The present application relates to U.S. provisional patent application (“Provisional Application”), Ser. No. 63/114,958, entitled “Methods for Reducing Disturb Errors By Data Refresh During Write Operations,” filed on Nov. 17, 2020. The Provisional Patent Application is hereby incorporated by reference in its entirety.
The present invention relates to data integrity in high-density memory circuits. In particular, the present invention preserves data integrity by reducing the impact of programming or erase disturbs in non-selected storage transistors in the vicinity of a storage transistor that is being written or erased.
U.S. Pat. No. 10,121,553 (“the '533 patent”), entitled “Capacitive-Coupled Non-Volatile Thin-film Transistor NOR Strings in Three-Dimensional Arrays,” filed on Aug. 26, 2016 and issued on Nov. 6, 2018, discloses storage or memory transistors organized as 3-dimensional arrays of NOR strings formed above a planar surface of a semiconductor substrate. In the '533 patent, a NOR memory string includes numerous thin-film storage transistors that share a common bit line and a common source line. In one implementation, storage transistors in a NOR memory string are arranged along a direction (“horizontal direction”) that is substantially parallel to the planar surface of the semiconductor substrate. In such a 3-dimensional array, the NOR memory strings are provided on multiple planes (e.g., 8 or 16 planes) above the semiconductor substrate, with the NOR memory strings on each plane arranged in rows and columns along two orthogonal horizontal directions. The NOR memory string may each extend along one of the horizontal directions. Data is stored in a charge-trapping layer (e.g., a silicon oxide-silicon nitride-silicon oxide triple layer) in each storage transistor. The disclosure of the '533 patent is hereby incorporated by reference in its entirety for all purposes.
In the '533 patent, each storage transistor of a NOR memory string is read, programmed or erased by suitably biasing its associated word line and the common bit line it shares with other storage transistors in the NOR memory string. In some examples, the '533 patent discloses that the storage transistors may share a common source line that is pre-charged prior to a read, programming or erase operation to a predetermined voltage and maintains substantially that predetermined voltage during the operation by a capacitor (“virtual ground”), such as the parasitic capacitor formed by a number of connected common source lines in multiple NOR memory strings. In other examples, the common source line may be biased by a constant voltage source of a suitable voltage. The storage transistor's associated word line is shared with storage transistors of NOR memory strings on other planes. In those configurations, the storage transistors are aligned along the direction normal to the planar surface of the semiconductor substrate (“vertical direction”). Each word line may also be shared between two storage transistors from adjacent NOR memory strings. To program or erase a storage transistor, for example, a substantial voltage difference (e.g., 8.0 volts) is imposed across the common bit line and the word line. However, as the word line of a selected transistor is shared with non-selected storage transistors on other NOR memory strings and as the common bit line of the selected transistor is shared with other non-selected transistors on its NOR memory string, the non-selected transistors must be protected from inadvertently being set into the programmed or the erased state during a programming or erase operation, as they are vulnerable to interference or “disturb” arising from the bias voltages (e.g., by capacitive coupling). To mitigate disturbs to a storage transistor, a predetermined voltage difference that is significantly less in magnitude than the required voltage difference to program or to erase may be imposed across a storage transistor's associated word line and its common bit line, so as to inhibit undesired programming or erasing of the storage transistor.
In this detailed description, the term “write operation” (or simply “write”) may refer to either a programming operation or an erase operation that sets a storage transistor to a known data storage state (e.g., “programmed state” or “erased state”).
According to one embodiment of the present invention, a method is provided for ensuring data integrity in memory pages implemented in a 3-dimensional array of storage transistors. The method includes: dividing the memory pages into a predetermined number of refresh groups; and for each write operation to be performed on a selected one of the memory pages: (a) selecting one of the refresh groups; (b) reading data from one or more memory page in the selected refresh group; and (c) concurrently, (i) performing the write operation on the selected memory page, and (ii) writing back the read data into the memory pages of the selected refresh group. Each write operation may include an erase phase and a program phase, in which: (a) during the erase phase, the write operation carries out an erase operation on each storage transistor in the selected page that is designated for the erased state, and (b) during the program phase, the write operation carries out a program operation on each storage transistor in the selected page that is designated for to be in the programmed state.
According to one embodiment of the present invention, the method selects the refresh group according to a predetermined schedule, so as to limit the number of program or erase disturbs experienced between selections by the memory pages within each refresh group. The state of the schedule (i.e., where in the schedule is the current write operation) may be stored with the data. To ensure integrity, the state may be stored in multiple copies (e.g., stored in each of the memory pages) to allow redundancy. Alternatively, the schedule may be stored in odd number of copies (e.g., 3) in designated pages, so that a corrupted state may be recovered by a consensus majority. With redundancy, the method proceeds after recovering the state from a first attempt using states retrieved from both the selected page and at least one of the memory pages from the refresh group. In one embodiment, when the state cannot be recovered from the first attempt, states may be retrieved from one or more additional memory pages from the refresh group. The state may be determined according to majority consensus. To avoid reading multiple memory pages from the refresh group, in yet another alternative, multiple copies (e.g., preferably 3 or any suitable odd number) may be stored in a designated page. In that embodiment, a majority consensus (3:0 or 2:1) controls. In one embodiment, the state of the schedule is represented in the memory pages as Grey codes.
According to one embodiment of the present invention, the method for ensuring data integrity is applied to a 3-dimensional array of storage transistors organized as a 3-dimensional array of NOR memory strings. Within a NOR memory string, the storage transistors are each associated with a different word line. In one embodiment, the number of refresh groups is determined from a figure of merit that represents the number of times an inhibit voltage pulse is applied across a non-selected common bit line and a selected word line. (The inhibit voltage is a predetermined voltage that prevents a non-selected transistor on the same word line from being undesirably written into.) The method that concurrently performs the write operation and write backs the data read from memory pages in the refresh group includes: (a) selecting one of word lines and one of the common bit lines; (b) biasing the selected word line and the selected common bit line to a predetermined voltage difference for a programming or erase operation; (c) biasing each of the non-selected common bit lines to a first voltage, such that a first voltage difference exists between the selected common bit line and each of the non-selected common bit line, the first voltage difference being a first fraction—i.e., less than 1.0 in magnitude—of the predetermined voltage difference; and (d) biasing each of the non-selected word lines to a second voltage, such that a second voltage difference exists between the selected common bit line and each of the non-selected common bit line, the second voltage difference being a second fraction—i.e., less than 1.0 in magnitude—of the predetermined voltage difference.
According to one embodiment of the present invention, the method for ensuring data integrity is applied to memory pages organized as “slices”, with each slice including a storage transistor from each memory page and with the storage transistors in the slice being associated with the same word line. In one embodiment, the storage transistors in a slice share a single sense amplifier.
The present invention is better understood upon consideration of the detailed description below in conjunction with the drawings.
The '533 patent discloses that sense amplifiers for the storage transistors may be formed in or at the planar surface of the semiconductor substrate. Because of the high storage density desired, the storage transistors within a slice share a sense amplifier. As a result, only a single storage transistor within the slice may be selected at any given time for reading, while programming or erase may be performed in parallel. Of course, a slice may include any suitable number of storage transistors (e.g., 16, 32, 64, 128 etc.)
The 3-dimensional array may be organized, however, such that each of the 4096 word lines in the group of sixteen NOR memory strings may be connected to a like word line in each of numerous like groups of NOR memory strings. For example, one may connect 512 such groups of sixteen NOR memory strings, word line to word line, to create 512×4096 slices. In that arrangement, a 512-bit read operation may be carried out by concurrently reading one bit from each of the 512 slices associated with the same word line. A 3-dimensional array of NOR memory strings may thus be organized to carry out any read, programming or erase operation simultaneously on 512, 1024, 1536 or 2048 storage transistors (customarily referred to as a “page”) in parallel in as many groups of NOR memory strings. In this detailed description, a memory structure that allows any read, programming or erase operation to be carried out simultaneously on all storage transistors in the page is referred to as a “n-page slice” (e.g., a 16-page slice), where n is the number of storage transistors in a slice.
As shown in
With the programming biasing configuration of
Table 1a summarizes the disturb conditions during a program operation under the first inhibit scheme:
With the erase biasing configuration of
Note that, while the sizeable voltage difference (i.e., 4.0 volts) across the selected word line and each non-selected common bit line reduces the program or erase disturb on the inhibited storage transistors, setting the 4095 non-selected word lines to the same voltage as a non-selected common bit line imposes a comparable program or erase disturb on non-selected storage transistors on the selected common bit line. Assuming that each word line is substantially equally likely to be selected, for any write operation, each storage transistor is more than 4000 times more likely to be associated with a non-selected word line than a selected word line. Therefore, the benefit of a reduced program disturb as an inhibited storage transistor is far outweighed by the much more frequent detriment of program or erase disturbs that arises from being associated with a non-selected word line.
Table 1b summarizes the disturb conditions during an erase operation under the first inhibit scheme:
With the programming biasing configuration in this second inhibit scheme, an inhibited storage transistor that is in the erased state may experience a lesser program disturb relative to the inhibit scheme of
Table 2a summarizes the disturb conditions during a program operation under the second inhibit scheme:
To erase a selected storage transistor in a slice (not shown in
With the erase biasing configuration in this second inhibit scheme, an inhibited storage transistor that is in the programmed state may experience a lesser erase disturb relative to the inhibit scheme of
Table 2b summarizes the disturb conditions during an erase operation under the second inhibit scheme:
Thus, under this second inhibit scheme, the voltages applied to non-selected common bit lines in a slice (i.e., 6.0 volts for programming and 2.0 volts for erase) to inhibit undesired programming or erase of the associated storage transistors, desirably reduce program and erase disturbs in non-selected storage transistors on a selected word line or a selected common bit line, at the cost of introducing erase disturb and program disturb in other non-selected storage transistors during these operations.
Also, in the example of
According to one embodiment of the present invention, by setting the non-selected common bit lines each to a voltage that is closer to the voltage on the selected common bit line, the program or erase disturb on the inhibited storage transistors is worsened, but the program or erase disturb is significantly reduced for a storage transistor along the selected bit line, due to the voltage of the non-selected word line.
Table 3a summarizes the disturb conditions during a program operation under the third inhibit scheme:
For the erase bias configuration in this third inhibit scheme, a voltage of 6.0 volts is imposed for both the non-selected common bit lines in the slice and the non-selected word lines.
Table 3b summarizes the disturb conditions during an erase operation under the third inhibit scheme:
As discussed above, if each word line is substantially equally likely to be selected, for any write operation, a storage transistor is more than 4000 times more likely to be associated with a non-selected word line than a selected word line. Therefore, the detriment of the worsened program or erase disturb in an inhibited storage transistor is far outweighed by the much more frequent benefit of lessened program or erase disturbs from being associated with a non-selected word line. Thus, the overall program or erase disturbs experienced by a storage transistor under this third inhibit scheme is significantly diminished relative to the inhibit schemes of
Table 4a summarizes the disturb conditions during a programming operation under the fourth inhibit scheme:
For the erase bias configuration under the fourth inhibit scheme, during an erase operation, (i) 6.0 volts is imposed on the non-selected common bit lines, and (ii) 7.0 volts is imposed on the non-selected word lines, which is half-way between the voltage of a non-selected common bit line and the voltage of a selected common bit line.
Table 4b summarizes the disturb conditions during an erase operation under the fourth inhibit scheme:
However, in this fourth inhibit scheme, relative to the third inhibit scheme of
Based on a study performed by the inventor, an inhibited storage transistor can endure at least a certain number of the inhibit pulses (“threshold inhibit number”) before the cumulative program or erase disturbs cause the storage transistor's threshold voltage to deviate from its programmed or erased threshold voltage into an undesirable zone between the range of allowable programmed state threshold voltages and the range of allowable erased state threshold voltages. Specifically, in embodiments where the non-selected common bit lines and the non-selected word lines receive the same voltage (“single-voltage case”; e.g., the examples of
For a slice with sixteen storage transistors, the threshold inhibit number must exceed 15 to allow a full-slice programming or erase operation (i.e., every storage transistor in the slice is programmed or erased); otherwise, the program or erase disturbs may bring the threshold voltage of one or more of the storage transistors within the slice into the undesirable zone before the full-slice programming or erase operation completes. (In one embodiment, the 16 storage transistors in the slice share a single sense amplifier.) To avoid data loss, a “partial refresh” operation—i.e., a data refresh operation that involves less than all the storage transistors within the slice—may be carried out in conjunction with each programming or erase operation.
As the threshold inhibit number is 8, each page within the slice (the “page-slice,” in this instance), must be refreshed at least once prior to eight write operations being carried out on pages in the slice. Thus, in conjunction with each write operation on a page in the slice, a partial refresh operation involving reading and writing back two designated pages in the slice is carried out. (One of the designated may, coincidentally, be the target of the write operation; in which case, the write operation is carried out and the data read in conjunction with the partial refresh is discarded.) Under the partial refresh scheme, no storage transistor associated with a page within the slice will experience more than the threshold inhibit number of inhibition pulses (i.e., 8, in this case) before its next partial refresh. In other embodiments, the threshold inhibit number may be higher (e.g., 15) and, accordingly, each partial refresh operation need only involve one designated page in the slice.
For a threshold inhibit number of eight, the 16 pages in the slice may be divided into 8 non-overlapping refresh groups, each designating a different set of two pages in the slice. Under a schedule that selects a different refresh group in conjunction with 8 consecutive write operations, a partial refresh operation may be performed on all 16 pages in the slice. The value of a 3-bit pointer (“refresh state”) encodes which of the 8 refresh groups is to be selected for partial refresh in conjunction of the next write operation. In
Note that, in a write operation on a page, the data to be written requires some of the storage transistors in the page to be put into the programmed state, while the other storage transistors in the page are required to be put into the erased state. Accordingly, each write operation includes a “programming phase” and an “erase phase” that set those storage transistors to be put into the programmed state and those storage transistors to be put into the erased state, respectively. In the concurrent partial refresh operation, the data read from a designated page requires some of the storage transistors in the designated page to be put into the programmed state. Those storage transistors would be set to the programmed state during the program phase of the write operation. Likewise, the other storage transistors in the designated page of the partial refresh operation are put into the erased state during the erase phase of the write operation.
Initially, a 4-bit refresh pointer has value “0000”, which encodes the refresh state in which page <0> is designated for partial refresh.
Similarly, as shown in
As shown in
Similarly, during the erase phase of the third write operation (i.e., when the refresh pointer has value “1100”), the exemplary bits of pages <12> (reference numeral 605) and <2> (reference numeral 603) are brought to 8.0 volts, to effectuate the erase operation. The non-selected common bit lines of the other pages are also brought to 6.0 volts to inhibit any undesired erase.
Likewise, during the erase phase of the fifth write operation (i.e., when the refresh pointer has value “0110”), the exemplary bit of page <0> (reference numeral 605) is brought to 8.0 volts to effectuate the erase operation. During the erase phase of the sixth write operation (i.e., when the refresh pointer has value “1110”), the exemplary bit of page <0> (reference numeral 606) is brought to 6.0 volts to inhibit an undesired erase. The common bit lines for the exemplary bits of pages <4> and <5> during the erase phases of the fifth and sixth write operations are brought to the 6.0 volts to inhibit any undesired erase.
Similarly, during the programming phase of the third write operation (i.e., when the refresh pointer has value “1100”), the exemplary bits of pages <12> (reference numeral 605) and <2> (reference numeral 603) are brought to 2.0 volts to inhibit any undesired programming operation on these exemplary bits. The non-selected common bit lines of the other pages are also brought to 2.0 volts to inhibit any undesired programming.
Likewise, during the program phase of the fifth write operation (i.e., when the refresh pointer has value “0110”), the exemplary bit of page <0> (reference numeral 605) is brought to 2.0 volts to inhibit any undesired programming During the program phase of the sixth write operation (i.e., when the refresh pointer has value “1110”), the exemplary bit of page <0> (reference numeral 606) is brought to 0.0 volts to effectuate the programming of the exemplary bit. The common bit lines for the exemplary bits during the program phases of the fifth and sixth write operations are brought to the 2.0 volts to inhibit any undesired programming.
Note that the refresh pointer representing each refresh state is common to all pages in the page slice and thus is required meta-data to be written in conjunction with each write operation within the page slice. In one embodiment, the refresh pointer is stored in every page of the page slice, the redundancy ensuring integrity. Accordingly, two read operations are carried out prior to each write operation: (a) one read operation on any page to retrieve the refresh pointer to determine which page is designated for partial refresh, and (b) a second read operation from the page or pages designated for partial refresh. In one embodiment, the second read may also retrieve the pointer value from the page or pages designated to be refreshed. If the pointer values retrieved do not all agree, one of the store page values may be corrupt. If necessary, a third read operation may be performed to retrieve a tie-breaking pointer value, although such a read should be a very rare occurrence. Note that, in some embodiments, error correction is carried out by the controller during a read operation independent of the memory circuit. In those embodiments, the partial refresh scheme may reinforce errors in the memory circuit. Alternatively, in another embodiment, to avoid reading multiple memory pages from the refresh group multiple copies (e.g., preferably 3 or any suitable odd number) may be stored in a designated page. In that embodiment, the consensus of a majority of the copies (3:0 or 2:1) controls.
The above detailed description is intended to illustrate specific embodiments of the present invention and is not intended to be limiting. Numerous modifications and variations within the scope of the present invention are possible. For example, although the detailed description above uses, as an example, NOR memory strings that store data as electric charge, the present invention is equally applicable to NOR memory strings that store data in the form of ferroelectric polarization (e.g., NOR memory strings of ferroelectric field-effect transistors (FeFETs)). The present invention is set forth in the accompanying claims.
Number | Name | Date | Kind |
---|---|---|---|
4213139 | Rao | Jul 1980 | A |
4984153 | Kregness et al. | Jan 1991 | A |
5388246 | Kasai | Feb 1995 | A |
5583808 | Brahmbhatt | Dec 1996 | A |
5646886 | Brahmbhatt | Jul 1997 | A |
5656842 | Iwamatsu | Aug 1997 | A |
5768192 | Eitan | Jun 1998 | A |
5789776 | Lancaster et al. | Aug 1998 | A |
5880993 | Kramer et al. | Mar 1999 | A |
5915167 | Leedy | Jun 1999 | A |
6040605 | Sano et al. | Mar 2000 | A |
6049497 | Yero | Apr 2000 | A |
6057862 | Margulis | May 2000 | A |
6107133 | Furukawa et al. | Aug 2000 | A |
6118171 | Davies et al. | Sep 2000 | A |
6130838 | Kim et al. | Oct 2000 | A |
6313518 | Ahn et al. | Nov 2001 | B1 |
6314046 | Kamiya et al. | Nov 2001 | B1 |
6362508 | Rasovaky et al. | Mar 2002 | B1 |
6396744 | Wong | May 2002 | B1 |
6434053 | Fujiwara | Aug 2002 | B1 |
6580124 | Cleeves et al. | Jun 2003 | B1 |
6587365 | Salling | Jul 2003 | B1 |
6744094 | Forbes | Jun 2004 | B2 |
6754105 | Chang et al. | Jun 2004 | B1 |
6774458 | Fricke et al. | Aug 2004 | B2 |
6873004 | Han et al. | Mar 2005 | B1 |
6881994 | Lee et al. | Apr 2005 | B2 |
6946703 | Ryu et al. | Sep 2005 | B2 |
7005350 | Walker et al. | Feb 2006 | B2 |
7177977 | Chen | Feb 2007 | B2 |
7223653 | Cheng et al. | May 2007 | B2 |
7307308 | Lee | Dec 2007 | B2 |
7426141 | Takeuchi | Sep 2008 | B2 |
7489002 | Forbes et al. | Feb 2009 | B2 |
7495963 | Edahiro et al. | Feb 2009 | B2 |
7512012 | Kuo | Mar 2009 | B2 |
7524725 | Chung | Apr 2009 | B2 |
7542348 | Kim | Jun 2009 | B1 |
7612411 | Walker | Nov 2009 | B2 |
7804145 | Shimizu et al. | Sep 2010 | B2 |
7876614 | Kang et al. | Jan 2011 | B2 |
7940563 | Yokoi | May 2011 | B2 |
8026521 | Or-Bach et al. | Sep 2011 | B1 |
8139418 | Carman | Mar 2012 | B2 |
8178396 | Sinha et al. | May 2012 | B2 |
8237213 | Liu | Aug 2012 | B2 |
8278183 | Lerner | Oct 2012 | B2 |
8383482 | Kim et al. | Feb 2013 | B2 |
8395942 | Samachisa et al. | Mar 2013 | B2 |
8604618 | Cooney et al. | Dec 2013 | B2 |
8630114 | Lue | Jan 2014 | B2 |
8743612 | Choi et al. | Jun 2014 | B2 |
8767473 | Shim et al. | Jul 2014 | B2 |
8848425 | Schloss | Sep 2014 | B2 |
8878278 | Alsmeier et al. | Nov 2014 | B2 |
9158622 | Lee et al. | Oct 2015 | B2 |
9190293 | Wang et al. | Nov 2015 | B2 |
9202694 | Konevecki et al. | Dec 2015 | B2 |
9230985 | Wu et al. | Jan 2016 | B1 |
9299580 | Kong et al. | Mar 2016 | B2 |
9391084 | Lue | Jul 2016 | B2 |
9412752 | Yeh et al. | Aug 2016 | B1 |
9455268 | Oh et al. | Sep 2016 | B2 |
9620605 | Liang et al. | Apr 2017 | B2 |
9633944 | Kim | Apr 2017 | B2 |
9698152 | Peri | Jul 2017 | B2 |
9711529 | Hu et al. | Jul 2017 | B2 |
9748172 | Takaki | Aug 2017 | B2 |
9799761 | Or-Bach et al. | Oct 2017 | B2 |
9842651 | Harari | Dec 2017 | B2 |
9892800 | Harari | Feb 2018 | B2 |
9911497 | Harari | Mar 2018 | B1 |
10014317 | Peng | Jul 2018 | B2 |
10074667 | Higashi | Sep 2018 | B1 |
10096364 | Harari | Oct 2018 | B2 |
10121553 | Harari | Nov 2018 | B2 |
10157780 | Wu et al. | Dec 2018 | B2 |
10217667 | Or-Bach et al. | Feb 2019 | B2 |
10249370 | Harari | Apr 2019 | B2 |
10254968 | Gazit et al. | Apr 2019 | B1 |
10283493 | Nishida | May 2019 | B1 |
10319696 | Nakano | Jun 2019 | B1 |
10373956 | Gupta et al. | Aug 2019 | B2 |
10381370 | Shin et al. | Aug 2019 | B2 |
10381378 | Harari | Aug 2019 | B1 |
10395737 | Harari | Aug 2019 | B2 |
10431596 | Hierner et al. | Oct 2019 | B2 |
10475812 | Harari | Nov 2019 | B2 |
10608008 | Harari et al. | Mar 2020 | B2 |
10608011 | Harari et al. | Mar 2020 | B2 |
10622377 | Harari et al. | Apr 2020 | B2 |
10651153 | Fastow et al. | May 2020 | B2 |
10651196 | Sharangpani et al. | May 2020 | B1 |
10692837 | Nguyen et al. | Jun 2020 | B1 |
10692874 | Harari et al. | Jun 2020 | B2 |
10950616 | Harari et al. | Mar 2021 | B2 |
11043280 | Prakash | Jun 2021 | B1 |
20010030340 | Fujiwara | Oct 2001 | A1 |
20010053092 | Kosaka et al. | Dec 2001 | A1 |
20020012271 | Forbes | Jan 2002 | A1 |
20020028541 | Lee et al. | Mar 2002 | A1 |
20020051378 | Ohsawa | May 2002 | A1 |
20020193484 | Albee | Dec 2002 | A1 |
20030038318 | Forbes | Feb 2003 | A1 |
20040214387 | Madurawe et al. | Oct 2004 | A1 |
20040246807 | Lee | Dec 2004 | A1 |
20040262681 | Masuoka et al. | Dec 2004 | A1 |
20040262772 | Ramanathan et al. | Dec 2004 | A1 |
20040264247 | Kim | Dec 2004 | A1 |
20050128815 | Ishikawa et al. | Jun 2005 | A1 |
20050236625 | Schuele et al. | Oct 2005 | A1 |
20050280061 | Lee | Dec 2005 | A1 |
20060001083 | Bhattacharyya | Jan 2006 | A1 |
20060080457 | Hiramatsu et al. | Apr 2006 | A1 |
20060155921 | Gorobets et al. | Jul 2006 | A1 |
20060212651 | Ashmore | Sep 2006 | A1 |
20060261404 | Forbes | Nov 2006 | A1 |
20070012987 | McTeer | Jan 2007 | A1 |
20070023817 | Dao | Feb 2007 | A1 |
20070045711 | Bhattacharyya | Mar 2007 | A1 |
20070134876 | Lai et al. | Jun 2007 | A1 |
20070192518 | Rupanagunta et al. | Aug 2007 | A1 |
20080022026 | Yang et al. | Jan 2008 | A1 |
20080054346 | Saitoh et al. | Mar 2008 | A1 |
20080160765 | Lee et al. | Jul 2008 | A1 |
20080173930 | Watanabe | Jul 2008 | A1 |
20080178794 | Cho et al. | Jul 2008 | A1 |
20080212358 | Mitsui | Sep 2008 | A1 |
20080239812 | Naofumi et al. | Oct 2008 | A1 |
20080266960 | Kuo | Oct 2008 | A1 |
20080291723 | Wang et al. | Nov 2008 | A1 |
20080301359 | Smith | Dec 2008 | A1 |
20090057722 | Masuoka et al. | Mar 2009 | A1 |
20090140318 | Dong | Jun 2009 | A1 |
20090157946 | Arya | Jun 2009 | A1 |
20090237996 | Kirsch et al. | Sep 2009 | A1 |
20090268519 | Ishii | Oct 2009 | A1 |
20090279360 | Peter et al. | Nov 2009 | A1 |
20090290442 | Rajan | Nov 2009 | A1 |
20090316487 | Lee et al. | Dec 2009 | A1 |
20100013001 | Cho et al. | Jan 2010 | A1 |
20100121994 | Kim et al. | May 2010 | A1 |
20100124116 | Takashi et al. | May 2010 | A1 |
20100128509 | Kim et al. | May 2010 | A1 |
20100207185 | Lee et al. | Aug 2010 | A1 |
20100219392 | Awaya et al. | Sep 2010 | A1 |
20100254191 | Son et al. | Oct 2010 | A1 |
20100327413 | Lee et al. | Dec 2010 | A1 |
20110044113 | Kim | Feb 2011 | A1 |
20110047325 | Mishima | Feb 2011 | A1 |
20110115011 | Masuoka et al. | May 2011 | A1 |
20110134705 | Jones et al. | Jun 2011 | A1 |
20110143519 | Lerner | Jun 2011 | A1 |
20110170266 | Haensh et al. | Jul 2011 | A1 |
20110208905 | Shaeffer et al. | Aug 2011 | A1 |
20110298013 | Hwang et al. | Dec 2011 | A1 |
20110310683 | Gorobets | Dec 2011 | A1 |
20120063223 | Lee | Mar 2012 | A1 |
20120146126 | Lai et al. | Jun 2012 | A1 |
20120182801 | Lue | Jul 2012 | A1 |
20120208347 | Hwang et al. | Aug 2012 | A1 |
20120223380 | Lee et al. | Sep 2012 | A1 |
20120243314 | Takashi | Sep 2012 | A1 |
20120307568 | Banna et al. | Dec 2012 | A1 |
20120327714 | Lue | Dec 2012 | A1 |
20130031325 | Nakamoto et al. | Jan 2013 | A1 |
20130256780 | Kai et al. | Oct 2013 | A1 |
20140015036 | Fursin et al. | Jan 2014 | A1 |
20140040698 | Loh et al. | Feb 2014 | A1 |
20140070289 | Tanaka et al. | Mar 2014 | A1 |
20140075135 | Choi et al. | Mar 2014 | A1 |
20140117366 | Saitoh | May 2014 | A1 |
20140151774 | Rhie | Jun 2014 | A1 |
20140173017 | Takagi et al. | Jun 2014 | A1 |
20140213032 | Kai et al. | Jul 2014 | A1 |
20140229131 | Cohen et al. | Aug 2014 | A1 |
20140247674 | Karda et al. | Sep 2014 | A1 |
20140328128 | Louie et al. | Nov 2014 | A1 |
20140340952 | Ramaswamy et al. | Nov 2014 | A1 |
20150054507 | Gulaka et al. | Feb 2015 | A1 |
20150098272 | Kasolra et al. | Apr 2015 | A1 |
20150113214 | Sutardja | Apr 2015 | A1 |
20150155876 | Jayasena et al. | Jun 2015 | A1 |
20150194440 | Noh et al. | Jul 2015 | A1 |
20150220463 | Fluman et al. | Aug 2015 | A1 |
20150249143 | Sano | Sep 2015 | A1 |
20150263005 | Zhao et al. | Sep 2015 | A1 |
20150340371 | Lui | Nov 2015 | A1 |
20150372099 | Chen et al. | Dec 2015 | A1 |
20160013156 | Zhai et al. | Jan 2016 | A1 |
20160019951 | Park et al. | Jan 2016 | A1 |
20160035711 | Hu | Feb 2016 | A1 |
20160086970 | Peng | Mar 2016 | A1 |
20160141294 | Peri et al. | May 2016 | A1 |
20160225860 | Karda et al. | Aug 2016 | A1 |
20160276360 | Doda et al. | Sep 2016 | A1 |
20160300724 | Levy et al. | Oct 2016 | A1 |
20160314042 | Plants | Oct 2016 | A1 |
20160321002 | Jung et al. | Nov 2016 | A1 |
20160358934 | Lin et al. | Dec 2016 | A1 |
20170053906 | Or-Bach et al. | Feb 2017 | A1 |
20170092370 | Harari | Mar 2017 | A1 |
20170092371 | Harari | Mar 2017 | A1 |
20170148517 | Harari | May 2017 | A1 |
20170148810 | Kai et al. | May 2017 | A1 |
20170194341 | Yamada | Jul 2017 | A1 |
20170213731 | Yoon et al. | Jul 2017 | A1 |
20170213821 | Or-Bach et al. | Jul 2017 | A1 |
20170358594 | Lu et al. | Dec 2017 | A1 |
20180095127 | Pappu et al. | Apr 2018 | A1 |
20180108416 | Harari | Apr 2018 | A1 |
20180151419 | Wu et al. | May 2018 | A1 |
20180261613 | Ariyoshi et al. | Sep 2018 | A1 |
20180269229 | Or-Bach et al. | Sep 2018 | A1 |
20180286918 | Bandyopadhyay et al. | Oct 2018 | A1 |
20180314635 | Alam | Nov 2018 | A1 |
20180330791 | Li et al. | Nov 2018 | A1 |
20180331042 | Manusharow et al. | Nov 2018 | A1 |
20180342455 | Nosho et al. | Nov 2018 | A1 |
20180342544 | Lee et al. | Nov 2018 | A1 |
20180366471 | Harari et al. | Dec 2018 | A1 |
20180366485 | Harari | Dec 2018 | A1 |
20180366489 | Harari et al. | Dec 2018 | A1 |
20190006009 | Harari | Jan 2019 | A1 |
20190006015 | Norman et al. | Jan 2019 | A1 |
20190019564 | Li et al. | Jan 2019 | A1 |
20190067327 | Herner et al. | Feb 2019 | A1 |
20190148286 | Or-Bach et al. | May 2019 | A1 |
20190157296 | Harari et al. | May 2019 | A1 |
20190180821 | Harari | Jun 2019 | A1 |
20190206890 | Harari et al. | Jul 2019 | A1 |
20190214077 | Oh et al. | Jul 2019 | A1 |
20190238134 | Lee et al. | Aug 2019 | A1 |
20190244971 | Harari | Aug 2019 | A1 |
20190259769 | Karda et al. | Aug 2019 | A1 |
20190303042 | Kim et al. | Oct 2019 | A1 |
20190304988 | Dong et al. | Oct 2019 | A1 |
20190325945 | Linus | Oct 2019 | A1 |
20190325964 | Harari | Oct 2019 | A1 |
20190319044 | Harari | Nov 2019 | A1 |
20190348424 | Karda et al. | Nov 2019 | A1 |
20190355747 | Hierner et al. | Nov 2019 | A1 |
20190370117 | Fruchtman et al. | Dec 2019 | A1 |
20200020718 | Harari et al. | Jan 2020 | A1 |
20200051990 | Harari et al. | Feb 2020 | A1 |
20200063263 | Yang et al. | Feb 2020 | A1 |
20200098738 | Herner et al. | Mar 2020 | A1 |
20200098779 | Cernea et al. | Mar 2020 | A1 |
20200098881 | Vellianitis | Mar 2020 | A1 |
20200176468 | Herner et al. | Jun 2020 | A1 |
20200201718 | Richter et al. | Jun 2020 | A1 |
20200203378 | Harari et al. | Jun 2020 | A1 |
20200219572 | Harari | Jul 2020 | A1 |
20200243486 | Quader et al. | Jul 2020 | A1 |
20200258897 | Yan et al. | Aug 2020 | A1 |
20200350234 | Shan et al. | Nov 2020 | A1 |
20200357822 | Chen | Nov 2020 | A1 |
20200403002 | Harari | Dec 2020 | A1 |
20210013224 | Purayath et al. | Jan 2021 | A1 |
20210175251 | Zhang et al. | Jun 2021 | A1 |
20210247910 | Kim et al. | Aug 2021 | A1 |
20210248094 | Norman et al. | Aug 2021 | A1 |
20210265308 | Norman et al. | Aug 2021 | A1 |
20210375933 | Lu et al. | Dec 2021 | A1 |
20210407600 | Cariello | Dec 2021 | A1 |
20220028876 | Purayath et al. | Jan 2022 | A1 |
20220028886 | Pur et al. | Jan 2022 | A1 |
20220084564 | Choi | Mar 2022 | A1 |
20220139933 | Noack | May 2022 | A1 |
20220231049 | Lin et al. | Jul 2022 | A1 |
20220246766 | Manfrini et al. | Aug 2022 | A1 |
20220254390 | Gans et al. | Aug 2022 | A1 |
20220351776 | Nam et al. | Nov 2022 | A1 |
20220384459 | Lu et al. | Dec 2022 | A1 |
20220393031 | Ando et al. | Dec 2022 | A1 |
20230052477 | Ha et al. | Feb 2023 | A1 |
Number | Date | Country |
---|---|---|
111799263 | Oct 2020 | CN |
1998-269789 | Oct 1998 | JP |
2006099827 | Apr 2006 | JP |
2010108522 | May 2010 | JP |
2010251572 | Nov 2010 | JP |
2011028540 | Feb 2011 | JP |
20120085591 | Aug 2012 | KR |
20120085603 | Aug 2012 | KR |
2015025357 | Feb 2015 | WO |
2018236937 | Dec 2018 | WO |
Entry |
---|
“EP Extended Search Report EP168690149.3”, dated Oct. 18, 2019. |
“European Search Report, EP 16852238.1”, dated Mar. 28, 2019. |
“European Search Report, EP17844550.8”, dated Aug. 12, 2020, 11 pages. |
“Invitation to Pay Additional Fees (PCT/ISA/206), PCT/US2020/015710”, Mar. 20, 2020, 2 pages. |
“Notification of Reasons for Refusal, Japanese Patent Application 2018-527740”, dated Nov. 4, 2020, 8 pages. |
“Partial European Search Report EP 16869049.3”, dated Jul. 1, 2019, pp. 1-12. |
“PCT Search Report and Written Opinion, PCT/US2018/038373”, dated Sep. 10, 2018. |
“PCT Search Report and Written Opinion, PCT/US2019/014319”, dated Apr. 15, 2019. |
“PCT Search Report and Written Opinion, PCT/US2019/052164”, dated Feb. 27, 2020. |
“PCT Search Report and Written Opinion, PCT/US2019/052446”, dated Dec. 11, 2019. |
“PCT Search Report and Written Opinion, PCT/US2020/015710”, dated Jun. 9, 2020. |
“PCT Search Report and Written Opinion, PCT/US2020/017494”, dated Jul. 20, 2020, 13 pages. |
“PCT Search Report and Written Opinion, PCT/US2020/065374”, dated Mar. 15, 2021, 17 pages. |
“PCT Search Report and Written Opinion, PCT/US2020/065670”, dated Apr. 5, 2021, 12 pages. |
“PCT Search Report and Written Opinion, PCT/US2021/016964”, dated Jun. 15, 2021, 19 pages. |
“PCT Search Report and Written Opinion, PCT/US2021/025722”, dated Jun. 15, 2021, 10 pages. |
Hou, S. Y., et al., “Wafer-Leval Integration of an Advanced Logic-Memory System Through the Second-Generation CoWoS Technology”, IEEE Transactions on Electron Devices, vol. 64, No. 10, Oct. 2017, 4071-4077. |
Kim, N. , et al., “Multi-layered Vertical gate NANO Flash Overcoming Stacking Limit for Terabit Density Storage”, Symposium on VLSI Tech. Dig. of Technical Papers, 2009, pp. 188-189. |
Lue, H.T. , et al., “A Highly Scalable 8- Layer 3D Vertical-gate {VG) TFT NANO Flash Using Junction-Free Buried Channel BE-SONOS Device”, Symposium on VLSI: Tech. Dig. Of Technical Papers, 2010, pp. 131-132. |
Tanaka, T. , et al., “A 768 GB 3b/cell 3D-Floaling-Gate NANO Flash Memory”, Digest of Technical Papers, the 2016 IEEE International Solid-Slate Circuits Conference, 2016, pp. 142-144. |
Wann, H.C. , et al., “High-Endurance Ultra-Thin Tunnel Oxide in Monos Device Structure for Dynamic Memory Application”, IEEE Electron Device letters, vol. 16, No. 11, Nov. 1995, pp. 491-493. |
Wu, Jixuan , et al., “A Monolithic 3D Integration of RRAM Array with Oxide Semiconductor FET for In-Memory Computing in Quantized Neural Network AI Applications”, 2020 IEEE Symposium on VLSI Technology Digest of Technical Papers, Honolulu, Hi, USA, Jun. 2020, 4 pages. |
“Invitation to Pay Additional Fees, PCT/US2019/065256”, Feb. 13, 2020, 2 pages. |
“PCT Search Report and Written Opinion, PCT/US2018/067338”, dated May 8, 2019. |
“PCT Search Report and Written Opinion, PCT/US2019/041678”, dated Oct. 9, 2019. |
“PCT Search Report and Written Opinion, PCT/US2019/065256”, dated Apr. 14, 2020. |
“PCT Search Report and Written Opinion, PCT/US2021/042607”, dated Nov. 4, 2021, 17 pages. |
“PCT Search Report and Written Opinion, PCT/US2021/064844”, dated Mar. 8, 2022, 15 paged. |
“PCT Search Report and Written Opinion, PCT/US2021/42620”, dated Oct. 28, 2021, 18 pages. |
Park, Goon-Ho , et al., “Electrical Characteristics of SiO2/High-k Dielectric Stacked Tunnel Barriers for Nonvolatile Memory Applications”, Journal of the Korean Physical Society, vol. 55, No. 1, Jul. 2009, pp. 116-119. |
Tan, Yan-Ny , et al., “Over-Erase Phenomenon in Songs-Type Flash Memory and its Minimization Using a Hafnium Oxide Charge Storage Layer”, IEEE Transactions on Electron Devices, vol. 51, No. 7, Jul. 2004, pp. 1143-1147. |
Number | Date | Country | |
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20220157391 A1 | May 2022 | US |
Number | Date | Country | |
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63114958 | Nov 2020 | US |