Number | Name | Date | Kind |
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3868720 | New et al. | Feb 1975 | |
4078096 | Redmond et al. | Mar 1978 | |
4112139 | Shirk et al. | Sep 1978 | |
4346125 | Kinshian et al. | Aug 1982 | |
4426253 | Kreug et al. | Jan 1984 |
Entry |
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"A Novel Polyimide Film Preparation & its Preferential-Like Chemical Etching Techniques for GaAs Devices" Journal Electro-Chemical Society, vol. 130, pp. 129-134, (1983). |