Number | Name | Date | Kind |
---|---|---|---|
5924005 | Wado | Jul 1999 | |
6028015 | Wang et al. | Mar 1999 | |
6100195 | Chan et al. | Dec 1998 | |
6136511 | Reinberg et al. | Oct 2000 |
Entry |
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“Integaration of Organic Loe-k Material with Cu-Damascene Employing Novel Process” Masonobu Ikeda, et al., 1998 IEEE, IITC 98-131. |