comprising elements which are movable in relation to each other

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B81C1/00198

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00198comprising elements which are movable in relation to each other

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS device having an improved stress distribution and manufacturin...
- Patent number 12,084,341
- Issue date Sep 10, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device having two buried cavities and manu...
- Patent number 11,358,862
- Issue date Jun 14, 2022
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional micro devices and method for their production
- Patent number 11,208,321
- Issue date Dec 28, 2021
- Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden e.V.
- Daniil Karnaushenko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined mirror assembly having reflective layers on both sides
- Patent number 11,209,641
- Issue date Dec 28, 2021
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical z-inertial sensor
- Patent number 10,899,603
- Issue date Jan 26, 2021
- Robert Bosch GmbH
- Ralf Boessendoerfer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically actuated oscillating structure with oscillation s...
- Patent number 10,746,982
- Issue date Aug 18, 2020
- STMicroelectronics S.r.l.
- Benedetto Vigna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device having two buried cavities and manu...
- Patent number 10,676,347
- Issue date Jun 9, 2020
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing microelectromechanical system structure ha...
- Patent number 10,654,713
- Issue date May 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible strip for horology and method for manufacturing the same
- Patent number 10,579,020
- Issue date Mar 3, 2020
- The Swatch Group Research and Development Ltd.
- Gianni Di Domenico
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertia sensor and method of manufacturing the same
- Patent number 10,502,758
- Issue date Dec 10, 2019
- Hitachi, Ltd.
- Takashi Shiota
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and device of MEMS process control monitoring and packaged M...
- Patent number 10,343,896
- Issue date Jul 9, 2019
- MCube, Inc.
- Te-Hsi “Terrence” Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Segmented electrode structure for quadrature reduction in an integr...
- Patent number 10,330,475
- Issue date Jun 25, 2019
- NXP USA, INC.
- Thierry Cassagnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing microelectromechanical system structure ha...
- Patent number 10,273,152
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically actuated oscillating structure with oscillation s...
- Patent number 9,921,405
- Issue date Mar 20, 2018
- STMicroelectronics S.r.l.
- Benedetto Vigna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for fabricating high-precision objects by high-resolution l...
- Patent number 9,796,581
- Issue date Oct 24, 2017
- Onera (Office National D'Etudes et de Recherches Aerospatiales)
- Stéphane Landais
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for precision transport, positioning, and assembl...
- Patent number 9,718,683
- Issue date Aug 1, 2017
- The Johns Hopkins University
- Chia-Ling Chien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS hinges with enhanced rotatability
- Patent number 9,546,508
- Issue date Jan 17, 2017
- Apple Inc.
- Raviv Erlich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic device with integrated stirring structure and manufact...
- Patent number 9,527,726
- Issue date Dec 27, 2016
- STMicroelectronics S.r.l.
- Sabrina Conoci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic device with integrated stirring structure and manufact...
- Patent number 9,394,160
- Issue date Jul 19, 2016
- STMicroelectronics S.r.l.
- Sabrina Conoci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical sensor with out-of-plane sensing and process...
- Patent number 9,383,382
- Issue date Jul 5, 2016
- STMicroelectronics S.r.l.
- Barbara Simoni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with non-planar features
- Patent number 9,340,415
- Issue date May 17, 2016
- Texas Instruments Incorporated
- James C. Baker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional inter-chip contact through vertical displacement...
- Patent number 9,337,173
- Issue date May 10, 2016
- International Business Machines Corporation
- Kenneth J. Goodnow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and device of MEMS process control monitoring and packaged M...
- Patent number 9,249,012
- Issue date Feb 2, 2016
- MCube, Inc.
- Te-Hsi “Terrence” Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor and method for manufacturing a sensor
- Patent number 9,227,837
- Issue date Jan 5, 2016
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rotary nanotube bearing structure and methods for manufacturing and...
- Patent number 9,150,405
- Issue date Oct 6, 2015
- The Charles Stark Draper Laboratory, Inc.
- David Carter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonant transducer, manufacturing method therefor, and multi-layer...
- Patent number 9,139,419
- Issue date Sep 22, 2015
- Yokogawa Electric Corporation
- Takashi Yoshida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Assembling and applying nano-electro-mechanical systems
- Patent number 8,945,970
- Issue date Feb 3, 2015
- Carnegie Mellon University
- L. Richard Carley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rotary nanotube bearing structure and methods for manufacturing and...
- Patent number 8,771,525
- Issue date Jul 8, 2014
- The Charles Stark Draper Laboratory, Inc.
- David J. Carter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rotary nanotube bearing structure and methods for manufacturing and...
- Patent number 8,337,141
- Issue date Dec 25, 2012
- The Charles Stark Draper Laboratory, Inc.
- David J. Carter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated single-crystal MEMS device
- Patent number 7,982,558
- Issue date Jul 19, 2011
- NXP B.V.
- Marc Sworowski
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS ACCELEROMETER WITH VERTICAL STOPS
- Publication number 20240329076
- Publication date Oct 3, 2024
- NXP USA, Inc.
- Jun Tang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR GRAPHITE SLIDER ARRAYS
- Publication number 20240043266
- Publication date Feb 8, 2024
- RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN
- Quanshui ZHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFOR...
- Publication number 20240010490
- Publication date Jan 11, 2024
- STMicroelectronics S.r.l.
- Gabriele GATTERE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE AND NOISE CANCELLATIO...
- Publication number 20230365401
- Publication date Nov 16, 2023
- Huawei Technologies Co., Ltd
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS with cover drive and method of operating the same
- Publication number 20230322546
- Publication date Oct 12, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Sergiu LANGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20230296461
- Publication date Sep 21, 2023
- InvenSense, Inc.
- Yoshitaka Sasaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME
- Publication number 20230127991
- Publication date Apr 27, 2023
- WEMEMS CO.,LTD.
- Jonghyun LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ROTOR WITH COATED BOTTOM SURFACE
- Publication number 20220340411
- Publication date Oct 27, 2022
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
- Publication number 20220119245
- Publication date Apr 21, 2022
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES
- Publication number 20210405347
- Publication date Dec 30, 2021
- Beijing Voyager Technology Co., Ltd.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANU...
- Publication number 20200262699
- Publication date Aug 20, 2020
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE
- Publication number 20190256350
- Publication date Aug 22, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Han MENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANU...
- Publication number 20190210868
- Publication date Jul 11, 2019
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL Z-INERTIAL SENSOR
- Publication number 20190135612
- Publication date May 9, 2019
- ROBERT BOSCH GmbH
- Ralf Boessendoerfer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE
- Publication number 20190092625
- Publication date Mar 28, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Han MENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-DIMENSIONAL MICRO DEVICES AND METHOD FOR THEIR PRODUCTION
- Publication number 20190062154
- Publication date Feb 28, 2019
- Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden E.V.
- Daniil KARNAUSHENKO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Isolated Protrusion/Recession Features in a Micro Electro Mechanica...
- Publication number 20180290880
- Publication date Oct 11, 2018
- TEXAS INSTRUMENTS INCORPORATED
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIA SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20180238926
- Publication date Aug 23, 2018
- Hitachi, Ltd
- Takashi SHIOTA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY ACTUATED OSCILLATING STRUCTURE WITH OSCILLATION S...
- Publication number 20180157030
- Publication date Jun 7, 2018
- STMicroelectronics S.r.l.
- Benedetto Vigna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEGMENTED ELECTRODE STRUCTURE FOR QUADRATURE REDUCTION IN AN INTEGR...
- Publication number 20180017387
- Publication date Jan 18, 2018
- NXP USA, Inc.
- Thierry Cassagnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATED OPTICAL APPARATUS WITH INTEGRATED TURNING SURFACE
- Publication number 20170146793
- Publication date May 25, 2017
- Innovative Micro Technology
- Christopher S. GUDEMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY ACTUATED OSCILLATING STRUCTURE WITH OSCILLATION S...
- Publication number 20170123202
- Publication date May 4, 2017
- STMicroelectronics S.r.l.
- Benedetto Vigna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT HAVING TWO AXES OF OSCILLATION AND METHOD...
- Publication number 20170101306
- Publication date Apr 13, 2017
- ROBERT BOSCH GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES AND METHODS OF MANUFACTURING THE SAME
- Publication number 20170081173
- Publication date Mar 23, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- YU-CHIA LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC DEVICE WITH INTEGRATED STIRRING STRUCTURE AND MANUFACT...
- Publication number 20160090302
- Publication date Mar 31, 2016
- STMicroelectronics S.r.l.
- Sabrina Conoci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DISPLAY DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20160033754
- Publication date Feb 4, 2016
- InnoLux Corporation
- Yu-Chung LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DISPLAY DEVICE AND MANUFACTURING METHOD OF SAME
- Publication number 20160018636
- Publication date Jan 21, 2016
- PIXTRONIX INC.
- Hiroshi Kawanakago
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR PRECISION TRANSPORT, POSITIONING, AND ASSEMBL...
- Publication number 20150353354
- Publication date Dec 10, 2015
- The Johns Hopkins University
- Chia-Ling Chien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS HINGES WITH ENHANCED ROTATABILITY
- Publication number 20150345196
- Publication date Dec 3, 2015
- Raviv Erlich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH NON-PLANAR FEATURES
- Publication number 20150266727
- Publication date Sep 24, 2015
- TEXAS INSTRUMENTS INCORPORATED
- James C. Baker
- B81 - MICRO-STRUCTURAL TECHNOLOGY

comprising elements which are movable in relation to each other

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS device having an improved stress distribution and manufacturin...

Micro-electro-mechanical device having two buried cavities and manu...

Three-dimensional micro devices and method for their production

Micromachined mirror assembly having reflective layers on both sides

Micromechanical z-inertial sensor

Electrostatically actuated oscillating structure with oscillation s...

Micro-electro-mechanical device having two buried cavities and manu...

Method for manufacturing microelectromechanical system structure ha...

Flexible strip for horology and method for manufacturing the same

Inertia sensor and method of manufacturing the same

Method and device of MEMS process control monitoring and packaged M...

Segmented electrode structure for quadrature reduction in an integr...

Method for manufacturing microelectromechanical system structure ha...

Electrostatically actuated oscillating structure with oscillation s...

Process for fabricating high-precision objects by high-resolution l...

System and method for precision transport, positioning, and assembl...

MEMS hinges with enhanced rotatability

Microfluidic device with integrated stirring structure and manufact...

Microfluidic device with integrated stirring structure and manufact...

Microelectromechanical sensor with out-of-plane sensing and process...

MEMS device with non-planar features

Three-dimensional inter-chip contact through vertical displacement...

Method and device of MEMS process control monitoring and packaged M...

Sensor and method for manufacturing a sensor

Rotary nanotube bearing structure and methods for manufacturing and...

Resonant transducer, manufacturing method therefor, and multi-layer...

Assembling and applying nano-electro-mechanical systems

Rotary nanotube bearing structure and methods for manufacturing and...

Rotary nanotube bearing structure and methods for manufacturing and...

Integrated single-crystal MEMS device

Patents Applicationslast 30 patents

MEMS ACCELEROMETER WITH VERTICAL STOPS

MANUFACTURING METHOD FOR GRAPHITE SLIDER ARRAYS

DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFOR...

MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE AND NOISE CANCELLATIO...

MEMS with cover drive and method of operating the same

PRESSURE SENSOR AND MANUFACTURING METHOD FOR THE SAME

LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME

MEMS ROTOR WITH COATED BOTTOM SURFACE

MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...

MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES

MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANU...

METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE

MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANU...

MICROMECHANICAL Z-INERTIAL SENSOR

METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE

THREE-DIMENSIONAL MICRO DEVICES AND METHOD FOR THEIR PRODUCTION

Isolated Protrusion/Recession Features in a Micro Electro Mechanica...

INERTIA SENSOR AND METHOD OF MANUFACTURING THE SAME

ELECTROSTATICALLY ACTUATED OSCILLATING STRUCTURE WITH OSCILLATION S...

SEGMENTED ELECTRODE STRUCTURE FOR QUADRATURE REDUCTION IN AN INTEGR...

MICROFABRICATED OPTICAL APPARATUS WITH INTEGRATED TURNING SURFACE

ELECTROSTATICALLY ACTUATED OSCILLATING STRUCTURE WITH OSCILLATION S...

MICROMECHANICAL COMPONENT HAVING TWO AXES OF OSCILLATION AND METHOD...

MEMS DEVICES AND METHODS OF MANUFACTURING THE SAME

MICROFLUIDIC DEVICE WITH INTEGRATED STIRRING STRUCTURE AND MANUFACT...

DISPLAY DEVICE AND METHOD FOR FABRICATING THE SAME

DISPLAY DEVICE AND MANUFACTURING METHOD OF SAME

SYSTEM AND METHOD FOR PRECISION TRANSPORT, POSITIONING, AND ASSEMBL...

MEMS HINGES WITH ENHANCED ROTATABILITY

MEMS DEVICE WITH NON-PLANAR FEATURES