Micro-vacancy center device

Abstract

A method for providing a miniature vector magnetometer includes embedding a micron-sized diamond nitrogen-vacancy (DNV) crystal into a bonding material. The bonding material including the embedded micron-sized DNV crystal is cured to form a micro-DNV sensor. A micro-DNV assembly is formed by integrating the micro-DNV sensor with a micro-radio-frequency (RF) source, a micron-sized light source, a reference bias magnet, and one or more micro-photo detectors. The micro-DNV assembly is operable to perform vector magnetometry when positioned in an external magnetic field.

Description

FIELD OF THE INVENTION

The present invention generally relates to magnetometers, and more particularly, to a micro-diamond nitrogen-vacancy (micro-DNV) device.

BACKGROUND

A number of industrial applications including, but not limited to, medical devices, communication devices, long range magnetic imaging and navigation systems, as well as scientific areas such as physics and chemistry can benefit from magnetic detection and imaging with a device that has extraordinary sensitivity and an ability to capture signals that fluctuate very rapidly (bandwidth) all with a substantive package that is both small in size and efficient in power. Many advanced magnetic imaging systems can operate in limited conditions, for example, high vacuum and/or cryogenic temperatures, which can make them inapplicable for imaging applications that require ambient conditions. Furthermore, small size, weight and power (SWAP) magnetic sensors of moderate sensitivity, vector accuracy, and bandwidth are valuable in many applications.

Atomic-sized nitrogen-vacancy (NV) centers in diamond lattices have been shown to have excellent sensitivity for magnetic field measurement and enable fabrication of small magnetic sensors that can readily replace existing-technology (e.g., Hall-effect) systems and devices. Distinguishing themselves from more mundane superconducting quantum interface device (SQUID) and Bose-Einstein condensate (BEC) sensors that require extraordinary low temperature control, the subject technology describes the sensing capabilities of diamond NV (DNV) sensors that are maintained in room temperature and atmospheric pressure and these sensors can be even used in liquid environments (e.g., for biological imaging).

SUMMARY

In some aspects, a method for providing a miniature vector magnetometer includes embedding a micron-sized diamond nitrogen-vacancy (DNV) crystal into a bonding material. The bonding material including the embedded micron-sized DNV crystal is cured to form a micro-DNV sensor. A micro-DNV assembly is formed by integrating the micro-DNV sensor with a micro-radio-frequency (RE) source, a micron-sized light source, a near-field fixed bias magnet, and one or more micro-photo detectors. The micro-DNV assembly is operable to perform vector magnetometry when positioned in an external magnetic field.

In another aspect, a miniature vector magnetometer apparatus includes a micron-sized diamond nitrogen-vacancy (micro-DNV) sensor, a micro-radio-frequency (RE) source that is configured to generate RIF pulses to stimulate nitrogen-vacancy centers in the micro-DNV sensor, micron-sized light source, a near-field fixed bias magnet, and one or more micro-photo detectors that are configured to detect fluorescence radiation emitted by stimulated nitrogen-vacancy centers. The micro-DNV sensor is formed by embedding a micron-sized DNV crystal into a bonding material, and curing the bonding material including the embedded micron-sized DNV crystal. The micro-DNV assembly is operable to perform vector magnetometry when positioned in an external magnetic field.

In yet another aspect, a method of calibration of a micro-diamond nitrogen-vacancy (micro-DNV) assembly includes applying a plurality of magnetic fields having known directions with respect to a coordinate system to the micro-DNV assembly. The micro-DNV assembly is operated to measure a current generated by a photo detector of the micro-DNV assembly. A magnetic field vector associated with each of the plurality of magnetic fields is estimated. The estimated magnetic field vectors have orientations aligned with a DNV lattice reference frame. The estimated magnetic field vectors are correlated with the applied plurality of magnetic fields to determine an attitude matrix that defines the transformation from the DNV lattice reference frame into the reference coordinate system.

The foregoing has outlined rather broadly the features of the present disclosure in order that the detailed description that follows can be better understood. Additional features and advantages of the disclosure will be described hereinafter, which firm the subject of the claims.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present disclosure, and the advantages thereof, reference is now made to the following descriptions to be taken in conjunction with the accompanying drawings describing specific embodiments of the disclosure, wherein:

FIG. 1 is a diagram illustrating an example of a fabrication process of a micro-DNV sensor according to some implementations;

FIGS. 2A-2B illustrate conceptual diagrams of an example micro-DNV assembly according to some implementations;

FIG. 3 illustrates a conceptual in-use diagram of an example micro-DNV assembly according to some implementations;

FIGS. 4A-4B illustrate a conceptual diagram of a calibration set-up and a corresponding readout system of a micro-DNV sensor according to some implementations;

FIG. 5 illustrates a functional block diagram of a readout system of a micro-DNV sensor according to some implementations;

FIG. 6 illustrates a flow diagram of a method for providing a miniature vector magnetometer according to some implementations; and

FIG. 7 is a diagram illustrating an example of a system for implementing some aspects of the subject technology.

DETAILED DESCRIPTION

The detailed description set forth below is intended as a description of various configurations of the subject technology and is not intended to represent the only configurations in which the subject technology may be practiced. The appended drawings are incorporated herein and constitute a part of the detailed description. The detailed description includes specific details for the purpose of providing a thorough understanding of the subject technology. However, it will be clear and apparent to those skilled in the art that the subject technology is not limited to the specific details set forth herein and may be practiced without these specific details. In some instances, well-known structures and components are shown in block diagram form in order to avoid obscuring the concepts of the subject technology.

The present disclosure is directed, in part, to methods and configurations for providing a high sensitivity, low weight, power, and volume vector magnetometer suitable for compact applications operating with sensitivities below 1.0 micro-Tesla. The subject technology can sense a vector magnetic field as it impinges on a diamond crystal that has nitrogen impurities, also called vacancies, in its lattice structure. In some implementations, the subject technology is directed at an apparatus including a micrometer-sized DNV sensor (hereinafter “micro-DNV sensor”), method of encasing a micron sized diamond, for example, by affixing the micron sized diamond to a first liquid epoxy layer to form the micro-DNV sensor, and applying formed (e.g., sputtered) excitation sources for microwave and green light, together with similarly integrated photo-detection functions and a bias magnet. In some implementations, the subject technology includes algorithms and logic circuits that allow calibration of an arbitrarily oriented diamond chip relative to a known reference frame, such as a device coordinate frame, so that coordinates of measured magnetic vectors can be accurately determined with respect to that reference frame.

The micro-DNV device of the subject technology establishes a compact, low profile, low power implementation for the construction of a NV diamond (e.g., a micro-DNV sensor) with an excitable and readable arrangement. For a NV diamond, the order of magnitude is micron-scale. The micro-DNV sensor is then packaged with a class of green optical excitation devices, a class of RF excitation devices, a bias magnet, and the photo-detectors (e.g., phototransistors) that collect the red photoluminescence from the NV diamond.

Many magnetometer applications require very small size, weight and power (SWAP) sensors but of moderate sensitivity, vector accuracy, and bandwidth. Existing Hall-effect devices, however, are adequate, for instance, in low precision compass attitude determination, coarse positioning, and similar applications. The disclosed micro-DNV sensor has a number of advantageous features. For example, the subject micro-DNV sensor is compact, has smaller size, weight, and power consumption compared to the existing magnetometry sensors (e.g., the Hall-effect devices), and is suited for most industrial magnetic sensing applications that have to operate with sensitivities below 1.0 micro-Tesla. The disclosed technology allows longer battery life for navigation and compass applications. Further, it enables remote radio-frequency (RE) directional identification (ID) for personal vehicles and property based on magnetic signature and can be used (e.g., in hand-held communication devices) as backup navigation device when GPS is lost or is unavailable. In other words, the subject technology empowers the DNV precision to across many applications.

FIG. 1 is a diagram illustrating an example of a fabrication process of a micro-DNV sensor 110 according to some implementations of the subject technology. The construction and packaging aspects of the micro-DNV sensor 110 include using micrometer (micron)-sized NV diamond fragments, depositing them into or onto a translucent affixing arrangement with arbitrary orientation of the lattice planes with respect to the crucible, transferring the NV-affixed ensemble for automated installation into an awaiting chip. In one or more implementations, at a first step (e.g., step #1), a single DNV crystal 102 (e.g., pulverized) in an arbitrary orientation, in the for of a cube or any other shape, with small dimensions (e.g., 2×2×2 micron) is heated in a crucible 106 containing a host bonding material (e.g., an epoxy) 104 to form a mixture. In a second step (e.g., step #2), the DNV crystal 102 is solidified in the bonding material 104 by curing the mixture using a ultra-violet (UV) light source 108. Finally (e.g., at step #3), an encased micro-DNV sensor 110 (hereinafter “sensor 110”) is formed when the DNV crystal 102 is solidified in the epoxy 104 and is removed from the crucible 106. The sensor 110 can be installed onto a chip, for example, a semiconductor chip (e.g., a silicon chip) or other substrate materials (e.g., glass) for various magnetic field measurement applications.

FIGS. 2A-2B illustrate conceptual diagrams of an example micro-DNV assembly 200 according to some implementations of the subject technology. In some implementations, the micro-DNV assembly 200 shown in FIG. 2A has dimensions of the order of millimeters and includes components with dimensions that are in the order of micrometers (microns) and are referred to with the “micro” prefixes. The micro-DNV assembly 200 includes a chip including the sensor 110, a micron-sized light source 222, one or more micro-photo detectors (e.g., red micro-photo detectors) 224, a near field bias magnet 225, and a micron-sized RF source (e.g., microwave coil, such as a micro-strip coil) 226. In some implementations, the micron-sized RE source is configured to generate RF pulse sequences by using Ramsey, Hahn echo or Barry timing sequences to attain higher sensitivity and to enable measuring AC varying magnetic fields. The dimensions shown on the micro-DNV assembly 200 are exemplary width (e.g., 1 mm) and length (e.g., 2 mm) of the assembly. An example height value (e.g., 0.5 mm) of the micro-DNV assembly is shown in the cross sectional view 210.

In some implementations, the micron-sized light source 222 includes a class of green excitation devices including a green micron-sized light emitting diode (LED), an organic LED, alternatively a green low power laser, or other green light sources. In some implementations, the micron-sized light source 222 (e.g., green micro-LED source 222) can be deposited (e.g., sputtered) on a cathode-anode pair (e.g., silicon) using for example, gallium (III) phosphide (GaP), aluminum gallium indium phosphide (AlGaInP), or aluminum gallium phosphide (AlGaP). In some implementations, instead of continuous green light and continuous RE excitation, the subject technology can be equally well implemented with pulsed excitation techniques such as the known Ramsey, Hahn Echo and Berry sequences, to achieve higher sensitivity.

In one or more implementations, examples of the micron-sized RF source include RE excitation devices such as a strip-line resonator, a split ring, a straight rod dipole, or other RF excitation devices. In some implementations, the one or more red micro-photo detectors 224 may be formed by using indium gallium Arsenide deposited (e.g., sputtered) on a. Si cathode-anode pair. In some aspects, examples of the red micro-photo detectors 224 include a red photoluminescence transducer such as a 2D tantalum-nitride phototransistor, a boron nitride equivalent, or other suitable transducers. In one or more implementations, the micro-DNV assembly 200 can be assembled in an enclosure (e.g., a box such as a glass or polyurethane box). In some aspects, for enhanced efficiency, more than one red micro-photo detectors 224 may be used. In some implementations, a green micro-photo detector may be added to provide a balanced detection for improved sensitivity. In some implementations, an RF source or a micro-RF source may be a microwave source.

In some implementations, as shown in FIG. 2B, the components of the micro-DNV assembly may be realized in a multilayer structure 200. The multilayer structure 200 may be formed by integrating multiple layers, for example, layers 232, 234, and 236. Each layer may include one or more of the green micro-LED source 222, the one or more red micro-photo detectors 224, and the micro-strip coil 226. For example, the sensor 110 and one or more of the red micro-photo detectors 224 may be formed on the layer 234 (e.g., a glass layer) that is sandwiched between two other layers 232 and 236. Each of the layers 232 and 236 may include a semiconductor chip (e.g., a silicon chip) and can include one of the green micro-LED source 222 and the micro-strip coil 226. In the example implementation shown in FIG. 2B, the micro-strip coils 226 is incorporated in the same layer with the sensor 110 and is configured to surround (encircle) the sensor 110 for more effective excitation of the DNV. For instance, some coils of the micro-strip coils 226, as shown in the top view 250 of the layer 234, may be realized above the sensor 110 and the other coils may be realized below the sensor 110, although other configurations may be implemented as well. One or more of the red and green micro-photo detectors 224 may be embedded in the layer 234 (e.g., a red-light transparent layer, such as glass). In FIG. 2B only two red micro-photo detectors 224 are shown, but a larger number of red micro-photo detectors 224 may be added around the sensor 110 and in different locations inside the layer 234 or in layers 232 and 236. In some aspects, one or more of the red micro-photo detectors 224 may include an attached micro-lens to improve light collection efficiency of the respective red micro-photo detectors 224. In some implementations, one or more of the red micro-photo detectors 224 may include a red filter to filter out green tight emitted by the green micro-LED source 222.

The green micro-LED source 222 optically excites NV centers of the sensor 110 that can emit fluorescence radiation (e.g., red light) under off-resonant optical excitation. The micro-strip coil 226 generates a magnetic field that can sweep a range of frequencies (e.g., between 2.7 to 3.0 GHz). The generated magnetic field can probe the degenerate triplet spin states (e.g., with m_s=−1, 0, +1) of the NV centers along each lattice vector of the sensor 100 to split the bias magnet produced reference spin states approximately proportional to an external magnetic field projection along an NV lattice axis of the sensor 100, resulting in two spin modified resonance frequencies. For an external field projection aligned with the corresponding bias magnetic field projection, as the magnitude of the external magnetic field is increased, the distance between the two spin resonance frequencies increases. For an external field projection aligned opposite to the corresponding bias magnetic field projection, as the magnitude of the external magnetic field is increased, the distance between the two spin resonance frequencies decreases. The red micro-photo detector 224 measures the fluorescence (red light) emitted by the optically excited NV centers. The measured fluorescence spectra as a function of microwave frequency show two dips (e.g., Lorentzian dips) or triplet hyperfine sets corresponding to the two spin resonance frequencies. The distance between the dips widens as the magnitude of a co-aligned external magnetic field is increased.

FIG. 3 illustrates a conceptual in-use diagram of an example micro-DNV assembly 200 according to some implementations of the subject technology. In some implementations, the green-LED source 222 may be biased using a voltage supply (e.g., a positive voltage supply +VCC) provided by a power supply (not shown for simplicity). A signal generator 310 is coupled to the micro-strip coil 226. The signal generator 310 is capable of generating RF signals (e.g., RF voltage signals) at various frequencies by sweeping a range of frequencies (e.g., within a range of 2.7-3.0 GHz). The red micro-photo detector (s) 224, once biased and exposed to the fluorescence light (e.g., the red light) can generate a current signal I(t) that can be measured. The measured amplitude of the current signal I(t) is proportional to the intensity of the fluorescence light.

FIGS. 4A-4B illustrate a conceptual diagram of a calibration set-up 400A and a corresponding readout system 400B of a micro-DNV sensor 110 according to some implementations of the subject technology. The processing and calibration methods discussed herein simply describe mechanization for finding the NV diamond lattice plane orientations relative to the chip so that an adaptation matrix (e.g., attitude matrix) is computed that then can convert the change in red photoluminescence Lorentzian peak frequencies to an equivalent 3D Cartesian B field vector. In some implementations, the calibration set-up 400 includes a red micro-photo detector 224, the position of which defines an origin of a reference coordinate system (e.g., a Cartesian Coordinate system X,Y,Z) shown in FIG. 4A. The X axis (e.g., 412) of the coordinate system is in the direction of a symmetry axis of the red micro-photo detector 224. A bias magnet (not shown for simplicity) is used to initially push the 8 Lorentzian peaks apart. In some aspects, the bias magnet is in general a 3-dimensional dipole field that has projections on the four DNV lattice planes, and can force the Lorentzian peaks apart. A reference external magnetic field source 420 is used as a calibration source that can generate a magnetic field with a known direction e.g., with direction axis 414) with respect to the reference coordinate system. In some implementations, using the calibration set-up of FIG. 4A, several external magnetic fields with known directions with respect to the reference coordinate system are applied to the micro-DNV sensor 110. The corresponding measurement data are collected using the readout system shown in FIG. 4B. In some implementations, an orthonormal coordinate transformation matrix (e.g., an attitude matrix A) that provides the least-squares fit between the applied magnetic fields B(i=1,n) and the measured data (e.g., {circumflex over (B)}_i(i=1,n) is determined. The attitude matrix A can be used to determine the actual axes orientation of the micro-DNV sensor (e.g., DNV lattice reference frame) and to transform magnetic field vectors estimated in the lattice frame into the reference coordinate frame.

FIG. 4B shows the readout system 400B that includes the green micro-LED 222, the micro-DNV sensor 110, the micro-strip coil 226, the red micro-photo detector 224, the bias magnet 225, and a processor 440. The calibration process starts with application of microwave power to the micro-strip coil 226, and application of a continuous green tight by the green micro-LED 222 to the micro-DNV sensor 110. The reference external magnetic field 420 of FIG. 4A is activated for n≥3 non-colinear measurements at a known unit vector orientation with respect to the reference coordinate system (e.g., axis 412). The red micro-photo detector 224 can provide a photo current i(t), proportional to an intensity of the photoluminescence light emitted by the micro-DNV sensor 110, to the processor 440. The processor 440 determines the 8-pair Lorentzian intensity pattern associated with the applied magnetic field B_i(i=1,n), computes the measured magnetic field in the standard lattice coordinate frame identified by the bias magnet generated reference Lorentzian intensity pattern, and computes the attitude matrix relating the reference coordinates to the applied magnetic field B_i(i=1,n) to produce the estimated magnetic field 430 (e.g., {circumflex over (B)}_i(i=1,n)), as described herein.

FIG. 5 illustrates a functional block diagram of a readout system 500 of a micro-DNV sensor 110 according to some implementations of the subject technology. In some implementations, the readout system 500 shown in FIG. 5 includes functional blocks that describe application of magnetic field 503 (e.g., B_i(i=1,n) to the micro-DNV sensor 110 of FIG. 4A. At block 504, green light (e.g., 520 nm) is used to excite spin resonances in the micro-DNV sensor 110. Block 506 represents probing via the Zeeman splitting by using the signal generator 514 that drives the microwave coil with a frequency of ˜2.87+/−df(t) GHz and generates corresponding red fluorescence that are passed through optical filter 508 to filter out non-red lights and are finally measured at the detection block 510 by the red micro-photo detector(s) 224 of FIG. 4B. The red micro-photo detector(s) 224 can generate a photo-current i(t), which is converted to digital form at block 512. The converted i(t) is used by a DNV intensity model fit block 522 to generate a signal Lfi (I=1,n) representing the resonance frequency locations of the Lorentzian peaks (e.g., 8 peaks). In some implementations, a processor 520 measures and locates the eight Lorentzian peaks associated with the projection of the magnetic field vector Bi (i=1,n) into four lattice planes of the DNV of the micro-DNV sensor 110. It is understood that the stronger the projection of the magnetic field B onto a given (e.g., 1 of 4) lattice planes containing nitrogen vacancies, the further the separation of the symmetric peaks associated with that lattice plane will change from the reference bias field separation distance.

In some implementations, the processor 520 includes a DNV intensity model fit block 522, a pattern match block 524, a frequency-to-magnetic field conversion block 526, and an attitude determination block 528. In one or more implementations, the DNV intensity model fit block 522 receives the converted current î(t) and generates the resonance frequency locations for the resulting eight Lorentzian peaks (Lfi). The pattern match block 524 includes estimated stored spectral location of the 8 Lorentzian peaks associated with the reference bias magnetic field only and generates the deviations in the Lorentzian peak values (e.g., ΔLfi) with respect to the values corresponding to the reference bias magnetic field. The frequency-to-magnetic field conversion block 526 then converts the deviations in the Lorentzian peak values ΔLfi into equivalent magnetic field projection estimates. The attitude determination/application block 528 then computes an interim lattice frame magnetic field vector estimate from the individual magnetic field projection estimates. Finally, during initial attitude calibration, the attitude determination/application block 528 uses the measured magnetic field vector estimates over multiple (n≥3) applications of known magnetic fields (Bi (i=1,n)) to compute the orthonormal coordinate transformation matrix A (e.g., the attitude matrix) by correlating these measured magnetic field vectors with the applied magnetic fields. The attitude matrix A relates the DNV lattice reference frame specified by the bias magnet generated reference spectra to the reference coordinate system (e.g., sensor frame Cartesian coordinate axes of FIG. 4A). In some implementations, the pattern match block 524 is called once at initialization to compute Ar (a reference matrix A), and not normally thereafter. Once the attitude matrix Ar is computed at initialization of a new micro-DNV, it needs not be often repeated, but can be occasionally computed to re-calibrate the DNV as required. In some aspects, the attitude determination block 528 processes the estimated magnetic field projections onto the four lattice frame vectors that when used by determination/application block 528 results in the (3×1) estimated magnetic field vector {circumflex over (B)}.

In some implementations, the pattern match block 524 inputs the 4 pairs (8) Lorentzian peaks shifted by magnetic field vectors Bi (i=1,n), then determines the matrix the attitude matrix A, that relates the DNV lattice reference frame to the vector frequency shift values associated with the estimated magnetic field vector {circumflex over (B)}.

In some implementations, an incident magnetic field vector B on the micro-DNV sensor 110 of FIG. 4A can be estimated using the attitude matrix A from the following equation:A^TB=m  (1)

Where A^T is the transpose of the attitude matrix A, B is the incident magnetic field vector, which when applied to the micro-DNV sensor 110 produces eight (four pairs) of Lorentzian peaks represented by m, and n is a noise vector. In some aspects, the attitude determination and application block 528 inverts equation (1) to obtain the incident magnetic field vector B as follows:B=(AA^T)⁻¹Am  (2)where equation (2) employs the known Moore-Penrose (least square) Pseudoinverse of equation (1).

FIG. 6 illustrates a flow diagram 600 of a method for providing a miniature vector magnetometer according to some implementations of the subject technology. According to the method 600, at an operation block 610, a micron-sized diamond nitrogen-vacancy (DNV) crystal (e.g., 102 of FIG. 1) is embedded (e.g., step #1 of FIG. 1) into a bonding material (e.g., 104 of FIG. 1). At operation block 620, the bonding material including the embedded micron-sized DNV crystal is cured (e.g., step #2 of FIG. 1) to form a micro-DNV sensor (e.g., 110 of FIG. 1). A micro-DNV assembly (e.g., 200 of FIG. 2A or FIG. 2B) is formed, at operation block 330, by integrating the micro-DNV sensor with a micro-radio-frequency (RF) source (e.g., 226 of FIG. 2A or 2B), a micron-sized light source (e.g., 222 of FIG. 2A or 2B), a fixed bias magnet (e.g., 225 of FIG. 2A), and one or more micro-photo detectors (e.g., 224 of FIG. 2A or 2B). The micro-DNV assembly is operable to perform vector magnetometry when positioned in an external magnetic field (e.g., 420 of FIG. 4A).

FIG. 7 is a diagram illustrating an example of a system 700 for implementing some aspects of the subject technology. In some implementations, the system 700 may be used to control the operation of the readout system 400B of FIG. 4B or to process data, for example, perform the functionalities of the processor 440 of FIG. 4 or the processor 520 of FIG. 5 as described above. The system 700 includes a processing system 702, which may include one or more processors or one or more processing systems. A processor can be one or more processors. The processing system 702 may include a general-purpose processor or a specific-purpose processor for executing instructions and may further include a machine-readable medium 719, such as a volatile or non-volatile memory, for storing data and/or instructions for software programs. The instructions, which may be stored in a machine-readable medium 710 and/or 719, may be executed by the processing system 702 to control and manage access to the various networks, as well as provide other communication and processing functions. The instructions may also include instructions executed by the processing system 702 for various user interface devices, such as a display 712 and a keypad 714. The processing system 702 may include an input port 722 and an output port 724. Each of the input port 722 and the output port 724 may include one or more ports. The input port 722 and the output port 724 may be the same port (e.g., a bi-directional port) or may be different ports.

The processing system 702 may be implemented using software, hardware, or a combination of both. By way of example, the processing system 702 may be implemented with one or more processors. A processor may be a general-purpose microprocessor, a microcontroller, a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field Programmable Gate Array (FPGA), a Programmable Logic Device (PLD), a controller, a state machine, gated logic, discrete hardware components, or any other suitable device that can perform calculations or other manipulations of information. In some implementations, the processing system 702 can implement the functionalities of the processor 440 of FIG. 4B or the processor 520 of FIG. 5.

A machine-readable medium can be one or more machine-readable media. Software shall be construed broadly to mean instructions, data, or any combination thereof, whether referred to as software, firmware, middleware, microcode, hardware description language, or otherwise. Instructions may include code (e.g., in source code format, binary code format, executable code format, or any other suitable format of code).

Machine-readable media (e.g., 719) may include storage integrated into a processing system such as might be the case with an ASIC. Machine-readable media (e.g., 710) may also include storage external to a processing system, such as a Random Access Memory (RAM), a flash memory, a Read Only Memory (ROM), a Programmable Read-Only Memory (PROM), an Erasable PROM (EPROM), registers, a hard disk, a removable disk, a CD-ROM, a DVD, or any other suitable storage device. Those skilled in the art will recognize how best to implement the described functionality for the processing system 702. According to one aspect of the disclosure, a machine-readable medium is a computer-readable medium encoded or stored with instructions and is a computing element, which defines structural and functional interrelationships between the instructions and the rest of the system, which permit the instructions' functionality to be realized. Instructions may be executable, for example, by the processing system 702 or one or more processors. Instructions can be, for example, a computer program including code.

A network interface 716 may be any type of interface to a network (e.g., an Internet network interface), and may reside between any of the components shown in FIG. 7 and coupled to the processor via the bus 704.

A device interface 718 may be any type of interface to a device and may reside between any of the components shown in FIG. 7. A device interface 718 may, for example, be an interface to an external device (e.g., USB device) that plugs into a port USB port) of the system 700.

The foregoing description is provided to enable a person skilled in the art to practice the various configurations described herein. While the subject technology has been particularly described with reference to the various figures and configurations, it should be understood that these are for illustration purposes only and should not be taken as limiting the scope of the subject technology.

One or more of the above-described features and applications may be implemented as software processes that are specified as a set of instructions recorded on a computer readable storage medium (alternatively referred to as computer-readable media, machine-readable media, or machine-readable storage media). When these instructions are executed by one or more processing unit(s) (e.g., one or more processors, cores of processors, or other processing units), they cause the processing unit(s) to perform the actions indicated in the instructions. In one or more implementations, the computer readable media does not include carrier waves and electronic signals passing wirelessly or over wired connections, or any other ephemeral signals. For example, the computer readable media may be entirely restricted to tangible, physical objects that store information in a form that is readable by a computer. In one or more implementations, the computer readable media is non-transitory computer readable media, computer readable storage media, or non-transitory computer readable storage media.

In one or more implementations, a computer program product (also known as a program, software, software application, script, or code) can be written in any form of programming language, including compiled or interpreted languages, declarative or procedural languages, and it can be deployed in any form, including as a stand-alone program or as a module, component, subroutine, object, or other unit suitable for use in a computing environment. A computer program may, but need not, correspond to a file in a file system. A program can be stored in a portion of a file that holds other programs or data (e.g., one or more scripts stored in a markup language document), in a single file dedicated to the program in question, or in multiple coordinated files (e.g., files that store one or more modules, sub programs, or portions of code). A computer program can be deployed to be executed on one computer or on multiple computers that are located at one site or distributed across multiple sites and interconnected by a communication network.

While the above discussion primarily refers to microprocessor or multi-core processors that execute software, one or more implementations are performed by one or more integrated circuits, such as application specific integrated circuits (ASICs) or field programmable gate arrays (FPGAs). In one or more implementations, such integrated circuits execute instructions that are stored on the circuit itself.

Although the invention has been described with reference to the disclosed embodiments, one having ordinary skill in the art will readily appreciate that these embodiments are only illustrative of the invention. It should be understood that various modifications can be made without departing from the spirit of the invention. The particular embodiments disclosed above are illustrative only, as the present invention may be modified and practiced in different but equivalent manners (e.g., pulsed vs continuous DNV excitation schemes) apparent to those skilled in the art having the benefit of the teachings herein. Furthermore, no limitations are intended to the details of construction or design herein shown, other than as described in the claims below. It is therefore evident that the particular illustrative embodiments disclosed above may be altered, combined, or modified and all such variations are considered within the scope and spirit of the present invention. While compositions and methods are described in terms of “comprising,” “containing,” or “including” various components or steps, the compositions and methods can also “consist essentially of” or “consist of” the various components and operations. All numbers and ranges disclosed above can vary by some amount. Whenever a numerical range with a lower limit and an upper limit is disclosed, any number and any subrange falling within the broader range is specifically disclosed. Also, the terms in the claims have their plain, ordinary meaning unless otherwise explicitly and clearly defined by the patentee. If there is any conflict in the usages of a word or term in this specification and one or more patent or other documents that may be incorporated herein by reference, the definitions that are consistent with this specification should be adopted.

Claims

1. A vector magnetometer apparatus, the apparatus comprising: a micron-sized vacancy center diamond nitrogen-vacancy (micro-DNV) sensor positioned in a first layer of a multi-layer structure;a micro-radio-frequency (RF) source configured to generate RF pulses to stimulate nitrogen-vacancy centers in the micro-vacancy center sensor;a micron-sized light source positioned at a second layer of the multi-layer structure;a fixed bias magnet; andone or more micro-photo detectors configured to detect fluorescence radiation emitted by stimulated nitrogen-vacancy centers and positioned in the first layer of the multi-layer structure,wherein the micro-vacancy center sensor comprises a micron-sized vacancy center crystal embedded in a cured bonding material, and wherein the micro-vacancy center assembly is operable to perform vector magnetometry when positioned in an external magnetic field.

2. The apparatus of claim 1, wherein the micro-vacancy center sensor is affixed to a silicon chip.

3. The apparatus of claim 1, wherein the micro-RF source is configured to generate RF pulses to stimulate nitrogen-vacancy centers in the micro-vacancy center sensor, wherein the micro-RF source comprises one of a strip-line resonator, a split ring, or a straight rod dipole, wherein the micro-RF source is formed on a chip to surround the micro-vacancy center sensor.

4. The apparatus of claim 1, wherein the micro-RF source is configured to generate RF pulse sequences by using Ramsey, Hahn echo or Barry timing sequences to attain higher sensitivity and to enable measuring AC varying magnetic fields.

5. The apparatus of claim 1, wherein micron-sized light source comprises a green micron-sized light-emitting diode (LED), wherein the green micron-sized LED is formed on a chip, wherein each of the one or more micro-photo detectors comprises a red micro-photo detector, and wherein the one or more red micro-photo detectors are formed on the chip.

6. The apparatus of claim 5, wherein at least one of the one or more micro-photo detectors is configured to measure green excitation light generated by the green micron-sized LED.

7. The apparatus of claim 5, wherein the green micron-sized LED is configured to generate green light pulse sequences by using Ramsey, Hahn echo or Barry timing sequences to attain higher sensitivity and enable measuring AC varying magnetic fields.

8. The apparatus of claim 1, wherein at least one of the one or more micro-photo detectors further comprises a red filter configured to filter out green light.

9. The apparatus of claim 1, wherein at least one of the one or more micro-photo detectors further comprises a micro-lens.

10. The apparatus of claim 1, wherein the micro-vacancy center assembly is operable to measure the external magnetic field with a sensitivity of better than one micro-Tesla.

11. The apparatus of claim 1, wherein the micro-vacancy center assembly comprises a multilayer structure formed by integrating a plurality of layers, wherein each layer includes at least one of the micro-RE source, the micron-sized light source, a fixed bias magnet, or the one or more micro-photo detectors.

12. The apparatus of claim 1, wherein micron-sized vacancy center sensor is a micron-sized diamond nitrogen-vacancy (micro-DNV) sensor.

13. A vector magnetometer apparatus, the apparatus comprising: a micro-sized vacancy center sensor;a micro-radio-frequency (RF) source configured to generate RF pulses to stimulate vacancy centers in the micro-sized vacancy center sensor;a micro-sized light source;a fixed bias magnet; andone or more micro-photo detectors configured to detect fluorescence radiation emitted by stimulated vacancy centers,wherein the micro-sized vacancy center sensor comprises a micro-sized vacancy center material embedded in a cured bonding material, and wherein the micro-sized vacancy center assembly is operable to perform vector magnetometry when positioned in an external magnetic field;wherein micro-sized light source comprises a green micro-sized light-emitting diode (LED), wherein the green micro-sized LED is formed on a chip, wherein each of the one or more micro-photo detectors comprises a red micro-photo detector, and wherein the one or more red micro-photo detectors are formed on the chip.

14. The apparatus of claim 13, wherein at least one of the one or more micro-photo detectors is configured to measure green excitation light generated by the green micro-sized LED.

15. The apparatus of claim 13, wherein the green micro-sized LED is configured to generate green light pulse sequences by using Ramsey, Hahn echo or Barry timing sequences to attain higher sensitivity and enable measuring AC varying magnetic fields.

16. A vector magnetometer apparatus, the apparatus comprising: a micro-sized vacancy center sensor;a micro-radio-frequency (RF) source configured to generate RF pulses to stimulate vacancy centers in the micro-sized vacancy center sensor;a micro-sized light source;a fixed bias magnet; andone or more micro-photo detectors configured to detect fluorescence radiation emitted by stimulated vacancy centers,wherein the micro-sized vacancy center sensor comprises a micro-sized vacancy center material embedded in a cured bonding material, and wherein the micro-sized vacancy center assembly is operable to perform vector magnetometry when positioned in an external magnetic field;wherein micro-sized light source comprises a micro-sized light-emitting diode (LED), wherein the micro-sized LED is formed on a chip, wherein each of the one or more micro-photo detectors comprises a micro-photo detector, and wherein the one or more micro-photo detectors are formed on the chip;wherein the micro-sized LED is configured to generate light pulse sequences by using Ramsey, Hahn echo or Barry timing sequences to attain higher sensitivity and enable measuring AC varying magnetic fields.