The present application is a continuation of U.S. patent application Ser. No. 08/103,896, filed Aug. 6, 1993, now U.S. Pat. No. 5,473,945, which is a continuation-in-part of Ser. No. 07/904,211, filed Jun. 25, 1992, entitled MONOLITHIC MICROMECHANICAL ACCELEROMETER, now abandoned which is a continuation-in-part of application Ser. No. 07/528,051, filed May 23, 1990, entitled MONOLITHIC MICROMECHANICAL ACCELEROMETER, Issued Jun. 30, 1992 as U.S. Pat. No. 5,126,812, which is a continuation-in-part of commonly assigned U.S. application Ser. No. 07/479,854, filed Feb. 14, 1990, entitled METHOD AND APPARATUS FOR SEMICONDUCTOR CHIP TRANSDUCER issued Mar. 23, 1993 as U.S. Pat. No. 5,195,371.
Number | Name | Date | Kind |
---|---|---|---|
RE32931 | Staudte | May 1989 | |
RE33479 | Juptner et al. | Dec 1990 | |
3053095 | Koril et al. | Sep 1962 | |
3251231 | Hunt et al. | May 1966 | |
3370458 | Dillon | Feb 1968 | |
3696429 | Tressa | Oct 1972 | |
3913035 | Havens | Oct 1975 | |
3974699 | Morris et al. | Aug 1976 | |
4044305 | Oberbeck | Aug 1977 | |
4122448 | Martin | Oct 1978 | |
4144764 | Hartzell, Jr. | Mar 1979 | |
4155257 | Wittke | May 1979 | |
4234666 | Gursky | Nov 1980 | |
4311046 | Pittman | Jan 1982 | |
4321500 | Paros et al. | Mar 1982 | |
4336718 | Washburn | Jun 1982 | |
4342227 | Petersen et al. | Aug 1982 | |
4381672 | O'Connor et al. | May 1983 | |
4406992 | Kurtz et al. | Sep 1983 | |
4411741 | Janata | Oct 1983 | |
4414852 | McNeill | Nov 1983 | |
4447753 | Ochiai | May 1984 | |
4457173 | Hunter | Jul 1984 | |
4468584 | Nakamura et al. | Aug 1984 | |
4478076 | Bohrer | Oct 1984 | |
4478077 | Bohrer et al. | Oct 1984 | |
4483194 | Rudolf | Nov 1984 | |
4484382 | Kawashima | Nov 1984 | |
4490772 | Blickstein | Dec 1984 | |
4495499 | Richardson | Jan 1985 | |
4499778 | Westhaver et al. | Feb 1985 | |
4502042 | Wuhrl et al. | Feb 1985 | |
4507705 | Hoshino | Mar 1985 | |
4522072 | Sulouff et al. | Jun 1985 | |
4524619 | Staudte | Jun 1985 | |
4538461 | Juptner et al. | Sep 1985 | |
4585083 | Nishiguchi | Apr 1986 | |
4590801 | Marhav | May 1986 | |
4592242 | Kempas | Jun 1986 | |
4596158 | Strugach | Jun 1986 | |
4598585 | Boxenhorn | Jul 1986 | |
4600934 | Aine et al. | Jul 1986 | |
4619001 | Kane | Oct 1986 | |
4621925 | Masuda et al. | Nov 1986 | |
4628283 | Reynolds | Dec 1986 | |
4629957 | Walters et al. | Dec 1986 | |
4639690 | Lewis | Jan 1987 | |
4644793 | Church | Feb 1987 | |
4651564 | Johnson et al. | Mar 1987 | |
4653326 | Danel et al. | Mar 1987 | |
4654663 | Alsenz et al. | Mar 1987 | |
4665605 | Kempas | May 1987 | |
4670092 | Motamedi | Jun 1987 | |
4671112 | Kimura et al. | Jun 1987 | |
4674180 | Zavracky et al. | Jun 1987 | |
4674319 | Muller et al. | Jun 1987 | |
4674331 | Watson | Jun 1987 | |
4679434 | Stewart | Jul 1987 | |
4680606 | Knutti et al. | Jul 1987 | |
4699006 | Boxenhorn | Oct 1987 | |
4705659 | Bernstein et al. | Nov 1987 | |
4706374 | Murkami | Nov 1987 | |
4712439 | North | Dec 1987 | |
4727752 | Peters | Mar 1988 | |
4735506 | Pavlath | Apr 1988 | |
4736629 | Cole | Apr 1988 | |
4743789 | Puskas | May 1988 | |
4744248 | Stewart | May 1988 | |
4744249 | Stewart | May 1988 | |
4747312 | Herzl | May 1988 | |
4750364 | Kawamura et al. | Jun 1988 | |
4761743 | Wittke | Aug 1988 | |
4764244 | Chitt et al. | Aug 1988 | |
4776924 | Delapierre | Oct 1988 | |
4783237 | Aine et al. | Nov 1988 | |
4789803 | Jacobsen et al. | Dec 1988 | |
4792676 | Hojo et al. | Dec 1988 | |
4805456 | Howe et al. | Feb 1989 | |
4808948 | Patel et al. | Feb 1989 | |
4815472 | Wise et al. | Mar 1989 | |
4834538 | Heeks et al. | May 1989 | |
4851080 | Howe et al. | Jul 1989 | |
4855544 | Glenn | Aug 1989 | |
4869107 | Murakami | Sep 1989 | |
4881410 | Wise et al. | Nov 1989 | |
4882933 | Petersen et al. | Nov 1989 | |
4884446 | Ljung | Dec 1989 | |
4890812 | Chechile et al. | Jan 1990 | |
4893509 | MacIver et al. | Jan 1990 | |
4898032 | Voles | Feb 1990 | |
4899587 | Staudte | Feb 1990 | |
4900971 | Kawashima | Feb 1990 | |
4901586 | Blake et al. | Feb 1990 | |
4916520 | Kurashima | Apr 1990 | |
4922756 | Henrion | May 1990 | |
4929860 | Hulsing, II et al. | May 1990 | |
4981359 | Tazartes et al. | Jan 1991 | |
5001383 | Kawashima | Mar 1991 | |
5006487 | Stokes | Apr 1991 | |
5013396 | Wise et al. | May 1991 | |
5016072 | Greiff | May 1991 | |
5025346 | Tang | Jun 1991 | |
5038613 | Takenaka et al. | Aug 1991 | |
5055838 | Wise et al. | Oct 1991 | |
5060039 | Weinberg et al. | Oct 1991 | |
5065626 | Hanson | Nov 1991 | |
5090809 | Ferrar | Feb 1992 | |
5094537 | Karpinski, Jr. | Mar 1992 | |
5126812 | Greiff | Jun 1992 | |
5138883 | Paquet et al. | Aug 1992 | |
5195371 | Greiff | Mar 1993 | |
5203208 | Bernstein | Apr 1993 | |
5205171 | O'Brien et al. | Apr 1993 | |
5216490 | Greiff et al. | Jun 1993 | |
5226321 | Varnham et al. | Jul 1993 | |
5233874 | Putty et al. | Aug 1993 | |
5241861 | Hulsing, II | Sep 1993 | |
5408112 | Tai et al. | Apr 1995 | |
5507911 | Greiff | Apr 1996 |
Number | Date | Country |
---|---|---|
55-121728 | Sep 1980 | JPX |
58-136125 | Aug 1983 | JPX |
59-037722 | Mar 1984 | JPX |
59-158566 | Sep 1984 | JPX |
Number | Date | Country | |
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Parent | 103896 | Aug 1993 |
Number | Date | Country | |
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Parent | 904211 | Jun 1992 | |
Parent | 528812 | May 1990 | |
Parent | 479854 | Feb 1990 |