The described embodiments relate generally to electronic component processing. More particularly, the described embodiments relate to retaining components during a semiconductor manufacturing process.
Sputtering typically involves ejecting small particles of material from a source onto a substrate or other object, such as to plate or otherwise coat the object with the material during semiconductor manufacturing. Other plating processes and similar procedures are also often used in the manufacture of semiconductors and other components. Current sputter, plating, and other processes often rely on the use of an ink or a high temperature tape to hold or secure a component or object to a separate carrier or other handling component while the component or object is being sputtered, plated, or otherwise processed. Tapes and inks typically do not perform well at high temperatures over 150° C., however, such that adhesive burns, adhesive residues, and difficulties removing sputtered or plated items from the carriers post-processing are often issues. Added steps that deal with these issues are thus often a part of many such manufacturing processes. Furthermore, inks and tapes typically require interaction with a flat surface on the component or other object in order to be effective. Where the component or object surface has features or is otherwise not flat, various further considerations might be made, or effectiveness might be lessened.
While sputter, plating, and other manufacturing processes using inks and tapes have worked well in the past, there can be room for improvement. Accordingly, there is a need for improved systems and methods that secure objects during manufacturing processes in a more convenient and streamlined manner.
Representative embodiments set forth herein disclose various structures, methods, and features thereof for the disclosed component retention systems. In particular, the disclosed embodiments set forth methods for retaining or securing a component during a sputter, plating, or other manufacturing process, as well as the component retentions systems that used for such methods. These can involve the use of a curable and removable adhesive, among other items.
According to various embodiments, the disclosed component retentions systems can secure components during a manufacturing process. An exemplary component retention system can include at least: 1) a carrier configured for mounting a component thereto, and 2) an adhesive configured to form a layer that couples the carrier and component. The adhesive can be a liquid that is curable under ultraviolet (“UV”) light to form a cured adhesive layer, which can then remain on the carrier and leave no residue on the component as the component is processed and removed from the carrier. Holes in the carrier can help eject processed components.
In some embodiments, methods of retaining a module for a sputter process include mounting the module to a carrier using an adhesive layer, curing the adhesive layer, sputtering a material to the module, and removing the module from the carrier such that all of the adhesive layer is removed from the module when the module is removed from the carrier. The removed module can be immediately ready for another surface mount process. The adhesive can be a UV-curable liquid applied to the carrier that is later cleaned from the carrier to prepare the carrier for reuse. Other method steps can include applying an adhesive to a carrier, placing an electronic component onto the adhesive, curing the adhesive, performing a manufacturing process to the electronic component, and removing the electronic component from the carrier, wherein all of the adhesive is removed from the electronic component thereby.
This Summary is provided merely for purposes of summarizing some example embodiments so as to provide a basic understanding of some aspects of the subject matter described herein. Accordingly, it will be appreciated that the above-described features are merely examples and should not be construed to narrow the scope or spirit of the subject matter described herein in any way. Other features, aspects, and advantages of the subject matter described will become apparent from the following Detailed Description, Figures, and Claims.
The included drawings are for illustrative purposes and serve only to provide examples of possible structures and methods for the disclosed component retention systems. These drawings in no way limit any changes in form and detail that may be made to the embodiments by one skilled in the art without departing from the spirit and scope of the embodiments. The embodiments will be readily understood by the following detailed description in conjunction with the accompanying drawings, wherein like reference numerals designate like structural elements.
Securing or retaining electronic components during semiconductor manufacturing processes is commonly done by way of inking or taping the electronic components to separate carriers. Adhesive burns, adhesive residues, and difficulties removing sputtered or plated objects from carriers are often issues that result in added steps and inconveniences. Providing a component surface that is flat for mounting purposes is often a significant consideration as well. Improvements that provide for fewer process steps and less difficulties in retaining components may then be desirable. The embodiments set forth herein thus provide various structures and methods for using module retention systems that do not require inks or tapes, but that are still efficient and suitable for use in sputter, plating and other similar processes.
In various embodiments, a component retention system can include at least a carrier configured for mounting components and an adhesive that couples the carrier and components. The adhesive can be a UV-curable liquid that forms a cured adhesive layer to retain the components in place on the carrier during a sputter, plating, or other manufacturing process. The cured adhesive layer can then remain on the carrier and leave no residue on the components after the components are processed and removed from the carrier. Holes in the carrier can help eject the sputtered or otherwise processed components, which are then ready for another surface mount process without requiring any cleaning or further preparation steps to the components.
In various embodiments, methods of retaining a module for a sputter process include mounting the module to a carrier using an adhesive layer, curing the adhesive layer, sputtering a material to the module, and removing the module from the carrier such that the cured adhesive layer remains on the carrier and leaves no residue on the module. The removed module can be immediately ready for another surface mount process. The adhesive can be a UV-curable liquid applied to the carrier that is later cleaned from the carrier to prepare the carrier for reuse.
The foregoing approaches provide various structures and methods for the disclosed module retention during processing systems. A more detailed discussion of these structures, methods, and features thereof is set forth below and described in conjunction with
Turning first to
Carrier 100 can be a piece of glass or other suitable UV transparent material that is configured to hold numerous components in a mass manufacturing process. Transparency to UV light can help to facilitate a UV cure of an associated adhesive, as detailed below. Carrier 100 can have a thickness of about 5 mm to about 20 mm in various embodiments, although thinner or thicknesses may be used for the carrier depending upon the relevant mounted components, applications, and processes. In some embodiments, each location having a hole 112 and/or other features for an individual mounted component can be about 20-50 mm in width and length. Each hole 112 can have a diameter of about 5 mm to about 20 mm. Again, other dimensions are also possible depending upon the relevant mounted components, applications, and processes.
Moving next to
Retaining or holding the module 200 or other component being sputtered can be an issue. A common carrier or other portable item is often used for this, so that may components can be sputtered or coated at the same time. While an inking or taping process is often used to hold modules or other components to a carrier, this can result in an overall process that takes up to 20-25 steps to ink or tape the module, sputter, and then remove and clean the ink or tape from the module. Furthermore, inking or taping typically requires that flat surfaces be used on both the components and the carrier. As such, inking or taping is typically not possible or of limited effectiveness for any curved surfaces, three-dimensional surfaces, surfaces having balls or other features, and any other non-flat surfaces on a component. Since inking or taping can thus be a limiting, time consuming, and costly process, alternative ways of retaining modules to carriers may be preferable.
One alternative way of retaining a module 200 to a carrier 100 can involve the use of a curable or hardening adhesive, such as a liquid UV-curable adhesive. Such an adhesive can be placed between a given module 200 and a given carrier 100 in a manner that forms a layer therebetween. This can be accomplished by applying the liquid adhesive to the carrier 100, to each module 200, or to both. Application of the curable adhesive to each module can involve applying the adhesive to a backside or other mounting surface, as may be applicable. Where the properties of the curable adhesive and the carrier are appropriately tuned, the cured adhesive can then stick to the carrier and not the module upon separation. Furthermore, use of such a liquid curable adhesive can allow for mounting at non-flat surfaces, since the flowing nature of the liquid can readily accommodate any features or non-flat regions on the mounting surface.
Continuing with
When a module 200 is placed and pressed to the carrier 100 with a trace or line of adhesive 220 located therebetween, the adhesive 220 can be thereby spread outward to some or all of the perimeter edges of the module 200, as shown. Again, the adhesive 220 can be a UV-curable material in a liquid state at the time that the module 200 is placed to the carrier 100. Also, while UV-curable is often recited herein for purposes of illustration, it will be readily appreciated that other types of curable epoxies, resins, or liquids may alternatively be used. The spreading of the liquid adhesive 220 in this manner can facilitate the formation of a continuous seal around the perimeter of the module, such that a mounting surface on the module is sealed away from the undesirable possibility of any sputter or other process material getting underneath the module 200 or between the module 200 and the carrier 100. Again, the mounting surface on the carrier can be warped, curved, and/or have one or more 3D features, and the flowing and spreading nature of the liquid adhesive readily accounts for such non-planarity anywhere on the mounting surface.
In various embodiments, the curing process can transform the epoxy or other UV-curable material from a wet toothpaste or silicone type texture to a dried rubberized type texture. The cured epoxy or other UV-curable material 220 then retains or holds the module 200 or other component to the glass or other carrier 100, and also isolates the mounting surface or adhered region of the module 200 from outside air and processing materials. The cured adhesive layer can adhere to the glass or other carrier 100 stronger than it adheres to the module 200 or other processed component, which facilitates removal at a later time.
With the modules 200 or other components firmly retained or coupled to the carrier 100, the entire unit can then be subjected to a manufacturing process, such as a sputter or plating process. In some embodiments, the holes 112 in the carrier 100 can function to vent at least some portion of the backside of each respective module 200 during the sputter or other process. After the sputter, plating, or other relevant manufacturing process is finished, the sputtered or otherwise processed modules 200 can then be peeled or otherwise removed from the carrier 100. Again, one or more ejection holes 112 can be used to facilitate the removal process, such as by way of a pin or other item being inserted into the hole to push the module 200 away from the carrier 100. Such an ejection process using pins or other items may also be automated, as may be readily appreciated.
Because the UV-cured adhesive layer 220 adheres more strongly and readily to the carrier 100 than to the module 200, removal of the module 200 from the carrier 100 results in the adhesive layer 220 sticking to and remaining with the carrier 100 and not the module 200. In some embodiments, little to no adhesive residue remains with the module 200 at all, such that the module is immediately ready to be mounted to another surface for a further processing step without requiring any cleaning or further surface preparation or processing. The carrier 100 can then be cleaned or otherwise have the adhesive layer 220 removed therefrom, such that it may be reused for a separate new sputter or other manufacturing process with one or more new modules.
Turning next to
At the next process step 504, a curable layer is applied, which layer can be formed from a UV-curable liquid. Again, this layer can be an adhesive material that is applied to the component(s), to the carrier, or to both. At process step 506, the component(s) can be mounted to the carrier. This mounting step can involve spreading the adhesive to form a layer that is distributed between the component(s) and the carrier. The mounting surface of the component(s) need not be planar, and can be warped, curved, three-dimensional, and/or have one or more protruding or recessed features. Use of a curable liquid provides for such flexibility in use with non-planar mounting surfaces. The curable adhesive layer may also seal off a component mounting surface or portion thereof. At process step 508, the UV-curable layer is then cured, such as by adequate exposure to a UV light source or system. A sputter or other manufacturing process can then be performed at a following process step 510. This sputter process can be performed on the entire carrier, cured adhesive, and component combination, and may form a coating or layer of sputtered material atop the component(s). In various embodiments, the sputtered material is sealed off from and does not contact a mounting surface of the component(s).
At process step 512, the component(s) can be removed from the carrier. Again, this can be facilitated by way of one or more ejection holes in the carrier, which can allow for pins or other items to push the component(s) away from the carrier. As part of the removal process, most or all of the cured adhesive layer can stick to or otherwise remain with the carrier. Accordingly, little to no adhesive contamination stays with the removed component(s). At an optional following process step 514, the component(s) can then be mounted or re-mounted to another surface for a following manufacturing process. This can take place without any cleaning or other surface preparation for the component(s), since no adhesive has remained to contaminate any component surfaces. At another optional process step 516, the carrier can then be cleaned and prepared for future use with one or more new components. This can involve removing the cured adhesive layer from the carrier. As will be readily appreciated, removal of the adhesive layer and adhesive contamination from the carrier can be much easier and cheaper than removal of such adhesive items from the processed component(s), since more care is generally needed for processing the more relatively sensitive component(s).
For the foregoing flowchart, it will be readily appreciated that not every step provided is always necessary, and that further steps not set forth herein may also be included. For example, added steps that involve designing and forming the carrier may be added. Also, steps that provide more detail with respect to applying a liquid adhesive in preformed patterns may also be added. Furthermore, the exact order of steps may be altered as desired, and some steps may be performed simultaneously.
The computing device 600 can also include a storage device 640, which can comprise a single disk or a plurality of disks (e.g., hard drives), and includes a storage management module that manages one or more partitions within the storage device 640. In some embodiments, storage device 640 can include flash memory, semiconductor (solid state) memory or the like. The computing device 600 can also include a Random Access Memory (RAM) 620 and a Read-Only Memory (ROM) 622. The ROM 622 can store programs, utilities or processes to be executed in a non-volatile manner. The RAM 620 can provide volatile data storage, and stores instructions related to the operation of the computing device 600.
The various aspects, embodiments, implementations or features of the described embodiments can be used separately or in any combination. Various aspects of the described embodiments can be implemented by software, hardware or a combination of hardware and software. The described embodiments can also be embodied as computer readable code on a computer readable medium. The computer readable medium is any data storage device that can store data which can thereafter be read by a computer system. Examples of the computer readable medium include read-only memory, random-access memory, CD-ROMs, DVDs, magnetic tape, hard disk drives, solid state drives, and optical data storage devices. The computer readable medium can also be distributed over network-coupled computer systems so that the computer readable code is stored and executed in a distributed fashion.
The foregoing description, for purposes of explanation, uses specific nomenclature to provide a thorough understanding of the described embodiments. However, it will be apparent to one skilled in the art that the specific details are not required in order to practice the described embodiments. Thus, the foregoing descriptions of specific embodiments are presented for purposes of illustration and description. They are not intended to be exhaustive or to limit the described embodiments to the precise forms disclosed. It will be apparent to one of ordinary skill in the art that many modifications and variations are possible in view of the above teachings.
This application claims the benefit of U.S. Provisional Patent Application No. 62/221,486, filed on Sep. 21, 2015, which is incorporated by reference herein in its entirety for all purposes.
Number | Date | Country | |
---|---|---|---|
62221486 | Sep 2015 | US |