Claims
- 1. A monolithic corrector plate for an interferometer, said corrector plate comprising:
a substrate having an input face for intercepting a first beam emitted by said interferometer, and an output face opposite said input face; and an aperture integral with said substrate, said aperture being configured to transform a first beam intercepted by said input face into a second beam emerging from said output face.
- 2. The corrector plate of claim 1, wherein said aperture is configured to form a second beam having a selected direction of propagation, said selected direction of propagation being different from a direction of propagation of said first beam.
- 3. The corrector plate of claim 2, wherein said aperture is configured to form a second beam propagating in a direction orthogonal to said output face.
- 4. The corrector plate of claim 2, wherein said aperture comprises a prism.
- 5. The corrector plate of claim 1, wherein said aperture is configured to form a second beam having a different phase front from said first beam.
- 6. The corrector plate of claim 5, wherein said aperture comprises a lens.
- 7. The corrector plate of claim 5, wherein said aperture is configured to form a second beam having a planar phase front.
- 8. The corrector plate of claim 7, wherein said aperture is configured to form a second beam having a planar phase front parallel to said output face.
- 9. The corrector plate of claim 1, wherein said aperture merges continuously with neighboring apertures thereof.
- 10. An interferometer comprising:
an interferometer housing from which emerges a first beam; a corrector plate in optical communication with said interferometer, said corrector plate including
a substrate having an input face for intercepting said first beam from said interferometer, and an output face opposite said input face; and an aperture integrated into said substrate, said aperture being configured to transform said first beam incident on said input face into a second beam emerging from said output face.
- 11. The interferometer of claim 10, wherein said substrate is integral with said housing.
- 12. The interferometer of claim 10, wherein said aperture is configured to form a second beam having a selected direction of propagation, said selected direction of propagation being different from a direction of propagation of said first beam.
- 13. The interferometer of claim 12, wherein said aperture is configured to form a second beam propagating in a direction orthogonal to said output face.
- 14. The interferometer of claim 12, wherein said aperture comprises a prism.
- 15. The interferometer of claim 10, wherein said aperture is configured to form a second beam having a different phase front from said first beam.
- 16. The interferometer of claim 15, wherein said aperture comprises a lens.
- 17. The interferometer of claim 15, wherein said aperture is configured to form a second beam having a planar phase front.
- 18. The interferometer of claim 17, wherein said aperture is configured to form a second beam having a planar phase front parallel to said output face.
- 19. The interferometer of claim 10, wherein said aperture merges continuously with neighboring apertures thereof.
- 20. A multi-axis interferometer comprising:
an optically transmissive monolith having a multiplexer portion and a beam splitter portion,
said multiplexer portion being configured to split an input beam into a corresponding plurality of intermediate beams, each of said intermediate beams being directed toward said beam splitter portion through a corresponding output port of said multiplexer portion; said beam splitter portion being configured to separate said intermediate beam into a measurement component and a reference component; a corrector plate including
a substrate disposed to receive a first beam from said beam splitter portion, said first beam being selected from said measurement component and said reference component, said substrate having an input face for intercepting said first beam, and an output face; and an aperture integrated into said substrate, said aperture being configured to transform said first beam incident into a second beam emerging from said output face.
RELATED APPLICATIONS
[0001] This application claims the benefit of the priority date of U.S. provisional application No. 60/254,235 filed on Dec. 8, 2000, the contents of which are herein incorporated by reference.
Provisional Applications (1)
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Number |
Date |
Country |
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60254235 |
Dec 2000 |
US |