MOUNTING APPARATUS

Abstract

A mounting apparatus includes a surface plate; a temperature control unit integrated with the surface plate; and a bottom plate integrated with the temperature control unit via a heat insulation ring, wherein a temperature of a target object held on the surface plate is capable of being controlled and the surface plate is formed of ceramic. The surface plate and the temperature control unit are coupled to each other by a first coupling member at each portion thereof except for each peripheral portion thereof such that the peripheral portion of the surface plate being not coupled thereto. The peripheral portion of the temperature control unit is coupled to the heat insulation ring by a second coupling member.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects and features of the present invention will become apparent from the following description of embodiments given in conjunction with the accompanying drawings, in which:

FIG. 1 is a front view showing an interior of an inspection apparatus in which a mounting apparatus of the present invention is employed;

FIG. 2 is a cross sectional view illustrating the mounting apparatus shown in FIG. 1;

FIG. 3 is a cross sectional view of a mounting apparatus in accordance with another embodiment of the present invention;

FIG. 4 is a cross sectional view of a mounting apparatus in accordance with still another embodiment of the present invention; and

FIG. 5 is a cross sectional view showing an exemplified conventional mounting apparatus.

Claims

1. A mounting apparatus comprising: a surface plate;a temperature control unit integrated with the surface plate; anda bottom plate integrated with the temperature control unit via a heat insulation ring,wherein a temperature of a target object held on the surface plate is capable of being controlled,wherein the surface plate is formed of ceramic,wherein the surface plate and the temperature control unit are coupled to each other by a first coupling member at each portion thereof except for each peripheral portion thereof such that the peripheral portion of the surface plate being not coupled thereto, andwherein the peripheral portion of the temperature control unit is coupled to the heat insulation ring by a second coupling member.

2. The mounting apparatus of claim 1, wherein the first coupling member includes a plurality of coupling members arranged in a concentric circular shape with respect to the surface plate and the temperature control unit.

3. A mounting apparatus comprising: a surface plate;a temperature control unit integrated with the surface plate; anda bottom plate integrated with the temperature control unit through a heat insulation ring,wherein a temperature of a target object held on the surface plate is capable of being controlled,wherein the surface plate is formed of ceramic,wherein the surface plate and the temperature control unit are coupled to each other at each central portion by a coupling member, andwherein the temperature control unit is inserted between the surface plate and the heat insulation ring.

4. The mounting apparatus of claim 3, wherein the surface plate and the heat insulation ring are coupled to each other via the temperature control unit at a plurality of places spaced apart from each other in a circumferential direction by coupling members different from each other.

5. The mounting apparatus of claim 1, wherein each thermal expansion of the surface plate and the heat insulation ring is substantially equal to each other at coupling part.

6. The mounting apparatus of claim 3, wherein each thermal expansion of the surface plate and the heat insulation ring is substantially equal to each other at coupling part.

7. The mounting apparatus of claim 1, further comprising a temperature control plate ring attached to the bottom plate for surrounding the surface plate, the temperature control unit and the heat insulation ring, wherein a gap is formed between the temperature control plate ring and a peripheral surface of the surface plate, the temperature control plate ring, and the heat insulation ring.

8. The mounting apparatus of claim 3, further comprising a temperature control plate ring attached to the bottom plate for surrounding the surface plate, the temperature control unit and the heat insulation ring, wherein a gap is formed between the temperature control plate ring and a peripheral surface of the surface plate, the temperature control plate ring, and the heat insulation ring.

9. The mounting apparatus of claim 7, wherein both sides of the temperature control plate ring is formed of a mirror surface.

10. The mounting apparatus of claim 8, wherein both sides of the temperature control plate ring is formed of a mirror surface.

11. The mounting apparatus of claim 7, wherein the temperature control plate ring is made of a material having a thermal conductivity equal to or lower than 17 W/mK.

12. The mounting apparatus of claim 8, wherein the temperature control plate ring is made of a material having a thermal conductivity equal to or lower than 17 W/mK.

13. The mounting apparatus of claim 1, wherein an insulation sheet is interposed between the surface plate and the temperature control unit.

14. The mounting apparatus of claim 3, wherein an insulation sheet is interposed between the surface plate and the temperature control unit.

15. The mounting apparatus of claim 13, wherein the temperature control unit is formed of a cooling element and/or a heating element.

16. The mounting apparatus of claim 14, wherein the temperature control unit is formed of a cooling element and/or a heating element.

17. The mounting apparatus of claim 1, wherein the ceramic is a composite material of silicon carbide and silicon.

18. The mounting apparatus of claim 3, wherein the ceramic is a composite material of silicon carbide and silicon.