Multilayer optics with adjustable working wavelength

Information

  • Patent Grant
  • 6421417
  • Patent Number
    6,421,417
  • Date Filed
    Monday, August 2, 1999
    25 years ago
  • Date Issued
    Tuesday, July 16, 2002
    22 years ago
Abstract
An electromagnetic reflector having a multilayer structure where the electromagnetic reflector is configured to reflect multiple electromagnetic frequencies.
Description




BACKGROUND OF THE INVENTION




The present invention relates to an electromagnetic optic element. More specifically the present invention relates to reflective multilayer x-ray optics having adjustable working wavelengths.




X-ray optics are used in many applications such as x-ray diffraction analysis and spectroscopy that require the directing, focusing, collimation, or monochromatizing of x-ray energy from an x-ray source. The family of x-ray optics or reflectors used in such applications presently include: total reflection mirrors having a reflective surface coated with gold, copper, nickel, platinum, and other similar elements; crystal diffraction elements such as graphite; and multilayer structures.




The reflective surfaces in the present invention are configured as multilayer or graded-d multilayer x-ray reflective surfaces. Multilayer structures only reflect x-ray radiation when Bragg's equation is satisfied:








nλ=


2


d


sin(θ)






where




n=the order of reflection




λ=wavelength of the incident radiation




d=layer-set spacing of a Bragg structure or the lattice spacing of a crystal




θ=angle of incidence




Multilayer or graded-d multilayer reflectors/mirrors are optics which utilize their inherent multilayer structure to reflect narrow band or monochromatic x-ray radiation. The multilayer structure of the present invention comprises light element layers of relatively low electron density alternating with heavy element layers of relatively high electron density, both of which define the d-spacing of the multilayer. The bandwidth of the reflected x-ray radiation can be customized by manipulating the optical and multilayer parameters of the reflector. The d spacing may be changed depthwise to control the bandpass of the multilayer mirror. The d-spacing of a multilayer mirror can also be tailored through lateral grading in such a way that the Bragg condition is satisfied at every point on a curved multilayer reflector.




Curved multilayer reflectors, including parabolic, elliptical, and other aspherically shaped reflectors must satisfy Bragg's law to reflect a certain specific x-ray wavelength (also referred to as energy or frequency). Bragg's law must be satisfied at every point on a curvature for a defined contour of such a reflecting mirror. Different reflecting surfaces require different d-spacing to reflect a specific x-ray wavelength. This means the d-spacing should be matched with the curvature of a reflector to satisfy Bragg's law such that the desired x-ray wavelength will be reflected. Since Bragg's law must be satisfied, the incident angle and d-spacing are normally fixed and thus the reflected or working wavelength is fixed.




SUMMARY OF THE INVENTION




The present invention is a multilayer x-ray reflector/mirror which may be used to reflect multiple x-ray wavelengths.




In a first embodiment, the multilayer structure has a laterally graded d-spacing. The working (reflected) wavelength of the multilayer reflector may be changed by simply varying its curvature and thus the angle of incidence for an x-ray beam to satisfy Bragg's law.




In a second embodiment, an electromagnetic reflector has a fixed curvature and a multilayer structure that has been configured to include a plurality of distinct d-spacings. The multilayer structure has also been laterally graded such that the electromagnetic reflector may reflect multiple x-ray wavelengths according to Bragg's law. Thus, the lateral grading of the d-spacings have been configured in conjunction with the curvature of the multilayer coating to reflect a plurality of x-ray wavelengths.




In a third embodiment of the present invention an electromagnetic reflector is formed with stripe-like multilayer coating sections. Each of the coating sections has a fixed curvature and graded d-spacing tailored to reflect a specific wavelength. To change the working wavelength of the reflector, the mirror or x-ray source need to be moved relative to each other so that the appropriate coating section is aligned with the x-ray source.











BRIEF DESCRIPTION OF THE DRAWINGS




The various advantages of the present invention will become apparent to those skilled in the art after reading the following specification and by reference to the drawings, in which:





FIG. 1

is a cross-sectional diagrammatic view of a multilayer Bragg reflector;





FIG. 2

is a cross-sectional diagrammatic view of a multilayer reflector with a plurality of distinct d-spacings to reflect multiple x-ray wavelengths;





FIG. 3

is a cross-sectional view of a parabolically shaped reflector;





FIG. 4

is a cross-sectional view of an elliptically shaped reflector;





FIG. 5

is a magnified cross-sectional view taken within circle


5


of

FIG. 3

;





FIG. 6

is a magnified cross-sectional view taken within circle


6


of

FIG. 3

;





FIG. 7

is a magnified cross-sectional view taken within circle


7


of

FIG. 4

;





FIG. 8

is a magnified cross-sectional view taken within circle


8


of

FIG. 4

;





FIG. 9

is a diagrammatic view of the first embodiment of the reflector of the present invention illustrating its variable curvature and ability to reflect different x-ray wavelengths;





FIG. 10

is a diagrammatic view of a bender used in the present invention;





FIG. 11

is a cross sectional view of the second embodiment of the reflector of the present invention having a fixed curvature that is configured to include a plurality of distinct d-spacings and laterally graded such that it may reflect multiple x-ray wavelengths; and





FIG. 12

is a top view of the third embodiment of the reflector of the present invention with stripe-like sections having different d-spacings such that the reflector can reflect a plurality of x-ray frequencies.











DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT





FIG. 1

is a cross-sectional diagrammatic view of a multilayer reflector


10


. The multilayer reflector


10


is deposited on a substrate


12


and comprises a plurality of layer sets with a thickness d. Each layer set


14


is made up of two separate layers of different materials; one with a relatively high electron density and one with a relatively low electron density. In operation, x-ray radiation


13


is incident on the multilayer reflector


10


and narrow band or generally monochromatic radiation


16


is reflected according to Bragg's law.





FIG. 2

is a cross sectional diagram of a multilayer structure


18


having a plurality of distinct d-spacings d


1


and d


2


varying in the depth direction and defined as depth grading. The multilayer structure


18


because of the distinct d-spacings d


1


and d


2


may reflect multiple x-ray wavelengths (i.e. different groups of d-spacing to satisfy a discrete range of reflected wavelengths). In operation, polychromatic x-ray radiation


20


is incident on the surface of the multilayer structure


18


and low energy x-rays


22


are reflected by the relatively thicker d-spacings d


2


and high energy x-rays


24


are reflected by the relatively thinner d-spacings d


1


.





FIGS. 3 and 4

are cross-sectional diagrams of fixed curvature multilayer optics


26


and


28


which generally reflect only one x-ray wavelength.

FIG. 3

illustrates the parabolically shaped multilayer optic


26


which collimates x-ray beams generated by an idealized point x-ray source


30


and

FIG. 4

illustrates the elliptically shaped multilayer optic


28


which focuses x-ray beams generated by an x-ray source


32


to a focal point


34


. The curvature and d-spacing of optics


26


and


28


have been permanently configured to satisfy Bragg's law for a specific wavelength at every point on the surface of the optics


26


and


28


.





FIGS. 5

,


6


,


7


, and


8


are cross-sectional magnified views of the multilayer surfaces taken within circles


5


,


6


,


7


, and


8


of

FIGS. 3 and 4

. From these figures the variation in incident angle and the lateral grading of the d-spacing in order to satisfy Bragg's law for a specific frequency can be seen. In

FIGS. 5 and 6

the parabolic optic


26


includes incident angle θ


1


and d-spacing d


3


at one area of its surface and incident angle θ


2


and d-spacing d


4


at another area. While these parameters are different, the result is that these areas reflect generally the same x-ray wavelength following Bragg's law. Similarly, in

FIGS. 7 and 8

the elliptical optic


28


includes incident angle θ


3


and d-spacing d


5


at one area of its surface and incident angle θ


4


and d-spacing d


6


at another area which reflect the same x-ray wavelength. The shortcomings with these type of fixed curvature reflectors is that they may only be used to reflect a single x-ray wavelength or narrow band.




As discussed previously, multilayer reflectors require different d-spacing variations to reflect different x-ray wavelengths at the same incident angle and the d-spacing should match the surface curvature (angle of incidence) to reflect x-rays according to Bragg's law. The present invention provides electromagnetic reflectors which may be used to reflect a plurality of x-ray wavelengths having substantially no overlap.




A first embodiment of the present invention shown by

FIG. 8

comprises a multilayer reflector with variable curvature and a laterally graded d-spacing. If a multilayer is a flat reflector with uniform d-spacing, the flat reflector can be rotated to reflect x-rays of different wavelengths, as the incidence angle will vary. If a multilayer has a curved surface the d-spacing must be laterally graded to satisfy Bragg's law at every point. Thus, the d-spacing or incidence angle may be changed to vary the x-ray wavelength reflected from a multilayer reflector. The following discussion and equations will demonstrate that for certain x-ray wavelengths the laterally graded d-spacing of a multilayer reflector may remain constant while only the curvature is varied and the curvature of a multilayer reflector may remain constant and have multiple graded d-spacings such that multiple x-ray wavelengths may be reflected by the multilayer reflector.




For parabolic, elliptical, and other aspherically shaped multilayer optics, either the d-spacing variation of the multilayer coating or the curvature of the optics can be manipulated such that the multilayer optics reflect x-rays with different wavelengths. Following Bragg's law the d-spacing is given by:









d
=

λ

2





sin





θ






(
1
)













Where θ is the incident angle. It can be shown that the sin θ can be written, at a very accurate approximation, as a product of a factor “C” (an arbitrary constant) and common form which is independent from the x-ray energy. The same d-spacing can be used for different wavelengths by changing the factor C such that λ/C is a constant. Accordingly, sin θ, which is determined by the configuration of the reflection surface, can be maintained the same if d-spacing is proportionally changed with the wavelength such that:










sin





θ

=

λ

2

d






(1b)













is maintained constant for different wavelengths.




For a parabolic mirror the curvature of the reflecting surface can be written as:








y=


{square root over (2


px


+L )}  (2)






where p is the parabolic parameter. The accurate incident angle can be given by the following formula:






θ
=



tan


-
1









(



2

px



x
-

p
2



)


-


tan

-
1


(


p

2

x















p generally is a number on the order of 0.1 and x is generally in the range of several tens of millimeters to more than 100 millimeters. Due to the fact that θ is small where tan θ≈θ, the incident angle can be written as:









θ
=


p



1


2

x








(
3
)













Using small angle approximation, d-spacing is determined by:









d
=


λ

p





x
2







(
4
)













From the equations shown above it can be shown that d-spacing can be maintained for different reflected wavelengths by altering the curvature or parabolic parameter (ρ) of a parabolic shaped multilayer reflector.




For an elliptical mirror, the reflection surface is described by the equation:












x
2


a
2


+


y
2


b
2



=
1




(
5
)













Where x and y are points in a Cartesian coordinate system and a is the major radius of the ellipse and b is the minor radius of the ellipse. The incident angle is given by the equation:






θ
=



tan

-
1




(



b
a





a
2

-

x
2





x
+
c


)


-


tan

-
1


(



-
2


bx


a




a
2

-

x
2

















where c is defined by the equation:








c={square root over (a


2





−b





2


+L )}








For an x-ray elliptical mirror, the minor radius is much smaller than the major radius. Using small angle approximation, the above equation can be written as:






θ




q




a
2

-

x
2





x
+

a



1
-

q
2






-



-
2


qx




a
2

-

x
2















where q=b/a. Therefore the d-spacing is given by the equation:









d
=


λ
q



1

2






(





a
2

-

x
2




x
+
a


+


2

x




a
2

-

x
2





)








(
6
)













From the above formula, it can be shown that the d-spacing and focal position can be maintained by just changing the minor radius b.




Furthermore, we determine how d-spacing is defined as well as the wavelength dependency on d-spacing for a multilayer reflector. The d-spacing used in this application is defined by using first order Bragg's law (n=1), since multilayers generally operate under first order reflection. The “real d-spacing”, or the “geometric d-spacing is different from the “first order Bragg d-spacing” due to the effects of refraction in the multilayer structure. In most applications a multilayer optic is used as a first order Bragg reflector. This is the reason that “d-spacing” is commonly defined and measured by the first order Bragg's law. Such defined d-spacing is the same for different wavelengths as shown in the following discussion.




The “real d-spacing” d


r


is given by the following equation:










d
r

=

d


(

1
-

δ


sin
2


θ



)






(
7
)













where δ is the optical index decrement. Therefore, higher order measurement gives a d-spacing closer to the “real d-spacing”. However, the optical index is proportional to the square of the wavelength and so is sin


2


θ. Therefore, the above equation becomes:








d




r




=d


(1


−Ad




2


)  (8)






where A is a constant not dependent on energy. This means that the “first order d-spacing” is the same for different wavelengths and the d-spacing measured by different wavelengths is the same.




Referring to FIG.


9


and the first embodiment of the present invention, a variable curvature multilayer reflector


36


, is shown in two positions


38


and


40


having two different curvatures defined by the ellipses


33


and


35


and reflecting different x-ray wavelengths


39


and


41


to a focal point


31


. A similar scheme may be configured for parabolic collimating mirrors which conform to two different parabolas. The reflector


36


has more curvature at position


38


then at position


40


. The increased curvature will allow the reflector to reflect larger x-ray wavelengths at position


38


then at position


40


. The reflector at position


40


is modified with less curvature then at position


38


and will reflect shorter x-ray wavelengths. The curvature of the reflector


36


is exaggerated in

FIG. 9

to help illustrate the curvature at the alternate positions


38


and


40


.




For a variable curvature parabolic mirror from Formula


4


:







λ

p


=
C










for all the wavelengths. Therefore the parabolic parameter must change in the following way:









p
=


λ
2


C
2






(
9
)













For an elliptical mirror, according to formula


6


, the minor radius b must change as:









b
=


λ





a

C





(
10
)













Thus, the manipulation of the parabolic parameter ρ of the parabolic reflector and the minor radius b of the elliptical reflector may be adjusted to vary the wavelength of the reflected x-rays.




A four point bender


42


is shown in

FIG. 10

having precision actuators


44




a


and


44




b


which will vary the curvature of the reflector


36


. Posts


43


are fixed while members


45


are actuated to alter the curvature of the reflector


36


. The bender


42


will vary the parabolic parameter ρ of a parabolically shaped multilayer reflector and the minor radius b of an elliptically shaped multilayer reflector as detailed above.




In a second embodiment of the present invention shown in

FIG. 11

, a multilayer reflector


46


of fixed curvature, with a plurality of distinct d-spacings d


7


and d


8


, is configured to reflect multiple x-ray wavelengths. Each d-spacing d


7


and d


8


will satisfy Bragg's law for a specific x-ray wavelength. The relatively larger d-spacing d


8


will reflect longer wavelengths and the relatively shorter d-spacing d


7


will reflect shorter wavelengths. The reflected wavelengths will have substantially no overlap. Since the absorption for lower energy (longer wavelength) x-rays is stronger, the reflection layer d


8


for the lower energy x-rays should be the top layers on the reflector


46


. As can be seen in the drawing, the d-spacings d


7


and d


8


are laterally graded in cooperation with the curvature of the reflector


46


to satisfy Bragg's law for a plurality of specific x-ray wavelengths. In alternate embodiments of the present invention additional groups of d-spacings may be used limited only by the dimensions and structure of the reflector


46


.




In a third embodiment of the present invention seen in

FIG. 12

(an overhead or top view) a multilayer reflector


48


having stripe like sections


50


with different d-spacings is shown. Each stripe


50


has a d-spacing configured to reflect specific x-ray wavelengths. An x-ray source


52


needs only to be translated relative to the stripe like sections


50


of the reflector


48


to change the wavelength of the x-rays reflected from the reflector


48


. The preferred method of translation is to fix the position of the x-ray source


52


while translating the reflector


48


.




It is to be understood that the invention is not limited to the exact construction illustrated and described above, but that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the following claims.



Claims
  • 1. An electromagnetic reflector comprising:a multilayer structure having a d-spacing and a first curvature to reflect a first electromagnetic frequency, and a movement apparatus that varies said first curvature of said multilayer structure to a second curvature so that said multilayer structure reflects a second electromagnetic frequency.
  • 2. The electromagnetic reflector of claim 1, wherein said multilayer structure is deposited on a substrate.
  • 3. The electromagnetic reflector of claim 1, wherein said d-spacing is laterally graded.
  • 4. The electromagnetic reflector of claim 1, wherein said first electromagnetic frequency and said second electromagnetic frequency are each x-ray frequencies.
  • 5. The electromagnetic reflector of claim 1, wherein said movement apparatus is a bender which alters the curvature of said multilayer structure.
  • 6. The electromagnetic reflector of claim 5, wherein said bender is a four point bender.
  • 7. The electromagnetic reflector of claim 1, wherein said electromagnetic reflector is shaped as a parabolic curve and said parabolic curve has a p factor that is varied to change a curvature of said electromagnetic reflector.
  • 8. The electromagnetic reflector of claim 1, wherein said electromagnetic reflector is shaped as an elliptical curve and said elliptical curve has a minor radius that is varied to change a curvature of said electromagnetic reflector.
  • 9. A method of reflecting multiple electromagnetic frequencies with a multilayer reflector comprising:generating electromagnetic energy; directing said electromagnetic energy at said multilayer reflector; and during said directing, adjusting a curvature of said multilayer reflector to reflect said electromagnetic energy in accordance with Bragg's law.
  • 10. The method of claim 9, wherein said electromagnetic energy comprises x-rays.
  • 11. An electromagnetic optic comprising:a multilayer surface, said multilayer surface comprising a curvature that varies from a first curvature that reflects a first wavelength of electromagnetic energy to a second curvature that reflects a second wavelength.
  • 12. The electromagnetic optic of claim 11, wherein said multilayer surface is laterally graded.
  • 13. The electromagnetic optic of claim 11, wherein said first electromagnetic frequency and said second electromagnetic frequency are each x-ray frequencies.
  • 14. The electromagnetic optic of claim 11 further comprising a bender to alter the curvature of said multilayer surface.
  • 15. An x-ray reflector comprising:a first multilayer section, wherein said first multilayer section has a d-spacing as measured along a first direction and configured to reflect a first x-ray frequency; and a second multilayer section arranged side by side with said first multilayer section along a second direction, wherein said second multilayer section has a d-spacing as measured along said first direction and configured to reflect a second x-ray frequency.
  • 16. The x-ray reflector of claim 15, wherein said first and second multilayer sections are each configured with an elliptical surface.
  • 17. The x-ray reflector of claim 15, wherein said first and second multilayer sections are each configured with a parabolic surface.
  • 18. An electromagnetic energy system comprising:an electromagnetic energy source that directs electromagnetic energy at an electromagnetic reflector; said electromagnetic reflector comprising: a multilayer structure having a d-spacing and a first curvature to reflect a first electromagnetic frequency; and a movement apparatus that varies said first curvature of said multilayer structure to a second curvature so that said multilayer structure reflects a second electromagnetic frequency.
  • 19. The electromagnetic energy system of claim 18, wherein said electromagnetic energy source directs x-rays at said electromagnetic reflector.
  • 20. An electromagnetic energy system comprising:an electromagnetic energy source that directs electromagnetic energy at an electromagnetic optic; said electromagnetic optic comprising: a multilayer surface, said multilayer surface comprising a curvature that varies from a first curvature that reflects a first wavelength of electromagnetic energy to a second curvature that reflects a second wavelength.
  • 21. The electromagnetic energy system of claim 20, wherein said electromagnetic energy source directs x-rays at said electromagnetic optic.
  • 22. An x-ray system comprising:an x-ray source that directs x-rays at an x-ray reflector; said x-ray reflector comprising a first multilayer section, wherein said first multilayer section has a d-spacing as measured along a first direction and configured to reflect a first x-ray frequency; and a second multilayer section arranged side by side with said first multilayer section along a second direction, wherein said second multilayer section has a d-spacing as measured along said first direction and configured to reflect a second x-ray frequency.
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