Number | Name | Date | Kind |
---|---|---|---|
3887373 | Hays et al. | Jun 1975 | |
3925077 | Lewis et al. | Dec 1975 | |
3969118 | Stahlhofen et al. | Jul 1976 | |
4330612 | Tashiro et al. | May 1982 | |
4467025 | Goto et al. | Aug 1984 | |
4575480 | Kotani et al. | Mar 1986 | |
4626492 | Eilbeck | Dec 1986 | |
4677043 | Cordes, III et al. | Jun 1987 | |
4762767 | Haas et al. | Aug 1988 | |
4789619 | Ruckert et al. | Dec 1988 |
Number | Date | Country |
---|---|---|
263921 | Apr 1988 | EPX |
48214 | Mar 1982 | CHX |
Entry |
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Housley et al. "Dyes in Photoresists: Today's View" Semiconductor International, Apr. 1988, pp. 142-144. |