Numerous embodiments are disclosed for a non-volatile memory cell array formed in a p-well in a deep n-well in a p-substrate. During an erase operation, a negative voltage is applied to the p-well, which reduces the peak positive voltage required to erase the cells in the array.
Different types of non-volatile memories are well known. For example, U.S. Pat. No. 5,029,130 (“the '130 patent”), which is incorporated herein by reference, discloses an array of split gate non-volatile memory cells, which are a type of flash memory cells. Such a memory cell 110 is shown in
Memory cell 110 is erased (where electrons are removed from the floating gate) by placing a high positive voltage (with respect to substrate 12) on word line terminal 22, which causes electrons on floating gate 20 to tunnel through the intermediate insulation from floating gate 20 to word line terminal 22 via Fowler-Nordheim (FN) tunneling.
Memory cell 110 is programmed by source side injection (SSI) with hot electrons (where electrons are placed on the floating gate) by placing a positive voltage (with respect to substrate 12) on word line terminal 22, and a positive voltage on source region 14. Electron current will flow from drain region 16 towards source region 14. The electrons will accelerate and become heated when they reach the gap between word line terminal 22 and floating gate 20. Some of the heated electrons will be injected through the gate oxide onto the floating gate 20 due to the attractive electrostatic force from floating gate 20.
Memory cell 110 is read by placing positive read voltages (with respect to substrate 12) on drain region 16 and word line terminal 22 (which turns on the portion of the channel region 18 under the word line terminal). If floating gate 20 is positively charged (i.e. erased of electrons), then the portion of channel region 18 under floating gate 20 is turned on as well, and current will flow across channel region 18, which is sensed as the erased or “1” state. If floating gate 20 is negatively charged (i.e., programmed with electrons), then the portion of the channel region 18 under floating gate 20 is mostly or entirely turned off, and current will not flow (or there will be little flow) across channel region 18, which is sensed as the programmed or “0” state.
Table No. 1 depicts typical voltage and current ranges that can be applied to the terminals of memory cell 110 for performing read, erase, and program operations:
The voltages of Table No. 1 are with reference to substrate 12, to which 0V is applied during a read, erase, or program operation.
Other split gate memory cell configurations, which are other types of flash memory cells, are known.
For example,
Table No. 2 depicts typical voltage and current ranges that can be applied to the terminals of memory cell 210 for performing read, erase, and program operations:
A voltage of 0V is be applied to substrate 12 during a read, erase, or program operation.
Table No. 3 depicts typical voltage and current ranges that can be applied to the terminals of memory cell 310 for performing read, erase, and program operations:
A voltage of 0V is applied to substrate 12 during a read, erase, or program operation.
Space within a semiconductor die is precious. In the prior art systems described above, substantial space is required for circuits external to the array that are necessary for read, program, and/or erase operations. For example, the high voltages required for erase operations require special high voltage generation and regulation circuitry, which in turns requires high voltage transistors that require large areas on the semiconductor die due to thicker gate oxide, longer channel length, and wider physical spacing.
What is needed is a new architecture for an array of non-volatile memory cells that reduces the voltage required for erase operations, which would then reduce the space required for high voltage generation and regulation circuitry.
Numerous embodiments are disclosed of a non-volatile memory cell array formed in a p-well, which is formed in a deep n-well, which is formed in a p-substrate. During an erase operation, a negative voltage is applied to the p-well, which reduces the peak positive voltage required to be applied to the cells to cause the cells to erase.
The embodiments described herein enable a negative-voltage to be applied to a p-well surrounding certain components to enable a lower voltage to be used during erase operations of non-volatile memory cells.
Output circuit 407 may include circuits such as digital sensing circuitry to convert cell current into a logic ‘1’ or ‘0’, or analog sensing circuitry such as a ADC (analog to digital converter) to convert neuron analog output to digital bits), AAC (analog to analog converter) such as a current to voltage converter, logarithmic converter, APC (analog to pulse(s) converter), analog to time modulated pulse converter, or any other type of converters. The output circuit 407 may implement an activation function such as a rectified linear activation function (ReLU) or sigmoids. Output circuit 407 may implement statistic normalization, regularization, up/down scaling/gain functions, statistical rounding, or arithmetic functions (e.g., add, subtract, divide, multiply, shift, log) for neuron outputs. Output circuit 407 may implement a temperature compensation function for bitline outputs.
In the embodiments described below with reference to
Array 601 is formed within p-well 604, and p-well 604 is formed within deep n-well 605.
Row decoder 602 is formed within p-well 608, which p-well 608 is formed within deep n-well 609.
High voltage decoder 603 is formed within p-well 606, and p-well 606 is formed within deep n-well 607.
Deep n-wells 605, 607, and 609 are respectively formed within (and on top of) p-substrate 680. Optionally, deep n-wells 605, 607, and 609 can be separate deep n-wells or part of a common deep n-well.
P-well 604 containing array 601 hence can be driven with a negative voltage, in relation to p-substrate 680, by bias generator 409 or another voltage source due to its isolation from p-substrate 680 by deep n-well 605.
P-well 606 containing high voltage decoder 603 hence can be driven with a negative voltage, in relation to p-substrate 680, by bias generator 409 or another voltage source due to its isolation from p-substrate 680 by deep n-well 607.
For example, p-substrate 680 can be biased at 0V, deep n-wells 605, 707, and 609 can be biased at 0-3V, and p-wells 604, 606, and 608 can be biased at −0.1V to −10V. These bias voltages can be generated by bias generator 409 or another voltage source.
P-well 807 or 809 hence can go be driven to a negative voltage, in respect to p-substrate 880, independently, by bias generator 409 or another voltage source, due to its isolation from p-substrate 880 by deep n-well 808. Similarly, p-wells 810, 812, 814, 816 hence can be driven to a negative voltage independently, in respect to p-substrate 880, by bias generator 409 or another voltage source, due to their isolation from p-substrate 880 by respective deep n-wells 811, 813, 815, and 817.
Optionally, p-substrate 980 in
Using the architectures of
Table Nos. 4-10 that follow contain exemplary operating voltages to be applied to memory cells 110, 210, and 310 when configured as in
Table No. 4 depicts a first set of operating voltages (defined with respect to substrate 12) for memory cell 110 of
Table No. 5 depicts a second set of operating voltages for memory cell 110 of
P-well 904 is particularly advantageous in a situation where a negative voltage is applied to one or more terminals of the cell during an erase operation, because in that situation, applying a negative voltage to p-well 904 using bias generator 409 or another voltage source will reduce stress on the gate oxide regions when the negative voltage is applied to the terminal, as p-well 904 will serve as a virtual substrate for the cell that is biased to a negative voltage.
Table No. 4 is appropriate if stress on gate oxide regions is not a concern, while Table No. 5 is appropriate if stress on gate oxide regions is a concern. In Table No. 4, a word line voltage of 0V is applied to un-selected cells during an erase operation, while in Table No. 5, a word line voltage of −2.5V is applied to unselected cells during an erase operation, due to the fact that it is desired to reduce stress on the gate oxide regions of memory cell 110 as well as the peripheral (decoding) transistor for the 2.5V gate oxide. In the operation of Table No. 4, stress on the gate oxide regions of the decoding circuits is not a concern because the absolute voltage required will not cause the voltage across a gate oxide region to exceed the gate oxide break down voltage for both the decoding circuitry and the cells, and as a result, an isolated p-sub well 04 is not needed for the decoding circuitry. By contrast, in the implementation of Table 5, bias generator 409 or another voltage source applies negative voltages to certain terminals to reduce stress on the gate oxide regions, and as a result, an isolated p-sub well 904 is advantageous for the decoding circuitry.
Table No. 6 depicts a first set of operating voltages for memory cell 210 of
4.5 V
0 V
0 V
Table No. 7 depicts a second set of operating voltages for memory cell 210 of
0 V
Table No. 8 depicts a first set of operating voltages for memory cell 310 of
For the same reasons discussed above with respect to Table Nos. 5 and 6, the use of p-well 904 would be particularly advantageous for Table No. 8 and to a greater extent than for Table No. 7.
Table No. 9 depicts a second set of operating voltages for memory cell 310 of
For the same reasons discussed above with respect to Table Nos. 5 and 6, the use of p-well 904 would be particularly advantageous for Table No. 10 and to a greater extent than for Table No. 9.
It should be noted that, as used herein, the terms “over” and “on” both inclusively include “directly on” (no intermediate materials, elements or space disposed therebetween) and “indirectly on” (intermediate materials, elements or space disposed therebetween). Likewise, the term “adjacent” includes “directly adjacent” (no intermediate materials, elements or space disposed therebetween) and “indirectly adjacent” (intermediate materials, elements or space disposed there between), “mounted to” includes “directly mounted to” (no intermediate materials, elements or space disposed there between) and “indirectly mounted to” (intermediate materials, elements or spaced disposed there between), and “electrically coupled” includes “directly electrically coupled to” (no intermediate materials or elements there between that electrically connect the elements together) and “indirectly electrically coupled to” (intermediate materials or elements there between that electrically connect the elements together). For example, forming an element “over a substrate” can include forming the element directly on the substrate with no intermediate materials/elements therebetween, as well as forming the element indirectly on the substrate with one or more intermediate materials/elements there between.
This application claims priority to U.S. Provisional Patent Application Ser. No. 63/190,200, filed on May 18, 2021, and titled, “Non-Volatile Memory Cell Array with Substrate Capable of Receiving Negative Voltage During Erase Operations,” which is incorporated by reference herein.
Number | Date | Country | |
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63190200 | May 2021 | US |