Claims
- 1. A method for nondestructively determining the thickness and the fractional portions of a first and a second phosphate component of a protective phosphate layer disposed on a substrate comprising the steps of:
- illuminating said protective phosphate layer on said substrate with an incident beam of light of a first predetermined frequency,
- measuring the intensity of reflected light from said protective phosphate layer at said first frequency;
- illuminating said protective phosphate layer on said substrate with light of a second predetermined frequency;
- measuring reflected light intensity from said protective phosphate layer at said second frequency; and
- determining the fractional portions of a first and second component of said protective phosphate layer from said measured intensities of reflected light from said protective phosphate layer at said first and second frequencies, said light at said first and second frequencies being reflected by said protective phosphate layer by means of first and second interfaces of said protective phosphate layer, said protective phosphate layer being at least translucent to said light at said first and second frequencies, said step of determining comprising:
- automatically computing said fractional portion of each said component within said protective phosphate layer based on known optical parameters at each said predetermined frequency as known by utilizing a functional dependence of said intensity of reflected light upon said known optical parameters and said thickness,
- whereby the fractional portions of each of said components within said protective phosphate layer is nondestructively determined, and
- wherein said phosphate layer has at least two components of fractional portions .xi..sub.1 and .xi..sub.2 respectively, where said step of computing comprises the step of determining .xi..sub.1 and .xi..sub.2 based upon measured reflected light intensities at each said frequency, by the following equation:
- I=a.sub.0.sup.2 [r.sub.1.sup.2 +(1-r.sub.1).sup.4 r.sub.2.sup.2 e.sup.-4(.xi..sbsp.1.sup..alpha..sbsp.1.sup.+.xi..sbsp.2.sup..alpha..sbsp.2.sup.) d sec .phi.'
- )+2(1-r.sub.1).sup.2 r.sub.1 r.sub.2 e.sup.-2(.xi..sbsp.1.sup..alpha..sbsp.1.sup.+.xi..sbsp.2.sup..alpha..sbsp.2.sup.) d sec .phi.'
- cos 2(.xi..sub.1 k.sub.1 +.xi..sub.2 k.sub.2)d cos .phi.']
- where for each said predetermined frequency:
- I is the intensity of said measured reflected light at said predetermined frequency,
- a.sub.0 is the amplitude of light illuminating said substrate,
- r.sub.1 is the reflectivity of a first top interface of said phosphate layer,
- r.sub.2 is the reflectivity of a second bottom interface of said phosphate layer,
- .alpha..sub.1 is the absorptivity of said first component of said phosphate layer,
- .alpha..sub.2 is the absorptivity of said second component of said phosphate layer,
- .xi..sub.1 is the fractional portion of said first component of said phosphate layer,
- .xi..sub.2 is the fractional portion of said second component of said phosphate layer, and
- .phi.' is the angle of refraction of the incident beam in said phosphate layer with respect to the surface normal of said phosphate layer.
- 2. A method for nondestructively determining the thickness of a protective phosphate layer disposed on a substrate comprising the steps of:
- illuminating said protective phosphate layer on said substrate with an incident beam of light of a first predetermined frequency, said protective phosphate layer being at least translucent to said light beam at said first frequency such that said light beam is transmitted through and reflected from a first surface of said layer and transmitted through and reflected from a second surface of said layer, said layer having absorptivity and an index of refraction;
- measuring the intensity of reflected light from said protective phosphate layer at said first frequency from said first surface and said second surface;
- illuminating said protective phosphate layer on said substrate with light of a second predetermined frequency, which is different from said first frequency, said protective phosphate layer being at least translucent to said light beam at said second frequency such that said light is transmitted through and reflected from said first surface of said layer and transmitted through and reflected from said second surface of said layer;
- measuring the intensity of reflected light from said protective phosphate layer at said second frequency from said first surface and said second surface; and
- determining the thickness of said protective phosphate layer from the measured intensity of reflected light, which is a function of reflectivity from said first and said second surfaces, an angle of refraction of said transmitted light through said first surface; wave number of said light while inside said protective phosphate layer and absorptivity of said protective phosphate layer, wherein the step of determining comprising determining said thickness from the following equation:
- I=a.sub.0.sup.2 [r.sub.1.sup.2 +(1-r.sub.1).sup.4 r.sub.2.sup.2 e.sup.-4.alpha.dsec.phi.'
- +2(1-r.sub.1).sup.2 r.sub.1 r.sub.2 e.sup.-2.alpha.dsec.phi.' cos(2kd cos .phi.')],
- where
- a.sub.0 is an incident amplitude of said light,
- r.sub.1 is a reflectivity from said first surface,
- r.sub.2 is a reflectivity from said second surface,
- .alpha. is the absorptivity of said layer,
- k is a wave number of said light while inside said layer,
- .phi.' is a refracted light beam angle of said transmitted light through said first surface, and
- d is the thickness of said layer.
- 3. A method of nondestructively determining the fractional portions of a first phosphate component and a second phosphate component of a protective phosphate layer disposed on a substrate comprising the steps of:
- illuminating said protective phosphate layer on said substrate with an incident beam of light of a first predetermined frequency, said protective phosphate layer being at least translucent to said light beam at said first frequency such that said light beam is transmitted through and reflected from a first surface of said layer and transmitted through and reflected from a second surface of said layer, said layer having an average absorptivity and wave number which are weighted by the proportion of each phosphate component within said layer;
- measuring the intensity of reflected light from said protective phosphate layer at said first frequency from said first surface and said second surface;
- illuminating said protective phosphate layer on said substrate with a light beam of a second predetermined frequency, which is different from said first frequency, said protective phosphate layer being at least translucent to said light beam at said second frequency such that said light beam is transmitted through and reflected from said first surface of said layer and transmitted through and reflected from said second surface of said layer;
- measuring the intensity of reflected light from said protective phosphate layer at said second frequency from said first surface and said second surface; and
- determining the fractional portions of said first and said second phosphate components from the measured intensity of reflected light at each said predetermined frequency, which is a function of said layer thickness, reflectivity from said first and said second surfaces, absorptivity of said first and said second components, wave number of said light while inside said first and said second components and an angle of refraction through said first surface, wherein the step of determining comprises determining said fractional portions from the following equation:
- I=a.sub.0.sup.2 [r.sub.1.sup.2 +(1-r.sub.1).sup.4 r.sub.2.sup.2 e.sup.-4(.xi..sbsp.1.sup..alpha..sbsp.1.sup.+.xi..sbsp.2.sup..alpha..sbsp.2) d sec .phi.')+2(1-r.sub.1).sup.2 r.sub.1 r.sub.2 e.sup.-2(.xi..sbsp.1.sup..alpha..sbsp.1.sup.+.xi..sbsp.2.sup..alpha..sbsp.2) d sec .phi.'cos 2 (.xi..sub.1 k.sub.1 +.xi..sub.2 k.sub.2)d cos .phi.']
- where for each said predetermined frequency:
- I is the intensity of said measured reflected light at said predetermined frequency,
- a.sub.0 is an amplitude of light illuminating said substrate,
- r.sub.1 is a reflectivity of a first top interface of said phosphate layer,
- r.sub.2 is a reflectivity of a second bottom interface of said phosphate layer,
- .sup..alpha. 1 is an absorptivity of said first component of said phosphate layer,
- .sup..alpha. 2 is an absorptivity of said second component of said phosphate layer,
- k.sub.1 is a wave number of said first component of said phosphate layer,
- k.sub.2 is a wave number of said second component of said phosphate layer,
- .sup..xi. 1 is the fractional portion of said first component of said phosphate layer,
- .sup..xi. 2 is the fractional portion of said second component of said phosphate layer and .sup..xi. 1+.sup..xi. 2=1,
- d is the thickness of said protective phosphate layer, and
- .phi.' is an angle of refraction of the incident beam in said phosphate layer with respect to the surface normal of said phosphate layer.
- 4. A method for determining the thickness or composition of a layer of material, said layer having N components and having a top and bottom surface which define first and second interfaces, respectively, said method comprising the steps of:
- a) illuminating said layer with light at N different predetermined frequencies, said layer being at least translucent to light at each of said N frequencies and being reflective of light at said N frequencies at each of said interfaces;
- b) measuring the intensity of light reflected from said interfaces at said N frequencies; and
- c) determining the thickness or fractional portions of said layer from said measured reflected intensity at each said N different predetermined frequencies, which is a function of reflectivity at a first top interface and a second bottom interface of said phosphate layer, a weighted average absorptivity of said phosphate layer, a weighted average wave number of said light while inside said phosphate layer, and an angle of refraction of light through said first top interface, wherein said step of determining comprises determining said thickness or fractional portions from an equation:
- I=a.sub.0.sup.2 [r.sub.1.sup.2 +(1-r.sub.1).sup.4 r.sub.2.sup.2 e.sup.-4<.alpha.>dsec.phi.'
- +2(1-r.sub.1).sup.2 r.sub.1 r.sub.2 e.sup.-2<.alpha.>dsec.phi.' cos (2<k>d cos .phi.')],
- where for each said predetermined frequency:
- I is the intensity of said measured reflected light at said predetermined frequency,
- a.sub.0 is an amplitude of light illuminating said substrate,
- r.sub.1 is said reflectivity of said first top interface of said phosphate layer,
- r.sub.2 is said reflectivity of said second bottom interface of said phosphate layer,
- <.alpha.> is said weighted average absorptivity of said layer,
- <k> is said weighted average wave number of said light while inside said layer,
- .phi.' is said refracted light beam angle of said transmitted light through said first top interface, and
- d is the thickness of said layer,
- wherein:
- <.alpha.>=.xi..sub.
- .alpha..sub. +.xi..sub. .alpha..sub. +.xi..sub. .alpha..sub. + . . . .xi..sub.N .alpha..sub.N, and
- <k>=.xi..sub.1 k.sub.1 +.xi..sub.2 k.sub.2 +.xi..sub.3 k.sub.3 + . . . .xi..sub.N k.sub.N,
- and wherein:
- .alpha..sub.1, .alpha..sub.2, .alpha..sub.3 . . . .sup..alpha. N are absorptivities of said N components of said phosphate layer,
- k.sub.1, k.sub.2, k.sub.3, . . . k.sub.N are wave numbers of light while inside said N components of said phosphate layer,
- .xi..sub.1, .xi..sub.2, .xi..sub.3 . . . .xi..sub.N are fractional portions of said N components of said phosphate layer and .xi..sub.1 +.xi..sub.2 +.xi..sub.3 + . . . .xi..sub.N =1 and N is equal to or greater than 1.
Parent Case Info
This is a continuation of application Ser. No. 07/666,541, filed Feb. 19, 1991, now abandoned, which is a continuation of application Ser. No. 393,198, filed Aug. 14, 1989, now abandoned.
US Referenced Citations (12)
Foreign Referenced Citations (3)
Number |
Date |
Country |
0163466 |
Dec 1985 |
EPX |
0223485 |
May 1987 |
EPX |
2589578 |
Nov 1985 |
FRX |
Non-Patent Literature Citations (2)
Entry |
"Proceedings of the 1987 IEEE Int. Conference on Robotics and Automation", Aug. 1987, pp. 515-519; S. Parthasarathy et al. |
Transactions of the Institute of Metal Finishing, vol. 61, 1983, pp. 155-160; M. O. W. Richardson et al. |
Continuations (2)
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Number |
Date |
Country |
Parent |
666541 |
Feb 1991 |
|
Parent |
393198 |
Aug 1989 |
|