Number | Name | Date | Kind |
---|---|---|---|
3515877 | Baxter et al. | Jun 1970 | |
3523495 | Giedd et al. | Aug 1970 | |
3643098 | Willis | Feb 1972 | |
3783228 | Tarui et al. | Jan 1974 | |
3857041 | Spicer | Dec 1974 | |
3908118 | Micka | Sep 1975 | |
4264822 | Ueno et al. | Apr 1981 | |
4286154 | Okubo | Aug 1981 |
Number | Date | Country |
---|---|---|
1328976 | Sep 1973 | GBX |
Entry |
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"Automatic Pattern Positioning of Scanning Electron Beam Exposure", Miyauchi et al., IEEE Trans. on Electron Devices, vol. ED.-17, No. 6, Jun. 1970, pp. 450-457. |
"Mask Inspection Using Electron-Beam Systems", Grobman, IBM Tech. Disclosure Bulletin, vol. 22, No. 12, May 1980, p. 5540. |