Number | Name | Date | Kind |
---|---|---|---|
4545852 | Barton | Oct 1985 | |
4596071 | Kita | Jun 1986 | |
4662986 | Lim | May 1987 |
Number | Date | Country |
---|---|---|
0055521 | Jul 1982 | EPX |
60-132341 | Jul 1985 | JPX |
Entry |
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Tsang, "Forming Wide Trench Dielectric Isolation", IBM TDB, vol. 25, No. 11B, pp. 6129-6130, Apr. 1983. |