Plasma generation apparatus and work processing apparatus

Abstract

A plasma generation apparatus is provided which includes: a microwave generation portion which generates a microwave; a gas supply portion which supplies a gas to be turned into plasma; a plasma generation nozzle which includes a reception member receiving the microwave, and turns the gas into plasma based on the energy of the received microwave and emits the plasma gas; and a photo-detection unit which detects light emitted by the plasma gas and generates electrical information.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a work processing apparatus according to a first embodiment of the present invention, showing its whole configuration.

FIG. 2 is a perspective view of a plasma generation unit, seen from a different angle from FIG. 1.

FIG. 3 is a side view of the plasma generation unit, partly seen through.

FIG. 4 is an enlarged side view of two plasma generation nozzles (one plasma generation nozzle of which is shown in exploded view).

FIG. 5 is a sectional view, seen along the V-V line, of the plasma generation nozzle of FIG. 4.

FIG. 6 is a side view of plasma generation nozzles if seen through, showing a plasma-generation state.

FIG. 7 is a perspective view of a sliding short if seen through, showing its internal structure.

FIG. 8 is a top view of the plasma generation unit, showing the operation of a circulator.

FIG. 9 is a side view of a stab tuner if seen through, showing its disposition.

FIG. 10 is a block diagram, showing a control system of the work processing apparatus.

FIG. 11 is a bottom view of either of the plasma generation nozzles of FIG. 4.

FIG. 12 is a perspective view of an optical fiber and its support members according to a variation of the first embodiment, showing how to attach the optical fiber.

FIG. 13 is a block diagram, showing a control system of a work processing apparatus according to another variation of the first embodiment.

FIG. 14 is a perspective view of a work processing apparatus according to a second embodiment of the present invention, showing its whole configuration.

FIG. 15 is a perspective view of a plasma generation unit, seen from a different angle from FIG. 14.

FIG. 16 is an enlarged sectional view of a plasma generation nozzle and an adapter.

FIG. 17 is an exploded perspective view of the adapter shown in FIG. 16.

FIG. 18 is an enlarged perspective view of the adapters, showing the parts to which they are attached.

FIG. 19 is a sectional view of the adapter, illustrating its function.

FIG. 20 is an enlarged sectional view of a plasma generation nozzle and an adapter according to a variation of the second embodiment.

FIG. 21 is an exploded perspective view of the adapter shown in FIG. 20.

FIG. 22 is an enlarged sectional view of a plasma generation nozzle and an adapter according to another variation of the second embodiment.

FIG. 23 is an exploded perspective view of the adapter shown in FIG. 22.

FIG. 24 is a perspective view of a plasma generation unit according to a third embodiment of the present invention.

FIG. 25 is a block diagram, showing a control system of a work processing apparatus according to the third embodiment.

FIG. 26 is a flow chart, showing a processing for detecting a defect in the plasma generation nozzle.

FIG. 27 is an illustration, showing how a photography portion photographs plumes P.

FIG. 28 is a block diagram, showing a control system according to a variation of the third embodiment.

Claims

1. A plasma generation apparatus, comprising: a microwave generation portion which generates a microwave;a gas supply portion which supplies a gas to be turned into plasma;a plasma generation nozzle which includes a reception member receiving the microwave, and turns the gas into plasma based on the energy of the received microwave and emits the plasma gas; anda photo-detection unit which detects light emitted by the plasma gas and generates electrical information.

2. The plasma generation apparatus according to claim 1, further comprising a control portion which controls at least either of the supply of the gas to be turned into plasma or the power of the microwave based on the electrical information outputted by the photo-detection unit.

3. The plasma generation apparatus according to claim 1, wherein the photo-detection unit includes: an optical transmission member which has a first end portion and a second end portion and is provided so that the first end portion faces the tip of the plasma generation nozzle;a photoelectric conversion member which is apart from the plasma generation nozzle and is connected to the second end portion of the optical transmission member; andan output portion which outputs an electrical signal obtained by the photoelectric conversion member as an electrical signal indicating the lighting state of plasma.

4. The plasma generation apparatus according to claim 3, wherein the photoelectric conversion member and the output portion are housed in a shielding case.

5. The plasma generation apparatus according to claim 3, wherein a plurality of the optical transmission members are provided so that the first end portions are arranged in series in the direction where the plasma generation nozzle blows the gas.

6. The plasma generation apparatus according to claim 3, further comprising, a wave guide for propagating a microwave generated by the microwave generation portion, the wave guide having a plurality of the plasma generation nozzles attached in array thereto,wherein the optical transmission member is provided for each plasma generation nozzle.

7. The plasma generation apparatus according to claim 6, wherein the second end portion of each optical transmission member faces in array onto the light-reception surface of the single photoelectric conversion member.

8. The plasma generation apparatus according to claim 1, further comprising: an interior electrode and an exterior electrode which are concentrically disposed inside of the plasma generation nozzle, the plasma generation nozzle generating plasma by producing a glow discharge between these interior electrode and exterior electrode, and radiating a plasma gas under a normal pressure from a ring-shaped spout between both electrodes by supplying a processing gas between them; andan adapter which converts the ring-shaped spout into a lengthwise spout, said adapter being attached to the tip of the plasma generation nozzle, including a lengthwise plasma chamber leading to the ring-shaped spout and having a lengthwise opening in a side of said chamber,wherein the photo-detection unit detects the light of plasma inside of the plasma chamber.

9. The plasma generation apparatus according to claim 8, wherein: the photo-detection unit includes a photo-sensor; andthe photo-sensor is disposed at one end in the plasma chamber, and the inside of the plasma chamber is partitioned into the side of the photo-sensor and the residual internal space by a heat-resistant and transparent member.

10. The plasma generation apparatus according to claim 8, further comprising a thin conduit line which extends from one end of the plasma chamber and wherein the photo-detection unit includes a photo-sensor which is provided at the front end of the thin conduit line.

11. The plasma generation apparatus according to claim 8, wherein: the photo-detection unit includes a photo-sensor and an optical fiber; andone end surface of the optical fiber faces the inside of the plasma chamber and the other end surface of the optical fiber is connected to the photo-sensor disposed apart from the adapter.

12. The plasma generation apparatus according to claim 1, wherein the photo-detection unit includes: a photography portion which takes an image of a plume made of a plasma gas emitted from the plasma generation nozzle; anda state monitoring portion which displays an image of a plume taken by the photography portion.

13. The plasma generation apparatus according to claim 12, further comprising: a wave guide for propagating a microwave generated by the microwave generation portion, the wave guide having a plurality of the plasma generation nozzles attached in array thereto; anda defective-nozzle detection portion which detects a defective nozzle from which a plasma gas is not emitted among the plurality of plasma generation nozzles in array, based on an image of a plume taken by the photography portion.

14. The plasma generation apparatus according to claim 13, further comprising an operation control portion which stops the emission of plasma from all the plasma generation nozzles if the defective-nozzle detection portion detects at least one defective nozzle among the plurality of plasma generation nozzles in array.

15. The plasma generation apparatus according to claim 14, wherein the operation control portion resumes the emission of a plasma gas from the plasma generation nozzle after stopping the emission of the plasma gas from the plasma generation nozzles for a predetermined time, and decides that the plasma generation apparatus is out of order if the defective-nozzle detection portion detects at least one defective nozzle being a defective nozzle after resuming the emission of the plasma gas by a predetermined number of times.

16. The plasma generation apparatus according to claim 15, wherein the state monitoring portion gives notice that the plasma generation apparatus is out of order if the operation control portion decides that the plasma generation apparatus is out of order.

17. The plasma generation apparatus according to claim 13, further comprising a photographic-direction shift portion which shifts the direction where the photography portion photographs the plurality of plasma generation nozzles in array to the direction where the plurality of plasma generation nozzles are in array, so that the photography portion photographs the whole area thereof.

18. A work processing apparatus which irradiates a work with plasma and gives a predetermined processing, comprising: a plasma generation apparatus which irradiates the work with a plasma gas from a predetermined direction; anda movement mechanism which moves the work and the plasma generation apparatus relatively on a plane that intersects a direction where a plasma gas is applied,wherein the plasma generation apparatus includes:a microwave generation portion which generates a microwave;a gas supply portion which supplies a gas to be turned into plasma;a plasma generation nozzle which includes a reception member receiving the microwave, and turns the gas into plasma based on the energy of the received microwave and emits the plasma gas; anda photo-detection unit which detects light emitted by the plasma gas and generates electrical information.

19. The work processing apparatus according to claim 18, wherein the photo-detection unit includes: an optical transmission member which has a first end portion and a second end portion and is attached so that the first end portion faces the tip of the plasma generation nozzle;a photoelectric conversion member which is apart from the plasma generation nozzle and is connected to the second end portion of the optical transmission member; andan output portion which outputs an electrical signal obtained by the photoelectric conversion member as an electrical signal indicating the lighting state of plasma.

20. The work processing apparatus according to claim 18, further comprising: an interior electrode and an exterior electrode which are concentrically disposed inside of the plasma generation nozzle, the plasma generation nozzle generating plasma by producing a glow discharge between these interior electrode and exterior electrode, and radiating a plasma gas under a normal pressure from a ring-shaped spout between both electrodes by supplying a processing gas between them; andan adapter which converts the ring-shaped spout into a lengthwise spout, this adapter being attached to the tip of the plasma generation nozzle, including a lengthwise plasma chamber leading to the ring-shaped spout and having a lengthwise opening in a side of this chamber,wherein the photo-detection unit detects the light of plasma inside of the plasma chamber.

21. The work processing apparatus according to claim 18, wherein the photo-detection unit includes: a photography portion which takes an image of a plume made of a plasma gas emitted from the plasma generation nozzle; anda state monitoring portion which displays an image of a plume taken by the photography portion.