This application is a continuation of application Ser. No. 09/052,899 filed Mar. 31, 1998, issued as U.S. Pat. No. 6,169,283 on Jan. 2, 2001.
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A New Method for Promoting Photresist Adhesion on Tungsten Films for Self-Aligned Refractory Gates on GaAs by Bartram, Howard, Baca, Shul & Rieger. |
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Number | Date | Country | |
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Parent | 09/052899 | Mar 1998 | US |
Child | 09/660806 | US |