Number | Date | Country | Kind |
---|---|---|---|
88114297 | Aug 1999 | TW |
Number | Name | Date | Kind |
---|---|---|---|
396923 | Foreman | Jan 1889 | A |
2660833 | Weber | Dec 1953 | A |
3712480 | Houssa | Jan 1973 | A |
4940067 | Beard | Jul 1990 | A |
5622348 | Stechly | Apr 1997 | A |
5976255 | Takaki et al. | Nov 1999 | A |
6090205 | Sakai et al. | Jul 2000 | A |
Number | Date | Country |
---|---|---|
286358 | Aug 1915 | DE |
138830 | Oct 1980 | JP |
209822 | Sep 1991 | JP |
37131 | Feb 1992 | JP |
Entry |
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IBM Technical Disclosure Bulletin, vol. 14, No. 12, May 1972, “Wafer Carrier Conveyor” by Wagler et al. |