Number | Date | Country | Kind |
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6-159898 | Jul 1994 | JPX | |
7-055290 | Mar 1995 | JPX |
Number | Name | Date | Kind |
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4251384 | Rooney | Feb 1981 | |
4954142 | Carr et al. | Sep 1990 | |
4956313 | Cote et al. | Sep 1990 | |
5575885 | Hirabayashi et al. | Nov 1996 |
Entry |
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Materials Research Society Symposium Proceedings, vol. 337, Apr. 4-8, 1994, pp. 133-138, J.M. Steigerwald, et al., "Surface Layer Formation During The Chemical Mechanical Polishing of Copper Thin Films". |