Number | Date | Country | Kind |
---|---|---|---|
4-090771 | Apr 1992 | JPX | |
5-005793 | Jan 1993 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4371605 | Renner | Feb 1983 |
Number | Date | Country |
---|---|---|
388343 | Sep 1990 | EPX |
388343A3 | Aug 1991 | EPX |
0460416 | Dec 1991 | EPX |
497342A3 | Sep 1992 | EPX |
9115808 | Oct 1991 | WOX |
Entry |
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Solid State Technology, Aug. 1991, Chemically Amplified Resists Lamola, et al, No. 8 Westford, MA US Aug. 1991. |
8226, Ocrpe:Ectrpmoc Emgomeeromg 14(1991) Sep., No. 3/4, Amsterdam, NL Highly sensitive positive deep-UV resist . . . , Leo Schlegel et al. |
The Japan Society of Applied Physics and Relaed Societies, The 38th Spring Meeting, 1991, (29a-ZC-7). |
The Japan Society of Applied Physics and Related Societies, The 38th Spring Meeting, 1991, (30a-ZA-3). |