Number | Date | Country | Kind |
---|---|---|---|
6-152218 | Jul 1994 | JPX | |
6-157278 | Jul 1994 | JPX | |
6-160143 | Jul 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
5035979 | Nguyen-Kim et al. | Jul 1991 | |
5332648 | Kihara et al. | Jul 1994 | |
5342727 | Vicari et al. | Aug 1994 | |
5352564 | Takeda et al. | Oct 1994 | |
5580702 | Hayase et al. | Dec 1996 |
Number | Date | Country |
---|---|---|
249139 | Dec 1987 | EPX |
424124 | Apr 1991 | EPX |
541112 | May 1993 | EPX |
569707 | Nov 1993 | EPX |
Entry |
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M. Padmanaban, et al., "Structure-Property Relationship in Acetal-Based Chemically Amplified Three Component DUV Resist", SPIE vol. 2195, pp. 61-73. |