Number | Date | Country | Kind |
---|---|---|---|
43 06 152.4 | Feb 1993 | DEX |
This is a Continuation of application Ser. No. 08/195,425 filed on Feb. 14, 1994, now abandoned.
Number | Name | Date | Kind |
---|---|---|---|
4387152 | Stahlhofen | Jun 1983 | |
4690882 | Tanigaki et al. | Sep 1987 | |
4840867 | Elsaesser et al. | Jun 1989 | |
5364734 | Pawloski et al. | Nov 1994 |
Number | Date | Country |
---|---|---|
2066148 | Oct 1992 | CAX |
0508174 | Oct 1992 | EPX |
0510441 | Oct 1992 | EPX |
0519299 | Dec 1992 | EPX |
3144656 A1 | Jul 1982 | DEX |
3930086 | Mar 1991 | DEX |
3930087 | Mar 1991 | DEX |
4111060 | Oct 1991 | DEX |
3223864 | Oct 1992 | JPX |
1053866 | Jan 1967 | GBX |
Entry |
---|
Tsunooka et al, Mcintosh et al, Tetrahedron Letters 1967, 37. |
Langler et al, Can. J. Chem 65 �1978!903-907. |
Ueno et al, Chem. Amplification Positive Resist System Using Novel Sulfonates as Acid Generators, in: "Polymers for Micro-electronic--Science & Tech.", Hrsg. Y. Tabata et al, Kodansha-Weinheim-New York, 1989. |
Houlihan et al, SPIE Proc., Adv. in Resit Techn. and Proc. 920 (1988) 67. |
Roschert et al, Proceed. SPIE, Adv. Res. Tecn. Process. IX, 1672 �1992!33. |
Tsunooka et al, J. Photopolym. Sci. Tech. 4 �1991!239-242. |
Number | Date | Country | |
---|---|---|---|
Parent | 195425 | Feb 1994 |