Number | Date | Country | Kind |
---|---|---|---|
6-246166 | Oct 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4212935 | Canavello et al. | Jul 1980 | |
4281057 | Casteillani et al. | Jul 1981 | |
5252435 | Tami et al. | Oct 1993 | |
5300404 | Tani et al. | Apr 1994 | |
5316891 | Hashimoto et al. | May 1994 | |
5474872 | Tomo et al. | Dec 1995 |
Entry |
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Przybilla et al., "Delay Time Stable Chemically Amplified Deep UV Resist," SPIE vol. 1925, pp. 76-91 Jan. 1993. |
Ohfuji et al., "Dissolution Rate Modeling of a Chemically Amplified Positive Resist." SPIE vol. 1925, ppp. 213-227 Jan. 1993. |