The present invention relates to a probe for inspecting electrical characteristics of an object to be inspected.
Inspection of electrical characteristics of an electronic circuit, such as an IC, LSI, or the like, formed on, for example, a semiconductor wafer is performed by using a probe card mounted on a probe device. The probe card, in general, includes a plurality of probes and a contactor holding the probes. The contactor has a bottom surface, on which the probes are held, facing the wafer. And, inspection of electrical characteristics of the wafer is performed by bringing the plurality of probes into contact with electrodes of the electronic circuit formed on the wafer and applying an electrical inspection signal to a corresponding electrode of the electronic circuit formed on the wafer from each of the probes through the contactor.
When the electrical characteristics of the electronic circuit are measured, in order to establish electrical connection between the electrodes of the wafer and the probes, a scrubbing process for exposing conductive portions of the electrodes by cutting off aluminum oxide films formed on surfaces of the electrodes is necessary. Accordingly, as shown in
(Patent Document 1) Japanese Laid-Open Patent Publication No. 2006-119024
In order to appropriately perform inspection of electrical characteristics of the electronic circuit of the wafer W, it is necessary to cut off the aluminum oxide film which is an insulating layer on the surface of the electrode P so that the contact 103 contacts the aluminum under the surface layer of the electrode P and is pressure-contacted thereto at a predetermined contact pressure. Then, better contact is achieved as the amount of the aluminum oxide film cut off and the contact pressure is larger. However, since the contact 103 is formed to have a linear shape, a movement length of the contact 103 due to bending of the beam portion 102 also increases, as the contact pressure applied to the contact 103 and the electrode P increases. Therefore the amount of aluminum and impurities cut off by the contact 103 increases excessively. Then, the impurities are easily attached to the front end portion 104 of the contact 103 to become a protrusion and thus a deep dent is made and thus the electrode P is damaged when the contact 103 contacts the electrode P. Accordingly, the frequency of cleaning the contact 103 increases.
The cleaning of the contact 103, in general, is performed by pressing the front end portion 104 of the contact 103 against a cleaning sheet and by removing the attached substances. In this case, not only the attached substances but also the front end portion 104 itself of the contact 103 are polished and worn away.
Accordingly, if the frequency of cleaning the contact 103 increases as described above, the front end portion 104 of the contact 103 is easily worn away, thereby deteriorating the durability of the probe 100.
The present invention is proposed considering the aforementioned state of art. According to the invention, it may be obtained to maintain suitable contact between a probe and an object to be inspected, to suppress damage to the object to be inspected, and to improve the durability of the probe, in inspection of electrical characteristics of the object to be inspected.
In the present invention, there is provided a probe for inspecting electrical characteristics of an object to be inspected by contacting the object to be inspected, the probe including a beam portion cantilevered by a holding member, and a contact extending from a free end of the beam portion toward the object to be inspected, wherein a cut portion is formed in a side portion of the contact.
According to the present invention, since the cut portion is formed in the side portion of the contact, a suitable contact pressure at which the contact and the object to be inspected contact each other is set, and thus the contact may bend at the position of the cut portion. That is, since the rigidity of the contact is reduced, the contact easily bends. Accordingly, since a force for moving the contact in a horizontal direction is lower than that of a conventional art without the cut portion, movement of the contact due to overdrive is stopped due to friction. Accordingly, a movement length of the contact is less than that of the conventional art, and a movement depth is also reduced, thereby suppressing damage to the object to be inspected. Also, due to the contact, the amount of not only an aluminum oxide film on a surface of the object to be inspected but also aluminum inside the object to be inspected, which is unnecessarily cut off, is reduced. Accordingly, the frequency of cleaning the contact is reduced, thereby improving the durability of the probe.
According to the present invention, in inspection of electrical characteristics of an object to be inspected, suitable contact between a probe and the object to be inspected may be maintained, damage to the object to be inspected may be suppressed, and the durability of the probe may be improved.
Herein below, preferable embodiments of the present invention will be explained.
The probe device 1 includes a probe card 2, and a holding stage 3 on which a wafer W as an object to be inspected is placed.
The probe card 2 includes a contactor 11 acting as a holding member and having a bottom surface on which a plurality of probes 10 contacting electrodes of the wafer W are held, and a printed wiring board 12 transmitting to and receiving from the probes 10 an electrical signal through a main body of the contactor 11. The contactor 11 is formed to face the holding stage 3, and the probes 10 held on the contactor 11 are formed corresponding to a position of the electrodes of the wafer W. Each of the contactor 11 and the printed wiring board 12 may be formed to have, for example, a nearly disk shape. The printed wiring board 12 is disposed above a top surface of the contactor 11. The printed wiring board 12 and the contactor 11 are electrically connected by, for example, a connection pin (not shown), and the connection pin is connected to a connection terminal 11a formed on the top surface of the contactor 11.
The probes 10 are formed of a conductive metal material, for example, nickel cobalt. As shown in
Outer cut portions 24 are vertically formed, for example, at 2 places, on a free end side (a positive direction of the X-axis of
Since the holding stage 3 is configured to freely move horizontally and vertically, the holding stage 3 may move the wafer W placed on the holding stage 3 in a three-dimensional manner to make the probe 10 of the probe card 2 contact a desired position on the wafer W, that is, to bring the contact 23 of the probe 10 into appropriate contact with the electrode P on the wafer W.
When electrical characteristics of an electronic circuit of the wafer W are inspected by using the probe device 1 configured as described above, the wafer W is placed on the holding stage 3, and is raised toward the contactor 11 by the holding stage 3, as shown in
Now, the operation of the probe 10 according to the present embodiment at the time of inspection of electrical characteristics of the wafer W will be explained in detail. First, as shown in
Next, overdrive is applied while increasing a contact pressure between the contact 23 and the electrode P, so that the beam portion 22 of the probe 10 bends in the vertical direction to move the contact 23 to the outer side (the positive direction of the X-axis of
Afterward, when the contact pressure between the contact 23 and the electrode P reaches a predetermined contact pressure, the contact 23 bends to the outer side (the positive direction of the X-axis of
Next, if the inspection of the electrical characteristics is completed, the wafer W on the holding stage 3 is lowered. Then, the contact pressure applied to the front end portion 26 is reduced for a short period of time after the start of the lowering of the wafer W. However, since the bending of the contact 23 is restored, as shown in
According to the aforesaid embodiments, since the probe 10 includes the beam portion 22 that is cantilevered, and the contact 23 extending downward perpendicularly to the free end of the beam portion 22, when electrical characteristics of the electronic circuit of the wafer W are inspected, the beam portion 22 bends in the vertical direction, so that a predetermined contact pressure between the contact 23 and the electrode P of the wafer W may be maintained, thereby maintaining suitable contact between the probe 10 and the wafer W. Also, since the outer cut portions 24 and the inner cut portion 25 are formed in the side portion of the contact 23, the beam portion 22 bends in the vertical direction while the contact 23 bends in the horizontal direction at the time of inspection, as described above. Since a force for moving the contact 23 in the horizontal direction is less than a friction applied to the front end portion 26 when the contact 23 bends, movement of the front end portion 26 due to overdrive is easily stopped by the friction, compared to a conventional art without the cut portions 24 and 25. Accordingly, since a movement length of the front end portion 26 is less than that of the conventional art and a movement depth is also reduced, the amount of impurities and aluminum of the electrode P of the wafer W cut off by the contact 23 is reduced. Accordingly, the frequency of cleaning the contact 23 is reduced, thereby improving the durability of the probe 10. Since the beam portion 22 bends in the vertical direction and the contact 23 bends in the horizontal direction, in inspection of electrical characteristics of the electronic circuit of the wafer W, as described above, suitable contact between the probe 10 and the wafer W may be maintained, damage to the wafer W may be suppressed, and the durability of the probe 10 may be improved.
Moreover, since the contact 23 starts moving after standing still for a moment when the wafer W is lowered, according to the aforesaid embodiments, the front end portion 26 may move after a contact pressure applied to a bottom surface of the front end portion 26 is reduced. That is, the contact pressure (friction) applied to the front end portion 26 of the contact 23 that is moving is reduced. Also, as shown in
Although the outer cut portion 24 and the inner cut portion 25 are formed in the side portion of the contact 23 in the above embodiments, only one of the outer cut portion 24 and the inner cut portion 25 may be formed. That is, only the outer cut portion 24 may be formed at a plurality of places, or only the inner cut portion 25 may be formed at a plurality of places, in the side portion of the contact 23.
Although the front end portion 26 of the contact 23 leans to the inner side from the center of the contact 23 in the above embodiments, the front end portion 26 may lean to the outer side from the center of contact 23, or may be formed at the center of the contact 23.
While the present invention has been particularly described with reference to appropriate embodiments thereof by referring to the attached drawings, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the following claims. The present invention is not limited to the embodiments and may adopt various other types. The present invention may also be used even when a substrate is not a wafer but a substrate such as a mask reticle for photomask or an FPD (flat panel display).
The present invention may be used for a probe for inspecting electrical characteristics of an object to be inspected, for example, a semiconductor wafer or the like.
Number | Date | Country | Kind |
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2007-314194 | Dec 2007 | JP | national |
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/JP2008/070107 | 11/5/2008 | WO | 00 | 7/20/2010 |