Number | Name | Date | Kind |
---|---|---|---|
3652324 | Chu et al. | Mar 1972 | A |
4590091 | Rogers, Jr. et al. | May 1986 | A |
4855254 | Eshita et al. | Aug 1989 | A |
4855258 | Allman et al. | Aug 1989 | A |
4956538 | Moslehi | Sep 1990 | A |
5022961 | Izumi et al. | Jun 1991 | A |
5028560 | Tsukamoto et al. | Jul 1991 | A |
5032545 | Doan et al. | Jul 1991 | A |
5089441 | Moslehi | Feb 1992 | A |
5104694 | Saito et al. | Apr 1992 | A |
5264396 | Thakur et al. | Nov 1993 | A |
5294568 | McNeilly et al. | Mar 1994 | A |
5296258 | Tay et al. | Mar 1994 | A |
5303558 | Caton et al. | Apr 1994 | A |
5322809 | Moslehi | Jun 1994 | A |
5326406 | Kaneko et al. | Jul 1994 | A |
5332444 | George et al. | Jul 1994 | A |
5352636 | Beinglass | Oct 1994 | A |
5360769 | Thakur et al. | Nov 1994 | A |
5403434 | Moslehi | Apr 1995 | A |
5445994 | Gilton | Aug 1995 | A |
5790750 | Anderson | Aug 1998 | A |
5899752 | Hey et al. | May 1999 | A |
Number | Date | Country |
---|---|---|
430030 | Nov 1990 | EP |
870852 | Apr 1998 | EP |
3-22527 | Jan 1991 | JP |
4-30514 | Feb 1992 | JP |
Entry |
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T. Yamazaki et al., “Investigation of Thermal Removal of Native Oxide from Si (100) Surfaces in Hydrogen for Low-Temperature Si CVD Epitaxy”, J. Electrochem Soc., vol. 139, No. 4, Apr. 1992. |