Number | Date | Country | Kind |
---|---|---|---|
97 00344 | Jan 1997 | FR |
Number | Name | Date | Kind |
---|---|---|---|
3808035 | Stelter | Apr 1974 | |
4002512 | Lim | Jan 1977 | |
4045594 | Maddocks | Aug 1977 | |
4239811 | Kemlage | Dec 1980 | |
4788082 | Schmitt | Nov 1988 | |
4992306 | Hochberg et al. | Feb 1991 | |
5040046 | Chhabra et al. | Aug 1991 | |
5262356 | Fujii | Nov 1993 | |
5576076 | Slootman et al. | Nov 1996 | |
5728224 | Laurent et al. | Mar 1998 |
Number | Date | Country |
---|---|---|
622474 | Nov 1994 | EP |
Entry |
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“Controlled Oxidation of Silane”, K. Strater, RCA Review, vol. 29, 1968, pp. 618-629. |
“Preparation and Properties of SiO2 Films Deposited from SiH4 and O2”, Hammond et al., Transactions of the Metallurgical Society of Aime, vol. 242, 1968, pp. 546-550. |