Claims
- 1. The process of developing an image-wise exposed positive-working photoresist-coated substrate comprising the steps of:
- (1) coating said substrate with a radiation-sensitive composition useful as a photoresist; said composition comprising an admixture of:
- (a) at least one alkali-soluble binder resin;
- (b) at least one photoactive compound; and
- (c) a sufficient amount of at least one solvent to dissolve (a) and (b); subject to the proviso that said photoactive compound (b) is a mixture of fully and partially esterified o-naphthoquinone diazide esters of a polyhydroxyaromatic compound having at least four hydroxyl groups capable of being esterified by said diazide groups;
- (2) subjecting said coating on said substrate to an image-wise exposure of radiation energy; and
- (3) subjecting said image-wise exposed coated substrate to a developing solution to form an image-wise pattern in the coating, said developing solution comprising an aqueous solution of tetramethylammonium hydroxide which contains about 0.1% to about 1.0% by weight of a novolak-type resin.
- 2. The process of claim 1 wherein said alkali-soluble binder resin is a phenolic novolak resin.
- 3. The process of claim 2 wherein said photoactive compound is prepared by condensing spirobiindane or spirobchroman derivatives with 1.2-naphthoquinonediazide-5-sulfonyl chloride or 1,2-naphthoquinonediazide-4-sulfonyl chloride.
- 4. The process of claim 3 wherein the solvent is ethyl lactate or a mixture of ethyl lactate and ethyl 3-ethoxy propionate.
- 5. The process of claim 1 wherein said novolak-type resin, in said developing solution, is the reaction product of a mixture of meta-cresols and para-cresols reacted with formaldehyde, the weight percentages of the cresols being from about 25% meta-cresol and 75% para-cresol to about 75% meta-cresol and 25% para-cresol.
- 6. The process of claim 1 wherein said coating operation is carried out by spin-coating.
- 7. The process of claim 1 wherein said imaging step is carried out using ultraviolet light.
- 8. The process of claim 1 wherein said developing step is carried out using spray/puddle development.
- 9. The process of claim 1 wherein said developer solution comprises:
- (a) about 2.0-2.5% by weight tetramethylammonium hydroxide;
- (b) about 0.1-0.5% by weight of a novolak resin found by the reaction of a cresol mixtures of m-cresol and p-cresol with formaldehyde;
- (c) about 0.01 to 0.10% be weight of an ethoxylated tetramethyldecynediol surfactant;
- (d) about 0.001-0.01% by weight dimethylpolysiloxane emulsion defoamer; and
- (e) balance being water.
Parent Case Info
The present application is a continuation-in-part application of U.S. patent application Ser. No. 07/383,468, filed on July 24, 1989, now abandoned, by Robert F. Rogler. That parent application is incorporated herein by reference in its entirety.
US Referenced Citations (8)
Foreign Referenced Citations (3)
Number |
Date |
Country |
295626 |
Dec 1988 |
EPX |
56-162746 |
Dec 1981 |
JPX |
2212933 |
Aug 1989 |
GBX |
Continuation in Parts (1)
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Number |
Date |
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Parent |
383468 |
Jul 1989 |
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