Number | Name | Date | Kind |
---|---|---|---|
4500628 | Taylor | Feb 1985 | |
4596761 | Brault | Jun 1986 | |
4810601 | Allen et al. | Mar 1989 |
Entry |
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Follett et al. "Polarity Reversal of PMMA by Treatment with Chlorosilanes", Extend Abstracts, 1046B, vol. 82-2, Oct. 1982. |
G. N. Taylor et al., Journal of the Electrochemical Society, 131, 1659 (1984). |
Semiconductor Lithography, W. Moreau, Plenum Press, New York, 1988 (Because of the Length of the Article, Only the Table of Contents are Provided). |