Number | Date | Country | Kind |
---|---|---|---|
2-036194 | Feb 1990 | JPX | |
2-036195 | Feb 1990 | JPX | |
2-036196 | Feb 1990 | JPX | |
2-036197 | Feb 1990 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4492716 | Yamazaki | Jan 1985 | |
4825808 | Takahashi et al. | May 1989 | |
4923717 | Gladfelter et al. | May 1990 |
Number | Date | Country |
---|---|---|
0420594 | Apr 1991 | EPX |
0425084 | May 1991 | EPX |
63-33569 | Feb 1988 | JPX |
8606755 | Nov 1986 | WOX |
Entry |
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R. A. Levy et al., "Characterization of LPCVD Aluminum for VLSI Processing", J. Electrochem. Soc., 131, 2175-82 (1984). |