Number | Name | Date | Kind |
---|---|---|---|
4579609 | Reif et al. | Apr 1986 | |
4605479 | Faith, Jr. | Aug 1986 | |
4786352 | Benzing | Nov 1988 |
Entry |
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Wolf, S., Silicon Processing for the VLSI Era, vol. 1, Lattice Press, 1986, pp. 399-404. |
Coburn, J., Plasma-Assisted Etching, Plasma Chem. and Plasma Processing, vol. 2, No. 1, 1982, pp. 1-9, 28-29, 36-41. |