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4921816 | Ino | May 1990 | A |
5111259 | Teng et al. | May 1992 | A |
5250829 | Bronner et al. | Oct 1993 | A |
5364812 | Yashiro et al. | Nov 1994 | A |
5681769 | Lien | Oct 1997 | A |
5876796 | Regolini et al. | Mar 1999 | A |
5981332 | Mandelman et al. | Nov 1999 | A |
6004844 | Alsmeier et al. | Dec 1999 | A |
6157068 | Hashimoto et al. | Dec 2000 | A |
6200873 | Schrems et al. | Mar 2001 | B1 |
6225171 | Yu et al. | May 2001 | B1 |
Entry |
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Wolf et al., “Silicon Processing for the VLSI Era—vol. 1”, Lattice Press, 1986, pp. 397-398 and 520. |