Number | Date | Country | Kind |
---|---|---|---|
198 18 447 | Apr 1998 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4491628 | Ito et al. | Jan 1985 | |
5234794 | Sebald et al. | Aug 1993 | |
5346803 | Crivello et al. | Sep 1994 | |
5856071 | Kotachi et al. | Jan 1999 |
Number | Date | Country |
---|---|---|
0 388 484 A1 | Sep 1990 | EPX |
0 394 740 A2 | Oct 1990 | EPX |
0 395 917 A2 | Nov 1990 | EPX |
0 494 383 A1 | Jul 1992 | EPX |
0 492 253 A1 | Jul 1992 | EPX |
0 492 256 A1 | Jul 1992 | EPX |
2332679 | Jun 1999 | GBX |
Entry |
---|
Alexander M. Vekselman et al.: "Completely Water-Processable and Other Chemically Amplified Resists From Maleic Anhydride Copolymers", in SPIE vol. 2724, pp. 296-307. |