Patent Application
20230107966
The present invention relates to a resist composition and a method for forming a resist pattern.
Priority is claimed on Japanese Patent Application No. 2019-219010, filed Dec. 3, 2019, the content of which is incorporated herein by reference.
In recent years, with advances in lithography techniques in the production of semiconductor elements and liquid crystal display elements, rapid progress in the field of pattern fining has been achieved. Typically, pattern fining techniques involve shortening the wavelength (increasing the energy) of the light source for exposure.
Resist materials have been required to have lithography characteristics such as sensitivity to these light sources for exposure and resolution capable of reproducing a fine-sized pattern.
As a resist material that satisfies these requirements, a chemically amplified resist composition which contains a base material component having solubility in a developing solution, which is changed under action of acid, and an acid generator component that generates acid upon exposure has been conventionally used in the related art.
In the chemically amplified resist composition, a resin having a plurality of constitutional units is generally used in order to improve lithography characteristics. For example, Patent Document 1 discloses a resist composition or the like that employs a polymeric compound having two specific constitutional units to improve lithography characteristics.
[Patent Document 1]
Japanese Unexamined Patent Application, First Publication No. 2018-124548
Recently, with further advances in lithography techniques, rapid progress in the field of pattern fining has been achieved together with the expansion of application fields. Along with this progress, in a case where manufacturing a semiconductor element or the like, a technique capable of forming, in a good shape, a fine pattern having a pattern width dimension of less than 100 nm is required.
However, in the resist composition in the related art, as described in Patent Document 1 described above, it has been difficult to achieve both of high sensitivity and lithography characteristics in terms of defects or the like.
The present invention has been made in consideration of the above circumstances, and an object thereof is to provide a resist composition with which high sensitivity can be achieved and which has excellent lithography characteristics in terms of defects or the like, and a method for forming a resist pattern using the resist composition.
In order to achieve the above-described object, the present invention employs the following configurations.
That is, the first aspect of the present invention is a resist composition that generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, the resist composition containing a base material component (A) that exhibits changed solubility in a developing solution under action of acid, an acid generator component (B) that generates acid upon exposure, and an acid diffusion-controlling agent component (D), in which the base material component (A) contains a polymeric compound (A1) having a constitutional unit (a0) represented by General Formula (a0-1), the acid generator component (B) contains a compound (B1) represented by General Formula (b1), and the acid diffusion-controlling agent component (D) contains a compound (D1) represented by General Formula (d1).
[In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Va01 represents a divalent linking group. na01 represents an integer of 1 or 2. Ra01 represents a lactone-containing cyclic group having at least one substituent selected from the group consisting of a halogen atom, a carboxy group, an acyl group, a nitro group, and a cyano group.]
[In the formula, Yb01 represents a divalent linking group or a single bond. Lb01 represents —C(═O)—O—, —O—C(═O)—, —O—, or —O—C(═O)-Lb011-, and Lb011 represents an alkylene group having 1 to 3 carbon atoms. Rb01 to Rb03 each independently represents an alkyl group, and two or more of Rb01 to Rb03 may be bonded to each other to form a ring structure. Rb04 to Rb06 each independently represents an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, or a nitro group. nb04 represents an integer in a range of 0 to 4, and nb05 and nb06 each independently represents an integer in a range of 0 to 5. X− represents a counter anion.]
[In the formula, Rd01 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent. However, a carbon atom adjacent to a sulfur atom in the formula has no fluorine atom bonded thereto. m represents an integer of 1 or more, and each Mm+ independently represents an m-valent organic cation.]
The second aspect according to the present invention is a method for forming a resist pattern, including a step of forming a resist film on a support using the resist composition according to the first aspect, a step of exposing the resist film, and a step of developing the exposed resist film to form a resist pattern.
According to the present invention, it is possible to provide a resist composition with which high sensitivity can be achieved and which has excellent lithography characteristics in terms of defects or the like, and a method for forming a resist pattern using the resist composition.
In the present specification and the scope of the present patent claims, the term “aliphatic” is a relative concept used with respect to the term “aromatic” and defines a group or compound that has no aromaticity.
The “alkyl group” includes a monovalent saturated hydrocarbon group that is linear, branched, or cyclic, unless otherwise specified. The same applies to the alkyl group of the alkoxy group.
The “alkylene group” includes a divalent saturated hydrocarbon group that is linear, branched, or cyclic, unless otherwise specified.
Examples of the “halogen atom” include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
The “constitutional unit” means a monomer unit (monomeric unit) that constitutes to a polymeric compound (a resin, a polymer, or a copolymer).
In a case where “may have a substituent” is used, both a case where a hydrogen atom (—H) is substituted with a monovalent group and a case where a methylene group (—CH2—) is substituted with a divalent group are included.
The term “exposure” is used as a general concept that includes irradiation with any form of radiation.
The “acid-decomposable group” indicates a group in which at least part of bonds in the structure of the acid-decomposable group can be cleaved under action of acid.
Examples of the acid-decomposable group having a polarity that is increased under action of acid include groups which decompose under action of acid to generate a polar group.
Examples of the polar group include a carboxy group, a hydroxyl group, an amino group, and a sulfo group (—SO3H).
More specific examples of the acid-decomposable group include a group (for example, a group obtained by protecting a hydrogen atom of the OH-containing polar group with an acid-dissociable group) obtained by protecting the above-described polar group with an acid-dissociable group.
The “acid-dissociable group” indicates any one of (i) a group in which a bond between the acid-dissociable group and an atom adjacent to the acid-dissociable group can be cleaved under action of acid; and (ii) a group in which part of bonds are cleaved under action of acid, and then a decarboxylation reaction occurs, thereby cleaving the bond between the acid-dissociable group and the atom adjacent to the acid-dissociable group.”
It is necessary that the acid-dissociable group that constitutes the acid-decomposable group be a group that exhibits a lower polarity than the polar group generated by the dissociation of the acid-dissociable group. Thus, in a case where the acid-dissociable group is dissociated under action of acid, a polar group that exhibits a higher polarity than the acid-dissociable group is generated, thereby increasing the polarity. As a result of the above, the polarity of the entire component (A1) is increased. With the increase in the polarity, the solubility in a developing solution relatively changes. The solubility in a developing solution is increased in a case where the developing solution is an alkali developing solution, whereas the solubility in a developing solution is decreased in a case where the developing solution is an organic developing solution.
The “base material component” is an organic compound having a film-forming ability. The organic compounds used as the base material component are roughly classified into a non-polymer and a polymer. As the non-polymer, those having a molecular weight of 500 or more and less than 4,000 are usually used. Hereinafter, a “low-molecular-weight compound” refers to a non-polymer having a molecular weight of 500 or more and less than 4,000. As the polymer, those having a molecular weight of 1,000 or more are usually used. Hereinafter, a “resin”, a “polymeric compound”, or a “polymer” refers to a polymer having a molecular weight of 1,000 or more. As the molecular weight of the polymer, a polystyrene-equivalent mass-average molecular weight determined by gel permeation chromatography (GPC) is used.
The term “constitutional unit derived from” means a constitutional unit that is formed by the cleavage of a multiple bond between carbon atoms, for example, an ethylenic double bond.
In the “acrylic acid ester”, the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent. The substituent (Rαx) that is substituted for the hydrogen atom bonded to the carbon atom at the α-position is an atom other than a hydrogen atom or a group. Further, itaconic acid diester in which the substituent (Rαx) is substituted with a substituent having an ester bond or α-hydroxyacryl ester in which the substituent (Rαx) is substituted with a hydroxyalkyl group or a group in which a hydroxyl group thereof is modified can be mentioned as an acrylic acid ester. A carbon atom at the α-position of acrylic acid ester indicates the carbon atom bonded to the carbonyl group of acrylic acid, unless otherwise specified.
Hereinafter, the acrylic acid ester obtained by substituting a hydrogen atom bonded to the carbon atom at the α-position with a substituent is also referred to as an α-substituted acrylic acid ester.
The “derivative” includes a compound obtained by substituting a hydrogen atom at the α-position of an object compound with another substituent such as an alkyl group or a halogenated alkyl group; and a derivative thereof. Examples of the derivatives thereof include a derivative in which the hydrogen atom of the hydroxyl group of the object compound in which the hydrogen atom at the α-position may be substituted with a substituent is substituted with an organic group; and a derivative in which a substituent other than a hydroxyl group is bonded to the object compound in which the hydrogen atom at the α-position may be substituted with a substituent. The α-position refers to the first carbon atom adjacent to the functional group unless otherwise specified.
Examples of the substituent that is substituted for the hydrogen atom at the α-position of hydroxystyrene include the same one as Rαx.
In the present specification and the scope of the present claims, asymmetric carbon atoms may be present, and thus enantiomers or diastereomers may be present depending on the structures represented by the chemical formula. In that case, these isomers are represented by one chemical formula. These isomers may be used alone or in the form of a mixture.
(Resist Composition)
The resist composition according to the present embodiment is a resist composition that generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid.
Such a resist composition contains a base material component (A) (hereinafter, also referred to as a “component (A)”) that exhibits changed solubility in a developing solution under action of acid, an acid generator component (B) that generates acid upon exposure (hereinafter, also referred to as a “component (B)”), and an acid diffusion-controlling agent component (D). The base material component (A) contains a polymeric compound (A1) having a constitutional unit (a0) represented by General Formula (a0-1). The acid generator component (B) contains a compound (B1) represented by General Formula (b1). The acid diffusion-controlling agent component (D) contains a compound (D1) represented by General Formula (d1).
In a case where a resist film is formed using the resist composition according to the present embodiment and the formed resist film is subjected to selective exposure, acid is generated from the component (B) at exposed portions of the resist film, and the generated acid acts on the component (A) to change the solubility of the component (A) in a developing solution, whereas the solubility of the component (A) in a developing solution is not changed at unexposed portions of the resist film, which generates the difference in solubility in the developing solution between exposed portions and unexposed portions. As a result, in a case where the resist film is subjected to development, exposed portions of the resist film are dissolved and removed to form a positive-tone resist pattern in a case where the resist composition is a positive-tone type, whereas unexposed portions of the resist film are dissolved and removed to form a negative-tone resist pattern in a case where the resist composition is a negative-tone type.
In the present specification, a resist composition which forms a positive-tone resist pattern by dissolving and removing exposed portions of the resist film is called a positive-tone resist composition, and a resist composition which forms a negative-tone resist pattern by dissolving and removing unexposed portions of the resist film is called a negative-tone resist composition. The resist composition according to the present embodiment may be a positive-tone resist composition or a negative-tone resist composition. Further, in the formation of a resist pattern, the resist composition according to the present embodiment may be applied to an alkali developing process using an alkali developing solution in the developing treatment, or a solvent developing process using a developing solution (an organic developing solution) containing an organic solvent in the developing treatment.
<Component (A)>
In the resist composition according to the present embodiment, the component
(A) contains a polymeric compound (A1) (hereinafter, also referred to as a “component (A1)”) that exhibits changed solubility in a developing solution under action of acid. In the alkali developing process and the solvent developing process, since the polarity of the base material component before and after the exposure is changed using the component (A1), an excellent development contrast can be obtained.
As the component (A), at least the component (A1) is used, and another polymeric compound and/or a low-molecular-weight compound may be used in combination, together with the component (A1).
In a case of applying an alkali developing process, a base material component containing the component (A1) is insoluble in an alkali developing solution prior to exposure; however, it has a polarity that is increased under action of acid and exhibits increased solubility in an alkali developing solution, for example, in a case where acid is generated from the component (B) upon exposure. Therefore, in the resist pattern formation, in a case where a resist film formed by applying the resist composition onto a support is subjected to the selective exposure, exposed portions of the resist film change from an insoluble state to a soluble state in an alkali developing solution, whereas unexposed portions of the resist film remain insoluble in an alkali developing solution, and thus, a positive-tone resist pattern is formed by alkali developing.
On the other hand, in a case of applying a solvent developing process, a base material component containing the component (A1) has a high solubility in an organic developing solution prior to exposure; however, it has an increased polarity under action of acid and then exhibits decreased solubility in an organic developing solution, for example, in a case where acid is generated from the component (B) upon exposure. As a result, in the resist pattern formation, in a case where a resist film obtained by applying the resist composition onto a support is subjected to the selective exposure, exposed portions of the resist film change from a soluble state to a poorly soluble state with respect to an organic developing solution, whereas unexposed portions of the resist film remain soluble and unchanged, whereby a contrast between exposed portions and unexposed portions can be obtained, and thus a negative-tone resist pattern is formed by developing in the organic developing solution.
In the resist composition according to the present embodiment, the component (A) may be used alone or in a combination of two or more kinds thereof.
In Regard to Component (A1)
The component (A1) is a resin component that exhibits changed solubility in a developing solution under action of acid.
The component (A1) has a constitutional unit (a0) represented by General Formula (a0-1).
The component (A1) may have other constitutional units as necessary in addition to the constitutional unit (a0).
<<Constitutional Unit (a0)>>
The constitutional unit (a0) is a constitutional unit represented by General Formula (a0-1).
[In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Va01 represents a divalent linking group. na01 represents an integer of 1 or 2. Ra01 represents a lactone-containing cyclic group having at least one substituent selected from the group consisting of a halogen atom, a carboxy group, an acyl group, a nitro group, and a cyano group.]
In General Formula (a0-1), R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. The alkyl group having 1 to 5 carbon atoms as R is preferably a linear or branched alkyl group having 1 to 5 carbon atoms, and specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. The halogenated alkyl group having 1 to 5 carbon atoms is a group obtained by substituting part or all of hydrogen atoms in the alkyl group having 1 to 5 carbon atoms with a halogen atom. The halogen atom is particularly preferably a fluorine atom.
R is preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorinated alkyl group having 1 to 5 carbon atoms, and most preferably a hydrogen atom or a methyl group in terms of industrial availability.
In General Formula (a0-1), Va01 is a divalent linking group. The divalent linking group is not particularly limited; however, examples thereof include a divalent hydrocarbon group which may have a substituent, and a divalent linking group including a hetero atom.
Divalent Hydrocarbon Group which May have Substituent:
In a case where Va01 represents a divalent hydrocarbon group which may have a substituent, the hydrocarbon group may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group.
Aliphatic Hydrocarbon Group as Va01
The aliphatic hydrocarbon group indicates a hydrocarbon group that has no aromaticity. The aliphatic hydrocarbon group may be saturated or unsaturated. In general, it is preferable that the aliphatic hydrocarbon group be saturated.
Examples of the aliphatic hydrocarbon group include a linear or branched aliphatic hydrocarbon group, and an aliphatic hydrocarbon group containing a ring in the structure thereof.
Linear or Branched Aliphatic Hydrocarbon Group
The linear aliphatic hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and most preferably 1 to 3 carbon atoms.
The linear aliphatic hydrocarbon group is preferably a linear alkylene group, and specific examples thereof include a methylene group [—CH2—], an ethylene group [—(CH2)2—], a trimethylene group [—(CH2)3—], a tetramethylene group [—(CH2)4—], and a pentamethylene group [—(CH2)5—].
The branched aliphatic hydrocarbon group preferably has 2 to 10 carbon atoms, more preferably 3 to 6 carbon atoms, still more preferably 3 or 4 carbon atoms, and most preferably 3 carbon atoms.
The branched aliphatic hydrocarbon group is preferably a branched alkylene group, and specific examples thereof include alkylalkylene groups, for example, alkylmethylene groups such as —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH2CH3)—, —C(CH3)(CH2CH2CH3)—, and —C(CH2CH3)2—; alkylethylene groups such as —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, —CH(CH2CH3)CH2—, and —C(CH2CH3)2—CH2—; alkyltrimethylene groups such as —CH(CH3)CH2CH2—, and —CH2CH(CH3)CH2—; and alkyltetramethylene groups such as —CH(CH3)CH2CH2CH2—, and —CH2CH(CH3)CH2CH2—. The alkyl group in the alkylalkylene group is preferably a linear alkyl group having 1 to 5 carbon atoms.
The linear or branched aliphatic hydrocarbon group may or may not have a substituent. Examples of the substituent include a fluorine atom, a fluorinated alkyl group having 1 to 5 carbon atoms, which has been substituted with a fluorine atom, and a carbonyl group.
Aliphatic Hydrocarbon Group Containing Ring in Structure Thereof
Examples of the aliphatic hydrocarbon group containing a ring in the structure thereof include a cyclic aliphatic hydrocarbon group which may contain a substituent containing a hetero atom in the ring structure thereof (a group obtained by removing two hydrogen atoms from an aliphatic hydrocarbon ring), a group obtained by bonding a cyclic aliphatic hydrocarbon group to the terminal of a linear or branched aliphatic hydrocarbon group, and a group obtained by interposing a cyclic aliphatic hydrocarbon group in a linear or branched aliphatic hydrocarbon group. Examples of the linear or branched aliphatic hydrocarbon group include the same ones as those described above.
The cyclic aliphatic hydrocarbon group preferably has 3 to 20 carbon atoms and more preferably 3 to 12 carbon atoms.
The cyclic aliphatic hydrocarbon group may be a polycyclic group or a monocyclic group. The monocyclic alicyclic hydrocarbon group is preferably a group obtained by removing two hydrogen atoms from a monocycloalkane. The monocycloalkane preferably has 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane. The polycyclic alicyclic hydrocarbon group is preferably a group obtained by removing two hydrogen atoms from a polycycloalkane, and the polycycloalkane is preferably a group having 7 to 12 carbon atoms. Specific examples thereof include adamantane, norbornane, isobomane, tricyclodecane, and tetracyclododecane.
The cyclic aliphatic hydrocarbon group may have or may not have a substituent. Examples of the substituent include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, and a carbonyl group.
The alkyl group as the substituent is preferably an alkyl group having 1 to 5 carbon atoms, and more preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group.
The alkoxy group as the substituent is preferably an alkoxy group having 1 to 5 carbon atoms, more preferably a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, or a tert-butoxy group, and still more preferably a methoxy group or an ethoxy group.
The halogen atom as the substituent is preferably a fluorine atom.
Examples of the halogenated alkyl group as the substituent include a group obtained by substituting part or all of hydrogen atoms in the above-described alkyl group with the above-described halogen atom.
In the cyclic aliphatic hydrocarbon group, part of carbon atoms constituting the ring structure thereof may be substituted with a substituent containing a hetero atom. The substituent containing a hetero atom is preferably —O—, —C(═O)—O—, —S—, —S(═O)2—, or —S(═O)2—O—.
Aromatic Hydrocarbon Group as Va01
The aromatic hydrocarbon group is a hydrocarbon group having at least one aromatic ring.
The aromatic ring is not particularly limited as long as it is a cyclic conjugated system having (4n+2) π electrons, and may be monocyclic or polycyclic. The aromatic ring preferably has 5 to 30 carbon atoms, more preferably 5 to 20 carbon atoms, still more preferably 6 to 15 carbon atoms, and particularly preferably 6 to 12 carbon atoms. Here, the number of carbon atoms in a substituent is not included in the number of carbon atoms.
Specific examples of the aromatic ring include aromatic hydrocarbon rings such as benzene, naphthalene, anthracene, and phenanthrene; and an aromatic heterocyclic ring obtained by substituting part of carbon atoms constituting the above-described aromatic hydrocarbon ring with a hetero atom. Examples of the hetero atom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom. Specific examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Specific examples of the aromatic hydrocarbon group include a group obtained by removing two hydrogen atoms from the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring (an arylene group or a heteroarylene group); a group obtained by removing two hydrogen atoms from an aromatic compound having two or more aromatic rings (for example, biphenyl or fluorene); and a group (for example, a group obtained by further removing one hydrogen atom from an aryl group in an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, a 1-naphthylethyl group, or a 2-naphthylethyl group) obtained by substituting one hydrogen atom of a group (an aryl group or a heteroaryl group), in which one hydrogen atom has been removed from the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring, with an alkylene group. The alkylene group bonded to the aryl group or the heteroaryl group preferably has 1 to 4 carbon atoms, more preferably 1 or 2 carbon atoms, and particularly preferably 1 carbon atom.
With respect to the aromatic hydrocarbon group, the hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a substituent. For example, the hydrogen atom bonded to the aromatic ring in the aromatic hydrocarbon group may be substituted with a substituent. Examples of substituents include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, and a hydroxyl group.
The alkyl group as the substituent is preferably an alkyl group having 1 to 5 carbon atoms, and more preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group.
Examples of the alkoxy group, the halogen atom, and the halogenated alkyl group, as the substituent, include the same groups as those exemplified as the substituent that is substituted for a hydrogen atom contained in the cyclic aliphatic hydrocarbon group.
Divalent Linking Group Containing Hetero Atom:
In a case where Va01 represents a divalent linking group containing a hetero atom, preferred examples of the linking group include —O—, —C(═O)—O—, —O—C(═O)—, —C(═O)—, —O—C(═O)—O—, —C(═O)—NH—, —NH—, —NH—C(═NH)—(H may be substituted with a substituent such as an alkyl group, an acyl group, or the like), —S—, —S(═O)2—, —S(═O)2—O—, and a group represented by General Formula —Y21—O—Y22—, —Y21—, —Y21—C(═O)—O—, —C(═O)—O—Y21—, —[Y21—C(═O)—O]m″—Y22, —Y21—O—C(═O)—Y22— or —Y21—S(═O)2—O—Y22— [in the formulae, Y21 and Y22 each independently represents a divalent hydrocarbon group which may have a substituent, 0 represents an oxygen atom, and m″ represents an integer in a range of 0 to 3].
In a case where the divalent linking group containing a hetero atom is —C(═O)—NH—, —C(═O)—NH—C(═O)—, —NH—, or —NH—C(═NH)—, H may be substituted with a substituent such as an alkyl group, an acyl, or the like. The substituent (an alkyl group, an acyl group, or the like) preferably has 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms, and particularly preferably 1 to 5 carbon atoms.
In General Formulae —Y21—O—Y22—, —Y21—O—, —Y21—C(═O)—O—, —C(═O)—O—Y21—, —[Y21—C(═O)—O]m″—Y22, —Y21—O—C(═O)—Y22—, and —Y21—S(═O)2—O—Y22— Y21, and Y22 each independently represents a divalent hydrocarbon group which may have a substituent. Examples of the divalent hydrocarbon group include the same ones as those of the divalent hydrocarbon group which may have a substituent.
Y21 is preferably a linear aliphatic hydrocarbon group, more preferably a linear alkylene group, still more preferably a linear alkylene group having 1 to 5 carbon atoms, and particularly preferably a methylene group or an ethylene group.
Y22 is preferably a linear or branched aliphatic hydrocarbon group and more preferably a methylene group, an ethylene group, or an alkylmethylene group. The alkyl group in the alkylmethylene group is preferably a linear alkyl group having 1 to 5 carbon atoms, more preferably a linear alkyl group having 1 to 3 carbon atoms, and most preferably a methyl group.
In the group represented by General Formula —[Y21—C(═O)—O]m″—Y22—, m″ represents an integer in a range of 0 to 3, preferably an integer in a range of 0 to 2, more preferably 0 or 1, and particularly preferably 1. In other words, it is particularly preferable that the group represented by General Formula —[Y21—C(═O)—O]m″—Y22— represent a group represented by a formula —Y21—C(═O)—O—Y22—. Among these, a group represented by a formula —(CH2)a′—C(═O)—O—(CH2)b′— is preferable. In the formula, a′ represents an integer in a range of 1 to 10, preferably an integer in a range of 1 to 8, more preferably an integer in a range of 1 to 5, still more preferably 1 or 2, and most preferably 1. b′ represents an integer in a range of 1 to 10, preferably an integer in a range of 1 to 8, more preferably an integer in a range of 1 to 5, still more preferably 1 or 2, and most preferably 1.
Among them, Va01 is preferably a divalent hydrocarbon group which may have a substituent, more preferably an aliphatic hydrocarbon group which may have a substituent, and still more preferably a linear or branched alkylene group having 1 to 10 carbon atoms, which may have a substituent. The alkylene group more preferably has 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and particularly preferably 1 to 3 carbon atoms. Va01 is particularly preferably a methylene group or an ethylene group.
In General Formula (a0-1), na01 is an integer of 1 or 2. na01 is preferably 1.
In General Formula (a0-1), Ra01 is a lactone-containing cyclic group having at least one substituent selected from the group consisting of a halogen atom, a carboxy group, an acyl group, a nitro group, and a cyano group. The “lactone-containing cyclic group” indicates a cyclic group that contains a ring (lactone ring) containing a —O—C(═O)— in the ring skeleton. In a case where the lactone ring is counted as the first ring and the group contains only the lactone ring, the group is referred to as a monocyclic group. Further, in a case where the group has other ring structures, the group is referred to as a polycyclic group regardless of the structures. The lactone-containing cyclic group may be a monocyclic group or a polycyclic group.
The lactone-containing cyclic group as Ra01 is not particularly limited, and any lactone-containing cyclic group can be used. More specific examples of the lactone-containing cyclic group include groups each represented by General Formulae (a2-r-1) to (a2-r-7) which will be described later. Examples of the lactone-containing cyclic group as Ra01 include those in which Ra′21 in the groups represented by General Formulae (a2-r-1) to (a2-r-7) which will be described later is a halogen atom, a carboxy group, an acyl group, a nitro group, or a cyano group.
Preferred examples of the lactone-containing cyclic group as Ra01 include a lactone-containing cyclic group represented by General Formula (Ra0-1).
[In the formula, Ra012 and Ra013 each independently represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, an alkoxy group having 1 to 5 carbon atoms, or an alkylthio group having 1 to 5 carbon atoms, or Ra012 and Ra013 are bonded to each other to represent an alkylene group having 1 to 6 carbon atoms, which may contain an oxygen atom or a sulfur atom, an ether bond (—O—), or a thioether bond (—S—). X011 represents a halogen atom, a carboxy group, an acyl group, a nitro group, or a cyano group. Ra011 represents an alkyl group having 1 to 6 carbon atoms, which may contain a halogen atom, a hydroxyalkyl group having 1 to 6 carbon atoms, in which a hydroxy group moiety may be protected by a protecting group and which may contain a halogen atom, a carboxy group which may form a salt, or a substituted oxycarbonyl group. p01 represents an integer in a range of 0 to 8, and q01 represents an integer in a range of 1 to 9. However, the following is satisfied, p01+q01≤9. In a case where two or more X011's are present, a plurality of X011's may be the same or different from each other. In a case where two or more Ra011's are present, a plurality of Ra011's may be the same or different from each other. In a case where Ra012 and Ra013 are bonded to each other to form an alkylene group having 1 to 6 carbon atoms, which may contain an oxygen atom or a sulfur atom, X011 and Ra011 may be each independently present as a substituent that is substituted for a hydrogen atom of the alkylene group having 1 to 6 carbon atoms. * represents a bonding site to which an oxygen atom in General Formula (a0-1) is bonded].
In General Formula (Ra0-1), Ra012 and Ra013 each independently represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, an alkoxy group having 1 to carbon atoms, or an alkylthio group having 1 to 5 carbon atoms, or Ra012 and Ra013 are bonded to each other to represent an alkylene group having 1 to 6 carbon atoms, which may contain an oxygen atom or a sulfur atom, an ether bond, or a thioether bond (—S—).
The alkyl group having 1 to 5 carbon atoms is preferably a linear or branched alkyl group, and specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group.
The alkoxy group having 1 to 5 carbon atoms is preferably a linear or branched alkoxy group, and specific examples thereof include a group formed by the linking of an alkyl group mentioned as the alkyl group in Ra012 and Ra013 and an oxygen atom (—O).
The alkylthio group having 1 to 5 carbon atoms is preferably one having 1 to 4 carbon atoms, and specific examples thereof include a methylthio group, an ethylthio group, an n-propylthio group, an iso-propylthio group, an n-butylthio group, and a tert-butylthio group.
The alkylene group having 1 to 6 carbon atoms formed by the mutual bonding of Ra012 and Ra013 is preferably a linear or branched alkylene group, and examples thereof include a methylene group, an ethylene group, an n-propylene group, and an isopropylene group. Specific examples of the alkylene groups that contain an oxygen atom or a sulfur atom include a group obtained by interposing —O— or —S— in the terminal of the alkylene group or between the carbon atoms of the alkylene group, and examples thereof include —O—CH2—, —CH2—O—CH2—, —S—CH2—, and —CH2—S—CH2—. As the group formed by the mutual bonding of Ra012 and Ra013, an alkylene group having 1 to 6 carbon atoms or —O— is preferable, an alkylene group having 1 to 6 carbon atoms is more preferable, an alkylene group having 1 to 5 carbon atoms is still more preferable, and a methylene group is particularly preferable.
Among the above, in Ra012 and Ra013, it is preferable that Ra012 and Ra013 be bonded to each other to form an alkylene group having 1 to 6 carbon atoms. The alkylene group having 1 to 6 carbon atoms is more preferably an alkylene group having 1 to 3 carbon atoms and still more preferably a methylene group.
Regarding Ra011 in General Formula (Ra0-1), Ra011 represents an alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, a hydroxyalkyl group having 1 to 6 carbon atoms, in which a hydroxy group moiety may be protected by a protecting group and which may have a halogen atom, a carboxy group which may form a salt, or a substituted oxycarbonyl group.
Examples of the alkyl group having 1 to 6 carbon atoms include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, an s-butyl group, a t-butyl group, a pentyl group, and a hexyl group. Among these, an alkyl group having 1 to 5 carbon atoms is preferable, an alkyl group having 1 to 4 carbon atoms is more preferable, an alkyl group having 1 to 3 carbon atoms is still more preferable, a methyl group or an ethyl group is particularly preferable, and a methyl group is most preferable.
The alkyl group having 1 to 6 carbon atoms may or may not have a halogen atom. The halogen atom is preferably a fluorine atom or a chlorine atom and more preferably a fluorine atom. Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom include a chloroalkyl group such as a chloromethyl group; and a fluoroalkyl group (preferably, a fluoroalkyl group having 1 to 3 carbon atoms) such as a trifluoromethyl group, a 2,2,2-trifluoroethyl group, or a pentafluoroethyl group.
Examples of the hydroxyalkyl group having 1 to 6 carbon atoms include a hydroxymethyl group, a 2-hydroxyethyl group, a 1-hydroxyethyl group, a 3-hydroxypropyl group, a 2-hydroxypropyl group, a 4-hydroxide group, and a 6-hydroxyhexyl group.
The hydroxyalkyl group having 1 to 6 carbon atoms may have or may not have a halogen atom. The halogen atom is preferably a fluorine atom. Examples of the hydroxyalkyl group having 1 to 6 carbon atoms and having a halogen atom include a difluorohydroxymethyl group, a 1,1-difluoro-2-hydroxyethyl group, a 2,2-difluoro-2-hydroxyethyl group, and 1,1,2,2-tetrafluoro-2-hydroxyethyl group.
The hydroxyalkyl group having 1 to 6 carbon atoms, which may have a halogen atom, preferably has 1 to 3 carbon atoms, more preferably 1 or 2 carbon atoms, and still more preferably 1 carbon atom.
In the hydroxyalkyl group having 1 to 6 carbon atoms, the hydroxy group moiety may or may not be protected with a protecting group. Examples of the protecting group that protects the hydroxy group moiety include a group capable of forming an ether bond or an acetal bond together with an oxygen atom constituting a hydroxy group, such as a methyl group and a methoxymethyl group; and a group capable of forming an ester bond together with an oxygen atom constituting a hydroxy group, such as an acetyl group and a benzoyl group.
The carboxy group that may form a salt is selected from the group consisting of a carboxy group and a carboxy group that forms a salt (a salt of the carboxy group). Examples of the carboxy group that forms a salt (a salt of the carboxy group) include an alkali metal salt of a carboxy group, an alkaline earth metal salt of a carboxy group, and a transition metal salt of a carboxy group.
Examples of the substituted oxycarbonyl group include an alkoxycarbonyl group in which an alkoxy group having 1 to 4 carbon atoms and a carbonyl group are bonded to each other (specifically an alkyloxycarbonyl group such as a methoxycarbonyl group, an ethoxycarbonyl group, an isopropyloxycarbonyl group, and an n-propoxycarbonyl group; an alkenyloxycarbonyl group such as a vinyloxycarbonyl group and an allyloxycarbonyl group); a cycloalkyloxycarbonyl group such as a cyclohexyloxycarbonyl group, and an aryloxycarbonyl group such as phenyloxycarbonyl group.
In General Formula (Ra0-1), X011 represents a halogen atom, a carboxy group, an acyl group, a nitro group, or a cyano group. The halogen atom is preferably a fluorine atom. The acyl group is preferably an acyl group having 1 to 3 carbon atoms, and specific examples thereof include a formyl group, an acetyl group, and a propionyl group. Among these, X011 is preferably a cyano group.
In General Formula (Ra0-1), p01 is an integer in a range of 0 to 8. In General Formula (Ra0-1), q01 is an integer in a range of 1 to 9. However, the following is satisfied, p01+q01≤9.
p01 is preferably an integer in a range of 0 to 6, more preferably an integer in a range of 0 to 3, still more preferably 0 or 1, and particularly preferably 0.
q01 is preferably an integer in a range of 1 to 5, more preferably 1 or 2, and still more preferably 1.
p01 represents an integer in a range of 2 to 8, and in a case where two or more Ra011's are present, a plurality of Ra011's may be the same or different from each other.
In a case where q01 represents an integer in a range of 2 to 9 and two or more X011's are present, a plurality of X011's may be the same or different from each other.
In a case where Ra012 and Ra013 are bonded to each other to form an alkylene group having 1 to 6 carbon atoms, which may contain an oxygen atom or a sulfur atom, X011 and Ra011 may be each independently present as a substituent that is substituted for a hydrogen atom of the alkylene group having 1 to 6 carbon atoms.
The constitutional unit (a0) is preferably a constitutional unit represented by General Formula (a0-1-1).
[In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Va01 represents a divalent hydrocarbon group which may have a substituent. na01 represents an integer of 1 or 2. X011 represents a halogen atom, a carboxy group, an acyl group, a nitro group, or a cyano group. q011 is an integer in a range of 1 to 7.]
R, Va01, and na01 in General Formula (a0-1-1) are each the same as R, Va01, and na01 in General Formula (a0-1). X011 in General Formula (a0-1-1) is the same as X011 in General Formula (Ra0-1).
q011 in General Formula (a0-1-1) is an integer in a range of 1 to 7, preferably 1 or 2, and more preferably 1.
Specific examples of the constitutional unit (a0) are as follows.
In each of the formulae shown below, Rα represents a hydrogen atom, a methyl group, or a trifluoromethyl group. na01 represents 1 or 2 and is preferably 1. Ac represents an acetyl group. X represents a halogen atom, a carboxy group, an acyl group, a nitro group, or a cyano group, and is preferably a cyano group (—CN).
Among the above, the constitutional unit (a0) is preferably a constitutional unit represented by any one of General Formulae (a0-1-1-1) to (a0-1-1-18), and more preferably the constitutional unit represented by General Formula (a0-1-1-1).
The constitutional unit (a0) contained in the component (A1) may be one kind or may be two or more kinds.
The proportion of the constitutional unit (a0) in the component (A1) is preferably 10% by mole or more and 80% by mole or less, more preferably 20% by mole or more and 70% by mole or less, still more preferably 30% by mole or more and 60% by mole or less, even still more preferably 35% by mole or more and 50% by mole or less, and further particularly preferably 40% by mole or more and 50% by mole or less, with respect to the total (100% by mole) of all the constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a0) is set to be equal to or larger than the lower limit value of the above preferred range, the occurrence of defects can be further suppressed. Further, in a case where the proportion of the constitutional unit (a0) is equal to or smaller than the upper limit value of the preferred range described above, balance with other constitutional units can be easily obtained.
<<Another Constitutional Unit>>
The component (A1) may have another constitutional unit, as necessary, in addition to the constitutional unit (a0).
Examples of such another constitutional unit include a constitutional unit (a1) including an acid-decomposable group polarity that is increased under action of acid; a constitutional unit (a2) including a lactone-containing cyclic group, an —SO2—-containing cyclic group, or a carbonate-containing cyclic group (excluding those corresponding to the constitutional unit (a0)); and a constitutional unit (a3) including a polar group-containing aliphatic hydrocarbon group; a constitutional unit (a4) including an acid-non-dissociable aliphatic cyclic group; a constitutional unit (a10) represented by General Formula (a10-1) which will be described later; and a constitutional unit (st) derived from styrene or a styrene derivative.
In Regard to Constitutional Unit (a1):
The constitutional unit (a1) is a constitutional unit that contains an acid-decomposable group having a polarity that is increased under action of acid.
Examples of the acid-dissociable group are the same as those which have been proposed so far as acid-dissociable groups for the base resin for a chemically amplified resist composition.
Specific examples of acid-dissociable groups of the base resin proposed for a chemically amplified resist composition contain an “acetal-type acid-dissociable group”, a “tertiary alkyl ester-type acid-dissociable group”, and a “tertiary alkyloxycarbonyl acid-dissociable group” described below.
Acetal-Type Acid-Dissociable Group:
Examples of the acid-dissociable group for protecting a carboxy group or a hydroxyl group as a polar group include the acid-dissociable group represented by General Formula (a1-r-1) shown below (hereinafter, also referred to as an “acetal-type acid-dissociable group”).
[In the formula, Ra′1 to Ra′2 represent a hydrogen atom or an alkyl group. Ra′3 represents a hydrocarbon group, and Ra′3 may be bonded to Ra′1 or Ra′2 to form a ring.]
In General Formula (a1-r-1), it is preferable that at least one of Ra′1 and Ra′2 represent a hydrogen atom, and it is more preferable that both Ra′1 and Ra′2 represent hydrogen atoms.
In a case where Ra′1 or Ra′2 represents an alkyl group, examples of the alkyl group include the same one as the alkyl group mentioned as the substituent which may be bonded to the carbon atom at the α-position in the description on the α-substituted acrylic acid ester, and the alkyl group preferably has 1 to 5 carbon atoms. Specific examples thereof preferably include a linear or branched alkyl group. More specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. Among these, a methyl group or an ethyl group is preferable, and a methyl group is particularly preferable.
In General Formula (a1-r-1), examples of the hydrocarbon group as Ra′3 include a linear or branched alkyl group and a cyclic hydrocarbon group.
The linear alkyl group preferably has 1 to 5 carbon atoms, more preferably 1 to 4 carbon atoms, and still more preferably 1 or 2 carbon atoms. Specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, and an n-pentyl group. Among these, a methyl group, an ethyl group, or an n-butyl group is preferable, and a methyl group or an ethyl group is more preferable.
The branched alkyl group preferably has 3 to 10 carbon atoms and more preferably 3 to 5 carbon atoms. Specific examples thereof include an isopropyl group, an isobutyl group, a tert-butyl group, an isopentyl group, a neopentyl group a 1,1-diethylpropyl group, and a 2,2-dimethylbutyl group. Among these, an isopropyl group is preferable.
In a case where Ra′3 represents a cyclic hydrocarbon group, the hydrocarbon group thereof may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group and may be a polycyclic group or a monocyclic group.
The aliphatic hydrocarbon group which is a monocyclic group is preferably a group obtained by removing one hydrogen atom from a monocycloalkane. The monocycloalkane preferably has 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane.
The aliphatic hydrocarbon group which is a polycyclic group is preferably a group obtained by removing one hydrogen atom from a polycycloalkane. The polycycloalkane preferably has 7 to 12 carbon atoms, and specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
In a case where the cyclic hydrocarbon group as Ra′3 is an aromatic hydrocarbon group, the aromatic hydrocarbon group is a hydrocarbon group having at least one aromatic ring.
The aromatic ring is not particularly limited as long as it is a cyclic conjugated system having (4n+2) a electrons, and may be monocyclic or polycyclic. The aromatic ring preferably has 5 to 30 carbon atoms, more preferably 5 to 20 carbon atoms, still more preferably 6 to 15 carbon atoms, and particularly preferably 6 to 12 carbon atoms.
Specific examples of the aromatic ring include aromatic hydrocarbon rings such as benzene, naphthalene, anthracene, and phenanthrene; and an aromatic heterocyclic ring obtained by substituting part of carbon atoms constituting the above-described aromatic hydrocarbon ring with a hetero atom. Examples of the hetero atom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom. Specific examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Specific examples of the aromatic hydrocarbon group as Ra′3 include a group obtained by removing one hydrogen atom from the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring (an aryl group or a heteroaryl group); a group obtained by removing one hydrogen atom from an aromatic compound having two or more aromatic rings (biphenyl, fluorene or the like); and a group obtained by substituting one hydrogen atom of the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring with an alkylene group (an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, a 1-naphthylethyl group, or a 2-naphthylethyl group). The number of carbon atoms in the alkylene group bonded to the aromatic hydrocarbon ring or aromatic heterocyclic ring is preferably in a range of 1 to 4, more preferably 1 or 2, and particularly preferably 1.
The cyclic hydrocarbon group as Ra′3 may have a substituent. Examples of the substituent include: —RP1, —RP2—O—RP1, —RP2—CO—RP1, —RP2—CO—ORP1, —RP2—O—CO—RP1, —RP2—OH, —RP2—CN, and —RP2—COOH (hereinafter, these substituents are also collectively referred to as “Rax5”).
Here, RP1 represents a monovalent chain-like saturated hydrocarbon group having 1 to 10 carbon atoms, a monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms, or a monovalent aromatic hydrocarbon group having 6 to carbon atoms. In addition, RP2 represents a single bond, a divalent chain-like saturated hydrocarbon group having 1 to 10 carbon atoms, a divalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms, or a divalent aromatic hydrocarbon group having 6 to 30 carbon atoms. However, part or all of hydrogen atoms contained in the chain-like saturated hydrocarbon group, the aliphatic cyclic saturated hydrocarbon group, and the aromatic hydrocarbon group of RP1 and RP2 may be substituted with a fluorine atom. In the aliphatic cyclic hydrocarbon group, one or more of the above-described substituents may be included as a single kind, or one or more of the above-described substituents may be included as a plurality of kinds.
Examples of the monovalent chain-like saturated hydrocarbon group having 1 to carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, and a decyl group.
Examples of the monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms include monocyclic aliphatic saturated hydrocarbon groups such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a cyclodecyl group, and cyclododecyl group; and polycyclic aliphatic saturated hydrocarbon groups such as a bicyclo[2.2.2]octanyl group, a tricyclo[5.2.1.02,6]decanyl group, a tricyclo [3.3.1.13,7]decanyl group, a tetracyclo[6.2.1.13,6.02,7] dodecanyl group, and an adamantyl group.
Examples of the monovalent aromatic hydrocarbon group having 6 to 30 carbon atoms include a group obtained by removing one hydrogen atom from an aromatic hydrocarbon ring such as benzene, biphenyl, fluorene, naphthalene, anthracene, or phenanthrene.
In a case where Ra′3 is bonded to Ra′1 or Ra′2 to form a ring, the cyclic group is preferably a 4-membered to 7-membered ring, and more preferably a 4-membered to 6-membered ring. Specific examples of the cyclic group include a tetrahydropyranyl group and a tetrahydrofuranyl group.
Tertiary Alkyl Ester-Type Acid-Dissociable Group:
Among the above polar groups, examples of the acid-dissociable group for protecting the carboxy group include the acid-dissociable group represented by General Formula (a1-r-2) shown below.
Among the acid-dissociable groups represented by General Formula (a1-r-2), for convenience, a group which is constituted of an alkyl groups is referred to as a “tertiary alkyl ester-type acid-dissociable group”.
[In the formula, Ra′4 to Ra′6 each represent a hydrocarbon group, and Ra′5 and Ra′6 may be bonded to each other to form a ring.]
Examples of the hydrocarbon group as Ra′4 include a linear or branched alkyl group, a chain-like or cyclic alkenyl group, and a cyclic hydrocarbon group.
Examples of the linear or branched alkyl group and the cyclic hydrocarbon group (the aliphatic hydrocarbon group which is a monocyclic group, the aliphatic hydrocarbon group which is a polycyclic group, or the aromatic hydrocarbon group) as Ra′4 include the same one as Ra′3 described above.
The chain-like or cyclic alkenyl group as Ra′4 is preferably an alkenyl group having 2 to 10 carbon atoms.
Examples of the hydrocarbon group as Ra′5 or Ra′6 include the same one as Ra′3 described above.
In a case where Ra′5 to Ra′6 are bonded to each other to form a ring, suitable examples thereof include groups represented by General Formula (a1-r2-1), General Formula (a1-r2-2), and General Formula (a1-r2-3).
On the other hand, in a case where Ra′4 to Ra′6 are not bonded to each other and represent an independent hydrocarbon group, suitable examples thereof include a group represented by General Formula (a1-r2-4).
[In General Formula (a1-r2-1), Ra′10 represents a linear or branched alkyl group having 1 to 12 carbon atoms, a part of which may be substituted with a halogen atom or a hetero atom-containing group. Ra′11 represents a group that forms an aliphatic cyclic group together with a carbon atom to which Ra′10 is bonded. In General Formula (a1-r2-2), Ya represents a carbon atom. Xa is a group that forms a cyclic hydrocarbon group together with Ya. Part or all of hydrogen atoms contained in the cyclic hydrocarbon group may be substituted. Ra101 to Ra103 each independently represent a hydrogen atom, a monovalent chain-like saturated hydrocarbon group having 1 to 10 carbon atoms, or a monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms. Part or all of hydrogen atoms contained in the chain-like saturated hydrocarbon group and the aliphatic cyclic saturated hydrocarbon group may be substituted. Two or more of Ra101 to Ra103 may be bonded to each other to form a ring structure. In General Formula (a1-r2-3), Yaa represents a carbon atom. Xaa is a group that forms an aliphatic cyclic group together with Yaa. Ra104 represents an aromatic hydrocarbon group which may have a substituent. In General Formula (a1-r2-4), Ra′12 and Ra′13 each independently represents a monovalent chain-like saturated hydrocarbon group having 1 to 10 carbon atoms or a hydrogen atom. Part or all of hydrogen atoms contained in the chain-like saturated hydrocarbon group may be substituted. Ra′14 represents a hydrocarbon group which may have a substituent. * represents a bonding site.]
In General Formula (a1-r2-1) described above, Ra′10 represents a linear or branched alkyl group having 1 to 12 carbon atoms, a part of which may be substituted with a halogen atom or a hetero atom-containing group.
The linear alkyl group as Ra′10 has 1 to 12 carbon atoms, and preferably has 1 to carbon atoms and particularly preferably 1 to 5 carbon atoms.
Examples of the branched alkyl group as Ra′10 include the same one as Ra′3.
A part of the alkyl group as Ra′10 may be substituted with a halogen atom or a hetero atom-containing group. For example, a part of the hydrogen atoms constituting the alkyl group may be substituted with a halogen atom or a hetero atom-containing group. Further, part of carbon atoms (such as a methylene group) constituting the alkyl group may be substituted with a hetero atom-containing group.
Examples of the hetero atom mentioned here include an oxygen atom, a sulfur atom, and a nitrogen atom. Examples of the hetero atom-containing group include (—O—), —C(═O)—O—, —O—C(═O)—, —C(═O)—, —O—C(═O)—O—, —C(═O)—NH—, —NH—, —S—, —S(═O)2—, and —S(═O)2—O—.
In General Formula (a1-r2-1), Ra′11 (a group that forms an aliphatic cyclic group together with a carbon atom to which Ra′10 is bonded) is preferably the group mentioned as the aliphatic hydrocarbon group (the alicyclic hydrocarbon group) which is a monocyclic group or a polycyclic group as Ra′3 in General Formula (a1-r-1). Among them, a monocyclic alicyclic hydrocarbon group is preferable, specifically, a cyclopentyl group or a cyclohexyl group is more preferable, and a cyclopentyl group is still more preferable.
In General Formula (a1-r2-2), examples of the cyclic hydrocarbon group that is formed by Xa together with Ya include a group obtained by further removing one or more hydrogen atoms from a cyclic monovalent hydrocarbon group (an aliphatic hydrocarbon group) as Ra′3 in General Formula (a1-r-1).
The cyclic hydrocarbon group that is formed by Xa together with Ya may have a substituent. Examples of this substituent include the same one as the substituent which may be contained in the cyclic hydrocarbon group as Ra′3.
In General Formula (a1-r2-2), examples of the monovalent chain-like saturated hydrocarbon group having 1 to 10 carbon atoms, as Ra101 to Ra103, include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, and a decyl group.
Examples of the monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms, as Ra101 to Ra103, include monocyclic aliphatic saturated hydrocarbon groups such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a cyclodecyl group, and cyclododecyl group; and polycyclic aliphatic saturated hydrocarbon groups such as a bicyclo[2.2.2]octanyl group, a tricyclo[5.2.1.02,6]decanyl group, a tricyclo [3.3.1.13,7]decanyl group, a tetracyclo[6.2.1.13,6.02,7] dodecanyl group, and an adamantyl group.
Among the above, Ra101 to Ra103 are preferably a hydrogen atom or a monovalent chain-like saturated hydrocarbon group having 1 to 10 carbon atoms, and among them, a hydrogen atom, a methyl group, and an ethyl group are more preferable, and a hydrogen atom is particularly preferable from the viewpoint of easy synthesis.
Examples of the substituent contained in the chain-like saturated hydrocarbon group represented by Ra101 to Ra103 or the aliphatic cyclic saturated hydrocarbon group include the same groups as Rax5 described above.
Examples of the group containing a carbon-carbon double bond generated by forming a ring structure, which is obtained by bonding two or more of R101 to Ra103 to each other, include a cyclopentenyl group, a cyclohexenyl group, a methylcyclopentenyl group, a methylcyclohexenyl group, a cyclopentylideneethenyl group, and a cyclohexylideneethenyl group. Among these, a cyclopentenyl group, a cyclohexenyl group, and a cyclopentylideneethenyl group are preferable from the viewpoint of easy synthesis.
In General Formula (a1-r2-3), an aliphatic cyclic group that is formed by Xaa together with Yaa is preferably the group mentioned as the aliphatic hydrocarbon group which is a monocyclic group or a polycyclic group as Ra′3 in General Formula (a1-r-1).
In General Formula (a1-r2-3), examples of the aromatic hydrocarbon group as Ra104 include a group obtained by removing one or more hydrogen atoms from an aromatic hydrocarbon ring having 5 to 30 carbon atoms. Among them, Ra104 is preferably a group obtained by removing one or more hydrogen atoms from an aromatic hydrocarbon ring having 6 to 15 carbon atoms, more preferably a group obtained by removing one or more hydrogen atoms from benzene, naphthalene, anthracene, or phenanthrene, still more preferably a group obtained by removing one or more hydrogen atoms from benzene, naphthalene, or anthracene, particularly preferably a group obtained by removing one or more hydrogen atoms from benzene or naphthalene, and most preferably a group obtained by removing one or more hydrogen atoms from benzene.
Examples of the substituent which may be contained in Ra104 in General Formula (a1-r2-3) include a methyl group, an ethyl group, propyl group, a hydroxyl group, a carboxyl group, a halogen atom, an alkoxy group (a methoxy group, an ethoxy group, a propoxy group, a butoxy group, and the like), and an alkyloxycarbonyl group.
In General Formula (a1-r2-4), Ra′12 and Ra′13 each independently represents a monovalent chain-like saturated hydrocarbon group having 1 to 10 carbon atoms or a hydrogen atom. Examples of the monovalent chain-like saturated hydrocarbon group having 1 to 10 carbon atoms, as Ra′12 and Ra′13, include the same one as the monovalent chain-like saturated hydrocarbon group having 1 to 10 carbon atoms, as Ra101 to Ra103 as described above. Part or all of hydrogen atoms contained in the chain-like saturated hydrocarbon group may be substituted.
Among the above, Ra′12 and Ra′13 are preferably a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, more preferably an alkyl group having 1 to 5 carbon atoms, still more preferably a methyl group or an ethyl group, and particularly preferably a methyl group.
In a case where the chain-like saturated hydrocarbon groups represented by Ra′12 and Ra′13 are substituted, examples of the substituent include the same group as Rax5 described above.
In General Formula (a1-r2-4), Ra′14 represents a hydrocarbon group which may have a substituent. Examples of the hydrocarbon group as Ra′14 include a linear or branched alkyl group and a cyclic hydrocarbon group.
The linear alkyl group as Ra′14 preferably has 1 to 5 carbon atoms, more preferably 1 to 4 carbon atoms, and still more preferably 1 or 2 carbon atoms. Specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, and an n-pentyl group. Among these, a methyl group, an ethyl group, or an n-butyl group is preferable, and a methyl group or an ethyl group is more preferable.
The branched alkyl group as Ra′14 preferably has 3 to 10 carbon atoms and more preferably 3 to 5 carbon atoms. Specific examples thereof include an isopropyl group, an isobutyl group, a tert-butyl group, an isopentyl group, a neopentyl group a 1,1-diethylpropyl group, and a 2,2-dimethylbutyl group. Among these, an isopropyl group is preferable.
In a case where Ra′14 represents a cyclic hydrocarbon group, the hydrocarbon group thereof may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group and may be a polycyclic group or a monocyclic group.
The aliphatic hydrocarbon group which is a monocyclic group is preferably a group obtained by removing one hydrogen atom from a monocycloalkane. The monocycloalkane preferably has 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane.
The aliphatic hydrocarbon group which is a polycyclic group is preferably a group obtained by removing one hydrogen atom from a polycycloalkane. The polycycloalkane preferably has 7 to 12 carbon atoms, and specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
Examples of the aromatic hydrocarbon group as Ra′14 include the same one as the aromatic hydrocarbon group as Ra104. Among them, Ra′14 is preferably a group obtained by removing one or more hydrogen atoms from an aromatic hydrocarbon ring having 6 to 15 carbon atoms, more preferably a group obtained by removing one or more hydrogen atoms from benzene, naphthalene, anthracene, or phenanthrene, still more preferably a group obtained by removing one or more hydrogen atoms from benzene, naphthalene, or anthracene, particularly preferably a group obtained by removing one or more hydrogen atoms from naphthalene or anthracene, and most preferably a group obtained by removing one or more hydrogen atoms from naphthalene.
Examples of the substituent which may be contained in Ra′14 include the same one as the substituent which may be contained in Ra104.
In a case where Ra′14 in General Formula (a1-r2-4) is a naphthyl group, the position at which the tertiary carbon atom in General Formula (a1-r2-4) is bonded is any of the 1-position and the 2-position of the naphthyl group.
In a case where Ra′14 in General Formula (a1-r2-4) is an anthryl group, the position at which the tertiary carbon atom in General Formula (a1-r2-4) is bonded is any of the 1-position, the 2-position, and 9-position of the anthryl group.
Specific examples of the group represented by General Formula (a1-r2-1) are shown below.
Specific examples of the group represented by General Formula (a1-r2-2) are shown below.
Specific examples of the group represented by General Formula (a1-r2-3) are shown below.
Specific examples of the group represented by General Formula (a1-r2-4) are shown below.
Tertiary Alkyloxycarbonyl Acid-Dissociable Group:
Among the polar groups, examples of the acid-dissociable group for protecting a hydroxyl group include an acid-dissociable group (hereinafter, for convenience, also referred to as a “tertiary alkyloxycarbonyl acid-dissociable group”) represented by General Formula (a1-r-3) shown below.
[In the formula, Ra′7 to Ra′9 each represent an alkyl group.]
In General Formula (a1-r-3), Ra′7 to Ra′9 are each preferably an alkyl group having 1 to 5 carbon atoms and more preferably an alkyl group having 1 to 3 carbon atoms.
Further, the total number of carbon atoms in each of the alkyl groups is preferably in a range of 3 to 7, more preferably in a range of 3 to 5, and most preferably 3 or 4.
Examples of the constitutional unit (a1) include a constitutional unit derived from acrylic acid ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent; a constitutional unit derived from acrylamide; a constitutional unit in which at least part of hydrogen atoms in a hydroxyl group of a constitutional unit derived from hydroxystyrene or a hydroxystyrene derivative are protected by the substituent including an acid-decomposable group; and a constitutional unit in which at least part of hydrogen atoms in —C(═O)—OH of a constitutional unit derived from vinylbenzoic acid or a vinylbenzoic acid derivative are protected by the substituent including an acid-decomposable group.
Among the above, the constitutional unit (a1) is preferably a constitutional unit derived from acrylic acid ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent.
Preferred specific examples of such a constitutional unit (a1) include constitutional units represented by General Formula (a1-1) or (a1-2).
[In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Va1 represents a divalent hydrocarbon group which may have an ether bond. na1 represents an integer in a range of 0 to 2. Ra1 is an acid-dissociable group represented by General Formula (a1-r-1) or (a1-r-2). Wa1 represents an (na2+1)-valent hydrocarbon group, na2 represents an integer in a range of 1 to 3, and Ra2 represents an acid-dissociable group represented by General Formula (a1-r-1) or (a1-r-3).]
R in General Formula (a1-1) is the same as R in General Formula (a0-1). Examples of R in General Formula (a1-1) include the same ones as those mentioned in R in General Formula (a0-1), and preferred examples thereof are also the same.
In General Formula (a1-1), the divalent hydrocarbon group as Va1 may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group. Examples of the divalent hydrocarbon group in Va1 include the same ones as the groups mentioned as the divalent hydrocarbon group which may have a substituent in Va01 in General Formula (a0-1), and preferred examples thereof are also the same.
In General Formula (a1-1), Ra1 is an acid-dissociable group represented by General Formula (a1-r-1) or (a1-r-2).
In General Formula (a1-2), the (na2+1) valent hydrocarbon group as Wa1 may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group. The aliphatic hydrocarbon group indicates a hydrocarbon group that has no aromaticity and may be saturated or unsaturated. In general, it is preferable that the aliphatic hydrocarbon group be saturated. Examples of the aliphatic hydrocarbon group include a linear or branched aliphatic hydrocarbon group, an aliphatic hydrocarbon group containing a ring in the structure thereof, and a combination of the linear or branched aliphatic hydrocarbon group and the aliphatic hydrocarbon group containing a ring in the structure thereof.
The valency of (na2+1) is preferably divalent, trivalent, or tetravalent, and more preferably divalent or trivalent.
In General Formula (a1-2), Ra2 is an acid-dissociable group represented by General Formula (a1-r-1) or (a1-r-3).
Specific examples of the constitutional unit represented by General Formula (a1-1) are shown below. In each of the formulae shown below, Ra represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
Among those, a constitutional unit represented by General Formula (a1-1-1) is preferable as the constitutional unit (a1).
[In the formula, Ra1″ is an acid-dissociable group represented by General Formula (a1-r2-1), (a1-r2-3), or (a1-r2-4).]
In General Formula (a1-1-1), R, Va1, and na1 are each the same as R, Va1, and na1 in General Formula (a1-1).
The description for the acid-dissociable group represented by General Formula (a1-r2-1), (a1-r2-3), or (a1-r2-4) is as described above.
In General Formula (a1-1-1), Ra1″ is preferably, among the above, an acid-dissociable group represented by General Formula (a1-r2-1).
The proportion of the constitutional unit (a1) in the component (A1) is preferably in a range of 5% to 80% by mole, more preferably in a range of 10% to 75% by mole, still more preferably in a range of 30% to 70% by mole, and particularly preferably in a range of 40% to 60% by mole, with respect to the total (100% by mole) of all constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a1) is set within the preferred range described above, the efficiency of the deprotection reaction and the solubility of the developing solution can be properly ensured, and thus the effects according to the present invention can be more easily obtained.
In Regard to Constitutional Unit (a10):
The constitutional unit (a10) is a constitutional unit represented by General Formula (a10-1).
[In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Yax1 represents a single bond or a divalent linking group. Wax1 represents an aromatic hydrocarbon group which may have a substituent. nax1 represents an integer of 1 or more.]
R in General Formula (a10-1) is the same as R in General Formula (a0-1). Examples of R in General Formula (a10-1) include the same ones as those mentioned in R in General Formula (a0-1), and preferred examples thereof are also the same.
In General Formula (a10-1), Yax1 represents a single bond or a divalent linking group.
In the chemical formulae described above, the divalent linking group as Yax1 is not particularly limited, and suitable examples thereof include a divalent hydrocarbon group which may have a substituent, and a divalent linking group having hetero atoms. Examples of the divalent linking group in Yax1 include the same ones as those mentioned as Va01 in General Formula (a0-1).
Among the above, Yax1 is preferably a single bond, an ester bond [—C(═O)—O—, —O—C(═O)—], an ether bond (—O—), a linear or branched alkylene group, or a combination thereof, and more preferably a single bond or an ester bond [—C(═O)—O—, —O—C(═O)—].
In General Formula (a10-1), Wax1 represents an aromatic hydrocarbon group which may have a substituent.
Examples of the aromatic hydrocarbon group as Wax1 include a group obtained by removing (nax1+1) hydrogen atoms from an aromatic ring which may have a substituent. Here, the aromatic ring is not particularly limited as long as it is a cyclic conjugated system having (4n+2) π electrons, and may be monocyclic or polycyclic. The aromatic ring preferably has 5 to 30 carbon atoms, more preferably 5 to 20 carbon atoms, still more preferably 6 to 15 carbon atoms, and particularly preferably 6 to 12 carbon atoms. Specific examples of the aromatic ring include aromatic hydrocarbon rings such as benzene, naphthalene, anthracene, and phenanthrene; and aromatic heterocyclic rings obtained by substituting part of carbon atoms constituting the above-described aromatic hydrocarbon ring with a hetero atom. Examples of the hetero atom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom. Specific examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Examples of the aromatic hydrocarbon group as Wax1 also include a group obtained by removing (nax1+1) hydrogen atoms from an aromatic compound including an aromatic ring (for example, biphenyl or fluorene) which may have two or more substituents.
Among the above, Wax1 is preferably a group obtained by removing (nax1+1) hydrogen atoms from benzene, naphthalene, anthracene, or biphenyl, more preferably a group obtained by removing (nax1+1) hydrogen atoms from benzene or naphthalene, and still more preferably a group obtained by removing (nax1+1) hydrogen atoms from benzene.
The aromatic hydrocarbon group as Wax1 may or may not have a substituent. Examples of the substituent include an alkyl group, an alkoxy group, a halogen atom, and a halogenated alkyl group. Examples of the alkyl group, the alkoxy group, the halogen atom, and the halogenated alkyl group, as the substituent, include the same ones as those described as the above-described substituent of the cyclic aliphatic hydrocarbon group as Yax1. The substituent is preferably a linear or branched alkyl group having 1 to 5 carbon atoms, more preferably a linear or branched alkyl group having 1 to 3 carbon atoms, still more preferably an ethyl group or a methyl group, and particularly preferably a methyl group. The aromatic hydrocarbon group as Wax1 preferably has no substituent.
In General Formula (a10-1), nax1 represents an integer of 1 or more, preferably an integer in a range of 1 to 10, more preferably an integer in a range of 1 to 5, still more preferably 1, 2, or 3, and particularly preferably 1 or 2.
Specific examples of the constitutional unit (a10) represented by General Formula (a10-1) are shown below.
In the formulae shown below, Ra represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
The constitutional unit (a10) contained in the component (A1) may be one kind or may be two or more kinds.
In a case where the component (A1) has the constitutional unit (a10), the proportion of the constitutional unit (a10) in the component (A1) is preferably in a range of 5% to 80% by mole, more preferably in a range of 10% to 75% by mole, still more preferably in a range of 30% to 70% by mole, and particularly preferably in a range of 40% to 60% by mole, with respect to the total (100% by mole) of all constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a10) is set to be in the above-described preferred range, the efficiency in the supply of protons into a resist film increases and the solubility in a developing solution can be easily ensured.
In Regard to Constitutional Unit (a2):
The component (A1) may further have, as necessary, a constitutional unit (a2) (provided that a group having the constitutional unit (a0) is excluded) including a lactone-containing cyclic group, an —SO2—-containing cyclic group, or a carbonate-containing cyclic group.
In a case where the component (A1) is used for forming a resist film, the lactone-containing cyclic group, the —SO2—-containing cyclic group, or the carbonate-containing cyclic group in the constitutional unit (a2) is effective for improving the adhesiveness of the resist film to the substrate. Further, due to having the constitutional unit (a2), lithography characteristics can be improved, for example, by the effects obtained by properly adjusting the acid diffusion length, increasing the adhesiveness of the resist film to the substrate, and properly adjusting the solubility during development.
The lactone-containing cyclic group for the constitutional unit (a2) is not particularly limited, and any lactone-containing cyclic group may be used. Specific examples thereof include groups each represented by General Formulae (a2-r-1) to (a2-r-7) shown below.
[In the formulae, each Ra′21 independently represents a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR″, —OC(═O)R″, a hydroxyalkyl group, or a cyano group; R″ represents a hydrogen atom, an alkyl group, a lactone-containing cyclic group, a carbonate-containing cyclic group, or a —SO2—-containing cyclic group; A″ represents an oxygen atom, a sulfur atom, or an alkylene group having 1 to 5 carbon atoms, which may contain an oxygen atom (—O—) or a sulfur atom (—S—); and n′ represents an integer in a range of 0 to 2, and m′ is 0 or 1.]
In General Formulae (a2-r-1) to (a2-r-7), the alkyl group as Ra′21 is preferably an alkyl group having 1 to 6 carbon atoms. The alkyl group is preferably a linear alkyl group or a branched alkyl group. Specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, a neopentyl group, and a hexyl group. Among these, a methyl group or ethyl group is preferable, and a methyl group is particularly preferable.
The alkoxy group as Ra′21 is preferably an alkoxy group having 1 to 6 carbon atoms. Further, the alkoxy group is preferably a linear or branched alkoxy group. Specific examples of the alkoxy groups include a group that is formed by linking the above-described alkyl group mentioned as the alkyl group represented by Ra′21 to an oxygen atom (—O—).
The halogen atom as Ra′21 is preferably a fluorine atom.
Examples of the halogenated alkyl group as Ra′21 include a group obtained by substituting part or all of hydrogen atoms in the above-described alkyl group as Ra′21 with the above-described halogen atom. The halogenated alkyl group is preferably a fluorinated alkyl group and particularly preferably a perfluoroalkyl group.
In —COOR″ and —OC(═O)R″ as Ra′21, R″ represents a hydrogen atom, an alkyl group, a lactone-containing cyclic group, a carbonate-containing cyclic group, or a —SO2—-containing cyclic group.
The alkyl group as R″ may be linear, branched, or cyclic, and preferably has 1 to carbon atoms.
In a case where R″ represents a linear or branched alkyl group, it is preferably an alkyl group having 1 to 10 carbon atoms, more preferably an alkyl group having 1 to 5 carbon atoms, and particularly preferably a methyl group or an ethyl group.
In a case where R″ represents a cyclic alkyl group, the cyclic alkyl group preferably has 3 to 15 carbon atoms, more preferably 4 to 12 carbon atoms, and most preferably 5 to 10 carbon atoms. Specific examples thereof include a group obtained by removing one or more hydrogen atoms from a monocycloalkane, which may be or may not be substituted with a fluorine atom or a fluorinated alkyl group; and a group obtained by removing one or more hydrogen atoms from a polycycloalkane such as a bicycloalkane, a tricycloalkane, or a tetracycloalkane. More specific examples thereof include a group obtained by removing one or more hydrogen atoms from a monocycloalkane such as cyclopentane or cyclohexane; and a group obtained by removing one or more hydrogen atoms from a polycycloalkane such as adamantane, norbomane, isobomane, tricyclodecane, or tetracyclododecane.
Examples of the lactone-containing cyclic group as R″ include the same ones as those each represented by General Formulae (a2-r-1) to (a2-r-7).
The carbonate-containing cyclic group as R″ has the same definition as that for the carbonate-containing cyclic group described below. Specific examples of the carbonate-containing cyclic group include groups each represented by General Formulae (ax3-r-1) to (ax3-r-3).
The —SO2—-containing cyclic group as R″ is the same a —SO2—-containing cyclic group described below. Specific examples thereof include groups each represented by General Formulae (a5-r-1) to (a5-r-4).
The hydroxyalkyl group as Ra′21 preferably has 1 to 6 carbon atoms, and specific examples thereof include a group obtained by substituting at least one hydrogen atom in the alkyl group as Ra′21 with a hydroxyl group.
In General Formulae (a2-r-2), (a2-r-3) and (a2-r-5), as the alkylene group having 1 to 5 carbon atoms as A″, a linear or branched alkylene group is preferable, and examples thereof include a methylene group, an ethylene group, an n-propylene group, and an isopropylene group. Specific examples of the alkylene groups that contain an oxygen atom or a sulfur atom include a group obtained by interposing —O— or —S— in the terminal of the alkylene group or between the carbon atoms of the alkylene group, and examples thereof include O—CH2—, —CH2—O—CH2—, —S—CH2—, and —CH2—S—CH2—. A″ is preferably an alkylene group having 1 to 5 carbon atoms or —O—, more preferably an alkylene group having 1 to 5 carbon atoms, and most preferably a methylene group.
Specific examples of the groups each represented by General Formulae (a2-r-1) to (a2-r-7) are shown below.
The “—SO2—-containing cyclic group” indicates a cyclic group having a ring containing —SO2— in the ring skeleton thereof. Specifically, the —SO2—-containing cyclic group is a cyclic group in which the sulfur atom (S) in —SO2— forms part of the ring skeleton of the cyclic group. In a case where a ring containing —SO2— in the ring skeleton thereof is counted as the first ring and the group contains only the ring, the group is referred to as a monocyclic group. In a case where the group further has other ring structures, such a group is referred to as a polycyclic group regardless of the structures. The —SO2—-containing cyclic group may be a monocyclic group or a polycyclic group.
Particularly, the —SO2—-containing cyclic group is preferably a cyclic group containing —O—SO2— in the ring skeleton thereof, in other words, a cyclic group containing a sultone ring in which —O—S— in the —O—SO2— group forms part of the ring skeleton thereof.
More specific examples of the —SO2—-containing cyclic group include groups each represented by General Formulae (a5-r-1) to (a5-r-4) shown below.
[In the formulae, each Ra′51 independently represent a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR″, —OC(═O)R″, a hydroxyalkyl group, or a cyano group; R″ represents a hydrogen atom, an alkyl group, a lactone-containing cyclic group, a carbonate-containing cyclic group, or a —SO2—-containing cyclic group; A″ represents an oxygen atom, a sulfur atom, or an alkylene group having 1 to 5 carbon atoms, which may contain an oxygen atom or a sulfur atom; and n′ represents an integer in a range of 0 to 2.]
In General Formulae (a5-r-1) and (a5-r-2), A″ has the same definition as that for A″ in General Formulae (a2-r-2), (a2-r-3) and (a2-r-5).
Examples of the alkyl group, the alkoxy group, the halogen atom, the halogenated alkyl group, —COOR″, —OC(═O)R″, and the hydroxyalkyl group, as Ra′51, include the same ones as those mentioned in the explanation of Ra′21 in General Formulae (a2-r-1) to (a2-r-7).
Specific examples of the groups each represented by General Formulae (a5-r-1) to (a5-r-4) are shown below. In the formulae shown below, “Ac” represents an acetyl group.
The “carbonate-containing cyclic group” indicates a cyclic group having a ring (a carbonate ring) containing —O—C(═O)—O— in the ring skeleton thereof. In a case where the carbonate ring is counted as the first ring and the group contains only the carbonate ring, the group is referred to as a monocyclic group. Further, in a case where the group has other ring structures, the group is referred to as a polycyclic group regardless of the structures. The carbonate-containing cyclic group may be a monocyclic group or a polycyclic group.
The carbonate ring-containing cyclic group is not particularly limited, and any carbonate ring-containing cyclic group may be used. Specific examples thereof include groups each represented by General Formulae (ax3-r-1) to (ax3-r-3) shown below.
[In the formulae, each Ra′31 independently represents a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR″, —OC(═O)R″, a hydroxyalkyl group, or a cyano group; R″ represents a hydrogen atom, an alkyl group, a lactone-containing cyclic group, a carbonate-containing cyclic group, or a —SO2—-containing cyclic group; A″ represents an oxygen atom, a sulfur atom, or an alkylene group having 1 to 5 carbon atoms, which may contain an oxygen atom or a sulfur atom; and p′ represents an integer in a range of 0 to 3, and q′ is 0 or 1.]
In General Formulae (ax3-r-2) and (ax3-r-3), A″ has the same definition as that for A″ in General Formulae (a2-r-2), (a2-r-3) and (a2-r-5).
Examples of the alkyl group, the alkoxy group, the halogen atom, the halogenated alkyl group, —COOR″, —OC(═O)R″, and the hydroxyalkyl group as Ra′31 each include the same ones as those mentioned in the explanation of Ra′21 in General Formulae (a2-r-1) to (a2-r-7).
Specific examples of the groups each represented by General Formulae (ax3-r-1) to (ax3-r-3) are shown below.
Among them, the constitutional unit (a2) is preferably a constitutional unit derived from acrylic acid ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent.
The constitutional unit (a2) is preferably a constitutional unit represented by General Formula (a2-1).
[In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Ya21 represents a single bond or a divalent linking group. La21 represents —O—, —COO—, —CON(R′)—, —OCO—, —CONHCO— or —CONHCS—, and R′ represents a hydrogen atom or a methyl group. However, in a case where La21 represents —O—, Ya21 does not represent —CO—. Ra21 represents a lactone-containing cyclic group, a carbonate-containing cyclic group, or a —SO2—-containing cyclic group.]
R in General Formula (a2-1) is the same as R in General Formula (a0-1). Examples of R in General Formula (a2-1) include the same ones as those mentioned in R in General Formula (a0-1), and preferred examples thereof are also the same.
In General Formula (a2-1), the divalent linking group as Ya21 is not particularly limited, and suitable examples thereof include a divalent hydrocarbon group which may have a substituent and a divalent linking group having a hetero atom. Examples of the divalent linking group in Ya21 include the same ones as those mentioned as Va01 in General Formula (a0-1).
Among the above, Ya21 is preferably a single bond, an ester bond [—C(═O)—O—], an ether bond (—O—), a linear or branched alkylene group, or a combination thereof.
In General Formula (a2-1), Ra2 represents a lactone-containing cyclic group, a —SO2—-containing cyclic group, or a carbonate-containing cyclic group.
Suitable examples of the lactone-containing cyclic group, the —SO2—-containing cyclic group, and the carbonate-containing cyclic group as Ra21 include groups each represented by General Formulae (a2-r-1) to (a2-r-7), groups each represented by General Formulae (a5-r-1) to (a5-r-4), and groups each represented by General Formulae (ax3-r-1) to (ax3-r-3) described above.
Among them, a lactone-containing cyclic group or a —SO2—-containing cyclic group is preferable, and any one of groups each represented by General Formula (a2-r-1), (a2-r-2), (a2-r-6), or (a5-r-1) is preferable. Specifically, any one of groups each represented by Chemical Formulae (r-1c-1-1) to (r-1c-1-7), (r-1c-2-1) to (r-1c-2-18), (r-1c-6-1), (r-s1-1-1), and (r-s1-1-18) is more preferable.
The constitutional unit (a2) contained in the component (A1) may be one kind or may be two or more kinds.
In a case where the component (A1) has the constitutional unit (a2), the proportion of the constitutional unit (a2) is preferably in a range of 5% to 50% by mole, more preferably in a range of 10% to 40% by mole, still more preferably in a range of 15% to 35% by mole, and particularly preferably in a range of 20% to 30% by mole with respect to the total (100% by mole) of all constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a2) is equal to or larger than the lower limit value of the preferred range, the effect that is obtained by allowing the constitutional unit (a2) to be contained can be sufficiently achieved by the effect described above. In a case where it is equal to or smaller than the upper limit value of the preferred range, the balance with other constitutional units can be obtained, and various lithography characteristics are improved.
In regard to constitutional unit (a3):
The component (A1) may further have a constitutional unit (a3) (provided that a constitutional unit corresponding to the constitutional unit (a1) or the constitutional unit (a2) is excluded) containing a polar group-containing aliphatic hydrocarbon group, as necessary. In a case where the component (A1) has the constitutional unit (a3), the hydrophilicity of the component (A) is increased, which contributes to an improvement in resolution. Further, acid diffusion length can be properly adjusted.
Examples of the polar group include a hydroxyl group, a cyano group, a carboxy group, or a hydroxyalkyl group obtained by substituting part of hydrogen atoms of the alkyl group with a fluorine atom, and the polar group is particularly preferably a hydroxyl group.
Examples of the aliphatic hydrocarbon group include a linear or branched hydrocarbon group (preferably an alkylene group) having 1 to 10 carbon atoms, and a cyclic aliphatic hydrocarbon group (a cyclic group). The cyclic group may be a monocyclic group or a polycyclic group. For example, these cyclic groups can be appropriately selected from a large number of groups that have been proposed in resins for a resist composition for an ArF excimer laser.
In a case where the cyclic group is a monocyclic group, the monocyclic group preferably has 3 to 10 carbon atoms. Among them, a constitutional unit derived from an acrylic acid ester that includes an aliphatic monocyclic group containing a hydroxyl group, cyano group, carboxy group, or a hydroxyalkyl group obtained by substituting part of hydrogen atoms of the alkyl group with a fluorine atom is more preferable. Examples of the monocyclic group include a group obtained by removing two or more hydrogen atoms from a monocycloalkane. Specific examples of the monocyclic group include a group obtained by removing two or more hydrogen atoms from a monocycloalkane such as cyclopentane, cyclohexane, or cyclooctane. Among these monocyclic groups, a group obtained by removing two or more hydrogen atoms from cyclopentane or a group obtained by removing two or more hydrogen atoms from cyclohexane are industrially preferable.
In a case where the cyclic group is a polycyclic group, the polycyclic group preferably has 7 to 30 carbon atoms. Among them, a constitutional unit derived from an acrylic acid ester that includes an aliphatic polycyclic group containing a hydroxyl group, cyano group, carboxy group, or a hydroxyalkyl group obtained by substituting part of hydrogen atoms of the alkyl group with a fluorine atom is more preferable. Examples of the polycyclic group include a group obtained by removing two or more hydrogen atoms from a bicycloalkane, a tricycloalkane, a tetracycloalkane, or the like. Specific examples thereof include a group obtained by removing two or more hydrogen atoms from a polycycloalkane such as adamantane, norbornane, isobomane, tricyclodecane, or tetracyclododecane. Among these polycyclic groups, a group obtained by removing two or more hydrogen atoms from adamantane, a group obtained by removing two or more hydrogen atoms from norbornane, or a group obtained by removing two or more hydrogen atoms from tetracyclododecane are industrially preferable.
The constitutional unit (a3) is not particularly limited, and any constitutional unit may be used as long as the constitutional unit contains a polar group-containing aliphatic hydrocarbon group.
The constitutional unit (a3) is preferably a constitutional unit derived from an acrylic acid ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent, where the constitutional unit contains a polar group-containing aliphatic hydrocarbon group.
In a case where the hydrocarbon group in the polar group-containing aliphatic hydrocarbon group is a linear or branched hydrocarbon group having 1 to 10 carbon atoms, the constitutional unit (a3) is preferably a constitutional unit derived from a hydroxyethyl ester of acrylic acid.
Further, as the constitutional unit (a3), in a case where the hydrocarbon group in the polar group-containing aliphatic hydrocarbon group is a polycyclic group, a constitutional unit represented by General Formula (a3-1), a constitutional unit represented by General Formula (a3-2), or a constitutional unit represented by General Formula (a3-3) is preferable, and in a case where the hydrocarbon group is a monocyclic group, a constitutional unit represented by General Formula (a3-4) is preferable.
[In the formulae, R has the same definition as described above, j represents an integer in a range of 1 to 3, k represents an integer in a range of 1 to 3, t′ represents an integer in a range of 1 to 3, 1 represents an integer in a range of 0 to 5, and s represents an integer in a range of 1 to 3.]
In General Formula (a3-1), j preferably represents 1 or 2 and more preferably 1. In a case where j represents 2, it is preferable that the hydroxyl groups be bonded to the 3-position and 5-position of the adamantyl group. In a case where j represents 1, it is preferable that the hydroxyl group be bonded to the 3-position of the adamantyl group. It is preferable that j represent 1, and it is particularly preferable that the hydroxyl group be bonded to the 3-position of the adamantyl group.
In General Formula (a3-2), k preferably represents 1. The cyano group is preferably bonded to the 5-position or 6-position of the norbornyl group.
In General Formula (a3-3), it is preferable that t′ represent 1. It is preferable that 1 represent 1. It is preferable that s represent 1. Further, it is preferable that a 2-norbornyl group or 3-norbornyl group be bonded to the terminal of the carboxy group of the acrylic acid. It is preferable that the fluorinated alkyl alcohol be bonded to the 5-position or 6-position of the norbornyl group.
In General Formula (a3-4), it is preferable that t′ represent 1 or 2. It is preferable that 1 represent 0 or 1. It is preferable that s represent 1. It is preferable that the fluorinated alkyl alcohol be bonded to the 3-position or 5-position of the cyclohexyl group.
The constitutional unit (a3) contained in the component (A1) may be one kind or may be two or more kinds.
In a case where the component (A1) has the constitutional unit (a3), the proportion of the constitutional unit (a3) is preferably in a range of 1% to 30% by mole, more preferably in a range of 2% to 25% by mole, and still more preferably in a range of 5% to 20% by mole, with respect to the total (100% by mole) of all constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a3) is equal to or larger than the lower limit value of the preferred range, the effect obtained by allowing the constitutional unit (a3) to be contained can be sufficiently achieved by the effect described above. In a case where it is equal to or smaller than the upper limit value of the preferred range, the balance with other constitutional units can be obtained, and various lithography characteristics are improved.
In regard to constitutional unit (a4):
The component (A1) may have a constitutional unit (a4) including an acid non-dissociable aliphatic cyclic group.
In a case where the component (A1) has the constitutional unit (a4), the dry etching resistance of the formed resist pattern is improved. Further, the hydrophobicity of the component (A) increases. The improvement in hydrophobicity contributes to the improvement in resolution, a resist pattern shape, and the like, particularly in the case of a solvent developing process.
The “acid non-dissociable cyclic group” in the constitutional unit (a4) is a cyclic group that remains in the constitutional unit without being dissociated even when an acid acts in a case where the acid is generated in the resist composition upon exposure (for example, in a case where acid is generated from the constitutional unit or the component (B) that generates acid upon exposure).
Examples of the constitutional unit (a4) preferably include a constitutional unit derived from an acrylic acid ester including an acid non-dissociable aliphatic cyclic group. As the cyclic group, many cyclic groups known in the related art as the cyclic group used as a resin component of a resist composition for an ArF excimer laser, a KrF excimer laser (preferably an ArF excimer laser), or the like can be used.
The cyclic group is particularly preferably at least one selected from a tricyclodecyl group, an adamantyl group, a tetracyclododecyl group, an isobornyl group, and a norbornyl group, from the viewpoint of industrial availability. These polycyclic groups may have, as a substituent, a linear or branched alkyl group having 1 to 5 carbon atoms.
Specific examples of the constitutional unit (a4) include constitutional units each represented by General Formulae (a4-1) to (a4-7).
[In the formula, Ra is the same as above.]
The constitutional unit (a4) contained in the component (A1) may be one kind or may be two or more kinds.
In a case where the component (A1) has the constitutional unit (a4), the proportion of the constitutional unit (a4) is preferably in a range of 1% to 40% by mole and more preferably in a range of 5% to 20% by mole, with respect to the total (100% by mole) of all constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a4) is equal to or larger than the lower limit value of the preferred range, the effect that is obtained by allowing the constitutional unit (a4) to be contained can be sufficiently achieved. In a case where the proportion of the constitutional unit (a4) is equal to or smaller than the upper limit value of the preferred range, the balance with other constitutional units is obtained easily.
In regard to constitutional unit (st):
The constitutional unit (st) is a constitutional unit derived from styrene or a styrene derivative. The “constitutional unit derived from styrene” means a constitutional unit that is formed by the cleavage of an ethylenic double bond of styrene. The “constitutional unit derived from a styrene derivative” means a constitutional unit (provided that a constitutional unit corresponding to the constitutional unit (a10) is excluded) formed by the cleavage of an ethylenic double bond of a styrene derivative.
The “styrene derivative” means a compound in which at least part of hydrogen atoms of styrene are substituted with a substituent. Examples of the styrene derivative include a derivative in which the hydrogen atom at the α-position of styrene is substituted with a substituent, a derivative in which one or more hydrogen atoms of the benzene ring of styrene are substituted with a substituent, and a derivative in which the hydrogen atom at the α-position of styrene and one or more hydrogen atoms of the benzene ring are substituted with a substituent.
Examples of the substituent that is substituted for the hydrogen atom at the α-position of styrene include an alkyl group having 1 to 5 carbon atoms or a halogenated alkyl group having 1 to 5 carbon atoms.
The alkyl group having 1 to 5 carbon atoms is preferably a linear or branched alkyl group having 1 to 5 carbon atoms, and specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group.
The halogenated alkyl group having 1 to 5 carbon atoms is a group obtained by substituting part or all of hydrogen atoms in the alkyl group having 1 to 5 carbon atoms with a halogen atom. The halogen atom is particularly preferably a fluorine atom.
The substituent that is substituted for the hydrogen atom at the α-position of styrene is preferably an alkyl group having 1 to 5 carbon atoms or a fluorinated alkyl group having 1 to 5 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms or a fluorinated alkyl group having 1 to 3 carbon atoms, and still more preferably a methyl group from the viewpoint of industrial availability.
Examples of the substituent that is substituted for the hydrogen atom of the benzene ring of styrene include an alkyl group, an alkoxy group, a halogen atom, and a halogenated alkyl group.
The alkyl group as the substituent is preferably an alkyl group having 1 to 5 carbon atoms, and more preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group.
The alkoxy group as the substituent is preferably an alkoxy group having 1 to 5 carbon atoms, more preferably a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, or a tert-butoxy group, and still more preferably a methoxy group or an ethoxy group.
The halogen atom as the substituent is preferably a fluorine atom.
Examples of the halogenated alkyl group as the substituent include a group obtained by substituting part or all of hydrogen atoms in the above-described alkyl group with the above-described halogen atom.
The substituent that is substituted for the hydrogen atom of the benzene ring of styrene is preferably an alkyl group having 1 to 5 carbon atoms, more preferably a methyl group or an ethyl group, and still more preferably a methyl group.
The constitutional unit (st) is preferably a constitutional unit derived from styrene or a constitutional unit derived from a styrene derivative obtained by substituting a hydrogen atom at the α-position of styrene with an alkyl group having 1 to 5 carbon atoms or a halogenated alkyl group having 1 to 5 carbon atoms, more preferably a constitutional unit derived from styrene, or a constitutional unit derived from a styrene derivative obtained by substituting a hydrogen atom at the α-position of styrene with a methyl group, and still more preferably a constitutional unit derived from styrene.
The constitutional unit (st) contained in the component (A1) may be one kind or may be two or more kinds.
In a case where the component (A1) has the constitutional unit (st), the proportion of the constitutional unit (st) is preferably in a range of 1% to 30% by mole and more preferably in a range of 3% to 20% by mole with respect to the total (100% by mole) of all constitutional units constituting the component (A1).
The component (A1) contained in the resist composition may be used alone or in a combination of two or more kinds thereof.
In the resist composition according to the present embodiment, examples of the component (A1) include a polymeric compound having a repeating structure of the constitutional unit (a0).
The preferred component (A1) contains a polymeric compound having a repeating structure of the constitutional unit (a0) and a constitutional unit other than the constitutional unit (a0). Examples of the component (A1) include a polymeric compound having a repeating structure of the constitutional unit (a0) and the constitutional unit (a1).
In addition to the combination of the above two constitutional units, the constitutional units described above may be appropriately combined as a third constitutional unit or three or more constitutional units in accordance with the desired effect. Examples of the component (A1) include a polymeric compound having a repeating structure of the constitutional unit (a0), the constitutional unit (a1), and the constitutional unit (a2); and a polymeric compound having a repeating structure of the constitutional unit (a0), the constitutional unit (a1), and the constitutional unit (a3).
Among those, as the component (A1), the polymeric compound having a repeating structure of the constitutional unit (a0) and the constitutional unit (a1) is preferable.
In this case, the molar ratio of the constitutional unit (a0) to the constitutional unit (a1) in the polymeric compound (the constitutional unit (a0): the constitutional unit (a1)) is preferably in a range of 2:8 to 8:2, more preferably in a range of 3:7 to 7:3, and still more preferably in a range of 4:6 to 6:4.
The component (A1) can be produced by dissolving, in a polymerization solvent, each monomer from which the constitutional unit is derived, and adding thereto a radical polymerization initiator such as azobisisobutyronitrile (AIBN) or dimethyl azobisisobutyrate (for example, V-601) to carry out polymerization.
Alternatively, the component (A1) can be produced by dissolving, in a polymerization solvent, a monomer from which the constitutional unit (a0) is derived and, as necessary, a monomer from which a constitutional unit other than the constitutional unit (a0) is derived, adding thereto a radical polymerization initiator such as described above to carry out polymerization, and then carrying out a deprotection reaction.
Further, a —C(CF3)2—OH group may be introduced into the terminal thereof during the polymerization using a chain transfer agent such as HS—CH2—CH2—CH2—C(CF3)2—OH in combination. As described above, a copolymer into which a hydroxyalkyl group, formed by substitution of part of hydrogen atoms in the alkyl group with fluorine atoms, has been introduced is effective for reducing development defects and reducing line edge roughness (LER: uneven irregularities of a line side wall).
The weight-average molecular weight (Mw) (based on the polystyrene-equivalent value determined by gel permeation chromatography (GPC)) of the component (A1), which is not particularly limited, is preferably in a range of 1,000 to 50,000, more preferably in a range of 2,000 to 30,000, and still more preferably in a range of 3,000 to 20,000.
In a case where Mw of the component (A1) is equal to or smaller than the upper limit value of this preferred range, sufficient solubility in the resist solvent is exhibited in a case of being used as a resist. On the other hand, in a case where Mw thereof is equal to or larger than the lower limit value of this preferred range, the dry etching resistance and the cross-sectional shape of the resist pattern become excellent.
The polydispersity (Mw/Mn) of the component (A1) is not particularly limited; however, it is preferably in a range of 1.0 to 4.0, more preferably in a range of 1.0 to 3.0, and particularly preferably in a range of 1.0 to 2.0. Mn represents the number-average molecular weight.
In Regard to Component (A2)
In the resist composition according to the present embodiment, a base material component (hereinafter, referred to as a “component (A2)”) that exhibits changed solubility in a developing solution under action of acid, which does not correspond to the component (A1), may be used in combination as the component (A).
The component (A2) is not particularly limited and may be freely selected and used from a large number of base material components known in the related art for the chemically amplified resist composition.
As the component (A2), a polymeric compound or a low-molecular-weight compound may be used alone or in a combination of two or more kinds thereof.
The proportion of the component (A1) in the component (A) is preferably 25% by mass or more, more preferably 50% by mass or more, still more preferably 75% by mass or more, and may be 100% by mass with respect to the total mass of the component (A). In a case where the proportion is 25% by mass or more, it is easy to form a resist pattern having various excellent lithography characteristics such as higher sensitivity and improvements in terms of defects, resolution, and roughness.
The content of the component (A) in the resist composition according to the present embodiment may be adjusted depending on the resist film thickness to be formed.
<Acid Generator Component (B)>
The resist composition according to the present embodiment further contains an acid generator component (B) (a component (B)) that generates acid upon exposure in addition to the component (A). In the present embodiment, the component (B) contains a compound (B1) represented by General Formula (b1) (hereinafter, also referred to as a “component (B1)”).
In Regard to Component (B1)
The component (B1) is a compound represented by General Formula (b1). The lithography characteristics such as sensitivity and defect amelioration can be improved using the component (B1) with the component (A1) having the constitutional unit (a0) described above.
[In the formula, Yb01 represents a divalent linking group or a single bond. Lb01 represents —C(═O)—O—, —O—C(═O)—, —O—, or —O—C(═O)-Lb011-, and Lb011 represents an alkylene group having 1 to 3 carbon atoms. Rb01 to Rb03 each independently represents an alkyl group, and two or more of Rb01 to Rb03 may be bonded to each other to form a ring structure. Rb04 to Rb06 each independently represents an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, or a nitro group. nb04 represents an integer in a range of 0 to 4, and nb05 and nb06 each independently represents an integer in a range of 0 to 5. X− represents a counter anion.]
{Cation Moiety}
In General Formula (b1), Yb01 represents a divalent linking group or a single bond. The divalent linking group as Yb01 is not particularly limited, and suitable examples thereof include a divalent hydrocarbon group which may have a substituent, and a divalent linking group having hetero atoms. Examples of the divalent linking group in Yb01 include the same ones as those mentioned as Va01 in General Formula (a0-1).
Among them, the divalent linking group as Yb01 is preferably a hydrocarbon group which may contain an oxygen atom. The hydrocarbon group preferably has 1 to carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 3 carbon atoms, and particularly preferably 1 or 2 carbon atoms. The hydrocarbon group is preferably an aliphatic hydrocarbon group, more preferably a linear or branched aliphatic hydrocarbon group, and still more preferably a linear or branched alkylene group.
Yb01 is preferably a single bond or a linear or branched alkylene group having 1 to 6 carbon atoms, which may contain an ether bond or an ester bond, more preferably a single bond or a linear or branched alkylene group having 1 to 3 carbon atoms, which may contain an ether bond or an ester bond, and still more preferably a single bond, —O—CH2—, —C(═O)—O—CH2—, or —O—CH2—C(═O)—O—CH2—.
In General Formula (b1), Lb01 represents —C(═O)—O—, —O—C(═O)—, —O—, or —O—C(═O)-Lb011-, and Lb011 represents an alkylene group having 1 to 3 carbon atoms. Lb011 is preferably an ethylene group or a methylene group, and more preferably a methylene group.
Lb01 is preferably-C(═O)—O— or —O—C(═O)—, and more preferably —C(═O)—O—.
In General Formula (b1), Rb01 to Rb03 each independently represents an alkyl group, and two or more of Rb01 to Rb03 may be bonded to each other to form a ring structure. The alkyl group as Rb01 to Rb03 preferably has 1 to 12 carbon atoms, and more preferably 2 to 10 carbon atoms. Regarding Rb01 to Rb03, the total number of carbon atoms thereof is preferably 5 or more, and more preferably 6 or more. The alkyl group as Rb01 to Rb03 may be linear, may be branched, or may be cyclic.
The linear alkyl group preferably has 1 to 10 carbon atoms and more preferably 1 to 6 carbon atoms. Specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, an n-pentyl group, and an n-hexyl group.
The branched alkyl group preferably has 3 to 10 carbon atoms and more preferably 3 to 6 carbon atoms. Specific examples thereof include an isopropyl group, an isobutyl group, a tert-butyl group, an isopentyl group, a neopentyl group a 1,1-diethylpropyl group, and a 2,2-dimethylbutyl group.
The cyclic alkyl group preferably has 3 to 12 carbon atoms and more preferably 3 to 10 carbon atoms. Specific examples of the cyclic alkyl group may be monocyclic or polycyclic. As the preferred monocycloalkane, the monocyclic alkyl group is preferably a group having 3 to 6 carbon atoms, obtained by removing one hydrogen atom from a monocycloalkane, and specific examples thereof include cyclopentane and cyclohexane. The polycyclic group-type alkyl group is preferably a group obtained by removing one hydrogen atom from a polycycloalkane. The polycycloalkane is preferably a group having 7 to 12 carbon atoms, and specific examples thereof include adamantane, norbomane, isobomane, tricyclodecane, and tetracyclododecane.
Two or more of Rb01 to Rb03 may be bonded to each other to form a ring structure. The ring structure formed by mutual bonding of two or more of Rb01 to Rb03 preferably has 3 to 20 carbon atoms, more preferably 4 to 15 carbon atoms, and still more preferably 5 to 12 carbon atoms. Examples of the ring structure include the same ones as those mentioned as the cyclic alkyl group as Rb01 to Rb03.
It is preferable that two or more of Rb01 to Rb03 be bonded to each other to form a ring structure. The ring structure preferably has 5 to 20 carbon atoms, more preferably 5 to 15 carbon atoms, and still more preferably 5 to 12 carbon atoms. Specific examples of the ring structure include a cyclopentyl group, a cyclohexyl group, an adamantyl group, and a norbonyl group. Among them, the ring structure is preferably a cyclopentyl group, a cyclohexyl group, or an adamantyl group.
In General Formula (b1), Rb04 to Rb06 each independently represents an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, or a nitro group. The alkyl group, the alkoxy group, and the halogenated alkyl group preferably have 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 3 carbon atoms, and particularly preferably 1 or 2 carbon atoms. The alkyl group, the alkoxy group, and the halogenated alkyl group may be linear, may be branched, or may be cyclic; however, they are preferably linear or branched, and more preferably linear. The halogen atom as the above-described halogen atom and in the above-described halogenated alkyl group is preferably a fluorine atom.
nb04 represents an integer in a range of 0 to 4. nb04 is preferably an integer in a range of 0 to 3 and more preferably an integer in a range of 0 to 2. nb05 and nb06 each independently represents an integer in a range of 0 to 5. nb05 to nb06 are preferably an integer in a range of 0 to 3, more preferably an integer in a range of 0 to 2, and still more preferably 0 or 1.
The cation moiety of the compound represented by General Formula (b1) is preferably a cation represented by General Formula (b1-ca).
[In the formula, Yb011 represents a divalent linking group represented by any one of General Formulae (ca-y1-1) to (ca-y1-5). Rb011 represents a cyclic alkyl group which may have a substituent. Rb04 to Rb06 and nb04 are the same as those in General Formula (b1).]
[In the formula, * is a bonding site to which a carbon atom of the phenyl group in General Formula (b1-ca) is bonded. ** is a bonding site to which Rb011 in General Formula (b1-ca) is bonded.]
Yb011 in General Formula (b1-ca) represents a divalent linking group represented by any one of General Formulae (ca-y1-1) to (ca-y1-5). Yb011 is preferably a group represented by General Formula (ca-y1-1) or Formula (ca-y1-2).
Rb011 in General Formula (b1-ca) represents a cyclic alkyl group which may have a substituent. The cyclic alkyl group preferably has 5 to 20 carbon atoms, more preferably 5 to 15 carbon atoms, and still more preferably 5 to 12 carbon atoms. The cyclic alkyl group may be a monocyclic group or may be a polycyclic group. Specific examples of the cyclic alkyl group include the same one as the cyclic alkyl group mentioned as the ring structure formed by mutual bonding of two or more of Rb01 to Rb03 in General Formula (b1).
Examples of the substituent which may be contained in the cyclic alkyl group as Rb011 include a linear or branched alkyl group. The linear or branched alkyl group as the substituent preferably has 1 to 5 carbon atoms, more preferably 1 to 3 carbon atoms, and still more preferably 1 or 2 carbon atoms.
Specific examples of the cation moiety in the compound represented by General Formula (b1-ca) are shown below.
Among them, the cation moiety is preferably the cation represented by any one of General Formulae (b1-ca-2) to (b1-ca-14), and more preferably the cation represented by any one of General Formulae (b1-ca-2) to (b1-ca-11).
{Anion Moiety}
In General Formula (b1), X− represents a counter anion. X− is not particularly limited, and an anion known as the anion moiety of an acid generator component for a resist composition can be appropriately used.
Examples of X include an anion represented by any one of General Formulae (b1-an1) to (b1-an3).
[In the formulae, R101 and R104 to R108 each independently represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent. R104 and R105 may be bonded to each other to form a ring structure. R102 represents a fluorinated alkyl group having 1 to 5 carbon atoms or a fluorine atom. Y101 represents a divalent linking group containing an oxygen atom or a single bond. V101 to V103 each independently represents a single bond, an alkylene group, or a fluorinated alkylene group. L101 and L102 each independently represents a single bond or an oxygen atom. L103 to L105 each independently represents a single bond, —CO—, or —SO2—.]
{Anion Moiety}
Anion Represented by General Formula (b-an1) In General Formula (b-an1), R101 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent.
Cyclic Group which May have Substituent:
The cyclic group is preferably a cyclic hydrocarbon group, and the cyclic hydrocarbon group may be an aromatic hydrocarbon group or an aliphatic hydrocarbon group. The aliphatic hydrocarbon group indicates a hydrocarbon group that has no aromaticity. The aliphatic hydrocarbon group may be saturated or unsaturated. In general, it is preferable that the aliphatic hydrocarbon group be saturated.
The aromatic hydrocarbon group as R101 is a hydrocarbon group having an aromatic ring. The aromatic hydrocarbon group preferably has 3 to 30 carbon atoms, more preferably 5 to 30, still more preferably 5 to 20, particularly preferably 6 to 15, and most preferably 6 to 10. However, the number of carbon atoms in a substituent is not included in the number of carbon atoms.
Specific examples of the aromatic ring contained in the aromatic hydrocarbon group as R101 include benzene, fluorene, naphthalene, anthracene, phenanthrene, biphenyl, and an aromatic heterocyclic ring obtained by substituting part of carbon atoms constituting one of these aromatic rings with a hetero atom. Examples of the hetero atom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom.
Specific examples of the aromatic hydrocarbon group as R101 include a group (an aryl group such as a phenyl group or a naphthyl group) obtained by removing one hydrogen atom from the above-described aromatic ring and a group (an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, 1-naphthylethyl group, or a 2-naphthylethyl group) obtained by substituting one hydrogen atom in the aromatic ring with an alkylene group. The alkylene group (an alkyl chain in the arylalkyl group) preferably has 1 to 4 carbon atoms, more preferably 1 or 2 carbon atoms, and particularly preferably 1 carbon atom.
Examples of the cyclic aliphatic hydrocarbon group as R101 include aliphatic hydrocarbon groups containing a ring in the structure thereof.
Examples of the aliphatic hydrocarbon group containing a ring in the structure thereof include an alicyclic hydrocarbon group (a group obtained by removing one hydrogen atom from an aliphatic hydrocarbon ring), a group obtained by bonding the alicyclic hydrocarbon group to the terminal of a linear or branched aliphatic hydrocarbon group, and a group obtained by interposing the alicyclic hydrocarbon group is in a linear or branched aliphatic hydrocarbon group.
The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms and more preferably 3 to 12 carbon atoms.
The alicyclic hydrocarbon group may be a polycyclic group or a monocyclic group. The monocyclic alicyclic hydrocarbon group is preferably a group obtained by removing one or more hydrogen atoms from a monocycloalkane. The monocycloalkane preferably has 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane. The polycyclic alicyclic hydrocarbon group is preferably a group obtained by removing one or more hydrogen atoms from a polycycloalkane, and the polycycloalkane preferably has 7 to 30 carbon atoms. Among the above, the polycycloalkane is more preferably a polycycloalkane having a bridged ring-based polycyclic skeleton, such as adamantane, norbomane, isobomane, tricyclodecane, or tetracyclododecane; or a polycycloalkane having a condensed ring-based polycyclic skeleton, such as a cyclic group having a steroid skeleton.
Among them, the cyclic aliphatic hydrocarbon group as R101 is preferably a group obtained by removing one or more hydrogen atoms from a monocycloalkane or a polycycloalkane, more preferably a group obtained by removing one hydrogen atom from a polycycloalkane, particularly preferably an adamantyl group or a norbomyl group, and most preferably an adamantyl group.
The linear aliphatic hydrocarbon group which may be bonded to the alicyclic hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and most preferably 1 to 3 carbon atoms. The linear aliphatic hydrocarbon group is preferably a linear alkylene group, and specific examples thereof include a methylene group [—CH2—], an ethylene group [—(CH2)2—], a trimethylene group [—(CH2)3—], a tetramethylene group [—(CH2)4—], and a pentamethylene group [—(CH2)5—].
The branched aliphatic hydrocarbon group which may be bonded to the alicyclic hydrocarbon group preferably has 2 to 10 carbon atoms, more preferably 3 to 6 carbon atoms, still more preferably 3 or 4 carbon atoms, and most preferably 3 carbon atoms. The branched aliphatic hydrocarbon group is preferably a branched alkylene group, and specific examples thereof include alkylalkylene groups, for example, alkylmethylene groups such as —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH2CH3)—, —C(CH3)(CH2CH2CH3)—, and —C(CH2CH3)2—; alkylethylene groups such as —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, —CH(CH2CH3)CH2—, and —C(CH2CH3)2—CH2—; alkyltrimethylene groups such as —CH(CH3)CH2CH2—, and —CH2CH(CH3)CH2—; and alkyltetramethylene groups such as —CH(CH3)CH2CH2CH2—, and —CH2CH(CH3)CH2CH2—. The alkyl group in the alkylalkylene group is preferably a linear alkyl group having 1 to 5 carbon atoms.
The cyclic hydrocarbon group as R101 may contain a hetero atom such as a heterocyclic ring. Specific examples thereof include lactone-containing cyclic groups each represented by General Formulae (a2-r-1) to (a2-r-7), —SO2—-containing cyclic groups each represented by General Formulae (a5-r-1) to (a5-r-4), and other heterocyclic groups each represented by Chemical Formulae (r-hr-1) to (r-hr-16). In the formulae, * represents a bonding site to which Y101 in General Formula (b-an1) is bonded.
Examples of the substituent of the cyclic group as R101 include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, and a nitro group.
The alkyl group as the substituent is preferably an alkyl group having 1 to 5 carbon atoms, and a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group is most preferable.
The alkoxy group as the substituent is preferably an alkoxy group having 1 to 5 carbon atoms, more preferably a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, or a tert-butoxy group, and most preferably a methoxy group or an ethoxy group.
The halogen atom as the substituent is preferably a fluorine atom.
Examples of the halogenated alkyl group as the substituent include a group obtained by substituting part or all of hydrogen atoms in an alkyl group having 1 to 5 carbon atoms such as a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group, with the above-described halogen atom.
The carbonyl group as the substituent is a group that is substituted for a methylene group (—CH2—) constituting the cyclic hydrocarbon group.
The cyclic hydrocarbon group as R101 may be a condensed cyclic group containing a condensed ring in which an aliphatic hydrocarbon ring and an aromatic ring are condensed. Examples of the condensed ring include a condensed ring in which one or more aromatic rings are condensed with a polycycloalkane having a bridged ring-based polycyclic skeleton. Specific examples of the bridged ring-based polycycloalkane include bicycloalkanes such as bicyclo[2.2.1]heptane (norbomane) and bicyclo[2.2.2]octane. The condensed cyclic group is preferably a group containing a condensed ring, in which two or three aromatic rings are condensed with a bicycloalkane, and more preferably a group containing a condensed ring, in which two or three aromatic rings are condensed with bicyclo[2.2.2]octane. Specific examples of the condensed cyclic group as R101 include those represented by General Formulae (r-br-1) to (r-br-2). In the formulae, * represents a bonding site to which Y101 in General Formula (b-an1) is bonded.
Examples of the substituent which may be contained in the condensed cyclic group as R101 include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, a nitro group, an aromatic hydrocarbon group, and an alicyclic hydrocarbon group.
Examples of the alkyl group, the alkoxy group, the halogen atom, and the halogenated alkyl group, as the substituent of the condensed cyclic group, include the same ones as those described as the substituent of the cyclic group as R101.
Examples of the aromatic hydrocarbon group as the substituent of the condensed cyclic group include a group obtained by removing one hydrogen atom from the above-described aromatic ring (an aryl group; for example, a phenyl group or a naphthyl group), a group obtained by substituting one hydrogen atom in the aromatic ring with an alkylene group (for example, an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, 1-naphthylethyl group, or a 2-naphthylethyl group), and heterocyclic groups each represented by General Formulae (r-hr-1) to (r-hr-6).
Examples of the alicyclic hydrocarbon group as the substituent of the condensed cyclic group include a group obtained by removing one hydrogen atom from a monocycloalkane such as cyclopentane or cyclohexane; a group obtained by removing one hydrogen atom from a polycycloalkane such as adamantane, norbornane, isobornane, tricyclodecane, or tetracyclododecane; lactone-containing cyclic groups each represented by General Formulae (a2-r-1) to (a2-r-7); —SO2—-containing cyclic groups each represented by General Formulae (a5-r-1) to (a5-r-4); and heterocyclic groups each represented by General Formulae (r-hr-7) to (r-hr-16).
Chain-like alkyl group which may have substituent:
The chain-like alkyl group as R101 may be linear or branched.
The linear alkyl group preferably has 1 to 20 carbon atoms, more preferably 1 to carbon atoms, and most preferably 1 to 10 carbon atoms.
The branched alkyl group preferably has 3 to 20 carbon atoms, more preferably 3 to 15, and most preferably 3 to 10. Specific examples thereof include a 1-methylethyl group, a 1-methylpropyl group, a 2-methylpropyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1-ethylbutyl group, a 2-ethylbutyl group, a 1-methylpentyl group, a 2-methylpentyl group, a 3-methylpentyl group, and a 4-methylpentyl group.
Chain-Like Alkenyl Group which May have Substituent:
A chain-like alkenyl group as R101 may be linear or branched, and the chain-like alkenyl group preferably has 2 to 10 carbon atoms, more preferably 2 to 5 carbon atoms, still more preferably 2 to 4 carbon atoms, and particularly preferably 3 carbon atoms. Examples of the linear alkenyl group include a vinyl group, a 1-propenyl group, a 2-propenyl group (an allyl group), and a butynyl group. Examples of the branched alkenyl group include a 1-methylvinyl group, a 1-methylpropenyl group, and a 2-methylpropenyl group.
Among the above, the chain-like alkenyl group is preferably a linear alkenyl group, more preferably a vinyl group or a propenyl group, and particularly preferably a vinyl group.
Examples of the substituent in the chain-like alkyl group or alkenyl group as R101, include an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, a nitro group, an amino group, and a cyclic group as R101.
Among the above, R101 is preferably a cyclic group which may have a substituent and more preferably a cyclic hydrocarbon group which may have a substituent. More specific examples of the cyclic hydrocarbon group preferably include a phenyl group, a naphthyl group, a group obtained by removing one or more hydrogen atoms from a polycycloalkane, lactone-containing cyclic groups each represented by General Formulae (a2-r-1) to (a2-r-7), and —SO2—-containing cyclic groups each represented by General Formulae (a5-r-1) to (a5-r-4).
In General Formula (b-an1), Y101 represents a single bond or a divalent linking group containing an oxygen atom.
In a case where Y101 represents a divalent linking group containing an oxygen atom, Y101 may contain an atom other than the oxygen atom. Examples of the atom other than the oxygen atom include a carbon atom, a hydrogen atom, a sulfur atom, and a nitrogen atom.
Examples of divalent linking groups containing an oxygen atom include non-hydrocarbon-based oxygen atom-containing linking groups such as an oxygen atom (an ether bond; —O—), an ester bond (—C(═O)—O—), an oxycarbonyl group (—O—C(═O)—), an amide bond (—C(═O)—NH—), a carbonyl group (—C(═O)—), or a carbonate bond (—O—C(═O)—O—); and a combination of the above-described non-hydrocarbon-based oxygen atom-containing linking groups with an alkylene group. Furthermore, a sulfonyl group (—SO2—) may be linked to the combination. Examples of such a divalent linking group containing an oxygen atom include linking groups each represented by General Formulae (y-a1-1) to (y-a1-7) shown below.
[In the formulae, V′101 represents a single bond or an alkylene group having 1 to carbon atoms, and V′102 represents a divalent saturated hydrocarbon group having 1 to carbon atoms.]
The divalent saturated hydrocarbon group as V′102 is preferably an alkylene group having 1 to 30 carbon atoms, more preferably an alkylene group having 1 to 10 carbon atoms, and still more preferably an alkylene group having 1 to 5 carbon atoms.
The alkylene group as V′101 and V′102 may be a linear alkylene group or a branched alkylene group, and a linear alkylene group is preferable.
Specific examples of the alkylene group as V′101 and V′102 include a methylene group [—CH2—]; an alkylmethylene group such as —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH2CH3)—, —C(CH3)(CH2CH2CH3)—, or —C(CH2CH3)2—; an ethylene group [—CH2CH2—]; an alkylethylene group such as —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, or —CH(CH2CH3)CH2—; a trimethylene group (n-propylene group) [—CH2CH2CH2—]; an alkyltrimethylene group such as —CH(CH3)CH2CH2— or —CH2CH(CH3)CH2—; a tetramethylene group [—CH2CH2CH2CH2—]; an alkyltetramethylene group such as —CH(CH3)CH2CH2CH2—, or —CH2CH(CH3)CH2CH2—; and a pentamethylene group [—CH2CH2CH2CH2CH2—].
Further, part of methylene groups in the alkylene group as V′101 and V′102 may be substituted with a divalent aliphatic cyclic group having 5 to 10 carbon atoms. The aliphatic cyclic group is preferably a divalent group obtained by removing one hydrogen atom from the cyclic aliphatic hydrocarbon group (a monocyclic aliphatic hydrocarbon group or a polycyclic aliphatic hydrocarbon group) as Ra′3 in General Formula (a1-r-1), and a cyclohexylene group, a 1,5-adamantylene group, or a 2,6-adamantylene group is more preferable.
Y101 preferably represents a divalent linking group containing an ester bond or a divalent linking group containing an ether bond and more preferably linking groups each represented by General Formulae (y-a1-1) to (y-a1-5).
In General Formula (b1-an1), V101 represents a single bond, an alkylene group, or a fluorinated alkylene group. The alkylene group and the fluorinated alkylene group as V101 preferably have 1 to 4 carbon atoms. Examples of the fluorinated alkylene group as V101 include a group obtained by substituting part or all of hydrogen atoms in the alkylene group as V101 with a fluorine atom. Among them, V101 is preferably a single bond or a fluorinated alkylene group having 1 to 4 carbon atoms.
In General Formula (b1-an1), R102 represents a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms. R102 is preferably a fluorine atom or a perfluoroalkyl group having 1 to 5 carbon atoms and more preferably a fluorine atom.
In a case where Y101 represents a single bond, specific examples of the anion moiety represented by General Formula (b1-an1) include a fluorinated alkylsulfonate anion such as a trifluoromethanesulfonate anion or a perfluorobutanesulfonate anion; and in a case where Y101 represents a divalent linking group containing an oxygen atom, specific examples thereof include an anion represented by any one of General Formulae (an-1) to (an-3) shown below.
[In the formula, R″101 represents an aliphatic cyclic group which may have a substituent, monovalent heterocyclic groups each represented by Chemical Formulae (r-hr-1) to (r-hr-6), a condensed cyclic group represented by General Formula (r-br-1) or (r-br-2), and a chain-like alkyl group which may have a substituent. R″102 is an aliphatic cyclic group which may have a substituent, a condensed cyclic group represented by General Formula (r-br-1) or (r-br-2), lactone-containing cyclic groups each represented by General Formulae (a2-r-1), (a2-r-3) to (a2-r-7), or —SO2—-containing cyclic groups each represented by General Formulae (a5-r-1) to (a5-r-4). R″103 represents an aromatic cyclic group which may have a substituent, an aliphatic cyclic group which may have a substituent, or a chain-like alkenyl group which may have a substituent. V″101 represents a single bond, an alkylene group having 1 to 4 carbon atoms, or a fluorinated alkylene group having 1 to 4 carbon atoms. R102 represents a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms. Each v″ independently represents an integer in a range of 0 to 3, each q″ independently represents an integer in a range of 0 to 20, and n″ represents 0 or 1.]
The aliphatic cyclic group as R″101, R″102, and R″103 which may have a substituent is preferably the group exemplified as the cyclic aliphatic hydrocarbon group as R101 in General Formula (b1-an1). Examples of the substituent include the same one as the substituent that may be substituted for the cyclic aliphatic hydrocarbon group as R101 in General Formula (b1-an1).
The aromatic cyclic group which may have a substituent, as R″103, is preferably the group exemplified as the aromatic hydrocarbon group for the cyclic hydrocarbon group as R101 in General Formula (b1-an1). Examples of the substituent include the same one as the substituent that may be substituted for the aromatic hydrocarbon group as R101 in General Formula (b1-an1).
The chain-like alkyl group as R″101, which may have a substituent, is preferably the group exemplified as the chain-like alkyl group as R101 in General Formula (b1-anil).
The chain-like alkenyl group as R″103, which may have a substituent, is preferably the group exemplified as the chain-like alkenyl group as R101 in General Formula (b1-an1).
Anion represented by General Formula (b1-an2) In General Formula (b1-an2), R104 and R105 each independently represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent, and examples thereof each include the same one as R101 in General Formula (b1-an1). However, R104 and R105 may be bonded to each other to form a ring.
R104 and R105 are preferably a chain-like alkyl group which may have a substituent and more preferably a linear or branched alkyl group or a linear or branched fluorinated alkyl group.
The chain-like alkyl group preferably has 1 to 10 carbon atoms, more preferably 1 to 7 carbon atoms, and still more preferably 1 to 3 carbon atoms. It is preferable that the number of carbon atoms in the chain-like alkyl group as R104 and R105 be small since the solubility in a resist solvent is also excellent in this range of the number of carbon atoms. Further, in the chain-like alkyl group as R104 and R105, it is preferable that the number of hydrogen atoms substituted with a fluorine atom be large since the acid strength increases and the transparency to high energy radiation of 250 nm or less or an electron beam is improved. The proportion of fluorine atoms in the chain-like alkyl group, that is, the fluorination rate is preferably in a range of 70% to 100% and more preferably in a range of 90% to 100%, and it is most preferable that the chain-like alkyl group be a perfluoroalkyl group obtained substituting all hydrogen atoms with a fluorine atom.
in General Formula (b-an2), V102 and V103 each independently represents a single bond, an alkylene group, or a fluorinated alkylene group, and examples thereof each include the same one as V101 in General Formula (b1-an1).
In General Formula (b1-an2), L101 and L102 each independently represents a single bond or an oxygen atom.
Anion Represented by General Formula (b1-an3)
In General Formula (b1-an3), R106 to R108 each independently represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent, and examples thereof each include the same one as R101 in General Formula (b1-an1).
In General Formula (b1-an3), L103 to L105 each independently represents a single bond, —CO—, or —SO2—.
Among the above examples, as the anion moiety of the component (B1), an anion represented by General Formula (b1-an1) is preferable. Among these, an anion represented by any one of General Formulae (an-1) to (an-3) is more preferable, an anion represented by any one of General Formula (an-1) or (an-2) is still more preferable, and an anion represented by General Formula (an-2) is particularly preferable.
Among the above, the component (B1) is preferably a compound represented by General Formula (b1-1).
[In the formula, Yb011 represents a divalent linking group represented by any one of General Formulae (ca-y1-1) to (ca-y1-5). Rb011 represents a cyclic alkyl group which may have a substituent. Rb04 to Rb06 each independently represents an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, or a nitro group. nb04 represents an integer in a range of 0 to 4, and nb05 and nb06 each independently represents an integer in a range of 0 to 5. R101 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent. R102 represents a fluorinated alkyl group having 1 to 5 carbon atoms or a fluorine atom. Y101 represents a divalent linking group containing an oxygen atom or a single bond. V101 is a single bond or an oxygen atom.]
Hereinafter, specific examples of the component (B1) will be described, but the present invention is not limited thereto.
In the resist composition according to the present embodiment, the component (B1) may be used alone or in a combination of two or more kinds thereof.
The content of the component (B1) in the resist composition according to the present embodiment is preferably less than 50 parts by mass, more preferably in a range of 1 to 40 parts by mass, and still more preferably in a range of 5 to 25 parts by mass, with respect to 100 parts by mass of the component (A). In a case where the content of the component (B1) is set to be within the above-described preferred range, the occurrence of defects can be further suppressed, and the effects of the present invention can be more easily obtained.
In Regard to Component (B2)
The resist composition according to the present embodiment may contain an acid generator component (hereinafter, also referred to as a “component (B2)”) other than the component (B1) as long as the effects of the present invention are not impaired.
The component (B2) is not particularly limited, and those which have been proposed so far as an acid generator for a chemically amplified resist composition in the related art can be used.
Examples of these acid generators are numerous and include onium salt-based acid generators such as iodonium salts and sulfonium salts; oxime sulfonate-based acid generators; diazomethane-based acid generators such as bisalkyl or bisaryl sulfonyl diazomethanes and poly(bis-sulfonyl)diazomethanes; nitrobenzyl sulfonate-based acid generators; iminosulfonate-based acid generators; and disulfonate-based acid generators.
<Acid Diffusion-Controlling Agent Component (D)>
The resist composition according to the present embodiment further contains an acid diffusion-controlling agent component (D) (a component (D)) in addition to the component (A) and the component (B). The component (D) acts as a quencher (an acid diffusion-controlling agent) that traps acid that is generated in the resist composition upon exposure. In the present embodiment, the component (D) contains a compound (D1) represented by General Formula (d1) (hereinafter, also referred to as a “component (D1)”).
In Regard to Component (D1)
The component (D1) is a compound represented by General Formula (d1). The lithography characteristics such as sensitivity and defect amelioration can be improved using the component (D1) together with the component (A1) having the constitutional unit (a0) above described and the component (B1).
[In the formula, Rd01 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent. However, a carbon atom adjacent to a sulfur atom in the formula has no fluorine atom bonded thereto. m represents an integer of 1 or more, and each Mm+ independently represents an m-valent organic cation.]
{Anion Moiety}
[In General Formula (d1), Rd01 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent.
Cyclic Group which May have Substituent:
The cyclic group is preferably a cyclic hydrocarbon group. The cyclic hydrocarbon group may be an aromatic hydrocarbon group or may be a cyclic aliphatic hydrocarbon group.
The aromatic hydrocarbon group preferably has 3 to 30 carbon atoms, more preferably 5 to 30 carbon atoms, still more preferably 5 to 20 carbon atoms, particularly preferably 6 to 15 carbon atoms, and most preferably 6 to 10 carbon atoms. Here, the number of carbon atoms in a substituent is not included in the number of carbon atoms.
Specific examples of the aromatic ring contained in the aromatic hydrocarbon group include benzene, fluorene, naphthalene, anthracene, phenanthrene, biphenyl, and an aromatic heterocyclic ring obtained by substituting part of carbon atoms constituting one of these aromatic rings with a hetero atom. Examples of the hetero atom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom.
Specific examples of the aromatic hydrocarbon group include a group obtained by removing one hydrogen atom from the above-described aromatic ring (an aryl group; for example, a phenyl group or a naphthyl group) and a group obtained by substituting one hydrogen atom in the aromatic ring with an alkylene group (for example, an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, 1-naphthylethyl group, or a 2-naphthylethyl group). The alkylene group (an alkyl chain in the arylalkyl group) preferably has 1 to 4 carbon atoms, more preferably 1 or 2 carbon atoms, and particularly preferably 1 carbon atom.
The cyclic aliphatic hydrocarbon group is an aliphatic hydrocarbon group containing a ring in the structure thereof. Examples of the cyclic aliphatic hydrocarbon group include an alicyclic hydrocarbon group (a group obtained by removing two hydrogen atoms from an aliphatic hydrocarbon ring), a group obtained by bonding an alicyclic hydrocarbon group to the terminal of the linear or branched aliphatic hydrocarbon group, and a group obtained by interposing an alicyclic hydrocarbon group in the linear or branched aliphatic hydrocarbon group.
The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms and more preferably 3 to 12 carbon atoms. The alicyclic hydrocarbon group may be a polycyclic group or a monocyclic group. The monocyclic alicyclic hydrocarbon group is preferably a group obtained by removing one or more hydrogen atoms from a monocycloalkane. The monocycloalkane preferably has 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane. The polycyclic alicyclic hydrocarbon group is preferably a group obtained by removing one or more hydrogen atoms from a polycycloalkane. The polycycloalkane preferably has 7 to 30 carbon atoms. Specific examples of the polycycloalkane include a polycycloalkane having a bridged ring-based polycyclic skeleton, such as adamantane, norbomane, isobomane, tricyclodecane, or tetracyclododecane; and a polycycloalkane having a condensed ring-based polycyclic skeleton, such as a cyclic group having a steroid skeleton.
Among them, the cyclic aliphatic hydrocarbon group is preferably a group obtained by removing one or more hydrogen atoms from a monocycloalkane or a polycycloalkane, more preferably a group obtained by removing one hydrogen atom from a poly cycloalkane, particularly preferably an adamantyl group or a norbornyl group, and most preferably an adamantyl group.
The linear or branched aliphatic hydrocarbon group which may be bonded to the alicyclic hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and particularly preferably 1 to 3 carbon atoms.
The linear aliphatic hydrocarbon group is preferably a linear alkylene group. The branched aliphatic hydrocarbon group is preferably a branched alkylene group having 2 to 10 carbon atoms. Specific examples of the linear or branched alkylene group include the same ones as those mentioned as Va01 in General Formula (a0-1).
The cyclic hydrocarbon group as Rd01 may be a cyclic hydrocarbon group having a hetero atom, such as a heterocyclic ring. Specific examples thereof include lactone-containing cyclic groups each represented by General Formulae (a2-r-1) to (a2-r-7), —SO2—-containing cyclic groups each represented by General Formulae (a5-r-1) to (a5-r-4), and other heterocyclic groups each represented by Chemical Formulae (r-hr-1) to (r-hr-16).
Examples of the substituent which may be contained in the cyclic group include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, and a nitro group.
The alkyl group as the substituent preferably has 1 to 5 carbon atoms, and it is more preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group.
The alkoxy group as the substituent preferably has 1 to 5 carbon atoms, and it is more preferably a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, or a tert-butoxy group, and still more preferably a methoxy group or an ethoxy group.
The halogen atom as the substituent is preferably a fluorine atom.
Examples of the halogenated alkyl group as the substituent include a group obtained by substituting part or all of hydrogen atoms in the above-described alkyl group having 1 to 5 carbon atoms with a halogen atom.
The carbonyl group as the substituent is a group that is substituted for a methylene group (—CH2—) constituting the cyclic hydrocarbon group.
Chain-like alkyl group which may have substituent:
The chain-like alkyl group may be linear or may be branched.
The linear alkyl group preferably has 1 to 20 carbon atoms, more preferably 1 to carbon atoms, and still more preferably 1 to 10 carbon atoms.
The branched alkyl group preferably has 3 to 20 carbon atoms, more preferably 3 to 15 carbon atoms, and still more preferably 3 to 10 carbon atoms. Specific examples thereof include a 1-methylethyl group, a 1-methylpropyl group, a 2-methylpropyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1-ethylbutyl group, a 2-ethylbutyl group, a 1-methylpentyl group, a 2-methylpentyl group, a 3-methylpentyl group, and a 4-methylpentyl group.
Chain-like alkenyl group which may have substituent:
The chain-like alkenyl group may be linear or may be branched. The chain-like alkenyl group preferably has 2 to 10 carbon atoms, more preferably 2 to 5 carbon atoms, still more preferably 2 to 4 carbon atoms, and particularly preferably 3 carbon atoms.
Examples of the linear alkenyl group include a vinyl group, a propenyl group (an allyl group), and a butynyl group. Examples of the branched alkenyl group include a 1-methylvinyl group, a 2-methylvinyl group, a 1-methylpropenyl group, and a 2-methylpropenyl group.
Among the above, the chain-like alkenyl group is preferably a linear alkenyl group, more preferably a vinyl group or a propenyl group, and still more preferably a vinyl group.
Examples of the substituent which may be contained in the chain-like alkyl group or alkenyl group include an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, a nitro group, an amino group, a cyclic group exemplified as the cyclic group as Rd01.
Here, the carbon atom adjacent to the S atom in Rd01 has no fluorine atom bonded thereto (the carbon atom adjacent to the S atom in Rd01 is not substituted with a fluorine atom). As a result, the anion of the component (D1) becomes an appropriately weak acid anion, thereby improving the quenching ability.
As Rd01, examples of the cyclic group which may have a substituent or the chain-like alkyl group which may have a substituent include those having the same structure as the acid-dissociable group represented by General Formula (a1-r-2), in addition to those described above.
Among the above, Rd01 is preferably a cyclic group which may have a substituent and more preferably a cyclic hydrocarbon group which may have a substituent. Preferred specific examples of Rd01 include a phenyl group, a naphthyl group, a group obtained by removing one or more hydrogen atoms from a polycycloalkane, lactone-containing cyclic groups each represented by General Formulae (a2-r-1) to (a2-r-7), and —SO2—-containing cyclic groups each represented by General Formulae (a5-r-1) to (a5-r-4).
Rd01 is preferably a chain-like alkyl group which may have a substituent or a cyclic aliphatic hydrocarbon group which may have a substituent. The chain-like alkyl group preferably has 1 to 10 carbon atoms and more preferably 3 to 10 carbon atoms. As the cyclic aliphatic hydrocarbon group, an alicyclic hydrocarbon group or a group in which an alicyclic hydrocarbon group is bonded to the terminal of a linear or branched alkylene group having 1 to 5 carbon atoms is preferable. As the alicyclic hydrocarbon group, a group obtained by removing one or more hydrogen atoms from adamantane, norbomane, isobomane, tricyclodecane, tetracyclododecane, or the like (which may have a substituent); a group obtained by removing one or more hydrogen atoms from camphor; or a lactone-containing cyclic group represented by any of General Formulae (a2-r-1) to (a2-r-7) is preferable. Among these, as the alicyclic hydrocarbon group, a group in which one hydrogen atom has been removed from adamantane or camphor or a lactone-containing cyclic group represented by General Formula (a2-r-7) is more preferable, and a group in which one hydrogen atom has been removed from camphor or a lactone-containing cyclic group represented by General Formula (a2-r-7) is still more preferable.
The anion moiety of the component (D1) is preferably an anion represented by General Formula (d1-an).
Rd011-Yd011-Ld011-SO3⊕ (d1-an)
[In the formula, Ld011 represents an alkylene group which may have a substituent. However, in Ld011, a carbon atom adjacent to the sulfur electron in the formula has no fluorine atom bonded thereto. Yd011 represents a single bond or a divalent linking group containing an oxygen atom. Rd011 represents an alicyclic hydrocarbon group which may have a substituent.]
In General Formula (d1-an), Ld011 represents an alkylene group which may have a substituent. The alkylene group preferably has 1 to 10 carbon atoms, more preferably 1 to 5 carbon atoms, still more preferably 1 to 3 carbon atoms, and particularly preferably 1 or 2 carbon atoms. The alkylene group may be linear or may be branched. Specific examples of the linear or branched alkylene group include the same ones as those mentioned as the linear or branched alkylene group as Va01 in General Formula (a0-1).
The alkylene group as Ld011 may have or may not have a substituent; however, it preferably does not have a substituent. Examples of the substituent which may be contained in the alkylene group as Ld011 include an alkoxy group, a hydroxyl group, a carbonyl group, a nitro group, and an amino group.
The alkylene group as Ld011 is preferably a linear alkylene group having 1 to 5 carbon atoms, more preferably a linear alkylene group having 1 to 3 carbon atoms, and still more preferably a methylene group or an ethylene group.
In General Formula (d1-an), Yd011 represents a single bond or a divalent linking group containing an oxygen atom.
In a case where Yd011 represents a divalent linking group containing an oxygen atom, Yd011 may contain an atom other than the oxygen atom. Examples of the atom other than the oxygen atom include a carbon atom, a hydrogen atom, a sulfur atom, and a nitrogen atom.
Examples of divalent linking groups containing an oxygen atom include non-hydrocarbon-based oxygen atom-containing linking groups such as an oxygen atom (an ether bond; —O—), an ester bond (—C(═O)—O—), an oxycarbonyl group (—O—C(═O)—), an amide bond (—C(═O)—NH—), a carbonyl group (—C(═O)—), or a carbonate bond (—O—C(═O)—O—); and a combination of the above-described non-hydrocarbon-based oxygen atom-containing linking groups with an alkylene group. Furthermore, a sulfonyl group (—SO2—) may be linked to the combination. Examples of such a divalent linking group containing an oxygen atom include linking groups each represented by General Formulae (y-a1-1) to (y-a1-7) shown below.
Yd011 is preferably a single bond, a divalent linking group containing an ester bond, or a divalent linking group containing an ether bond, and more preferably a single bond, the linking groups each represented by General Formulae (y-a1-1) to (y-a1-5). Among these, it is preferable that Yd011 represent —O—, —C(═O)—O—, —O—C(═O)—, —C(═O)—, or —O—C(═O)—O—.
In General Formula (d1-an), Rd011 represents an alicyclic hydrocarbon group which may have a substituent. Examples of the alicyclic hydrocarbon group as Rd011 include the same ones as those mentioned as the alicyclic hydrocarbon group as Rd01.
Specific examples of the preferred anion moiety of the component (D1) are shown below.
Among the above examples, the anion moiety in the component (D1) is preferably an anion represented by any one of General Formulae (d1-an-1) to (dn-an-8), and more preferably an anion represented by any one of General Formula (d1-an-1) and Formulae (d1-an-5) to (d1-an-8).
{Cation Moiety}
In General Formula (d1), Mm+ represents an m-valent organic cation. m represents an integer of 1 or more. The organic cation is preferably a sulfonium cation or an iodonium cation.
Examples of the preferred cation moiety ((Mm+)1/m) of the component (D1) include organic cations each represented by General Formulae (ca-1) to (ca-5).
[In the formula, R201 to R207, R211, and R212 each independently represents an aryl group, an alkyl group, or an alkenyl group, each of which may have a substituent. R201 to R203, R206 and R207, or R211 and R212 may be bonded to each other to form a ring together with the sulfur atoms in the formulae. R208 and R209 each independently represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. R210 represents an aryl group which may have a substituent, an alkyl group which may have a substituent, an alkenyl group which may have a substituent, or a SO2—-containing cyclic group which may have a substituent. L201 represents —C(═O)— or —C(═O)—O—. Each Y201 independently represents an arylene group, an alkylene group, or an alkenylene group. x represents 1 or 2. W201 represents an (x+1)-valent linking group.]
In General Formulae (ca-1) to (ca-5), examples of the aryl group as R201 to R207, R211, and R212 include an unsubstituted aryl group having 6 to 20 carbon atoms, and a phenyl group or a naphthyl group is preferable.
The alkyl group as R201 to R207, R211, and R212 is a chain-like or cyclic alkyl group preferably having 1 to 30 carbon atoms.
The alkenyl group as R201 to R207, R211, and R212 preferably has 2 to 10 carbon atoms.
Examples of the substituent which may be contained in R201 to R207 and R210 to R212 include an alkyl group, a halogen atom, a halogenated alkyl group, a carbonyl group, a cyano group, an amino group, an aryl group, and groups each represented by General Formulae (ca-r-1) to (ca-r-7) shown below.
[In the formulae, each R′201 independently represents a hydrogen atom, a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent.]
Examples of the cyclic group which may have a substituent, the chain-like alkyl group which may have a substituent, or the chain-like alkenyl group which may have a substituent, as R′201, include the same ones as those mentioned as Rd01 in General Formula (d1).
Among them, R′201 is preferably a cyclic group which may have a substituent and more preferably a cyclic hydrocarbon group which may have a substituent. More specific examples thereof preferably include a phenyl group, a naphthyl group, a group obtained by removing one or more hydrogen atoms from a polycycloalkane, lactone-containing cyclic groups each represented by General Formulae (a2-r-1) to (a2-r-7), and —SO2—-containing cyclic groups each represented by General Formulae (a5-r-1) to (a5-r-4).
In General Formulae (ca-1) to (ca-4), in a case where R201 to R203, R206 and R207, or R211 and R212 are bonded to each other to form a ring with a sulfur atom in the formula, these groups may be bonded to each other via a hetero atom such as a sulfur atom, an oxygen atom or a nitrogen atom, or a functional group such as a carbonyl group, —SO—, —SO2—, —S03-, —COO—, —CONH—, or —N(RN)-(here, RN represents an alkyl group having 1 to 5 carbon atoms). Regarding the ring to be formed, it is preferable that a ring containing the sulfur atom in the formula in the ring skeleton thereof be a 3-membered to 10-membered ring and it is particularly preferable that it be a 5-membered to 7-membered ring, in a case where the sulfur atom is included. Specific examples of the ring to be formed include a thiophene ring, a thiazole ring, a benzothiophene ring, a thianthrene ring, a dibenzothiophene ring, a 9H-thioxanthene ring, a thioxanthone ring, a phenoxathiin ring, a tetrahydrothiophenium ring, and a tetrahydrothiopyranium ring.
R208 and R209 each independently represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms and are preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms. In a case where R208 and R209 each independently represents an alkyl group, R208 and R209 may be bonded to each other to form a ring.
R210 represents an aryl group which may have a substituent, an alkyl group which may have a substituent, an alkenyl group which may have a substituent, or a —SO2—-containing cyclic group which may have a substituent.
Examples of the aryl group as R210 include an unsubstituted aryl group having 6 to 20 carbon atoms, and a phenyl group or a naphthyl group is preferable.
The alkyl group as R210, a chain-like or cyclic alkyl group having 1 to 30 carbon atoms is preferable.
The alkenyl group as R210 preferably has 2 to 10 carbon atoms.
The —SO2—-containing cyclic group which may have a substituent, as R210, is preferably a “—SO2—-containing polycyclic group”, and more preferably the group represented by General Formula (a5-r-1).
Each Y201 independently represents an arylene group, an alkylene group, or an alkenylene group.
Examples of the arylene group as Y201 include groups obtained by removing one hydrogen atom from an aryl group mentioned as the aromatic hydrocarbon group represented by R101 in General Formula (b1-an1) described above.
Examples of the alkylene group and alkenylene group as Y201 include groups obtained by removing one hydrogen atom from the chain-like alkyl group or the chain-like alkenyl group as R101 in General Formula b1-an1) described above.
In General Formula (ca-4), x represents 1 or 2.
W201 represents an (x+1) valent linking group, that is, a divalent or trivalent linking group.
The divalent linking group as W201 is preferably a divalent hydrocarbon group which may have a substituent, and as examples thereof include the same divalent hydrocarbon group, which may have a substituent, as Ya21 in General Formula (a2-1) described above. The divalent linking group as W201 may be linear, branched, or cyclic, and it is more preferably cyclic. Among these, an arylene group having both terminals at which two carbonyl groups are combined is preferable. Examples of the arylene group include a phenylene group and a naphthylene group, and a phenylene group is particularly preferable.
Examples of the trivalent linking group as W201 include a group obtained by removing one hydrogen atom from the above-described divalent linking group as W201 and a group obtained by bonding the divalent linking group to another divalent linking group. The trivalent linking group as W201 is preferably a group obtained by bonding two carbonyl groups to an arylene group.
Specific examples of the suitable cation represented by General Formula (ca-1) include the following cations.
[In the formula, g1, g2, and g3 indicate the numbers of repetitions, g1 represents an integer in a range of 1 to 5, g2 represents an integer in a range of 0 to 20, and g3 represents an integer in a range of 0 to 20.]
[In the formula, R″201 represents a hydrogen atom or a substituent, and examples of the substituent include the same substituent as that exemplified as the substituent which may be contained in R201 to R207 and R210 to R212.]
Specific examples of suitable cations represented by General Formula (ca-2) include a diphenyliodonium cation and a bis(4-tert-butylphenyl)iodonium cation.
Specific examples of the suitable cation represented by General Formula (ca-3) include cations each represented by General Formulae (ca-3-1) to (ca-3-6) shown below.
Specific examples of the suitable cation represented by General Formula (ca-4) include cations each represented by General Formulae (ca-4-1) and (ca-4-2) shown below.
Specific examples of the suitable cation represented by General Formula (ca-5) include cations each represented by General Formulae (ca-5-1) to (ca-5-3) shown below.
Among the above, the cation moiety of the component (D1) is preferably a cation represented by General Formula (ca-1).
The component (D1) is preferably a compound represented by General Formula (d1-1).
[In the formula, Rd01 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent. However, a carbon atom adjacent to a sulfur atom in the formula has no fluorine atom bonded thereto. R201 to R203 each independently represents an aryl group, an alkyl group, or an alkenyl group, each of which may have a substituent. R201 to R203 may be bonded to each other to form a ring together with the sulfur atoms in the formula.]
Hereinafter, specific examples of the component (D1) will be described, but the present invention is not limited thereto.
In the resist composition according to the present embodiment, the component (D1) may be used alone or in a combination of two or more kinds thereof.
The content of the component (D1) in the resist composition according to the present embodiment is preferably in a range of 0.1 to 20 parts by mass, more preferably in a range of 0.5 to 15 parts by mass, still more preferably in a range of 0.5 to 10 parts by mass, and particularly preferably in a range of 0.5 to 5 parts by mass, with respect to 100 parts by mass of the component (A).
In a case where the content of the component (D1) is set to be within the above-described preferred range, the sensitivity is further improved, and the effects of the present invention can be more easily obtained.
In the resist composition according to the present embodiment, regarding the mixing ratio (in terms of mass ratio) of the component (B1) to the component (D1), the component (B1)/the component (D1) (in terms of mass ratio) is preferably 3 to 30, more preferably 5 to 25, and still more preferably 8 to 25.
In Regard to Component (D2)
The resist composition according to the present embodiment may contain an acid diffusion-controlling agent component (hereinafter, also referred to as a “component (D2)”) other than the component (D1) as long as the effects of the present invention are not impaired.
The component (D2) is not particularly limited, and those which have been proposed so far as an acid diffusion-controlling agent for a chemically amplified resist composition in the related art can be used.
Examples of the component (D2) include a photodecomposable base that decomposes upon exposure and loses acid diffusion controllability (provided that a photodecomposable base corresponding to the component (D1) is excluded) and a nitrogen-containing organic compound that does not correspond to the photodecomposable base.
<Optional Component>
The resist composition according to the present embodiment may further contain other components (optional components) in addition to the component (A), the component (B), and the component (D), which are described above. Examples of the optional component include a component (E), a component (F), and a component (S), which will be described later.
<<At Least One Compound (E) Selected from Group Consisting of Organic Carboxylic Acid, Phosphorus Oxo Acid, and Derivatives Thereof>
For the purpose of preventing any deterioration in sensitivity, and improving the resist pattern shape and the post-exposure temporal stability, the resist composition according to the present embodiment may contain, as an optional component, at least one compound (E) (hereinafter referred to as a component (E)) selected from the group consisting of an organic carboxylic acid, and a phosphorus oxo acid and a derivative thereof.
Examples of the suitable organic carboxylic acid include acetic acid, malonic acid, citric acid, malic acid, succinic acid, benzoic acid, and salicylic acid.
Examples of the phosphorus oxo acid include phosphoric acid, phosphonic acid, and phosphinic acid. Among these, phosphonic acid is particularly preferable.
Examples of the phosphorus oxo acid derivative include an ester obtained by substituting a hydrogen atom in the above-described oxo acid with a hydrocarbon group.
Examples of the hydrocarbon group include an alkyl group having 1 to 5 carbon atoms and an aryl group having 6 to 15 carbon atoms.
Examples of the phosphoric acid derivative include a phosphoric acid ester such as di-n-butyl phosphate or diphenyl phosphate.
Examples of the phosphonic acid derivative include phosphonic acid esters such as dimethyl phosphonate, di-n-butyl phosphonate, phenylphosphonic acid, diphenyl phosphonate, and dibenzyl phosphonate.
Examples of the phosphinic acid derivative include phosphinic acid esters and phenylphosphinic acid.
In the resist composition according to the present embodiment, the component (E) may be used alone or in a combination of two or more kinds thereof.
In a case where the resist composition contains the component (E), the content of the component (E) is typically in a range of 0.01 to 5 parts by mass with respect to 100 parts by mass of the component (A).
<<Fluorine Additive Component (F)>>
The resist composition according to the present embodiment may further include a fluorine additive component (hereinafter, referred to as a “component (F)”) in order to impart water repellency to the resist film or to improve lithography characteristics.
As the component (F), a fluorine-containing polymeric compound described in Japanese Unexamined Patent Application, First Publication No. 2010-002870, Japanese Unexamined Patent Application, First Publication No. 2010-032994, Japanese Unexamined Patent Application, First Publication No. 2010-277043, Japanese Unexamined Patent Application, First Publication No. 2011-13569, and Japanese Unexamined Patent Application, First Publication No. 2011-128226 can be mentioned.
Specific examples of the component (F) include polymers having a constitutional unit (f1) represented by General Formula (f1-1) shown below. This polymer is preferably a polymer (homopolymer) consisting of a constitutional unit (f1) represented by General Formula (f1-1) shown below; a copolymer of the constitutional unit (f1) and the constitutional unit (a1); and a copolymer of the constitutional unit (f1), a constitutional unit derived from acrylic acid or methacrylic acid, and the above-described constitutional unit (a1). The constitutional unit (a1) to be copolymerized with the constitutional unit (f1) is preferably a constitutional unit derived from 1-ethyl-1-cyclooctyl (meth)acrylate or a constitutional unit derived from 1-methyl-1-adamantyl (meth)acrylate.
[In the formula, R has the same definition as described above. Rf102 and Rf103 each independently represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, and Rf102 and Rf103 may be the same or different from each other. nf1 represents an integer in a range of 0 to 5 and Rf101 represents an organic group containing a fluorine atom.]
In General Formula (f1-1), R bonded to the carbon atom at the α-position has the same definition as described above. R is preferably a hydrogen atom or a methyl group.
In General Formula (f1-1), examples of the halogen atom as Rf102 and Rf103 include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, and a fluorine atom is particularly preferable. Examples of the alkyl group having 1 to 5 carbon atoms as Rf102 and Rf103 include the same one as the alkyl group having 1 to 5 carbon atoms as R, and a methyl group or an ethyl group is preferable. Specific examples of the halogenated alkyl group having 1 to 5 carbon atoms as Rf102 and Rf103 include a group obtained by substituting part or all of hydrogen atoms of an alkyl group having 1 to 5 carbon atoms with a halogen atom. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and, an iodine atom, and a fluorine atom is particularly preferable. Among the above, Rf102 and Rf103 is preferably a hydrogen atom, a fluorine atom, or an alkyl group having 1 to 5 carbon atoms and more preferably a hydrogen atom, a fluorine atom, a methyl group, or an ethyl group.
In General Formula (f1-1), nf1 represents an integer in a range of 0 to 5, preferably an integer in a range of 0 to 3, and more preferably an integer of 1 or 2.
In General Formula (f1-1), Rf101 represents an organic group containing a fluorine atom and is preferably a hydrocarbon group containing a fluorine atom.
The hydrocarbon group containing a fluorine atom may be linear, branched, or cyclic, and preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and particularly preferably 1 to 10 carbon atoms.
In addition, in the hydrocarbon group containing a fluorine atom, 25% or more of the hydrogen atoms in the hydrocarbon group are preferably fluorinated, more preferably 50% or more are fluorinated, and particularly preferably 60% or more are fluorinated since the hydrophobicity of the resist film during immersion exposure increases.
Among them, Rf101 is preferably a fluorinated hydrocarbon group having 1 to 6 carbon atoms and particularly preferably a trifluoromethyl group, —CH2—CF3, —CH2—CF2—CF3, or —CH(CF3)2, —CH2—CH2—CF3, or —CH2—CH2—CF2—CF2—CF2—CF3.
The weight-average molecular weight (Mw) (based on the polystyrene-equivalent value determined by gel permeation chromatography) of the component (F) is preferably in a range of 1,000 to 50,000, more preferably in a range of 5,000 to 40,000, and most preferably in a range of 10,000 to 30,000. In a case where the weight-average molecular weight is equal to or smaller than the upper limit value of this range, sufficient solubility in the resist solvent is exhibited in a case of being used as a resist. On the other hand, in a case where the weight-average molecular weight is equal to or larger than the lower limit value of this range, the water repellency of the resist film is excellent.
The polydispersity (Mw/Mn) of the component (F) is preferably in a range of 1.0 to 5.0, more preferably in a range of 1.0 to 3.0, and most preferably in a range of 1.0 to 2.5.
In the resist composition according to the present embodiment, the component (F) may be used alone or in a combination of two or more kinds thereof.
In a case where the resist composition contains the component (F), the content of the component (F) to be used is typically at a proportion of 0.5 to 10 parts by mass, with respect to 100 parts by mass of the component (A).
<<Organic Solvent Component (S)>>
The resist composition according to the present embodiment may be produced by dissolving the resist materials in an organic solvent component (hereinafter, referred to as a “component (S)”).
The component (S) may be any organic solvent which can dissolve each of the components to be used to obtain a homogeneous solution, and any organic solvent can be appropriately selected from solvents known in the related art for a chemically amplified resist composition, and then used.
Examples of the component (S) include lactones such as γ-butyrolactone; ketones such as acetone, methyl ethyl ketone, cyclohexanone, methyl-n-pentyl ketone, methyl isopentyl ketone, and 2-heptanone; polyhydric alcohols, such as ethylene glycol, diethylene glycol, propylene glycol and dipropylene glycol; compounds having an ester bond, such as ethylene glycol monoacetate, diethylene glycol monoacetate, propylene glycol monoacetate, and dipropylene glycol monoacetate; derivatives of the above polyhydric alcohols or polyhydric alcohols such as compounds having an ether bond such as a monoalkyl ether (such as monomethyl ether, monoethyl ether, monopropyl ether, or monobutyl ether) or monophenyl ether of the compounds having an ester bond [among these, propylene glycol monomethyl ether acetate (PGMEA) and propylene glycol monomethyl ether (PGME) are preferable]; cyclic ethers such as dioxane; esters such as methyl lactate, ethyl lactate (EL), methyl acetate, ethyl acetate, butyl acetate, methyl pyruvate, ethyl pyruvate, methyl methoxypropionate, and ethyl ethoxypropionate; aromatic organic solvents such as anisole, ethylbenzyl ether, cresylmethyl ether, diphenyl ether, dibenzyl ether, phenetole, butylphenyl ether, ethyl benzene, diethyl benzene, pentyl benzene, isopropyl benzene, toluene, xylene, cymene and mesitylene; and dimethylsulfoxide (DMSO).
In the resist composition according to the present embodiment, the component (S) may be used alone or as a mixed solvent of two or more kinds thereof. Among these, PGMEA, PGME, γ-butyrolactone, EL, and cyclohexanone are preferable.
Further, a mixed solvent obtained by mixing PGMEA with a polar solvent is also preferable as the component (S). The blending ratio (in terms of mass ratio) of the mixed solvent can be appropriately determined, taking into consideration the compatibility of the PGMEA with the polar solvent, but is preferably in a range of 1:9 to 9:1 and more preferably in a range of 2:8 to 8:2.
More specifically, in a case where EL or cyclohexanone is blended as the polar solvent, the PGMEA:EL or cyclohexanone mass ratio is preferably in a range of 1:9 to 9:1 and more preferably in a range of 2:8 to 8:2. Alternatively, in a case where PGME is blended as the polar solvent, the PGMEA:PGME mass ratio is preferably in a range of 1:9 to 9:1, more preferably in a range of 2:8 to 8:2, and still more preferably in a range of 3:7 to 7:3. Furthermore, a mixed solvent of PGMEA, PGME, and cyclohexanone is also preferable.
Further, the component (S) is also preferably a mixed solvent of at least one selected from PGMEA and EL and γ-butyrolactone. In this case, as the mixing ratio, the mass ratio of the former to the latter is preferably in a range of 70:30 to 95:5.
The amount of the component (S) to be used is not particularly limited and is appropriately set, depending on a thickness of a film to be coated, to a concentration at which the component (S) can be applied onto a substrate or the like. Generally, the component (S) is used such that the solid content concentration of the resist composition is in a range of 0.1% to 20% by mass and preferably in a range of 0.2% to 15% by mass.
As desired, other miscible additives can also be added to the resist composition according to the present embodiment. For example, for improving the performance of the resist film, an additive resin, a dissolution inhibitor, a plasticizer, a stabilizer, a colorant, a halation prevention agent, and a dye can be appropriately contained therein.
After dissolving the resist material in the component (S), the resist composition according to the present embodiment may be subjected to removal of impurities and the like using a porous polyimide membrane, a porous polyamideimide membrane, or the like. For example, the resist composition may be filtered using a filter made of a porous polyimide membrane, a filter made of a porous polyamideimide membrane, or a filter made of a porous polyimide membrane and a porous polyamideimide membrane. Examples of the porous polyimide membrane and the porous polyamideimide membrane include those described in Japanese Unexamined Patent Application, First Publication No. 2016-155121.
The resist composition according to the present embodiment described above contains the component (A1) having the constitutional unit (a0) represented by General Formula (a0-1), the component (B1) represented by General Formula (b1), and the component (D1) represented by General Formula (d1) in combination.
In the resist composition in the related art, there has been a trade-off relationship between sensitivity improvement and defect amelioration, and it has been difficult to obtain a resist composition having high sensitivity and a small number of defects. Furthermore, it has been difficult to improve sensitivity and ameliorate defects without deteriorating lithography characteristics such as CDU.
On the other hand, since the resist composition according to the present embodiment contains the component (A1), the component (B1), and the component (D1) in combination, it is possible to achieve high sensitivity and reduction of the number of defects while maintaining the lithography characteristics such as CDU. The reason therefor is not clear; however, it is presumed as follows.
By incorporating the constitutional unit (a0) into the component (A1), the solubility in a developing solution (particularly an alkali developing solution) can be increased. On the other hand, since the component (B1) has a bulky structure, the solubility thereof in an organic solvent is increased. As a result, it is conceived that in a case where the resist composition contains the component (A1) and the component (B1) in combination, high solubility is obtained in both a developing solution and an organic solvent, which contributes to defect amelioration. Further, the component (D1) controls acid diffusion as a quencher in unexposed portions, whereas it decomposes in exposed portions, and the decomposition product thereof is capable of contributing to the deprotection of the acid-dissociable group of the component (A). It is conceived that this improves the sensitivity. As a result of using the component (A1), the component (B1), and the component (D1) in combination, it is possible to achieve high sensitivity and reduction of the number of defects while maintaining the lithography characteristics such as CDU.
(Method for Forming Resist Pattern)
The method for forming a resist pattern according to the present embodiment is a method that includes a step of forming a resist film on a support using the resist composition of the above-described embodiment, a step of exposing the resist film, and a step of developing the exposed resist film to form a resist pattern.
Examples of one embodiment of such a method for forming a resist pattern include a method for forming a resist pattern carried out as described below.
First, the resist composition of the above-described embodiment is applied onto a support with a spinner or the like, and a baking (post-apply baking (PAB)) treatment is carried out, for example, at a temperature condition in a range of 80° C. to 150° C. for 40 to 120 seconds, preferably for 60 to 90 seconds to form a resist film.
Following the selective exposure carried out on the resist film by, for example, exposure through a mask (mask pattern) having a predetermined pattern formed thereon using an exposure apparatus such as an electron beam exposure apparatus or an EUV exposure apparatus, or direct irradiation of the resist film for drawing with an electron beam without using a mask pattern, baking treatment (post-exposure baking (PEB)) is carried out, for example, under a temperature condition in a range of 80° C. to 150° C. for to 120 seconds and preferably 60 to 90 seconds.
Next, the resist film is subjected to a developing treatment. The developing treatment is carried out using an alkali developing solution in a case of an alkali developing process, and a developing solution containing an organic solvent (organic developing solution) in a case of a solvent developing process.
After the developing treatment, it is preferable to conduct a rinse treatment. As the rinse treatment, water rinsing using pure water is preferable in a case of an alkali developing process, and rinsing using a rinse liquid containing an organic solvent is preferable in a case of a solvent developing process.
In a case of a solvent developing process, after the developing treatment or the rinse treatment, the developing solution or the rinse liquid remaining on the pattern can be removed by a treatment using a supercritical fluid.
After the developing treatment or the rinse treatment, drying is conducted. As desired, baking treatment (post-baking) may be carried out following the developing treatment.
In this manner, a resist pattern can be formed.
The support is not specifically limited and a conventionally known support in the related art can be used. For example, substrates for electronic components, and such substrates having a predetermined wiring pattern formed thereon can be used. Specific examples of the material of the substrate include metals such as silicon wafer, copper, chromium, iron and aluminum; and glass. Suitable materials for the wiring pattern include copper, aluminum, nickel, and gold.
Further, as the support, any support having the above-described substrate on which an inorganic and/or organic film is provided may be used. Examples of the inorganic film include an inorganic antireflection film (an inorganic BARC). Examples of the organic film include an organic antireflection film (organic BARC) and an organic film such as a lower-layer organic film used in a multilayer resist method.
Here, the multilayer resist method is a method in which at least one layer of an organic film (lower-layer organic film) and at least one layer of a resist film (upper-layer resist film) are provided on a substrate, and a resist pattern formed on the upper-layer resist film is used as a mask to conduct patterning of the lower-layer organic film. This method is considered to be capable of forming a pattern with a high aspect ratio. More specifically, in the multilayer resist method, a desired thickness can be ensured by the lower-layer organic film, and as a result, the thickness of the resist film can be reduced, and an extremely fine pattern with a high aspect ratio can be formed.
The multilayer resist method is classified into a method in which a double-layer structure consisting of an upper-layer resist film and a lower-layer organic film is formed (double-layer resist method), and a method in which a multilayer structure having three or more layers consisting of an upper-layer resist film, a lower-layer organic film and one or more intermediate layers (thin metal film or the like) provided between the upper-layer resist film and the lower-layer organic film is formed (triple-layer resist method).
The wavelength to be used for exposure is not particularly limited and the exposure can be carried out using radiation such as an ArF excimer laser, a KrF excimer laser, an F2 excimer laser, an extreme ultraviolet ray (EUV), a vacuum ultraviolet ray (VUV), an electron beam (EB), an X-ray, or a soft X-ray. The resist composition is highly useful for a KrF excimer laser, an ArF excimer laser, EB, or EUV, more useful for an ArF excimer laser, EB or EUV, and particularly useful for an ArF excimer laser. That is, the method for forming a resist pattern according to the present embodiment is a method particularly useful in a case where the step of exposing the resist film includes an operation of exposing the resist film with an ArF excimer laser.
The exposure method of the resist film may be a general exposure (dry exposure) carried out in air or an inert gas such as nitrogen, or liquid immersion exposure (Liquid immersion lithography).
The liquid immersion lithography is an exposure method in which the region between the resist film and the lens at the lowermost position of the exposure apparatus is pre-filled with a solvent (liquid immersion medium) that has a larger refractive index than that of air, and the exposure (immersion exposure) is carried out in this state.
The liquid immersion medium is preferably a solvent that exhibits a refractive index larger than that of air but smaller than that of the resist film to be exposed. The refractive index of the solvent is not particularly limited as long as it satisfies the above-described requirements.
Examples of the solvent which exhibits a refractive index that is larger than that of air but smaller than that of the resist film include water, fluorine-based inert liquids, silicon-based solvents, and hydrocarbon-based solvents.
Specific examples of the fluorine-based inert liquids include liquids containing a fluorine-based compound such as C3HCl2F5, C4F9OCH3, C4F9OC2H5, or C5H3F7 as the main component, and the boiling point is preferably in a range of 700 to 180° C. and more preferably in a range of 80° to 160° C. A fluorine-based inert liquid having a boiling point in the above-described range is advantageous in that removing the medium used in the liquid immersion after the exposure can be preferably carried out by a simple method. The fluorine-based inert liquid is particularly preferably a perfluoroalkyl compound obtained by substituting all hydrogen atoms of an alkyl group with a fluorine atom. Examples of these perfluoroalkyl compounds include perfluoroalkyl ether compounds and perfluoroalkyl amine compounds.
Specifically, an example of a suitable perfluoroalkyl ether compound is perfluoro(2-butyl-tetrahydrofuran) (boiling point of 102° C.), and an example of a suitable perfluoroalkyl amine compound is perfluorotributyl amine (boiling point of 174° C.).
As the liquid immersion medium, water is preferable in terms of cost, safety, environment, and versatility.
Examples of the alkali developing solution used for a developing treatment in an alkali developing process include a 0.10% to 10% by mass aqueous solution of tetramethylammonium hydroxide (TMAH).
As the organic solvent contained in the organic developing solution used for a developing treatment in a solvent developing process, any organic solvent capable of dissolving the component (A) (the component (A) prior to exposure) can be appropriately selected from the conventionally known organic solvents. Specific examples of the organic solvent include polar solvents such as a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, a nitrile-based solvent, an amide-based solvent, and an ether-based solvent, and hydrocarbon-based solvents.
The ketone-based solvent is an organic solvent containing C—C(═O)—C in the structure thereof. The ester-based solvent is an organic solvent containing C—C(═O)—O—C in the structure thereof. The alcohol-based solvent is an organic solvent containing an alcoholic hydroxyl group in the structure thereof. The “alcoholic hydroxyl group” indicates a hydroxyl group bonded to a carbon atom of an aliphatic hydrocarbon group. The nitrile-based solvent is an organic solvent containing a nitrile group in the structure thereof. The amide-based solvent is an organic solvent containing an amide group in the structure thereof. The ether-based solvent is an organic solvent containing C—O—C in the structure thereof.
Some organic solvents have a plurality of the functional groups which characterize the above-described solvents in the structure thereof. In such a case, the organic solvent can be classified as any type of solvent having a functional group. For example, diethylene glycol monomethyl ether can be classified as an alcohol-based solvent or an ether-based solvent.
The hydrocarbon-based solvent consists of a hydrocarbon which may be halogenated and does not have any substituent other than a halogen atom. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, and a fluorine atom is preferable.
Among the above, the organic solvent contained in the organic developing solution is preferably a polar solvent and more preferably a ketone-based solvent, an ester-based solvent, or a nitrile-based solvent.
Examples of the ketone-based solvent include 1-octanone, 2-octanone, 1-nonanone, 2-nonanone, acetone, 4-heptanone, 1-hexanone, 2-hexanone, diisobutyl ketone, cyclohexanone, methylcyclohexanone, phenylacetone, methyl ethyl ketone, methyl isobutyl ketone, acetylacetone, acetonylacetone, ionone, diacetonyl alcohol, acetylcarbinol, acetophenone, methyl naphthyl ketone, isophorone, propylenecarbonate, γ-butyrolactone and methylamyl ketone (2-heptanone). Among these examples, the ketone-based solvent is preferably methylamyl ketone (2-heptanone).
Examples of the ester-based solvent include methyl acetate, butyl acetate, ethyl acetate, isopropyl acetate, amyl acetate, isoamyl acetate, ethyl methoxyacetate, ethyl ethoxyacetate, ethylene glycol monoethyl ether acetate, ethylene glycol monopropyl ether acetate, ethylene glycol monobutyl ether acetate, ethylene glycol monophenyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monopropyl ether acetate, diethylene glycol monophenyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol monoethyl ether acetate, 2-methoxybutyl acetate, 3-methoxybutyl acetate, 4-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, 3-ethyl-3-methoxybutyl acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, 2-ethoxybutyl acetate, 4-ethoxybutyl acetate, 4-propoxybutyl acetate, 2-methoxypentyl acetate, 3-methoxypentyl acetate, 4-methoxypentyl acetate, 2-methyl-3-methoxypentyl acetate, 3-methyl-3-methoxypentyl acetate, 3-methyl-4-methoxypentyl acetate, 4-methyl-4-methoxypentyl acetate, propylene glycol diacetate, methyl formate, ethyl formate, butyl formate, propyl formate, ethyl lactate, butyl lactate, propyl lactate, ethyl carbonate, propyl carbonate, butyl carbonate, methyl pyruvate, ethyl pyruvate, propyl pyruvate, butyl pyruvate, methyl acetoacetate, ethyl acetoacetate, methyl propionate, ethyl propionate, propyl propionate, isopropyl propionate, methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, methyl-3-methoxypropionate, ethyl-3-methoxypropionate, ethyl-3-ethoxypropionate, and propyl-3-methoxypropionate. Among these, the ester-based solvent is preferably butyl acetate.
Examples of the nitrile-based solvent include acetonitrile, propionitrile, valeronitrile, and butyronitrile.
As desired, the organic developing solution may have a conventionally known additive blended. Examples of the additive include surfactants. The surfactant is not particularly limited, and for example, an ionic or non-ionic fluorine-based and/or a silicon-based surfactant can be used. The surfactant is preferably anon-ionic surfactant and more preferably a non-ionic fluorine-based surfactant or a non-ionic silicon-based surfactant.
In a case where a surfactant is blended, the amount of the surfactant to be blended is typically in a range of 0.001% to 5% by mass, preferably in a range of 0.005% to 2% by mass, and more preferably in a range of 0.01% to 0.5% by mass with respect to the total amount of the organic developing solution.
The method for forming a resist pattern according to the present embodiment is a method which is particularly useful in a case where the development is carried out using an alkali developing solution.
The developing treatment can be carried out by a conventionally known developing method. Examples thereof include a method in which the support is immersed in the developing solution for a predetermined period (a dip method), a method in which the developing solution is cast upon the surface of the support by surface tension and maintained for a predetermined period (a puddle method), a method in which the developing solution is sprayed onto the surface of the support (spray method), and a method in which a developing solution is continuously ejected from a developing solution ejecting nozzle and applied onto a support which is scanned at a constant rate while being rotated at a constant rate (dynamic dispense method).
As the organic solvent contained in the rinse liquid used in the rinse treatment after the developing treatment in a case of a solvent developing process, an organic solvent hardly dissolving the resist pattern can be appropriately selected and used, among the organic solvents mentioned as organic solvents that are used for the organic developing solution. In general, at least one kind of solvent selected from a hydrocarbon-based solvent, a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, an amide-based solvent, and an ether-based solvent is used. Among these, at least one kind of solvent selected from a hydrocarbon-based solvent, a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, and an amide-based solvent is preferable, at least one kind of solvent selected from an alcohol-based solvent and an ester-based solvent is more preferable, and an alcohol-based solvent is particularly preferable.
The alcohol-based solvent used for the rinse liquid is preferably a monohydric alcohol of 6 to 8 carbon atoms, and the monohydric alcohol may be linear, branched, or cyclic. Specific examples thereof include 1-hexanol, 1-heptanol, 1-octanol, 2-hexanol, 2-heptanol, 2-octanol, 3-hexanol, 3-heptanol, 3-octanol, 4-octanol, and benzyl alcohol. Among these, 1-hexanol, 2-heptanol, and 2-hexanol are preferable, and 1-hexanol and 2-hexanol are more preferable.
As the organic solvent, one kind of solvent may be used alone, or two or more kinds of solvents may be used in combination. Further, an organic solvent other than the above-described examples or water may be mixed thereto. However, in consideration of the development characteristics, the amount of water to be blended in the rinse liquid is preferably 30% by mass or less, more preferably 10% by mass or less, still more preferably 5% by mass or less, and particularly preferably 3% by mass or less with respect to the total amount of the rinse liquid.
A conventionally known additive can be blended with the rinse liquid as necessary. Examples of the additive include surfactants. Examples of the surfactant include the same ones as those described above, the surfactant is preferably a non-ionic surfactant and more preferably a non-ionic fluorine-based surfactant or a non-ionic silicon-based surfactant.
In a case where a surfactant is blended, the amount of the surfactant to be blended is typically in a range of 0.001% to 5% by mass, preferably in a range of 0.005% to 2% by mass, and more preferably in a range of 0.01% to 0.5% by mass with respect to the total amount of the rinse liquid.
The rinse treatment using a rinse liquid (washing treatment) can be carried out by a conventionally known rinse method. Examples of the rinse treatment method include a method in which the rinse liquid is continuously ejected and applied onto the support while rotating it at a constant rate (rotational coating method), a method in which the support is immersed in the rinse liquid for a predetermined period (dip method), and a method in which the rinse liquid is sprayed onto the surface of the support (spray method).
According to the method for forming a resist pattern according to the present embodiment described above, since the resist composition according to the first embodiment described above is used, it is possible to form a resist pattern which is highly sensitive and has excellent lithography characteristics.
Hereinafter, the present invention will be described in more detail based on Examples, but the present invention is not limited to these Examples.
<Preparation of Resist Composition>
Each of the components shown in Tables 1 and 2 was mixed and dissolved to prepare a resist composition of each Example.
In Tables 1 and 2, each abbreviation has the following meaning. The numerical values in the brackets are blending amounts (parts by mass).
(A1)-1: A polymeric compound represented by Chemical Formula (A1-1). The weight-average molecular weight (Mw) in terms of standard polystyrene equivalent value, acquired by the GPC measurement, is 7,000, and the polydispersity (Mw/Mn) is 1.5. The copolymerization composition ratio (the ratio (the molar ratio) among constitutional units in the structural formula) determined by 13C-NMR is l/m/n/o=40/35/15/10.
(A1)-2: A polymeric compound represented by Chemical Formula (A1-2). The weight-average molecular weight (Mw) in terms of standard polystyrene equivalent value, acquired by the GPC measurement, is 7,700, and the polydispersity (Mw/Mn) is 1.44. The copolymerization composition ratio (the ratio (the molar ratio) among constitutional units in the structural formula) determined by 13C-NMR is l/m=50/50.
(A1)-3: A polymeric compound represented by Chemical Formula (A1-3). The weight-average molecular weight (Mw) in terms of standard polystyrene equivalent value, acquired by the GPC measurement, is 6,600, and the polydispersity (Mw/Mn) is 1.61. The copolymerization composition ratio (the ratio (the molar ratio) among constitutional units in the structural formula) determined by 13C-NMR is 1/m=50/50.
(A1)-4: A polymeric compound represented by Chemical Formula (A1-4). The weight-average molecular weight (Mw) in terms of standard polystyrene equivalent value, acquired by the GPC measurement, is 6,500, and the polydispersity (Mw/Mn) is 1.57. The copolymerization composition ratio (the ratio (the molar ratio) among constitutional units in the structural formula) determined by 13C-NMR is l/m/n/o=30/35/10/25.
(A1)-5: A polymeric compound represented by Chemical Formula (A1-5). The weight-average molecular weight (Mw) in terms of standard polystyrene equivalent value, acquired by the GPC measurement, is 5,100, and the polydispersity (Mw/Mn) is 1.52. The copolymerization composition ratio (the ratio (the molar ratio) among constitutional units in the structural formula) determined by 13C-NMR is l/m/n/o=35/30/5/30.
(A2)-1: A polymeric compound represented by Chemical Formula (A2-1). The weight-average molecular weight (Mw) in terms of standard polystyrene equivalent value, acquired by the GPC measurement, is 6,700, and the polydispersity (Mw/Mn) is 1.65. The copolymerization composition ratio (the ratio (the molar ratio) among constitutional units in the structural formula) determined by 13C-NMR is 1/m=50/50.
(A2)-2: A polymeric compound represented by Chemical Formula (A2-2). The weight-average molecular weight (Mw) in terms of standard polystyrene equivalent value, acquired by the GPC measurement, is 7,400, and the polydispersity (Mw/Mn) is 1.40. The copolymerization composition ratio (the ratio (the molar ratio) among constitutional units in the structural formula) determined by 13C-NMR is 1/m=50/50.
(A2)-3: A polymeric compound represented by Chemical Formula (A2-3). The weight-average molecular weight (Mw) in terms of standard polystyrene equivalent value, acquired by the GPC measurement, is 5,400, and the polydispersity (Mw/Mn) is 1.45. The copolymerization composition ratio (the ratio (the molar ratio) among constitutional units in the structural formula) determined by 13C-NMR is l/m/n/o=45/40/5/10.
(B1)-1 to (B1)-5: Acid generators consisting of compounds each represented by Chemical Compounds (B1-1) to (B1-5) described below.
(B2)-1 to (B1)-2: Acid generators consisting of compounds each represented by Chemical Compounds (B2-1) to (B2-2) described below.
(D1)-1 to (D1)-5: Acid diffusion-controlling agents consisting of compounds each represented by Chemical Formulae (D1-1) to (D1-4).
(D2)-1 to (D2)-3: Acid diffusion-controlling agents consisting of compounds each represented by Chemical Formulae (D2-1) to (D2-3) described below.
(S1)-1: γ-Butyrolactone.
(S2)-1: A mixed solvent of propylene glycol monomethyl ether acetate/propylene glycol monomethyl ether/cyclohexanone=1,140/760/635 (in terms of mass ratio).
<Resist Pattern Formation 1>
An organic antireflection film composition “ARC29A”, (manufactured by Brewer Science Inc.) was applied onto a 12-inch silicon wafer using a spinner and sintered and dried on a hot plate at 205° C. for 60 seconds to form an organic antireflection film having a thickness of 98 nm.
The resist composition of each Example was applied onto the organic antireflection film using a spinner, and a pre-baking (PAB) treatment was carried out at 90° C. for 60 seconds on a hot plate, followed by drying to form a resist film having a thickness of 130 nm. Then, a top coat was applied onto the resist film using a spinner, and baking treatment was carried out on a hot plate at 90° C. for 60 seconds to form a topcoat film having a film thickness of 35 nm.
Next, an ArF excimer laser (193 nm) was selectively irradiated via a halftone photomask (6%) with an ArF exposure apparatus for a liquid immersion, XT1900Gi [manufactured by ASML; numerical aperture) (NA)=1.35, Conventional, Sigma: 0.94, liquid immersion medium: ultrapure water]. Then, PEB treatment was carried out at 80° C. for 60 seconds. Next, alkali development was carried out with a 2.38% by mass TMAH aqueous solution (product name: NMD-3, manufactured by Tokyo Ohka Kogyo Co., Ltd.) at 23° C. for 15 seconds, and then water rinsing was carried out for 20 seconds using pure water, followed by shake-off drying. As a result of the above, each of contact hole patterns (hereinafter, referred to as a “CH pattern”) having a hole diameter of 68 nm and a pitch of 160 nm (mask size: 85 nm) was formed in all the examples.
[Evaluation of Optimum Exposure Amount (Eop)]
According to <Resist pattern formation 1> described above, an optimum exposure amount Eop (μC/cm2) with which a CH pattern having a target size (hole diameter: 68 nm, pitch: 160 nm) is formed was determined. The results are shown in Tables 3 and 4 as “Eop (μC/cm2)”.
[Evaluation of Critical Dimension Uniformity (CDU) of Pattern Size]
100 holes in the CH pattern were observed from above by a length measurement scanning electron microscope (SEM, acceleration voltage: 500V, product name: CG5000, manufactured by Hitachi High-Tech Corporation) and the hole diameter (nm) of each hole was measured. A triple value (36) of the standard deviation (a) calculated from the measurement result was determined. The results are shown in Tables 3 and 4 as “CDU”. The lower the value of 36 obtained as described above, the higher the critical dimension uniformity of the hole dimension (CD) of the plurality of holes formed in the resist film.
<Resist Pattern Formation 2>
An organic antireflection film composition “ARC29A”, (manufactured by Brewer Science Inc.) was applied onto a 12-inch silicon wafer using a spinner and sintered and dried on a hot plate at 205° C. for 60 seconds to form an organic antireflection film having a thickness of 89 nm.
The resist composition of each Example was applied onto the organic antireflection film using a spinner, and a pre-baking (PAB) treatment was carried out at 90° C. for 60 seconds on a hot plate, followed by drying to form a resist film having a thickness of 130 nm. Then, a top coat was applied onto the resist film using a spinner, and baking treatment was carried out on a hot plate at 90° C. for 60 seconds to form a topcoat film having a film thickness of 35 nm.
Next, an ArF excimer laser (193 nm) was selectively irradiated via a halftone photomask (6%) with an ArF exposure apparatus for a liquid immersion, XT1900Gi [manufactured by ASML; numerical aperture (NA)=1.07, C-Quad, Sigma (Outer: 0.82, Inner: 0.66), TE deflection, liquid immersion medium: ultrapure water]. Then, PEB treatment was carried out at 80° C. for 60 seconds. Next, alkali development was carried out with a 2.38% by mass TMAH aqueous solution (product name: NMD-3, manufactured by Tokyo Ohka Kogyo Co., Ltd.) at 23° C. for 15 seconds, and then water rinsing was carried out for 10 seconds using pure water, followed by shake-off drying. As a result of the above, each of the line and space patterns of 1:1 (hereinafter, referred to as an “LS pattern”) having a line width of 65 nm was formed in all the examples.
[Evaluation of Defects (Number of Defects)]
For the LS pattern formed according to <Resist Pattern Formation 2> above, the total number of defects (the number of all the defects) in a wafer was measured using a surface defect observation device (product name: KLA2905, manufactured by KLA Corporation). The number of defects was evaluated in accordance with the following evaluation criteria, and the evaluation results are shown as “Number of defects” in Tables 3 and 4.
Evaluation Criteria
A: The number of defects is 100 or lower.
B: The number of defects is more than 100 and 200 or lower.
C: The number of defects is more than 200.
From the results shown in Tables 3 and 4, it can be confirmed that with the resist compositions of Examples, it is possible to form resist patterns having improved sensitivity and a small number of defects while maintaining CDU, as compared with the resist compositions of Comparative Examples.
While preferred Examples of the present invention have been described above, the present invention is not limited to these Examples. Additions, omissions, substitutions, and other modifications can be made without departing from the gist or scope of the present invention. Accordingly, the present invention is not to be considered as being limited by the foregoing description and is only limited by the scope of the appended claims.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2019-219010 | Dec 2019 | JP | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2020/044179 | 11/27/2020 | WO |
