This application is a continuation-in-part of U.S. application, Ser. No. 09/031,154, filed Feb. 26, 1998, now abandoned, the entire teachings of which are incorporated herein by reference.
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4867799 | Grebinski | Sep 1989 | A |
4904571 | Miyashita et al. | Feb 1990 | A |
5200031 | Latchford et al. | Apr 1993 | A |
5407788 | Fang | Apr 1995 | A |
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Number | Date | Country |
---|---|---|
143 920 | Oct 1985 | DE |
41 41 403 | Jun 1993 | DE |
1-158444 | Jun 1989 | JP |
WO 8805813 | Aug 1988 | WO |
Entry |
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Patent Abstracts of Japan, Publication No. 60203944 (Oct. 15, 1985) (Application No.: 59 060 147); Title: “Method for Removing Positive Type Photoresist”. |
Bansal et al., Photoresist Stripping Using Ammonium Persulfate in a Spray Machine, Solid State Tech.nology, vol. 26, No. 12 (Dec. 1983) XP002103153. |
Derwent Abstract DD 143 920 A (Sep. 17, 1980); Title: “Removing Photoresist Laacquer from Aluminium Substrates—Using Aq. Alkali Silicate Soln. Contg. Ammonia to Prevent Attack of the Metal” (application cited above). |
Patent Abstracts of Japan, Publication No. 01 158 444 (Jun. 21, 1989) (Application No.: 63 054 896); Title: “Photoresist Remover”; Applicant: Tokyo Ohka Kogyo Co., Ltd. (application cited above). |
Derwent Abstract DE 41 41 403 A (Jun. 17, 1993); Title Rapid Stripping of Light -Crosslinked Photoresist Patterns by Treatment First. |
Number | Date | Country | |
---|---|---|---|
Parent | 09/031154 | Feb 1998 | US |
Child | 09/678465 | US |