Claims
- 1. A scalable, automated metrology system for photoacoustic measurement, the system comprising:
a first metrology sub-system for making measurements; a front end for storing multiple cassettes and transferring the same to and from the first metrology sub-system; wherein the system in expandable to include a second metrology subsystem for making measurements, with the first and second metrology subsystems in vertically stacked relation to one another.
- 2. The automated metrology system according to claim 1, wherein the system is expandable without changing the size or form-factor of the system.
- 3. The automated metrology system according to claim 1, wherein the front end includes a robot having vertical travel capable of transferring cassettes to and from each of the first and second metrology sub-systems in the case the system is expanded to include the second metrology sub-system.
- 4. The automated metrology system according to claim 1, further comprising in combination a front opening unified pod (FOUP) to protect and transport wafers having films to be measured, the FOUP having the capacity to service both the first and second metrology sub-systems with only a slight delay for one of the two sub-systems in the case the system is expanded to include the second metrology sub-system.
- 5. The automated metrology system according to claim 1, wherein the first and second metrology sub-systems, in the case the system is expanded, are completely independent measuring sub-systems.
- 6. The automated metrology system according to claim 1, wherein the system throughput is 1.75-2 times greater when expanded compared with that when unexpanded.
- 7. The automated metrology system according to claim 1, further comprising an electronics unit for the system, the electronics unit containing components capable of being shared by the first and second metrology subsystems in the case the system is expanded to include the second metrology sub-system.
- 8. The automated metrology system according to claim 7, wherein the electronics unit is capable of accommodating additional components associated with the second metrology sub-system in the case the system is expanded.
- 9. A dual, automated metrology system for photoacoustic measurement, the system comprising:
a first metrology sub-system for making measurements; a second metrology sub-system for making measurements, the second metrology sub-system being arranged in vertically stacked relation to the first metrology sub-system; and a front end for storing multiple cassettes and transferring the same to and from the first and second metrology sub-systems for making measurements.
- 10. The automated metrology system according to claim 9, further comprising in combination a front opening unified pod (FOUP) to protect and transport wafers having films to be measured, the FOUP having the capacity to service both the first and second metrology sub-systems with only a slight delay for one of the two sub-systems.
- 11. The automated metrology system according to claim 9, wherein the system has the footprint of system having only a single metrology tool for making measurements.
- 12. The automated metrology system according to claim 9, wherein the front end includes a robot having vertical travel capable of transferring cassettes to and from each of the first and second metrology sub-systems.
- 13. The automated metrology system according to claim 9, wherein the first and second metrology sub-systems are completely independent measuring sub-systems.
- 14. The automated metrology system according to claim 9, wherein the system throughput is 1.75-2 times greater than that of a system having a single metrology tool.
- 15. The automated metrology system according to claim 9, further comprising an electronics unit for the system, the electronics unit containing components which are shared by the first and second metrology sub-systems.
- 16. The automated metrology system according to claim 9, wherein the first and second metrology sub-systems are matched and can be used together for making measurements on one cassette to double the system throughput, or on separate cassettes to process two different lots simultaneously.
- 17. The automated metrology system according to claim 9, wherein the system has the same facilities hookup requirements as a system having a single metrology tool.
- 18. The automated metrology system according to claim 9, wherein the first and second metrology sub-systems are identical.
- 19. The automated metrology system according to claim 9, wherein the first and second metrology sub-systems share much of the optics, a computer and the front end of the system.
- 20. A method of dramatically improving the cost of ownership of an automated metrology system for photoacoustic measurement, the method comprising:
making an automated metrology system which is scalable from a system having a single metrology sub-system for making measurements to a system having two, vertically stacked metrology sub-systems for making measurements, and providing the system with a front end for storing multiple cassettes and transferring the same to and from either a single metrology sub-system or two vertically stacked metrology sub-systems, of the system.
RELATED APPLICATION
[0001] This application claims priority of provisional application No. 60/367,511 filed Mar. 27, 2002, the disclosure of which is incorporated by reference.
Provisional Applications (1)
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Number |
Date |
Country |
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60367511 |
Mar 2002 |
US |