This application is based on, and claims priority from, Japanese Patent Application No. 2021-184007, filed Nov. 11, 2021, the entire content of which is incorporated herein by reference.
This disclosure relates to a semiconductor apparatus with power semiconductor elements.
For example, a semiconductor apparatus has been proposed with a power semiconductor element such as an insulated gate bipolar transistor (IGBT). For example, Japanese Patent Application Laid-Open Publication No. 2017-208987 discloses a power conversion apparatus including a first substrate, on which switching elements are mounted, and a second substrate on which a capacitive element is mounted. The switching elements and the capacitive element are electrically connected to each other through dedicated wires extending from the first substrate to the second substrate.
In a configuration disclosed in Japanese Patent Application Laid-Open Publication No. 2017-208987, linear wires, which are separate from elements on the first substrate or are separate from elements on the second substrate, are required to be coupled to both the first substrate and the second substrate. Therefore, it is difficult to simplify the manufacturing process of the apparatus.
In view of the circumstances described above, an object of one aspect according to the present disclosure is to simplify a manufacturing process of a semiconductor apparatus. To solve the above problem, a semiconductor apparatus according to the present disclosure includes a first connection terminal and a second connection terminal, a drive circuit including one or more power semiconductor elements, a control circuit configured to control the one or more power semiconductor elements, a circuit substrate, a passive element on the circuit substrate, and a first bus bar and a second bus bar. The first bus bar includes a first body including a path electrically connecting the first connection terminal to the drive circuit, and a first protrusion protruding toward the circuit substrate against the first body. The second bus bar includes a second body including a path electrically connecting the second connection terminal and the drive circuit, and a second protrusion protruding toward the circuit substrate against the second body. The passive element is electrically connected to the first protrusion and to the second protrusion.
Embodiments according to the present disclosure will be described with reference to the drawings. In each drawing, dimensions and scales of elements may differ from those of actual products. In addition, each embodiment described below is an exemplary embodiment assumed in a case in which the present disclosure is implemented. Therefore, the scope of the present disclosure is not limited to the embodiments described below.
The connection terminals P (P1, P2) are positive input terminals (P terminals) for electrically connecting the respective drive circuits 11 [k] (k = 1 to 3) to an external device (not shown). The connection terminals N (N1, N2) are negative input terminals (N terminals) for electrically connecting the respective drive circuit 11[k] to the external device. To each connection terminal P, a voltage higher than a voltage applied to each connection terminal N is applied. Each connection terminal P is an example of a “first connection terminal,” and each connection terminal N is an example of a “second connection terminal.”
Each output terminal O[k] is a terminal electrically connected to a respective input terminal of an electric motor to be driven. Power required to drive the electric motor is supplied from each output terminal O[k] to the electric motor. The three output terminals O[1] to O[3] correspond to output terminals included in a three-phase inverter circuit having a U-phase, a V-phase, and a W-phase.
Each drive circuit 11 [k] is a circuit configured to control a current supplied from the output terminal O[k] to the electric motor. The three drive circuits 11[1] to 11[3] correspond to drive circuits included in the three-phase inverter circuit, the drive circuits including a drive circuit for the U-phase, a drive circuit for the V-phase, and a drive circuit for the W-phase. Each drive circuit 11[k] is electrically connected to the respective connection terminals P via a high potential bus bar 70, and each drive circuit 11[k] is electrically connected to the respective connection terminals N via a low potential bus bar 80. The high potential bus bar 70 is a line for electrically connecting each connection terminal P to each drive circuit 11[k]. The low potential bus bar 80 is a line for electrically connecting each connection terminal N to each drive circuit 11[k]. Electric potential at the high potential bus bar 70 is set to be higher than electric potential at the low potential bus bar 80. The high potential bus bar 70 is an example of a “first bus bar,” and the low potential bus bar 80 is an example of a “second bus bar.” The number of drive circuits 11[k] mounted on the semiconductor apparatus 100 may be freely selected, and the number of drive circuits 11 [k] mounted on the semiconductor apparatus 100 is not limited to “three” as described in the first embodiment.
The semiconductor apparatus 100 includes six switching elements S (SH[1] to SH[3], SL[1] to SL[3]) and six diode elements D (DH[1] to DH[3], DL[1] to DL[3]). Each switching element S is a transistor including a main electrode E, a main electrode C, and a control electrode G. Each diode element D is a rectifier element including an anode A and a cathode K. Each of the switching element S and the diode element D is an example of a “power semiconductor element.” The number or type of power semiconductor elements included in the drive circuit 11[k] is not limited to the example of the first embodiment.
Each drive circuit 11[k] is a half bridge circuit including two switching elements S (SH[k], SL[k]) and two diode elements D (DH[k], DL[k]). The main electrode C of the switching element SH[k] on a high potential side is electrically connected to the high potential bus bar 70, and the main electrode E of the switching element SL[k] on a low potential side is electrically connected to the low potential bus bar 80. The main electrode E of the switching element SH[k] and the main electrode C of the switching element SL[k] are electrically connected to an output side bus bar 54[k]. The output side bus bar 54[k] is a line for electrically connecting the drive circuit 11[k] to the output terminal O[k]. In addition, the diode element DH[k] is connected in parallel to the switching element SH[k], and the diode element DL[k] is connected in parallel to the switching element SL[k].
The control circuit 13 is a circuit configured to control each switching element S (SH[1] to SH[3], SL[1] to SL[3]). The control circuit 13 includes six control chips 14 (14H[1] to 14H[3], 14L[1] to 14L[3]) corresponding to the respective switching elements S. Each control chip 14H[k] is a high voltage IC (HVIC) configured to control the switching element SH[k] on the high potential side. Each control chip 14L[k] is a low voltage IC (LVIC) configured to control the switching element SL[k] on the low potential side.
The capacitive element 15 is a passive element electrically connected to the high potential bus bar 70 and the low potential bus bar 80. Specifically, the capacitive element 15 includes a first electrode 151 and a second electrode 152. The first electrode 151 is electrically connected to the high potential bus bar 70, and the second electrode 152 is electrically connected to the low potential bus bar 80. According to a configuration in which the capacitive element 15 is connected between the high potential bus bar 70 and the low potential bus bar 80 as described above, it is possible to change the frequency characteristics of noise caused by switching the switching element S. Specifically, it is possible to change a frequency having a peak in the frequency characteristics of the noise. The capacitive element 15 may be used as a snubber capacitor configured to reduce a surge voltage momentarily generated at the semiconductor apparatus 100. However, to reduce the surge voltage sufficiently, the large capacitive element 15 is required. Therefore, from a viewpoint of downsizing the semiconductor apparatus 100, a configuration is preferable in which a large snubber capacitor separate from the capacitive element 15 is attached externally to the semiconductor apparatus 100.
In the following description, as shown in
In actual use, the semiconductor apparatus 100 is capable of being mounted in a freely selected direction; however, for convenience in the following description, the Z1 direction is assumed to be downward and the Z2 direction is assumed to be upward. Therefore, a surface, which faces in the Z1 direction, of a freely selected element of the semiconductor apparatus 100 may be described as a “lower surface” and a surface, which faces in the Z2 direction, of the element may be described as an “upper surface.” In addition, as shown in
As shown in
The base 21 in
The housing 30 houses the semiconductor unit 40, the connecting conductor 50, and the circuit substrate 60. The housing 30 is formed of, for example, a resin material such as polyphenylene sulfide (PPS) resin, polybutylene terephthalate (PBT) resin, polybutylene succinate (PBS) resin, polyamide (PA) resin, or acrylonitrile-butadiene-styrene (ABS) resin, etc.
The overhang 35 is a flat plate-shaped portion protruding in the Y1 direction from an inner wall surface of the side wall 32. The overhang 36 is a flat plate-shaped portion protruding in the Y2 direction from an inner wall surface of the side wall 34. Each of the overhang 35 and the overhang 36 extends in the direction of the X-axis from an inner circumferential surface of the side wall 31 to an inner circumferential surface of the side wall 33. As shown in
In a space surrounded by the housing 30, an encapsulating material (not shown) may be formed. The encapsulating material encapsulates the semiconductor unit 40, the connecting conductor 50, and the circuit substrate 60. The encapsulating material is formed of, for example, a resin material such as a silicone gel or an epoxy resin, etc. The encapsulating material may include various insulating fillers such as a silicon oxide or an aluminum oxide, etc., in addition to a resin material.
As shown in
As shown in
In addition, a plurality of external terminals 39 is installed in the side wall 34 of the housing 30. Each external terminal 39 is a conductor, which has a circular cross sectional, for supplying the semiconductor apparatus 100 with the control signal for controlling the respective switching element S from an external apparatus. The respective control signals supplied to the respective external terminals 39 are transmitted to the respective control terminals 38 via the circuit substrate 60, and then the respective control signals are transmitted from the respective control terminals 38 to the respective control chips 14 via the circuit substrate 60. Each external terminal 39 includes a lower end 391 protruding from an inner wall surface of the housing 30 (side wall 32, 34) and an upper end 392 protruding in the Z2 direction from an upper surface of the housing 30. Each control terminal 38 and each external terminal 39 are integrally formed with the housing 30, for example, by insert molding.
As shown in
The mounting substrate 41 is a rectangular plate-shaped member supporting each drive circuit 11[k]. For example, a laminated ceramic substrate such as a direct copper bonding (DCB) substrate or an active metal brazing (AMB) substrate, etc., or a metal base substrate including a resin insulating layer, is used as the mounting substrate 41.
The mounting substrate 41 is a laminated substrate constituted by stacking an insulating substrate 42, a metallic layer 43, and a plurality of conductive patterns 44 (44H[k]_a, 44H[k]_b, 44L[k]_a, 44L[k]_b). The insulating substrate 42 is a rectangular plate-shaped member formed of an insulating material. The material of the insulating substrate 42 is freely selected, and the material of the insulating substrate 42 may be, for example, a ceramic material such as alumina (Al2O3), aluminum nitride (AlN) or silicon nitride (Si3N4), or a resin material such as an epoxy resin, etc.
The metallic layer 43 is a conductive film formed on a lower surface of the insulating substrate 42, which faces the base 21. The metallic layer 43 is formed on some or all of the lower surface of the insulating substrate 42. A lower surface of the metallic layer 43 is in contact with the upper surface of the base 21. The metallic layer 43 is formed of, for example, a metallic material with high thermal conductivity, such as a copper material, or an aluminum material, etc.
As shown in
Each conductive pattern 44 is a conductive film formed on the upper surface of the insulating substrate 42. For example, the conductive pattern 44 is formed by a low-resistance conductive material such as a copper material or an alloy of copper, etc. As shown in
Each switching element S (SH[1] to SH[3], SL[1] to SL[3]) is a power semiconductor element capable of switching between conduction of an electric current and interruption of the electric current, and each switching element S is coupled to the mounting substrate 41 via a bonding material (not shown) such as solder, etc. Each switching element S according to the first embodiment is an insulated gate bipolar transistor (IGBT). Each switching element S is a semiconductor chip including the main electrode E, the main electrode C, and the control electrode G. The main electrode E and the main electrode C are electrodes to which a current, to be controlled, is input or output. Specifically, the main electrode E is an emitter electrode formed on an upper surface of the switching element S, and the main electrode C is a collector electrode formed on a lower surface of the switching element S. On the other hand, the control electrode G is a gate electrode to which a voltage for control of the turning on and off of the switching element S is applied, and the control electrode G is formed on the upper surface of the switching element S. The control electrode G may include a detection electrode used to detect a current or temperature, etc.
Each switching element SH[k] is coupled to the conductive pattern 44H[k]_a in the mounting area 45H[k]. In other words, the main electrode C of the switching element SH[k] is coupled to the conductive pattern 44H[k]_a. In addition, each switching element SL[k] is coupled to the conductive pattern 44L[k]_a in the mounting area 45L[k]. In other words, the main electrode C of the switching element SL[k] is coupled to the conductive pattern 44L[k]_a.
Each diode element D (DH[1] to DH[3], DL[1] to DL[3]) is a power semiconductor element configured to rectify a current, and each diode element D is coupled to the mounting substrate 41 via, for example, a bonding material (not shown) such as solder, etc. Each diode element D is a semiconductor chip including an anode A and a cathode K. The anode A is formed on an upper surface of the diode element D, and the cathode K is formed on a lower surface of the diode element D.
Each diode element DH[k] is coupled to the conductive pattern 44H[k]_a in the mounting area 45H[k]. In other words, the cathode K of the diode element DH[k] is coupled to the conductive pattern 44H[k]_a. Similarly, each diode element DL[k] is coupled to the conductive pattern 44L[k]_a in the mounting area 45L[k]. In other words, the cathode K of the diode element DL[k] is coupled to the conductive pattern 44L[k]_a.
In the above configuration, the main electrode E of each switching element SH[k] is electrically connected to the conductive pattern 44H[k] b in the mounting area 45H[k] by a plurality of wires. The control electrode G of each switching element SH[k] is electrically connected to the respective control terminal 38 in the support 37H[k] by a plurality of wires. Specifically, the control electrode G is electrically connected to the lower end 381 of the respective control terminal 38 by a wire. The anode A of each diode element DH[k] is electrically connected to the conductive pattern 44H[k]_b by a plurality of wires. Similarly, the main electrode E of each switching element SL[k] is electrically connected to the conductive pattern 44L[k]_b in the mounting area 45L[k] b by a plurality of wires. The control electrode G of each switching element SL[k] is electrically connected to the respective control terminal 38 (lower end 381) of the support 37L[k] by a plurality of wires. The anode A of each diode element DL[k] is electrically connected to the conductive pattern 44L[k] b by a plurality of wires.
As shown in
As shown in
The body 71 extends in the direction of the X-axis. Specifically, the body 71 extends linearly in the direction of the X-axis from the side wall 31 to the side wall 33 facing the side wall 31. One end of the body 71 is connected to the connection terminal P1, and the other end of the body 71 is connected to the connection terminal P2. Specifically, the end of the body 71 extending in the X1 direction is connected to the connection terminal P1, and the end of the body 71 extending in the X2 direction is connected to the connection terminal P2.
Each connector portion 72 is a portion for electrically connecting the mounting substrate 41 (conductive patterns 44) to the body 71. Each connector portion 72 branches in the Y1 direction from the body 71. Specifically, each connector portion 72 [k] branches in the Y1 direction from a portion of the body 71 corresponding to the mounting area 45H[k] in plan view, and each connector portion 72 [k] is electrically connected to the conductive pattern 44H[k]_a in the mounting area 45H[k].
The connector portion 73 in
As shown in
The body 81 is a portion extending linearly in the direction of the X-axis. The coupler portion 84 is a portion bent or curved from the body 81 in plan view so as to couple an end of the body 81 extending in the X1 direction to the connection terminal N1. Similarly, the coupler portion 85 is a portion that is bent or curved from the body 81 in plan view so as to couple an end of the body 81 extending in the X2 direction to the connection terminal N2. In other words, a long portion, which is constituted by the coupler portion 84, the body 81, and the coupler portion 85, extends from the side wall 31 to the side wall 33 facing the side wall 31. One end of the portion is connected to the connection terminal N1, and the other end of the portion is connected to the connection terminal N2.
The body 71 and the body 81 extend in the direction of the X-axis in a position spaced apart from the reference plane R in the Y1 direction. In other words, as will be understood from
Each connector portion 82 of the low potential bus bar 80 is a portion for electrically connecting the mounting substrate 41 (conductive patterns 44) to the body 81. Each connector portion 82 branches in the Y2 direction from the body 81. Specifically, each connector portion 82[k] branches in the Y2 direction from a portion of the body 81 corresponding to the mounting area 45L[k] in plan view, and each connector portion 82[k] is electrically connected to the conductive pattern 44L[k] b in the mounting area 45L[k]. As will be understood from the above description, each connector portion 72 of the high potential bus bar 70 protrudes in the Y1 direction from the body 71, whereas each connector portion 82 of the low potential bus bar 80 protrudes in the Y2 direction from the body 81. In other words, in plan view, the direction in which each connector portion 72 protrudes from the body 71 is opposite to the direction in which each connector portion 82 protrudes from the body 81.
As shown in
The connector portion 83 in
As shown in
As will be understood from
As will be understood from
As shown in
Specifically, the output side bus bar 54[k] includes a body 541[k], a connector portion 542[k], and a connector portion 543[k], as shown in
The connector portion 542[k] branches in the direction of the X-axis from an end of the body 541[k] corresponding to the mounting area 45H[k], and the connector portion 542[k] is electrically connected to the conductive pattern 44H[k]_b in the mounting area 45H[k]. In addition, the connector portion 543[k] branches in the direction of the X-axis from a portion of the body 541[k] corresponding to the mounting area 45L[k], and the connector portion 543[k] is electrically connected to the conductive pattern 44L[k]_a in the mounting area 45L[k]. The specific structures of the connector portion 542[k] and the connector portion 543[k] and their coupling to the conductive pattern 44 are similar to those of the connector portion 72 or those of the connector portion 82 shown in
As will be understood from the above description, the drive circuit 11[k] is formed by electrically connecting elements in the mounting area 45H[k] to elements in the mounting area 45L[k] through the output side bus bar 54[k]. The high potential bus bar 70 and the low potential bus bar 80 are, as described above with reference to
The circuit substrate 60 in
As shown in
As shown in
As shown in
As will be understood from the above description, an opening 66 and an opening 67 are formed in the circuit substrate 60. The opening 66 and the opening 67 are each a through hole formed between the first portion 61 and the second portion 62. Specifically, the opening 66 is a space surrounded by the first portion 61, the coupling portion 63, the second portion 62, and the coupling portion 65 in plan view. The opening 67 is a space surrounded by the first portion 61, the coupling portion 65, the second portion 62, and the coupling portion 64 in plan view. Accordingly, the coupling portion 65 is located between the opening 66 and the opening 67 in plan view. In other words, in the circuit substrate 60, an elongated space in the X-axis is divided by the coupling portion 65 into the opening 66 and the opening 67. The opening 66 is an example of a “first opening” and the opening 67 is an example of a “second opening.”
The encapsulating material (not shown) is supplied to a space inside the housing 30 via the opening 66 or the opening 67. The encapsulating material is an insulating mold for encapsulating the drive circuit 11[k]. For example, a resin material such as an epoxy resin is used as the encapsulating material. As will be understood from the above description, the opening 66 and the opening 67 are used as supply ports for the encapsulating material. In addition, the coupling portion 65 is formed between the opening 66 and the opening 67; therefore, there is an advantage of being easy to maintain mechanical strength of the circuit substrate 60 compared to a configuration in which the coupling portion 65 is omitted.
As shown in
The capacitive element 15 is a passive element mounted on the circuit substrate 60. Specifically, the capacitive element 15 is a chip capacitor including a first electrode 151 and a second electrode 152. As shown in
As described above, in the first embodiment, the capacitive element 15 is mounted on the coupling portion 65 coupling the first portion 61 and the second portion 62 of the circuit substrate 60. In other words, the portion of the circuit substrate 60, which couples the first portion 61 to the second portion 62, can be effectively used for the arrangement of the capacitive element 15.
As mentioned above, the three control chips 14H[1] to 14H[3] of the control circuit 13 are mounted on the first portion 61, whereas the three control chips 14L[1] to 14L[3] of the control circuit 13 are mounted on the second portion 62. In other words, the plurality of control chips 14 is arranged in an area surrounding the capacitive element 15. In other words, the plurality of control chips 14 is arranged to surround the capacitive element 15 in plan view. Specifically, the capacitive element 15 is arranged between an array of three control chips 14H[1] to 14H[3] and an array of three control chips 14L[1] to 14L[3].
As mentioned above, in the first embodiment, the body 71 of the high potential bus bar 70 and the body 81 of the low potential bus bar 80 are spaced apart from the reference plane R in the Y1 direction. On the other hand, the capacitive element 15 is located on the reference plane R. Therefore, as will be understood from
Heat generated due to an operation of each drive circuit 11 [k] may spread to the high potential bus bar 70 or the low potential bus bar 80. In a configuration in which the capacitive element 15 overlaps the body 71 or the body 81 in plan view, the capacitive element 15 may be heated due to the heat of the high potential bus bar 70 or due to the heat of the low potential bus bar 80. In the first embodiment, the capacitive element 15 overlaps neither the body 71 nor the body 81 in plan view; therefore, the heat of the high potential bus bar 70 or the heat of the low potential bus bar 80 has difficulty reaching the capacitive element 15. Therefore, change in the electrical characteristics of the capacitive element 15 due to heating are reduced. Consequently, malfunctions of the semiconductor apparatus 100 due to the change in the electrical characteristics of the capacitive element 15 are reduced. In addition, in the first embodiment, each control chip 14 overlaps neither the body 71 nor the body 81 in plan view, as well. Therefore, regarding each control chip 14, malfunctions due to heating are reduced, as well. In a case in which the spread of heat to the capacitive element 15 or to each control chip 14 is not a particular problem, a configuration is assumed in which the capacitive element 15 or each control chip 14 overlaps the body 71 or the body 81 in plan view.
In addition, a configuration (hereinafter referred to as a “comparative example”) is assumed in which the capacitive element 15 is mounted on the mounting substrate 41. However, in the comparative example, it is necessary to prepare an area for mounting the capacitive element 15 in addition to the plurality of mounting areas 45 corresponding to the respective switching elements S. Therefore, the mounting substrate 41 needs to be enlarged, and as a result, there is a problem in that the reduction in size of the semiconductor apparatus 100 is limited. In contrast to the comparative example described above, according to the first embodiment, the capacitive element 15 is mounted on the circuit substrate 60; therefore, the mounting substrate 41 need not to be made larger. Therefore, there is an advantage in that the semiconductor apparatus 100 can be reduced in size easily compared to the comparative example.
Soldering is used to mount each switching element S on the mounting substrate 41. From the viewpoint of ensuring the reliability of the mechanical and electrical connection between the mounting substrate 41 and each switching element S, it is necessary to use solder with a high melting point. In a case in which, in the comparative example, in addition to the switching element S, the capacitive element 15 is soldered to the mounting substrate 41 in a similar process, solder with a high melting point is used to couple the capacitive element 15 because of the circumstances described above. In other words, the capacitive element 15 may be heated to a high temperature in the soldering process. Therefore, the capacitive element 15 may be damaged due to heating, or the electrical characteristics of the capacitive element 15 may be changed by heating from the target characteristics. In contrast to the comparative example, in the first embodiment, the capacitive element 15 is mounted on the circuit substrate 60. Solder with a low melting point is used in soldering to mount various electrical components, which includes the capacitive element 15, on the circuit substrate 60. Therefore, even when solder with a high melting point is used to mount the switching element S on the mounting substrate 41, solder with a low melting point can be used to mount the capacitive element 15 on the circuit substrate 60. In other words, it is possible to avoid the capacitive element 15 being heated to an excessively high temperature. Therefore, according to the first embodiment, the probability of the capacitive element 15 being damaged due to heating in the manufacturing process of the semiconductor apparatus 100, or the probability of the electrical characteristics of the capacitive element 15 being changed, is reduced.
Through hole H1 and through hole H2 are formed in the circuit substrate 60. Each of the through hole H1 and the through hole H2 is a circular opening penetrating the circuit substrate 60. The through hole H1 and the through hole H2 are formed in the coupling portion 65 of the circuit substrate 60. The through hole H1 overlaps the wiring pattern 681 in plan view, and the through hole H2 overlaps the wiring pattern 682 in plan view. The diameter of each of the through hole H1 and the through hole H2 is greater than or equal to the maximum length of the diagonal in the cross section of each of the protrusion 732 and the protrusion 832 described above.
As will be understood from
As will be understood from the above description, the capacitive element 15 is electrically connected to the protrusion 732 and the protrusion 832. Specifically, the first electrode 151 of the capacitive element 15 is electrically connected to the protrusion 732 via the wiring pattern 681. In addition, the second electrode 152 of the capacitive element 15 is electrically connected to the protrusion 832 via the wiring pattern 682.
In step Q2 after execution of step Q1, the base 21 and the semiconductor unit 40 are fixed to the housing 30. For example, the base 21, which has an upper surface coupled to the semiconductor unit 40, is coupled to the housing 30. In step Q3 after execution of step Q2, a plurality of wires is formed. For example, wires are formed which electrically connect the respective control terminals 38 to the respective control electrodes G of the respective switching elements S.
In step Q4 after execution of step Q3, the circuit substrate 60 is arranged in the space inside the housing 30. Specifically, the circuit substrate 60 is lowered in the Z1 direction until the first surface F1 of the circuit substrate 60 is in contact with the upper surface of each of the supports 37 of the housing 30. In the process of lowering the circuit substrate 60, the protrusion 732 is inserted through the through hole H1, the protrusion 832 is inserted through the through hole H2, the upper end 382 of each control terminal 38 is inserted through the respective through hole Ha, and the lower end 391 of each external terminal 39 is inserted through the respective through hole Hb.
In step Q5 after execution of step Q4, the protrusion 732, the protrusion 832, each control terminal 38, and each external terminal 39 are soldered to the second surface F2 of the circuit substrate 60. In step Q5, the circuit substrate 60 is fixed to the housing 30. In step Q6 after execution of step Q5, the encapsulating material is supplied to the space inside the housing 30 through the opening 66 and the opening 67 of the circuit substrate 60. In step Q7 after curing of the encapsulating material, the lid 22 is fixed to the housing 30 to complete the semiconductor apparatus 100.
As described above, in the first embodiment, the protrusion 732 included in the high potential bus bar 70 and the protrusion 832 included in the low potential bus bar 80 are electrically connected to the capacitive element 15 on the circuit substrate 60. Therefore, independent elements, which electrically connect each of the connection terminals P and the connection terminals N to the capacitive element 15, are not necessary. Therefore, for example, compared to a configuration in which the connection terminals P and the connection terminals N are electrically connected to the capacitive element 15 by dedicated wirings, the number of parts is reduced, and as a result, the manufacture of the semiconductor apparatus 100 is simplified. For example, as described above with reference to
In the first embodiment, the body 71 of the high potential bus bar 70 and the body 81 of the low potential bus bar 80 are located between the mounting substrate 41 and the circuit substrate 60. In other words, the mounting substrate 41, the body 71, the body 81, and the circuit substrate 60 are stacked in the direction of the Z-axis. Therefore, compared to a configuration in which the body 71 and the body 81 do not overlap with the mounting substrate 41 or the circuit substrate 60 in plan view, it is possible to reduce the planar size of the semiconductor apparatus 100.
In the first embodiment, the multiple control chips 14 are arranged around the capacitive element 15 along the periphery of the circuit substrate 60. According to the configuration described above, it is possible to reduce respective differences between respective distances (electrical path length) between the respective control chips 14 and the capacitive element 15 (ideally, it is possible to match the respective distances). Therefore, compared to a configuration in which the capacitive element 15 is located near the periphery of the circuit substrate 60, it is possible to efficiently realize effects of using the capacitive element 15 (for example, the change in the frequency characteristics of noise described above).
The series of resistors L (ladder resistor) is a passive element in which five resistive elements 16 (16[1] to 16[5]) are connected to each other in series. The series of resistors L includes a first end e1 and a second end e2. The first end e1 and the second end e2 are ends opposite to each other. Specifically, the first end e1 is one terminal of two terminals of the resistive element 16[1], the one terminal being opposite to the other terminal connected to the resistive element 16[2]. The second end e2 is one terminal of two terminals of the resistive element 16[5], the one terminal being opposite to the other terminal connected to the resistive element 16[4]. The first end e1 is electrically connected to the high potential bus bar 70. The second end e2 is electrically connected to the low potential bus bar 80.
A detection line 17 is electrically connected between the resistive element 16[4] and the resistive element 16[5] adjacent to each other in the series of resistors L. Therefore, a voltage (hereinafter referred to as a “detection voltage”) V, which is obtained by dividing a voltage between the connection terminal P and the connection terminal N by the series of resistors L, is output to the detection line 17. The resistive element 16[4] is an example of a “first resistive element” and the resistive element 16[5] is an example of a “second resistive element.” The number of resistive elements 16 in the series of resistors L may be changed as needed. The position of the detection line 17 relative to the series of resistors L may be selected as needed.
As shown in
An external control apparatus 200 is connected to an output terminal of the detection circuit 18. The control apparatus 200 is externally connected to the semiconductor apparatus 100 to control the semiconductor apparatus 100. The control apparatus 200 detects an unusual state of the semiconductor apparatus 100 in response to receiving the warning signal α from the detection circuit 18, and the control apparatus 200 is capable of stopping the operation of the semiconductor apparatus 100 based on the detection of the unusual state.
As described above, in the second embodiment, the detection voltage V, which is obtained by dividing the voltage between the connection terminal P and the connection terminal N by the plurality of resistive elements 16[1] to 16[5], is detected by the detection line 17. Therefore, it is possible to detect the unusual state of the voltage between the connection terminal P and the connection terminal N.
Each of the five resistive elements 16[1] to 16[5] constituting the series of resistors L is a chip resistor mounted on the second surface F2 of the circuit substrate 60. Each resistive element 16 is mounted on the coupling portion 65 of the circuit substrate 60. Specifically, the five resistive elements 16[1] to 16[5] are aligned linearly in the direction of the X-axis in an area between the through hole H1 and the through hole H2. In other words, a direction (Y-axis), in which the through hole H1 and the through hole H2 are aligned, and a direction (X-axis), in which the resistive elements 16 are aligned, are perpendicular to each other. In the direction of the X-axis, the through hole H1 and the through hole H2 are located roughly in a center of the series of resistors L (specifically, a midpoint between the first end e1 and the second end e2). In addition, as will be understood from
On the second surface F2 of the circuit substrate 60, a wiring pattern 684 and a wiring pattern 685 are formed. The through hole H1 overlaps the wiring pattern 684 in plan view, and the through hole H2 overlaps the wiring pattern 685 in plan view. The protrusion 732 inserted through the through hole H1 is electrically connected to the wiring pattern 684 by, for example, a bonding material such as solder, etc. The protrusion 832 inserted through the through hole H2 is electrically connected to the wiring pattern 685 by, for example, a bonding material such as solder, etc.
The wiring pattern 684 is an L-shaped conductive pattern including a wiring portion 684a and a wiring portion 684b. The wiring portion 684a is a portion extending linearly in the X1 direction from the through hole H1. The wiring portion 684b is a portion extending in the Y2 direction from an end of the wiring portion 684a extending in the X1 direction to the first end e1. The first end e1 of the series of resistors L is electrically connected to the wiring portion 684b. In other words, the first end e1 is electrically connected to the protrusion 732 of the high potential bus bar 70, as shown in
On the other hand, the wiring pattern 685 is an L-shaped conductive pattern including a wiring portion 685a and a wiring portion 685b. The wiring portion 685a is a portion extending linearly in the X2 direction from the through hole H2. The wiring portion 685b is a portion extending in the Y1 direction from an end of the wiring portion 685a extending in the X2 direction to the second end e2. The second end e2 of the series of resistors L is electrically connected to the wiring portion 685b. In other words, the second end e2 is electrically connected to the protrusion 832 of the low potential bus bar 80, as shown in
The detection line 17 includes a wire electrically connected between the resistive element 16[4] and the resistive element 16[5]. A wiring pattern formed on the second surface F2 of the circuit substrate 60 may be used as the detection line 17.
From among components of the semiconductor apparatus 100, components different from components related to the series of resistors L are the same as in the first embodiment. For example, the configuration described for the capacitive element 15 in the first embodiment is applicable to the series of resistors L in the second embodiment, as well. For example, the series of resistors L is located at the center of the circuit substrate 60, and the multiple control chips 14 are arranged around the series of resistors L. The series of resistors L overlaps neither the body 71 nor the body 81 in plan view.
As described above, in the second embodiment, the protrusion 732 included in the high potential bus bar 70 and the protrusion 832 included in the low potential bus bar 80 are electrically connected to the series of resistors L on the circuit substrate 60. Therefore, independent elements for electrically connecting each of the connection terminals P and the connection terminals N to the series of resistors L are not necessary. Therefore, as in the first embodiment, compared to a configuration in which, for example, the connection terminals P and the connection terminals N are electrically connected to the series of resistors L by dedicated wirings, the manufacture of the semiconductor apparatus 100 is simplified. As described above, according to the second embodiment, the same effects as those of the first embodiment are realized.
Specific modifications added to each of the aspects described above are described below. Two or more modes selected from the following descriptions may be combined with one another as appropriate as long as such combination does not give rise to any conflicts. The following description will comprehensively describe each of the capacitive element 15 shown in the first embodiment and the series of resistors L shown in the second embodiment as a “passive element.”
(1) The structure of the connector portion 73 of the high potential bus bar 70 and the structure of the connector portion 83 of the low potential bus bar 80 are not limited to the examples in each embodiment described above. For example, in each embodiment described above, as shown in
(2) In each embodiment described above, the configuration is described in which the protrusion 732 and the protrusion 832 are aligned in the Y-axis direction; however, a positional relationship between the protrusion 732 and the protrusion 832 is not limited to the example described above. For example, as shown in
(3) In each embodiment described above, the configuration is described in which the connector portion 73 of the high potential bus bar 70 includes the extension portion 731 and the protrusion 732; however, the extension portion 731 may be omitted. For example, as shown in
(4) In each embodiment described above, the configuration is described in which the passive element is mounted on the second surface F2 of the circuit substrate 60 that is opposite to the surface facing the mounting substrate 41; however, the passive element may be mounted on the first surface F1 of the circuit substrate 60 facing the mounting substrate 41. However, in the configuration in which the passive element is mounted on the first surface F1, it is necessary to set a sufficient space, which is required to arrange the passive element, between the mounting substrate 41 and the circuit substrate 60, or between the connecting conductor 50 and the circuit substrate 60. In each embodiment described above, the passive element is mounted on the second surface F2 of the circuit substrate 60, which is opposite to the surface facing the drive circuit 11[k] (mounting substrate 41). Therefore, compared to the configuration in which the passive element is mounted on the first surface F1, it is possible to reduce a space required between the mounting substrate 41 and the circuit substrate 60, or between the connecting conductor 50 and the circuit substrate 60, thereby realizing the thinner semiconductor apparatus 100.
In each embodiment described above, the configuration is described in which the control circuit 13 is mounted on the second surface F2; however, the control circuit 13 may be mounted on the first surface F1 of the circuit substrate 60. In each embodiment described above, both the passive element and the control circuit 13 are mounted on the second surface F2. Therefore, according to each embodiment described above, compared to a configuration in which the passive element and the control circuit 13 are mounted on the first surface F1, the effect of being capable of reducing the space required between the mounting substrate 41 and the circuit substrate 60, or between the connecting conductor 50 and the circuit substrate 60, is particularly significant.
(5) In each embodiment described above, the configuration is described in which, whereas the protrusion 732 of the high potential bus bar 70 is inserted through the through hole H1, the protrusion 832 of the low potential bus bar 80 is inserted through the through hole H2. However, the configuration in which the protrusion 732 is inserted through the through hole H1, or the configuration in which the protrusion 832 is inserted through the through hole H2 is not necessary in the present disclosure. For example, a configuration is assumed in which, by the protrusion 732 of the high potential bus bar 70 being coupled to the first surface F1 of the circuit substrate 60, the protrusion 732 is electrically connected to the wiring pattern on the first surface F1. Similarly, a configuration is assumed in which, by the protrusion 832 of the low potential bus bar 80 being coupled to the first surface F1 of the circuit substrate 60, the protrusion 832 is electrically connected to the wiring pattern on the first surface F1.
(6) In the first embodiment, the capacitive element 15 is shown, and in the second embodiment, the series of resistors L is shown; however, both the capacitive element 15 and the series of resistors L may be mounted on the circuit substrate 60. Multiple capacitive elements 15 may be connected to each other in parallel between the protrusion 732 and the protrusion 832. The passive element mounted on the circuit substrate 60 is not limited to the capacitive element 15 or the series of resistors L. For example, an inductive element (coil) or a single resistive element, etc., may be assumed as a passive element to be mounted on the circuit substrate 60.
(7) In each embodiment described above, the configuration is described in which the control circuit 13 is constituted by the plurality of control chips 14 corresponding to the respective switching elements S; however, the control circuit 13 may be constituted by a single IC chip. Two or more of the multiple control chips 14 (14H[1] to 14H[3], 14L[1] to 14L[3]) in each of the embodiments describe above may be constituted by a single IC chip. In other words, the number of control chips 14 and the number of switching elements S may be different from each other.
(8) In each embodiment described above, the configuration is described in which an IGBT is used as the switching element S; however, a configuration of the switching element S is not limited to the example described above. For example, a metal-oxide-semiconductor field-effect transistor (MOSFET) may be used as the switching element S. In a configuration in which the switching element S is a MOSFET, the main electrode C is one of a source electrode and a drain electrode, and the main electrode E is the other of the source electrode and the drain electrode. Alternatively, a reverse conducting IGBT (RC-IGBT) including both an IBGT and a freewheeling diode (FWD) may be used as the switching element S. In a configuration in which an RC-IGBT is used, the diode elements D (DH[1] to DH[3], DL[1] to DL[3]) in each embodiment described above may be omitted.
The following configurations are derivable from the different embodiments described above.
A semiconductor apparatus according to one aspect (first aspect) of the present disclosure includes a first connection terminal and a second connection terminal, a drive circuit including one or more power semiconductor elements, a control circuit configured to control the one or more power semiconductor elements, a circuit substrate, a passive element on the circuit substrate, and a first bus bar and a second bus bar. The first bus bar includes a first body including a path electrically connecting the first connection terminal to the drive circuit, and a first protrusion protruding toward the circuit substrate against the first body. The second bus bar includes a second body including a path electrically connecting the second connection terminal and the drive circuit, and a second protrusion protruding toward the circuit substrate against the second body. The passive element is electrically connected to the first protrusion and to the second protrusion.
According to the aspect described above, the first protrusion included in the first bus bar and the second protrusion included in the second bus bar are electrically connected to the passive element on the circuit substrate. Therefore, independent elements for electrically connecting each of the first connection terminal and the second connection terminal to the passive element are not necessary. According to the aspect described above, for example, compared to a configuration in which the first connection terminal and the second connection terminal are electrically connected to the passive element by a dedicated element (for example, a linear connecting conductor), the manufacture of the semiconductor apparatus is simplified.
The “bus bar (first bus bar/second bus bar)” is a plate-shaped or bar-shaped conductor for conducting a large current. For example, a lead frame (lead) formed from a metal plate may be included in a concept of “bus bar” in this disclosure.
A configuration in which an element A and an element B are “electrically connected” to each other includes not only a configuration in which the element A and the element B are directly connected to each other, but also a configuration in which the element A and the element B are indirectly connected to each other through a conductor.
With respect to the first protrusion, “the first protrusion protruding toward the circuit substrate against the first body” means a configuration in which the first protrusion protrudes from a plane including a surface of the first body in a direction approaching the circuit substrate. In the present disclosure, the first protrusion and the first body may be directly coupled to each other, alternatively, the first protrusion and the first body may be indirectly coupled to each other via other elements (for example, a first extension portion described below). Although the above description focuses on the first bus bar, the same interpretation may apply to the second bus bar.
In an example (second aspect) of the first aspect, the semiconductor apparatus further includes a mounting substrate on which the drive circuit is mounted. The first body and the second body are located between the mounting substrate and the circuit substrate. The first bus bar further includes a first connector portion protruding toward the mounting substrate against the first body, the first connector portion being electrically connected to the drive circuit. The second bus bar further includes a second connector portion protruding toward the mounting substrate against the second body, the second connector portion being electrically connected to the drive circuit. Each of the first protrusion and the second protrusion is electrically connected to the passive element in a situation in which each of the first protrusion and the second protrusion is fixed to the circuit substrate. According to the aspect described above, the first body of the first bus bar and the second body of the second bus bar are located between the mounting substrate and the circuit substrate. In other words, the mounting substrate, the first body, the second body, and the circuit substrate are stacked. Therefore, compared to a configuration in which the first body and the second body do not overlap with the mounting substrate or the circuit substrate in plan view, it is possible to reduce the planar size of the semiconductor apparatus.
In an example (third aspect) of the first aspect or the second aspect, at least a part of the first body and at least a part of the second body overlap in plan view. According to the aspect described above, the at least the part of the first body and the at least the part of the second body overlap in plan view; therefore, compared to a configuration in which the first body and the second body do not overlap in plan view, it is possible to reduce inductive components from current paths of the semiconductor apparatus. The term “plan view” means viewing a target from a direction perpendicular to a substrate surface (upper surface or lower surface) of the circuit substrate.
The first body and the second body overlap entirely or partially in plan view. For example, a configuration is assumed in which the first body and the second body overlap in plan view at the center portion of each of the first body and the second body in the direction in which the first body or the second body extends.
In an example (fourth aspect) of any one of the first to the third aspects, the circuit substrate includes a first through hole and a second through hole, the first protrusion is through the first through hole, and the second protrusion is through the second through hole. According to the aspect described above, the first protrusion is inserted through the first through hole and the second protrusion is inserted through the second through hole. Therefore, it is possible to fix the first protrusion and the second protrusion to the circuit substrate easily.
In an example (fifth aspect) of any one of the first to the fourth aspects, the circuit substrate includes a first surface facing the drive circuit; and a second surface opposite to the first surface, and the passive element is on the second surface. According to the aspect described above, the passive element is mounted on the second surface of the circuit substrate, which is opposite to the first surface facing the drive circuit. Therefore, compared to a configuration in which the passive element is mounted on the first surface, it is possible to reduce a space required between the drive circuit and the circuit substrate.
In an example (sixth aspect) of the fifth aspect, the control circuit is on the second surface. According to the aspect described above, both the passive element and the control circuit are mounted on the second surface of the circuit substrate, which is opposite to the first surface facing the drive circuit. Therefore, compared to a configuration in which the control circuit is mounted on the first surface, an effect of being capable of reducing a space required between the drive circuit and the circuit substrate, is particularly significant.
In an example (seventh aspect) of any one of the first to the sixth aspects, the control circuit includes a plurality of control chips on the circuit substrate, the passive element is at a center of the circuit substrate, and the plurality of control chips is arranged, along a periphery of the circuit substrate, at an area surrounding the passive element. According to the aspect described above, the multiple control chips are arranged around the passive element along a periphery of the circuit substrate; therefore, it is possible to reduce respective differences between respective distances (electrical path length) between the respective control chips and the passive element. Therefore, compared to a configuration in which the passive element is located near the periphery of the circuit substrate, it is possible to efficiently realize effects of using the passive element (reduction in noise or detection of unusual voltage).
In an example (eighth aspect) of any one of the first to the seventh aspects, the passive element overlaps neither the first body nor the second body in plan view. Heat generated in the power semiconductor element due to an operation of the semiconductor apparatus may spread to the first bus bar or the second bus bar. In a configuration in which the passive element overlaps the first body or the second body in plan view, heat from the first bus bar or the second bus bar may reach the passive element. On the other hand, according to the aforementioned configuration in which the passive element overlaps neither the first body nor the second body in plan view, it is difficult for heat from the first bus bar or the second bus bar to reach the passive element. Therefore, change in the electrical characteristics of the capacitive element due to heating are reduced, and consequently, malfunctions of the semiconductor apparatus due to the change in electrical characteristics of the passive element are reduced.
In an example (ninth aspect) of any one of the first to the eighth aspects, the first bus bar further includes a first extension portion extending from the first body in a direction along a substrate surface of the circuit substrate, the first protrusion protrudes from a tip of the first extension portion toward the circuit substrate, the second bus bar further includes a second extension portion extending from the second body in the direction along the substrate surface of the circuit substrate, and the second protrusion protrudes from a tip of the second extension portion toward the circuit substrate. According to the aspect described above, the first body and the first protrusion are coupled to each other via the first extension portion; therefore, it is possible to maintain a high level of degree of freedom in the planar position of the first protrusion. For example, the first protrusion may be arranged at a position spaced apart from the first body. The same is true for the second bus bar.
In an example (tenth aspect) of any one of the first to the ninth aspects, the first protrusion is a portion bent from the first extension portion, and the second protrusion is a portion bent from the second extension portion. According to the aspect described above, the first protrusion is formed by bending a portion continuous with the first extension portion. Therefore, for example, it is possible to form the first protrusion with ease compared to a configuration in which the first protrusion, which is separate from the first extension portion, is coupled to the first extension portion. The same is true for the second protrusion.
In an example (eleventh aspect) of any one of the first to the tenth aspects, the circuit substrate includes a first portion and a second portion that are spaced from each other; and a coupler portion coupling the first portion to the second portion, and the passive element is on the coupler portion. According to the aspect described above, the passive element is mounted on the coupling portion coupling the first portion and the second portion of the circuit substrate. In other words, it is possible for the portion coupling the first portion and the second portion to be effectively used for the arrangement of the passive element.
In an example (twelfth aspect) of the eleventh aspect, a first opening and a second opening are located between the first portion and the second portion, and the coupler portion is located between the first opening and the second opening. According to the aspect described above, it is possible to inject a resin material for encapsulating the drive circuit through the first opening or the second opening. In addition, the coupling portion is formed between the first opening and the second opening; therefore, it is easy to maintain the mechanical strength of the circuit substrate.
In an example (thirteenth aspect) of any one of the first to the twelfth aspects, the passive elements includes a capacitive element including a first electrode electrically connected to the first protrusion; and a second electrode electrically connected to the second protrusion. According to the aspect described above, it is possible to change the frequency characteristics of noise caused by switching the power semiconductor element (for example, noise can be reduced).
In an example (fourteenth aspect) of any one of the first to the thirteenth aspects, the passive element includes a series of resistors including a plurality of resistive elements connected in series, a first end of the series of resistors is electrically connected to the first protrusion, a second end of the series of resistors opposite to the first end is electrically connected to the second protrusion, and the semiconductor apparatus further comprising a detection line connected between a first resistive element and a second resistive element, the first resistive element and the second resistive element being included in the plurality of resistive elements, the first resistive element and the second resistive element being adjacent to each other. According to the aspect described above, a voltage, which is obtained by dividing a voltage between the first connection terminal and the second connection terminal by the plurality of resistive elements, is detected by the detection line. Therefore, it is possible to detect an unusual state (or even an occurrence of an unusual state) of the voltage between the first connection terminal and the second connection terminal.
100... semiconductor apparatus, 11... drive circuit, 13... control circuit, 14... control chip, 15... capacitive element, 151... first electrode, 152... second electrode, 16... resistive element, 17... detection line, 18... detection circuit, 181... reference voltage source, 182... comparison circuit, 21... base, 22... lid, 30... housing, 31 to 34... side wall, 35, 36... overhang, 37... support, 38... control terminal, 39... external terminal, 40... semiconductor unit, 41... mounting substrate, 42... insulating substrate, 43... metal layer, 44... conductive pattern, 45... mounting area, 50... connecting conductor, 54... output side bus bar, 55... extension portion, 56... terminal portion, 58... spacer, 60... circuit substrate, 61... first portion, 62... second portion, 63 to 65... coupler portion, 66, 67... opening, F1... first surface, F2... second surface, H1, H2, Ha, Hb... through hole, 70... high potential bus bar, 71... body, 72... connector portion, 73... connector portion, 731... extension portion, 732... protrusion, 80... low potential bus bar, 81... body, 82... connector portion, 83... connector portion, 831...extension portion, 832... protrusion, 84, 85... coupler portion, 200... control apparatus, 681 to 685... wiring pattern, P, N... connecting terminal, D... diode element, S... switching element, V... detection voltage, Vref... reference voltage, e1... first end, e2... second end, α... warning signal.
Number | Date | Country | Kind |
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2021-184007 | Nov 2021 | JP | national |