Number | Name | Date | Kind |
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4543597 | Shibata | Sep 1985 | |
4689871 | Malhi | Sep 1987 | |
5844282 | Noguchi | Dec 1998 |
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K.P. Cheung, "Plasma Charging Damage", IEEE 1997 Tutorial Notes, Int'l Reliability Physics Symposium, Apr. 7-10, 1997, pp. 4.1-4.44, Bell Labs/Lucent Technologies, Murray Hill, NJ. |