This application claims priority of provisional application Ser. No. 60/135,260, filed May 21, 1999.
Number | Name | Date | Kind |
---|---|---|---|
3997381 | Wanlass | Dec 1976 | |
4318250 | Klievoneit et al. | Mar 1982 | |
4652901 | Nothaft | Mar 1987 | |
4663890 | Brandt | May 1987 | |
4668366 | Zarowin | May 1987 | |
4693036 | Mori | Sep 1987 | |
4753049 | Mori | Jun 1988 | |
4947598 | Sekiya | Aug 1990 | |
5035087 | Nishiquichi et al. | Jul 1991 | |
5113622 | Nishiquchi et al. | May 1992 | |
5238532 | Zarowin et al. | Aug 1993 | |
5254830 | Zarowin et al. | Oct 1993 | |
5290382 | Zarowin et al. | Mar 1994 | |
5291415 | Zarowin et al. | Mar 1994 | |
5292400 | Mumola | Mar 1994 | |
5329733 | Steere, Jr. | Jul 1994 | |
5336355 | Zarowin et al. | Aug 1994 | |
5344524 | Sharma et al. | Sep 1994 | |
5360509 | Zakaluk et al. | Nov 1994 | |
5372674 | Steinberg | Dec 1994 | |
5376224 | Zarowin | Dec 1994 | |
5419803 | Mumula | May 1995 | |
5474647 | Poultney et al. | Dec 1995 | |
5545076 | Yun et al. | Aug 1996 | |
5605494 | Nishioda et al. | Feb 1997 | |
5679060 | Leonard et al. | Oct 1997 | |
5679212 | Kato et al. | Oct 1997 | |
5688415 | Bollinger et al. | Nov 1997 | |
5821166 | Hajime et al. | Oct 1998 | |
5821167 | Fukami et al. | Oct 1998 | |
5827779 | Masumura et al. | Oct 1998 | |
5849603 | Kato et al. | Dec 1998 | |
5849636 | Harada et al. | Dec 1998 | |
5851924 | Nakazawa et al. | Dec 1998 | |
5863829 | Nakayoshi et al. | Jan 1999 | |
5942445 | Kato et al. | Aug 1999 | |
6030887 | Desai et al. | Feb 2000 | |
6184060 | Siniaguine | Feb 2001 |
Number | Date | Country |
---|---|---|
0 699 504 A1 | Mar 1996 | EP |
0 755 751 A1 | Jan 1997 | EP |
0 782 179 A3 | Jul 1997 | EP |
0 782 179 A2 | Jul 1997 | EP |
0 798 405 A2 | Oct 1997 | EP |
0 798 766 A1 | Oct 1997 | EP |
09-103944 | Apr 1997 | JP |
Entry |
---|
Mumola, P. B., et al., Recent Advances in Thinning of Bonded Soi Wafers by Plasma Assisted Chemical Etching, Electrochemical Society Proceedings vol. 95-7, pp 28-32 (1995). |
PCT International Publication No. WO 98/19337, International Publication Date May 7, 1998. |
PCT International Publication No. WO 98/09804 Publication Date Mar. 12, 1998. |
PCT International Publication No. WO 98/44541 Publication Date Oct. 8, 1998. |
PCT International Publication No. WO 98/44549 Publication Date Oct. 8, 1998. |
Number | Date | Country | |
---|---|---|---|
60/135260 | May 1999 | US |