Number | Date | Country | Kind |
---|---|---|---|
1881/87 | Jul 1987 | ATX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/AT88/00054 | 7/22/1988 | 3/16/1989 | 3/16/1989 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO89/01094 | 2/9/1989 |
Number | Name | Date | Kind |
---|---|---|---|
3941903 | Tucker | Mar 1976 | |
4404263 | Hodes et al. | Sep 1983 | |
4789607 | Fujita et al. | Dec 1988 |
Entry |
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Thornton, J. A., "Influence of Apparatus Geometry and Deposition Conditions on the Structure and Topography of Thick Sputtered Coatings", Journal of Vacuum Science and Technology, vol. 11, No. 4, Jul./Aug. 1974, 666-670. |