| Number | Date | Country | Kind |
|---|---|---|---|
| 1881/87 | Jul 1987 | ATX |
| Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
|---|---|---|---|---|---|
| PCT/AT88/00054 | 7/22/1988 | 3/16/1989 | 3/16/1989 |
| Publishing Document | Publishing Date | Country | Kind |
|---|---|---|---|
| WO89/01094 | 2/9/1989 |
| Number | Name | Date | Kind |
|---|---|---|---|
| 3941903 | Tucker | Mar 1976 | |
| 4404263 | Hodes et al. | Sep 1983 | |
| 4789607 | Fujita et al. | Dec 1988 |
| Entry |
|---|
| Thornton, J. A., "Influence of Apparatus Geometry and Deposition Conditions on the Structure and Topography of Thick Sputtered Coatings", Journal of Vacuum Science and Technology, vol. 11, No. 4, Jul./Aug. 1974, 666-670. |