Number | Date | Country | Kind |
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56-188842 | Nov 1981 | JPX |
Number | Name | Date | Kind |
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4131496 | Weitzel et al. | Dec 1978 |
Entry |
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Chang, Silicon-on-Sapphire Epitaxy by Vacuum Sublimation, pp. 500-511, Journal of Vacuum Science and Technology, vol. 8, No. 3, 12/22/70. |
Nolder et al, Heteroepitaxial Silicon-Aluminum Oxide Interface, Part II Orientation Relations of Single-Crystal Silicon on Alpha Aluminum Oxide, Transactions of Metallurgical Society of AIME, vol. 233, Mar. 1965, pp. 549-556. |
J. E. A. Maurits, "Problems and Solutions in the Preparation of SOS Wafers", Solid State Technology (Apr. 1977) pp. 81-86. |