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9725356 | Dec 1997 | GBX |
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---|---|---|---|
4288307 | Kiyotaka Wasa | Sep 1981 | |
4336119 | Gillery | Jun 1982 | |
4676883 | Nelson et al. | Jun 1987 | |
4951663 | L'Esperance, Jr. | Aug 1990 | |
4975168 | Ichiro Ohno et al. | Dec 1990 | |
5002631 | Giapis et al. | Mar 1991 | |
5154810 | Kamerling et al. | Oct 1992 | |
5403433 | Morrison et al. | Apr 1995 | |
5490912 | Warner et al. | Feb 1996 | |
5766426 | Clarke | Jun 1998 | |
5822211 | Barenboim et al. | Oct 1998 |
Number | Date | Country |
---|---|---|
0 190 051 | Aug 1986 | EPX |
0 666 337 | Aug 1995 | EPX |
Entry |
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D.A. Walsh, et al.; "Optical thickness monitor for sputtered films"; Rev. Sci. Instrum., vol. 47, No. 8; pp. 932-934, Aug. 1976. |