This application claims the benefit of Chinese Patent Application No. 202210556968.7, filed on May 20, 2022, which is incorporated herein by reference in its entirety.
The present invention generally relates to the field of semiconductor technology, and more particularly to packaging structures and power converters.
With increasing functionality, performance, and integration of integrated circuits, as well as the emergence of new types of integrated circuits, packaging technology plays an increasingly important role in integrated circuit products. Along these lines, packaging technology accounts for an increasing portion of the value of an entire electronic system.
Reference may now be made in detail to particular embodiments of the invention, examples of which are illustrated in the accompanying drawings. While the invention may be described in conjunction with the preferred embodiments, it may be understood that they are not intended to limit the invention to these embodiments. On the contrary, the invention is intended to cover alternatives, modifications and equivalents that may be included within the spirit and scope of the invention as defined by the appended claims. Furthermore, in the following detailed description of the present invention, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, it may be readily apparent to one skilled in the art that the present invention may be practiced without these specific details. In other instances, well-known methods, procedures, processes, components, structures, and circuits have not been described in detail so as not to unnecessarily obscure aspects of the present invention.
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In particular embodiments, a stacked packaging structure can include a lead frame, a die located on a first surface of the lead frame, a patterned first insulation layer, a diode, and an electrical interconnection structure. The patterned first insulation layer can be located on the surface of the die for voltage isolation and protection, and may selectively expose the metal structure with corresponding polarity of the die. The electrical interconnection structure can be located above the first insulation layer for electrical connection with the exposed metal structure of the die, and the electrode of the diode can be led out to facilitate electrical connection. The diode may be located on the electrical interconnection structure, whereby its lower surface is electrically connected to the electrical interconnection structure, and the electrode on the upper surface can connect to the corresponding pins of the lead frame. For example, the diode can be a regular silicon based diode. Also for example, the lead frame can be a QFN lead frame, with characteristics of relatively small volume and light weight. In this example, the stacked packaging structure can encapsulate the die and diode together using suitable processes, the technical barriers caused by the use of SOI or CMOS technology for diode preparation can be substantially avoided, and the requirements for diode formation also reduced. In addition, the layout of the die in this example packaging structure is more flexible, and the number of pins in the packaging structure not limited, thus further reducing the packaging volume.
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In this example, insulating layer 203 can include a polyimide material, and the insulating layer may be formed, e.g., by a PVD process, a CVD process, or a coating process. For example, insulation layer 203 may have a predetermined thickness for voltage isolation and protection of the die. The thickness of insulation layer 203 can be designed according to the process capacity of the factory and any warping problem caused by the insulating layer itself. For example, the thickness of insulation layer 203 may not be greater than 10 um. In this example, the stacked packaging structure may utilize polyimide passivation packaging technology, with excellent performance, relatively simple process operation, and that is suitable for mass production of products. Electrical interconnection structure 204 can be a metal redistribution layer having at least two different types of metal layers. For example, electrical interconnection structure 204 can include a Cu metal layer, a Ni metal layer, and an Au metal layer, which may be formed through an electroplating process. In alternative examples, electrical interconnection structure 204 can include suitable other metals and/or processes. For example, the thickness of electrical interconnection structure 204 may not be less than 8 um.
The packaging structure can also include adhesive layer 201 located between lead frame 200 and die 202, as well as adhesive layer 205 located between electrical interconnection structure 204 and diode 206. Adhesive layer 201 can be used to install die 202 on lead frame 200, and adhesive layer 205 may be used to install the diode 206 on electrical interconnection structure 204. In this example, adhesive layers 201 and 205 can be conductive adhesives, and the thickness of adhesive layer 205 can be less than 10 um. In another example, adhesive layer 205 may be configured as a welding layer for welding diode 206. For example, the welding layer can include lead-free solder with a thickness range of from 10 um to 15 um.
The packaging structure can also include a patterned second insulation layer located above electrical interconnection structure 204, and selectively exposing the upper surface of electrical interconnection structure 204. Second insulation layer may be utilized in conjunction with electrical interconnection structure 204 to improve the contact surface of diode 206, thereby better serving as a fixed connection and support. In this example, the second insulation layer can be subjected to opening treatment to form an opening for selectively exposing the upper surface of electrical interconnection structure 204, thereby enabling electrical connection between the lower surface of the diode and the upper surface of the exposed electrical interconnection structure. For example, the size of diode may be greater than that of the opening of the second insulation layer, and at least one side of the diode may exceed the corresponding side of the opening of the second insulating layer by 20-50 um. For example, the second insulating layer can include a polyimide material, and the second insulating layer may be formed, e.g., by a PVD process, a CVD process, or a coating process.
In particular embodiments, the surface of lead frame 200 can be subjected to an etching process. The etching may begin from the upper surface of lead frame 200, and extend along the thickness direction of the lead frame, and stop in lead frame 200. Accordingly, the depth of the etching is less than the thickness of lead frame 200. A concave convex shape may be formed on the surface of lead frame 200, and the surface of the convex part can be the outer pin layer pattern of the lead frame. The pins of lead frame 200 can include second type pin 2001 distributed in the edge area of the lead frame, and first type pin 2002 distributed in the middle of the lead frame. For example, second type pin 2001 can be L-shaped, and first type pin 2002 may be T-shaped. In particular embodiments, according to circuit design requirements, the packaging structure can be combined from diode 206, electrical interconnection structure 204, and lead of die 202 to pin 2001, in order to provide circuit connections for the distribution of power and signals. Any suitable wire bonding arrangement can be utilized in certain embodiments.
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In particular embodiments, a stacked packaging structure can be arranged whereby the die and the diode are packaged together by using the lead frame as the die carrier of the integrated circuit. Thus, the technical barrier caused by the diode being prepared by adopting SOI technology or CMOS technology can be substantially avoided, and limitations on the diode preparation method utilize may be reduced. In addition, the arrangement of the die in the packaging structure may provide more flexibility, and the number of pins of the packaging structure may not be limited, such that the packaging volume can be further reduced.
The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best utilize the invention and various embodiments with modifications as are suited to particular use(s) contemplated. It is intended that the scope of the invention be defined by the claims appended hereto and their equivalents.
Number | Date | Country | Kind |
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202210556968.7 | May 2022 | CN | national |