Surface inspection by double pass laser doppler vibrometry

Abstract

A double pass apparatus for detecting defects on a disk surface includes a light source that generates a light beam and a beamsplitter that splits the light beam into a first light beam portion and a second light beam portion. A modulator is provided that modulates the second light beam portion into a frequency shifted modulated light beam for illuminating the surface of the disk. The frequency shifted modulated light beam is twice reflected from the surface of the disk, thus doubling the frequency shift of the reflected light beam. A polarizing beamsplitter combines the first light beam portion with the reflected light beam portion providing an interference signal.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates generally a double pass advanced optical inspection system for inspecting disk surfaces according to one embodiment of the present invention.

FIG. 2 illustrates a delivery module of a sensor optical illumination module for the double pass advanced optical inspection system according to one embodiment of the present invention.

FIG. 3 illustrates the sensor optical illumination module and a sensor brightfield collection optical module for the double pass advanced optical inspection system according to one embodiment of the present invention.

FIG. 4 is a flowchart depicting steps performed within a double pass apparatus for detecting defects on a disk surface in accordance with one embodiment of the present invention.

Claims

1. A double pass apparatus for detecting defects on a disk surface, comprising: a light source that generates a light beam;a beamsplitter that splits the light beam into a first light beam portion and a second light beam portion;a modulator that modulates the second light beam portion into a frequency shifted modulated light beam for illuminating the surface of the disk,wherein the frequency shifted modulated light beam is twice reflected from the surface of the disk, doubling the frequency shift of a reflected light beam; anda polarizing beamsplitter that combines the first light beam portion with the reflected light beam portion providing an interference pattern.

2. The double pass apparatus for detecting defects on a disk surface according to claim 1, further comprising photomultiplier tubes that square law detect the interference pattern.

3. The double pass apparatus for detecting defects on a disk surface according to claim 2, wherein the photomultiplier tubes are arranged differentially.

4. The double pass apparatus for detecting defects on a disk surface according to claim 1, further comprising a lens to reflect the frequency shifted modulated light beam back onto the surface of the disk.

5. The double pass apparatus for detecting defects on a disk surface according to claim 1, further comprising a differential amplifier that differentially sums the square law detected interference pattern.

6. The double pass apparatus for detecting defects on a disk surface according to claim 1, wherein the light source is fiber optic coupled with polarization maintaining fibers.

7. The double pass apparatus for detecting defects on a disk surface according to claim 1, further comprising a plano-convex lens providing an illumination spot on the surface of the disk.

8. The double pass apparatus for detecting defects on a disk surface according to claim 7, wherein the plano-convex lens has an angle of incidence which allows a spherical mirror to reflect the frequency shifted modulated light beam back on to the surface of the disk.

9. The double pass apparatus for detecting defects on a disk surface according to claim 7, wherein the illumination spot has an elliptical shape.

10. A method for detecting defects on a disk surface, comprising: generating a light beam;splitting the light beam into a first light beam portion and a second light beam portion;modulating the second light beam portion into a frequency shifted modulated light beam for illuminating the surface of the disk,twice reflecting the frequency shifted modulated light beam from the surface of the disk, thereby doubling the frequency shift of a reflected light beam; andcombining the first light beam portion with the reflected light beam portion providing an interference pattern.

11. The method for detecting defects on a disk surface according to claim 10, further comprising square law detecting the interference pattern.

12. The method for detecting defects on a disk surface according to claim 10, further comprising reflecting the frequency shifted modulated light beam back onto the surface of the disk with a spherical mirror.

13. The method for detecting defects on a disk surface according to claim 11, further comprising differentially summing the square law detected interference pattern.

14. The method for detecting defects on a disk surface according to claim 10, further comprising coupling a fiber optic with polarization maintaining fibers.

15. The method for detecting defects on a disk surface according to claim 10, further comprising providing an illumination spot on the surface of the disk.

16. The method for detecting defects on a disk surface according to claim 15, wherein the illumination spot has an elliptical shape.

17. The method for detecting defects on a disk surface according to claim 10, further comprising provided a plano-convex lens for creating an illumination spot on the surface of the disk.

18. The method for detecting defects on a disk surface according to claim 10, wherein the plano-convex lens has an angle of incidence which allows a spherical mirror to reflect the frequency shifted modulated light beam back on the surface of the disk.

19. The method for detecting defects on a disk surface according to claim 10, further comprising arranging photomultiplier tubes to increase optical inspection efficiency.

20. The method for detecting defects on a disk surface according to claim 10, wherein the photomultiplier tubes are arranged differentially.