Claims
- 1: A wafer manufacturing method for use in a wafer manufacturing apparatus comprising a plurality of processing units each having therein at least one processing chamber, a conveying mechanism, and a conveyer device for conveying objects to be processed to the processing units in an atmospheric pressure space which is arranged in an atmospheric air, and provided therein a purifying device, comprising the steps of:
temporarily holding objects to be processed in a container to introduce or deliver individual object to be processed; transferring the objects to be processed between the container and the conveyer device; conveying an object to be processed to a position around a desired one of the plurality of processing units through an atmospheric pressure space conveying path in the conveyer device, transferring the object to be processed between the desired processing unit and the conveyer device with a designated timing; processing the objects to be processed, via the plurality of processing units; and transferring the objects to be processed between the processing units through the atmospheric pressure conveying path.
- 2: A wafer manufacturing method as claimed in claim 1, further comprising a step of transferring objects to be processed piece-by-piece between the desired processing unit, a storage device or a measuring device and the conveying mechanism with a timing which is different among the processing units, the storage device and the measuring device.
- 3: A wafer manufacturing method as claimed in claim 1, further comprising a step of temporarily accommodating the objects to be processed in the conveyer device between the steps of receiving the objects to be processed from the processing units to the conveyer device and the step of delivering the objects to be processed from the conveyer device to the processing units.
- 4: A wafer manufacturing method as claimed in claim 2, further comprising a step of temporarily accommodating the objects to be processed in the conveyer device between the steps of receiving the objects to be processed from the processing units to the conveyer device and the step of delivering the objects to be processed from the conveyer device to the processing units.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2001-384863 |
Dec 2001 |
JP |
|
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a division of application Ser. No. 10/083,378 filed on Feb. 27, 2002. The contents of application Ser. No. 10/083,378 are hereby incorporated herein by reference in their entirety.
Divisions (1)
|
Number |
Date |
Country |
Parent |
10083378 |
Feb 2002 |
US |
Child |
10740615 |
Dec 2003 |
US |