The present invention concerns a system for illuminating an object with a wave or for imaging an object with a wave.
It is known from the applicant's own patent application WO-2008/007024, a device having a reactive type antenna element surrounded by a plurality of metallic diffusers. Thanks to this arrangement, the electromagnetic wave is focused to a point i near the antenna element at a sub wavelength distance.
This device is efficient, but is limited to the focalisation of a wave to the core of the reactive antenna element, that is to say to only one single point at a short distance from the metallic diffusers.
One object of the present invention is to provide a system for illuminating an object with a wave, said object being at a sub wavelength distance from the lens of the system.
To this effect, the system for illuminating an object with a wave comprises:
a width wR in a direction to a neighbour resonator element lower than said first distance d1,
a length lR in an other direction, and
a resonance frequency fR corresponding to a resonance wavelength λR,
Thanks to these features, the system may illuminate a plurality of points Pi on an object positioned at a short sub wavelength distance from the lens.
In various embodiments of the system for illuminating, one and/or other of the following features may optionally be incorporated:
t
j(t)=hij−1(t)*oi(t) in time domain, and
t
j(t)=IFFT(Hij−1(ω)·Oi(ω)) frequency domain,
where
oi(t) is an object signal corresponding to the desired near field wave on the object,
hij(t) are predetermined filters designed to focus the near field wave on the point of index-number i of the object,
t is a time value,
* is the convolution product operator,
Oi(ω) is a Fourier transform of the object signal oi(t),
Hij(ω) is a Fourier transform of the predetermined filters hij(t),
IFFT is an inverse Fourier transform, and
ω is a frequency pulsation equal to 2.π.f where f is a frequency of the desired near field wave;
Another object of the present invention is to provide a system for imaging an object with a wave, said object being at a sub wavelength distance from the lens of the system.
To this effect, the system for imaging an object with a wave comprises:
a resonance frequency fR corresponding to a resonance wavelength λR,
a width wR in a direction to a neighbour resonator element lower than said first distance d1, and
a length lR in an other direction,
Thanks to these features, the system may provide an image of a plurality of points Pi on an object positioned at a short sub wavelength distance from the lens.
In various embodiments of the system for imaging proposed by the invention, one and/or the other of the following features may optionally be incorporated:
o
i(t)=hij(t)*tj(t)
where
hi( ) are predetermined filters designed to determine the near field wave on the point of index-number
* is the convolution product operator, and
Another object of the invention is to provide a method for illuminating an object with a wave, wherein:
a width wR in a direction to a neighbour resonator element lower than said first distance d1,
a length lR in an other direction, and
a resonance frequency fR corresponding to a resonance wavelength λR, said resonance wavelength λR being comprised between λmin and λmax, and the first distance d1 being lower than λmax/5 so that said resonator elements are coupled to each other,
Another object of the invention is to provide a method for imaging an object with a wave, wherein:
a width wR in a direction to a neighbour resonator element lower than said first distance d1,
a length lR in an other direction, and
a resonance frequency fR corresponding to a resonance wavelength λR, said resonance wavelength λR being comprised between λmin and λmax, and the first distance d1 being lower than λmax/5 so that said resonator elements are coupled to each other, and said far field wave having wavelengths comprised into a desired wavelength bandwidth ΔλD between λmin and λmax,
Other features and advantages of the invention will be apparent from the following detailed description of two of its embodiments given by way of non-limiting examples, with reference to the accompanying drawings. In the drawings:
a, 4b and 4c are views of three transverse electromagnetic modes inside the lens of
The invention concerns firstly a system for illuminating an object with a wave and secondly a system for imaging an object with a wave.
The system for illuminating an object is described bellow. The system for imaging an object will be described later in this description.
The wave may be any type of wave. It could be an acoustic wave, an electromagnetic wave, an optical wave. The system could be adapted to each type of wave, with slight differences concerning at least the transducers. The transducers are indeed usually adapted to a specific wavelength bandwidth ΔλT concerning only one of the types of waves.
A first embodiment illustrating a system adapted for an electromagnetic wave is described now, regarding the
The system for illuminating an object comprises:
The control unit 30 is adapted to computes the signals tk(t) based on:
Each point Pi belongs to a surface 2 of said object 1. Said surface 2 may be a plane surface or not.
The control unit 30 therefore computes the following formulas:
t
j(t)=hij−1(t)*oi(t) in time domain, or (1)
t
j(t)=IFFT(Hij−1(ω)·Oi(ω)) in frequency domain, (2)
where
oi(t) is an object signal corresponding to the desired near field wave on the object,
hij(t) are predetermined filters designed to focus the near field wave on the point of index-number i of the object,
t is a time value,
* is the convolution product operator,
Oi(ω) is a Fourier transform of the object signal oi(t),
Hij(ω) is a Fourier transform of the predetermined filters hij(t),
LEFT is an inverse Fourier transform, and
ω is a frequency pulsation equal to 2.π.f where f is a frequency of the desired near field wave.
The predetermined filters may be determined by many known methods.
According to a first variant, the predetermined filters hij(t) are delay filters so that the equation (1) corresponds to well known beam forming focussing.
According to a second variant, the predetermined filters hij(t) are themselves computed with the impulse responses gij(t) between the transducer j and the point Pi.
According to a third variant, the predetermined filters hij(t) are themselves computed with the temporal inversion gij(−t) of the impulse responses gij(t) between the transducerj and the point Pi, as explained inter alia in FR-2 748 137 and in WO-2008/007024 concerning temporal inversion.
The plurality of transducers 20 are remote from the lens 20, and emit the far field wave WFF towards the lens 10. Each transducer Tj is fed with the signal tj(t) provided by the control unit 30, so that the plurality of transducers 20 emits the far field wave WFF.
A transducer Tj of said plurality has a wavelength bandwidth ΔλT.
In case of electromagnetic wave, a transducer Tj is an electromagnetic antenna element. An electromagnetic wave has for example a wavelength λ between 1 mm and 1 m, corresponding to a frequency between 300 GHz and 300 MHz.
The lens 10 comprises a medium 11 and a plurality of resonator elements 12 incorporated inside said medium 11. The medium 11 can be a solid dielectric material, and may comprise also active materials.
In case of electromagnetic wave, the resonator elements 12 are conductive wires, for example metallic or copper wires. The lens 10 may have a parallelepiped shape with a first surface 10a facing the object 1 and a second surface 10b opposite to said first surface 10a. The far field wave WFF prop agates at least between the transducers 20 and the second surface 10b of the lens 10. The lens 10 converts the far field wave WFF to a near field wave WNF. The near field wave WNF propagates at least between the first surface 10a of the lens 10 and the object 1.
The resonator elements 12 extend between the first surface 10a and the second surface 10b of the lens 10. They have (see
In case of
The resonance wavelength λR of a resonator element is comprised between λmin and λmax, and is for example a multiple of 2.lR. The length lR of the resonator element 12 is roughly equal to λR/2 or a multiple of it, therefore corresponding to a Fabry-Perot resonance.
The resonance wavelength λR is also comprised inside the transducer wavelength bandwidth ΔλT so that the near field wave WNF spreads into a desired wavelength bandwidth ΔλD between said λmin and λmax.
The resonator elements 12 are spaced from each other of a distance lower than a first distance d1. The first distance is a sub wavelength distance, usually lower than λmax/5 so that said resonator elements are coupled to each other But, the first distance d1 may be lower than λmax/20, and preferably lower than λmax/50, so that the resonator elements are very close from each other and highly coupled to each others.
The resonator elements 12 may be straight lines as represented on
In the case of
The width wR of the resonator element 12 is lower than d1/5, and preferably lower than d1/20. Consequently, the width wR of the resonator element 12 is very small and lower than λmax/25, and preferably lower than λmax/100.
Such lens is also known as a wire medium. In such wire medium comprising wire conductor elements 12, the magnetic field vector B and the electric field vector E are perpendicular to the direction Z, and the propagation wave vector K is a propagation vector collinear to said direction Z. Inside the wire medium, the electromagnetic wave is a plane wave propagating inside the medium 11 along the direction Z.
The magnetic field vector B and electric field vector E have transverse electromagnetic modes (TEM) inside said medium 11, with nodes and antinodes. These TEM modes have sub-wavelengths variations along directions X and Y.
The medium 11 is therefore an anisotropic medium. Each TEM mode has the same propagation speed and the same resonance frequency. They have the same phase velocity, and the TEM modes are dispersionless.
The near field wave WNF decomposes onto these TEM modes with a unique set of amplitudes and phases, so that the near field wave WNF is converted into a unique specific spectrum inside the lens 10 and into a specific unique temporal signature of the electric field: The lens encodes the near field wave according to a unique specific way.
The near field wave space resolution is then limited by the first distance d1 between the resonators and the losses inside the lens 10.
The TEM modes have a transverse wave number k and they penetrate outside of the medium up to a penetration distance dk:
where
k is the transverse wave number of a TEM mode,
k is free space wave number, i.e. k=2.π.f/c,
f is the frequency of wave, and
c is the electromagnetic wave speed in vacuum.
The length for the TEM mode propagation is not the length lR of the resonator element 12, but an effective length Leff which is equal to:
This effective length Leff may then be used to define the condition for resonance (Leff=λ0/2 for the first Fabry-Perot like condition), and gives the following dispersion relation:
where
f is the resonance frequency,
f0 is the Fabry-Perot resonance frequency,
kt is the transverse wave number of a TEM mode, and
k0 is the Fabry-Perot wave number.
The TEM modes of the lens 10 are sub wavelength modes that only generate evanescent waves, not propagating outside of the lens to the far field.
However, the Z component Ez of the electric field vector E is non zero at the longitudinal boundaries of the lens 10 (in proximity of the first surface 10a and the second surface 10b). This component Ez is coupled to the internal TEM modes. It has the same periodicity than the TEM modes inside the lens 10 and radiates as the far field wave WFF.
The coupling converts therefore the far field wave WFF into the near field wave WNF of the lens 10, and reciprocally. Such coupling or conversion is not very efficient and inversely proportional or related to the transverse wave number kt. But, the TEM modes are very efficient and have a quality factor Q proportional to the same transverse wave number kt. This quality factor is reduced by the losses in the lens. Then, signals transmitted from the near field wave WNF through the near field TEM modes inside the lens are radiated to the far field wave WFF, and reciprocally. The coding or signature of the near field wave may be found inside the far field wave.
This explains how the near field wave WNF is converted into a specific electric field E inside the lens, and is then radiated out of the lens into a far field wave WFF, free space radiation. Reciprocally, the far field wave WFF is transformed or converted by the lens 10 into a near field wave WNF inside or at proximity of the lens, by the TEM modes of the lens.
The system further comprises positioning means (not shown) adapted for positioning the object 1 relative to the lens 10, at a short sub-wavelength distance. One point Pi of the surface 2 of the object 1 is therefore positioned at a second distance d2 from the lens (at least a resonator element 12 of the lens). Said second distance is a sub-wavelength distance, and is lower than λmax/5.
The second distance d2 may be lower than λmax/20, and preferably lower than λmax/50, so that the points Pi of the object 1 are very close to the lens 10 and are illuminated by the near field wave WNF.
Such system for illuminating an object may focus a desired near field wave WDNF on an object 1 or illuminate such object 1 with said desired near field wave WDNF. The point Pi of the object 1 may be all illuminated simultaneously with a different desired near field wave WDNF.
The points Pi are at sub wavelength distance from each others, that is to say at a predetermined distance dP lower than λmax/20, and preferably lower than λmax/50.
An experiment was carried out to demonstrate such behaviour of the lens.
A square periodic lattice of N×N (N=20) parallel conductor wires 12 was build. Each wire has a diameter or width wR of 3 mm, a length lR of 40 cm in direction Z. The first distance d1 between the wires in a transversal direction (plane XY) is of 1.2 cm. Consequently, the wire are distant from each other of a first distance lower than to λ/66. The medium 11 is air.
An antenna element (a small transverse electric dipole) is positioned at a second distance d2 of 2 mm from the lens at a plurality of the points Pi.
During an initial learning step, the antenna element is fed with a signal consisting in a 5 ns pulse centred on around 300 MHz for each point Pi. The transducers signals tij(t) received by the transducers 20 in the far field wave gives the impulse response gij(t) (gij(t)=tij(t)) between the point Pi and the transducer Tj. The decomposition of the emitted signal onto the TEM modes of the lens is unique, so that the impulse response gij(t) or its Fourier transform depends on the position of the element at point Pi, giving a unique signature.
Then, during an illumination step, the transducers 20 are now fed with transducers signals tij(t) which are the time reversal of the previous signal (tij(t)=gij(−t), to carry out a time reversal experiment. The plot of
This demonstrates that a focal spot of wavelength width Δ of λ/25 is experienced. Such focalisation of the near field wave WNF is therefore adapted to illuminate each point Pi with a different and uncorrelated value. The second curve 52 shows the received amplitudes without the lens. In that case, there is no focalisation.
Such system for illuminating an object may then be used for transmitting precisely a plurality of data simultaneously between the far field transducers 20 and the near field object 1.
A second embodiment illustrating a system adapted for an optical wave is described now.
The system of this second embodiment is similar and works similarly to the first embodiment. Only the differences will be explained.
The transducers 20 are photo emitters adapted to emit a far field wave WFF of light.
The resonator elements 12 are small conductive elements having a size or width wR lower than the wavelength λ of the far field wave WFF, for example lower than 50 nm. Such small conductive elements also have a resonance frequency which interacts with an incident far field wave WFF, and refracts a modified near field wave WNF.
Such conductive elements may be nanoparticules.
The conductive element may comprise of active materials adapted to receive a wave at a first wavelength λ1 and to emit a wave at a second wavelength λ2 different to said first wavelength. Such active materials may be quantum dots or dyes or fluorescent molecules or the like.
Such system for illuminating an object may then be used for focalising a light wave with sub wavelength resolution, for example for a resolution lower than 20 nm, and preferably lower than 10 nm. The system may illuminate in the near field wave one single point or a plurality of points simultaneously or a complete surface with an image.
Thus, such system for illuminating an object may be used for example for etching a semiconductor device, precisely and quickly.
A third embodiment illustrating a system adapted for an acoustic wave is described now.
The acoustic sub wavelength lens 10 may be a rigid structure in air having a plurality of holes from a first side to a second side of the structure. The holes have a Helmholtz resonance and are the resonator elements 12 of the lens 10, while the rigid structure is the medium 11. For example, having a structure of 10 cm thick would provide a lens with modes around 1500 Hz.
Such acoustic lens 10 will behave like the wire media electromagnetic lens, converting the sub wave length near field wave WNF into a radiated far field wave WFF comprising the temporal and spectrum signature of the near field wave, and reciprocally.
The system for imaging an object is described now.
A first embodiment illustrating a system adapted for an electromagnetic wave is described, regarding also
The system is very similar to the system for illuminating an object, the waves propagating in the reverse way. It comprises:
Each point belongs to a surface 2 of the object 1. The points Pi are at sub wavelength distance from each others.
The system further comprises positioning means (not shown) adapted for positioning the object 1 relative to the lens 10 at a second distance d2 from at least one resonator element 12 of the lens 10. The second distance d2 is a short distance and verifies the same conditions as for the first embodiment of the invention.
The system further comprises emitting means.
According to a first variant, the near field wave WNF is indirectly emitted by the object 1. The emitting means emit an emitted wave towards the object 1, and a near field wave WNF is reflected or refracted from the object 1 towards the lens 10. The emitted wave and the near field wave comprise wavelengths between λmin and λmax.
According to a second variant, the near field wave WNF is directly emitted by the object 1. The emitting means are connected to the object 1 and the object 1 emits itself a near field wave WNF having wavelengths between λmin and λmax towards the lens 10.
The object 1 emits directly or indirectly a near field wave WNF towards the lens 10. The lens 10 converts or transforms such near field wave WNF into a far field wave WFF by the TEM modes of the lens, as explained above. The lens is identical to the one of the first embodiment.
The plurality of transducers 20, remote from the lens, receives the far field wave WFF from the lens 10. Each transducer Tj delivers a transducer signal tj(t) to the control unit 30.
The control unit 30 computes object signals oi(t) at each points Pi by the following formulas:
o
i(t)=hij(t)*tj(t)
where
hij(t) are predetermined filters designed to determine the near field wave on the point of index-number i, such predetermined filters being determined in an initial learning step as described above, and
* is the convolution product operator.
The image of the object is then build with the values at the origin time oi(t) of the object signals oi(t).
Another experiment was carried out to demonstrate the imaging ability of the lens.
The same square periodic lattice or grid of wires is used, with antenna element at all the points Pi. The same learning step, is used to determine the impulse responses gij(t) and the predetermined filters used in the control unit 30. The predetermined filters hij(t) are for example equal to the impulse responses gij(t).
Then, a different predetermined excitation is generated at each point Pi in from of the lens 10, and the control unit 30 computes the object signal oi(t) and the values of the image of the object 1. In the plot of
The good agreement between these points and the curve demonstrates that the system is able to computes a precise image of the object 1 comprising uncorrelated pixels, so that the image has a resolution lower than λ/80.
Such system for imaging an object may then be used for imaging precisely a small object as an electronic microscope. However, such system does not need to move a tip above the surface of the object, as is absolutely necessary in a scanning tunnelling microscope.
A second embodiment of the system for imaging may be adapted for optical waves. Such optical system would have the same changes compared to the electromagnetic device as explained above.
A third embodiment of the system for imaging may be also adapted for acoustical waves.
As an improvement of all the previous embodiments and variants, the system may also comprise at least one lens transducer incorporated inside the lens 10 and connected to the control unit 30.
This lens transducer may be fed with a lens signal l(t) provided by the control unit 30 to modify the properties of the lens 10. For example, in case of an electromagnetic device, the lens transducer may generate an electric field inside the lens 10 that modifies the TEM modes as desired.
This lens transducer may also provide a lens signal l(t) to the control unit 30 to retrieve information inside the lens 10. Such lens signal may be used by the control unit as the other transducers are treated. For example, the image building of an object may be improved by such added information.
Filing Document | Filing Date | Country | Kind | 371c Date |
---|---|---|---|---|
PCT/IB10/00626 | 2/22/2010 | WO | 00 | 8/17/2012 |