Number | Name | Date | Kind |
---|---|---|---|
2260725 | Richards et al. | Oct 1941 | |
3569757 | Brewer et al. | Mar 1971 | |
4063098 | Enge | Dec 1977 | |
4140913 | Anger et al. | Feb 1979 | |
4234797 | Ryding | Nov 1980 | |
4276477 | Enge | Jun 1981 | |
4367411 | Hanley et al. | Jan 1983 | |
4380703 | Schmitt | Apr 1983 | |
4494005 | Shibata et al. | Jan 1985 | |
4544847 | Taylor | Oct 1985 | |
4661712 | Mobley | Apr 1987 | |
4687936 | McIntyre et al. | Aug 1987 | |
4745281 | Enge | May 1988 | |
4922106 | Berrian et al. | May 1990 | |
4980562 | Berrian et al. | Dec 1990 |
Number | Date | Country |
---|---|---|
61-133545 | Jun 1986 | JPX |
62-252047 | Nov 1987 | JPX |
Entry |
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Winnard, IBM Technical Disclosure Bulletin, vol. 19, No. 9, Feb. 1977, pp. 3411-3412. |
Allison, Jr. et al., "Design and Performance of a High Current 200 keV Electrostatically Scanned Ion Implantation Accelerator" in The Proceedings of the Symposium on Electron and Ion Beam Science and Tech., 7th Int'l Conference, 1976, pp. 482-489. |
Dearnaley et al., Ion Implantation, North/Holland Publishing, Amsterdam, 1973, pp. 283-289, 387-409. |