Patent Application
20220112598
Typical semiconductor processes will produce exhaust gases when, for example, depositing and etching the various materials needed to manufacture semiconductors. There may be unreacted gases, reactive radical species, and/or corrosive gases, among other things, present as effluents emitted under vacuum through the exhaust port of a semiconductor processing tool that may be transported into a pump/abatement system. The reactive species, polymer residues, and byproducts, as well as particles, may clog and damage the pump/abatement system and may result in tool downtime, repair, replacement costs and an increase in the cost of operations. For the semiconductor manufacturing industry, there is a continuous focus on increasing process yields, wafer throughput, and tool uptime.
In the drawings, like reference characters generally refer to the same parts throughout the different views. The drawings are not necessarily to scale, emphasis instead generally being placed upon illustrating the principles of the present disclosure. The dimensions of the various features or elements may be arbitrarily expanded or reduced for clarity. In the following description, various aspects of the present disclosure are described with reference to the following drawings, in which:
The following detailed description refers to the accompanying drawings that show, by way of illustration, specific details, and aspects in which the present disclosure may be practiced. These aspects are described in sufficient detail to enable those skilled in the art to practice the present disclosure. Various aspects are provided for devices, and various aspects are provided for methods. It will be understood that the basic properties of the devices also hold for the methods and vice versa. Other aspects may be utilized and structural, and logical changes may be made without departing from the scope of the present disclosure. The various aspects are not necessarily mutually exclusive, as some aspects can be combined with one or more other aspects to form new aspects.
The present disclosure generally relates to a trap filter system with a manifold assembly having a plurality of filters. In an aspect, the present disclosure may have a manifold assembly and a bypass mechanism that permits easy interchange and the ability to swap out and/or alternate filters; in particular, the “hot-swapping” of used/exhausted filters without impacting/stopping production.
The present disclosure is also directed a trap filter system that allows the use of “cold traps” or room temperature filtering for semiconductor manufacturing processes to trap effluents/unreactive chemicals and particles. Semiconductor fabs may not use chemical/cold traps, primarily due to the complexity of handling the chemicals once trapped. According to the present disclosure, the cold traps may be most effective when used with condensing gas species and may be able to address a full spectrum of reactive species and solids.
The present disclosure is further directed a manifold assembly that allows ease of swapping of a used/exhausted filter with a new filter, including using a mechanical “revolver-like” rotation. In an aspect, the manifold assembly may have a housing with the various subcomponents and that can accommodate a plurality of filters, e.g., at least two filters, that is designed to allow the filters to be rotated in and out of alignment with an exhaust line of a semiconductor processing tool. This arrangement allows a used filter to be replaced while the semiconductor processing tool continues to operate with little or no interruption.
In an aspect, the present disclosure may have a plurality of filters that permit a parallel gas flow, which may be directed, or re-directed, as needed by a bypass mechanism or a manifold assembly with a bypass mechanism in the event the effluents clog up one of the filters.
The present disclosure is also directed to a physical filter in combination with a reactive matrix to trap the gas contaminants and solids so that downstream pump and/or abatement systems are protected from contaminants in the gas effluents to maintain their efficiency. The present filters may contain a passive matrix to enable the physical trapping of solids and a reactive matrix to enable chemical reaction/quenching to stop reactive chemicals from damaging the pump and abatement systems.
In an aspect, the present disclosure is directed to effecting chemical reactions between the exhaust gases and the chemical trapping reagents in a reactive matrix at room temperature. The present trapping filter/matrix materials may include a mixture of activated carbon or alumina, zeolites as a support, with a nano mixed-metal oxide having a large surface area and porosity.
In another aspect, the present filter materials may be customized and “targeted” to address the various particles and chemicals in an effluent with a high degree of specificity. In the present disclosure, the filtering of particulates and the chemical filtration may use, respectively, different filter/matrix materials. In an aspect, the present disclosure may provide a customized matrix with several filter materials used to address the specific effluents that need to be captured. In addition, the filter matrix materials may be “stacked” to address different types of gas effluents and the contaminants therein, e.g., a combination of a first filter material to remove particles, a second filter material to remove a first gas, a third filter material to remove a second gas, etc.
In yet another aspect, the present filter materials may convert reactive gas species in an effluent gas into inert and unreactive species before flowing into and through pump/abatement systems. In addition, for certain gas species, the use of elevated temperature, by providing heating elements for the present trap filtering system, which may improve the conversion of reactive gas species to inert/unreactive species.
In an additional aspect of the present disclosure, the filters may be designed for reuse by having filter materials that be re-generated or replaced to allow the present trap filter system to be more environmentally friendly. For example, if a metal matrix filter is used, it can be regenerated back into native species using reductive gases; similarly, other matrix materials which form reversible compounds upon reaction with effluents can also be regenerated, several metals such as Ni, Pd, etc. can be used.
In a further aspect, the present disclosure may have a filter housing design that accommodates a specific flow rate for gas effluents and the amount of time the contaminants may need to be present in a filter to be captured, i.e., residence time. On the other hand, the filter housing design may need to provide a high level of flow or conductance in providing a path for gas effluents. In this regard, a filter housing design and the type/structure of the filter materials may need to be optimized to provide a designated flow rate for the present trap filter system.
An advantage of the present disclosure may include, but is not limited to, reducing the annual cost for refurbishing, cleaning, and repair of pumps and abatement systems for process chambers. In an aspect, the present trap filter system may reduce costs by approximately 80% by protecting the pump and abatement systems.
To more readily understand and put into practical effect, the present trap filter system with a manifold assembly, particular aspects will now be described by way of examples that are not intended as limitations. The advantages and features of the aspects herein disclosed will be apparent through reference to the following descriptions relating to the accompanying drawings. Furthermore, it is to be understood that the features of the various aspects described herein are not mutually exclusive and can exist in various combinations and permutations. For the sake of brevity, duplicate descriptions of features and properties may be omitted.
In
In addition,
In an aspect, the present trap filter system may be a cost-effective substitute for an abatement system or provide a point-of-use (POU) pre-treatment of the effluent gases. An abatement system may be used for exhaust gas handling and treatment from various semiconductor manufacturing processes and tools. The abatement system may have numerous inlets feeding into a single common treatment system or be a POU abatement system handling gases from a single semiconductor processing tool. Abatement systems may include “washing’ of the exhaust gases by combustion/burning, catalytic treatment, oxidative treatment, dry and/or wet scrubbing, and other gas treatment methods.
In another aspect, the present filter trap system may be designed to be positioned upstream from a pumping system, which may be a ‘roughing’ pump that creates a vacuum to direct exhaust gases into an abatement system. It is within the scope of the present disclosure to have the present filter trap system integrated into the pumping system or the abatement system.
In
In an aspect, it should be understood that the trap filter system 204 will maintain the operating pressure or vacuum level of a semiconductor processing tool to which it is connected, e.g., the use of an appropriate housing, valves, seals, and/or connectors to maintain the vacuum.
According to the present disclosure, an effluent gas generated by a semiconductor processing tool (not shown) may flow through the exhaust outlet 203 into the manifold inlet 213a to the front-end bypass mechanism 216a, which may route the effluent gas through the exhaust fore lines 203a to one of the plurality of filters, for example, filter 215a, to remove particulate and chemical contaminants from the effluent gas. When the filter 215a is “exhausted” and no longer able to effectuate the removal of the particle and/or chemical contaminants from the effluent gas generated by the semiconductor processing tool, the filter 215a may be “bypassed” or swapped out, and replaced by the filter 215b. Similarly, in an aspect where the filter 215b is exhausted, it may be replaced by the filter 215c.
In another aspect, according to the present disclosure, the present filters may be configured as a removable sealed cartridge that may be replaced as a “plug and play” unit, and alternatively, as an accessible casing containing filter materials therein as one or more replaceable inserts.
In a further aspect, the present manifold assembly 211 may be configured for a “passive” or an “active” modality. In the passive modality, a filter 215 may be replaced based on a schedule and the front-end and back-end bypass mechanisms 216a, 216b and the fore line and backline shutoff valves 214a, 214b may be manually set to shut off and divert the flow of exhaust gas from one to the other of the plurality of filters 215. In the active modality, a filter 215 may be replaced based on a measured or monitored flow rate, e.g., front-end pressure vs back-end pressure, determined by a manifold controller (not shown) and the front-end and back-end bypass mechanisms 216a, 216b, and the fore line and backline shutoff valves 214a, 214b may be electronically controlled with actuators (not shown) to shut off and divert the flow of exhaust gas from one to the other of the plurality of filters 215. In an aspect, the bypass mechanisms may include a sensor (not shown) for monitoring the flow rate of the gas effluent, which may be triggered upon reaching certain predefined pressure conditions to activate the bypass mechanisms.
In
In another aspect, the present filter materials may be customized to address the various particles and chemicals in an effluent with a high degree of specificity. It is within the scope of the present disclosure to have the first filter material directed to the removal of particulate contaminants and the second filter material directed to the removal of chemical contaminants and, alternatively, the first filter material directed to the removal of a first chemical contaminant and the second filter material directed to the removal of a second chemical contaminant.
In an aspect, for example, the first filter material may be a particle filter made with an unreactive physical filtering media, such as alumina, zeolite, carbon, and molecular sieve materials, and the second filter material 415b may be a reactive filter material made with a support nano-material with high porosity, such as activated metal, cellulose, hydrated alumino silicates, functionalized polymeric membrane, and metal oxide frameworks, and active metal-oxide adsorbents, such as ZnO/Al2O3, CeO2/Al2O3, CuO/Al2O3, CuO—CeO2/Al2O3, and CuO—ZnO/Al2O3 and/or other specific functionalied materials designed to chemically interact with the effluent gases.
In yet another aspect, according to the present disclosure, the present filter may be configured as a removable sealed cartridge that may be replaced in a “plug and play” unit and, alternatively, as an accessible casing containing the filter materials therein as one or more replaceable inserts. In any event, the present filters must be able replaceable while being able to maintain the pressure level or vacuum of the production line.
According to the present disclosure, a trap filter system may have a heating element to provide an elevated temperature that may be needed to improve the conversion of certain reactive gas species to inert/unreactive species and/or the adsorption of such species by a filter material. As shown in
The operation 501 may be directed to providing a gas effluent from a semiconductor processing tool.
The operation 502 may be directed to introducing the gas effluent into a trap filter system placed downstream from the semiconductor processing tool. In addition, the trap filter may be upstream from a pump/abatement system.
The operation 503 may be directed to removing unreacted gases, reactive radical gas species, and corrosive gases from the gas effluent.
The operation 504 may be directed to removing particulate matter from the gas effluent.
The operation 505 may be directed to activating a bypass mechanism to shut off the flow of gas effluent to one or more used or exhausted filters. In addition, the gas effluent may be directed to an unused filter thereafter.
The operation 506 may be directed to removing and replacing the used or exhausted filters from the trap filter system.
The methods presented above are intended to be exemplary for using the present trap filter system. It will be apparent to those ordinary skilled practitioners that the foregoing process operations may be modified without departing from the spirit of the present disclosure.
According to an aspect of the present disclosure, the present filter materials that may be used to remove silane and its radicals may include a support nano-material with high porosity, for example, alumina, zeolite, and carbon (e.g., graphene, carbon nanotubes, etc.) and active metal oxide adsorbents, for example, ZnO/Al2O3, CeO2/Al2O3, CuO/Al2O3, CuO—CeO2/Al2O3, and CuO—ZnO/Al2O3.
In another aspect, the present disclosure may be based on the following reaction chemistry for the adsorption of silane (SiH4) by CuO—ZnO/Al2O3:
and when the adsorbent is exposed to air:
The above reactions indicate that SiH4 and its radicals may be removed from an exhaust gas by reduction to Si with the active species (CuO) of the adsorbents, according to present disclosure directed to a trap filter system with a manifold assembly. When the present adsorbent is exposed to air, the Si oxidizes to SiOx and the reduced Cu oxidizes into CuO in air.
As shown in
It will be understood that any property described herein for a specific device may also hold for any device described herein. It will also be understood that any property described herein for a specific method may hold for any of the methods described herein. Furthermore, it will be understood that for any device or method described herein, not necessarily all the components or operations described will be enclosed in the device or method, but only some (but not all) components or operations may be enclosed.
To more readily understand and put into practical effect the present trap filter system and methods, they will now be described by way of examples. For the sake of brevity, duplicate descriptions of features and properties may be omitted.
Example 1 provides a trap filter system including a plurality of filters, the plurality of filters having filtering materials to remove contaminants from a flow of gas effluents generated by a semiconductor processing tool, and a bypass mechanism configured to selectively direct or shut off the flow of gas effluents to one or more of the plurality of filters while the semiconductor processing tool remains in operation, for which each of the plurality of filters is removable and replaceable when the filtering material is unable to effectuate the removal of contaminants.
Example 2 may include the trap filter system of example 1 and/or any other example disclosed herein, further including positioning the plurality of filters to process effluents from an exhaust line of the semiconductor processing tool.
Example 3 may include the trap filter system of example 2 and/or any other example disclosed herein, further including positioning the plurality of filters on the exhaust line for the semiconductor processing tool upstream from a pump or abatement system.
Example 4 may include the trap filter system of example 1 and/or any other example disclosed herein, further including a heating mechanism configured to elevate the operating temperature of the plurality of filters.
Example 5 may include the trap filter system of example 1 and/or any other example disclosed herein, further including the plurality of filters being connected in parallel to receive the flow of gas effluent.
Example 6 may include the trap filter system of example 1 and/or any other example disclosed herein, for which the filtering material comprises at least two materials for removing particulate and chemical contaminants.
Example 7 may include the trap filter system of example 1 and/or any other example disclosed herein, for which the filtering material comprises a support material with a metal oxide adsorbent.
Example 8 may include the trap filter system of example 7 and/or any other example disclosed herein, for which the plurality of filters remove unreacted gases, reactive radical gas species, and corrosive gases from the gas effluents.
Example 9 may include the trap filter system of example 8 and/or any other example disclosed herein, for which the plurality of filters convert reactive species in the effluents into inert and unreactive species.
Example 10 provides a method including configuring a trap filter system to remove contaminants from gas effluents provided from an exhaust line of a semiconductor processing tool, the trap filter system including a plurality of filters, the plurality of filters having filtering materials to remove contaminants from gas effluents generated by the semiconductor processing tool, and a bypass mechanism configured to selectively direct or shut off a flow of gas effluent to one or more of the plurality of filters as the semiconductor processing tool remains in operation, introducing the flow of gas effluents into at least one of the plurality of filters, and activating the bypass mechanism to shut off the flow of gas effluent to one or more of the plurality of filters, when the one or more of the plurality of filters are unable to effectuate the removal of contaminants, and direct the flow of gas effluents to another of the plurality of filters, and removing and replacing the one or more of the plurality of filters that are unable to effectuate the removal of contaminants.
Example 11 may include the method of example 10 and/or any other example disclosed herein, further including monitoring the flow of gas through the plurality of filters, for which the monitoring determines when the plurality of filters need to be replaced.
Example 12 may include the method of example 10 and/or any other example disclosed herein, further including heating the at least one of the plurality of filters to elevate the operating temperature of the one of the plurality of filters.
Example 13 may include the method of example 10 and/or any other example disclosed herein, further including removing particles, unreacted gases, reactive species, and corrosive gases from the gas effluents.
Example 14 may include the method of example 13 and/or any other example disclosed herein, The method of claim 13, further including converting reactive species in the effluents into inert and unreactive species.
Example 15 may include the method of example 10 and/or any other example disclosed herein, further including positioning the plurality of filters on the exhaust line of the semiconductor processing tool before an abatement system.
Example 16 may include the method of example 10 and/or any other example disclosed herein, further including refurbishing or regenerating the removed filters for reuse.
Example 17 provides a semiconductor processing system including a semiconductor processing tool, for which the semiconductor processing tool generates exhaust gases with contaminants, a trap filter system including a plurality of filters, the plurality of filters having filtering materials to remove contaminants from the exhaust gases generated by the semiconductor processing tool, for which the exhaust gases flow into at least one of the plurality of filters, and a bypass mechanism configured to selectively direct or shut off a flow of exhaust gas effluent to one or more of the plurality of filters as the semiconductor processing tool remains in operation, for which the bypass mechanism is activated to replace one or more of the plurality of filters when the one or more of the plurality of filters are unable to effectuate the removal of contaminants, and a pumping or abatement system.
Example 18 may include the semiconductor processing system of example 17 and/or any other example disclosed herein, further including the plurality of filters being connected in parallel to receive the flow of the exhaust gas.
Example 19 may include the semiconductor processing system of example 17 and/or any other example disclosed herein, for which the plurality of filters remove particles, unreacted gases, reactive species, and corrosive gases from the exhaust gas.
Example 20 may include the semiconductor processing system of example 17 and/or any other example disclosed herein, further including positioning the plurality of filters on an exhaust line of the semiconductor processing tool before the abatement system.
The term “comprising” shall be understood to have a broad meaning similar to the term “including” and will be understood to imply the inclusion of a stated integer or operation or group of integers or operations but not the exclusion of any other integer or operation or group of integers or operations. This definition also applies to variations on the term “comprising” such as “comprise” and “comprises”.
The term “coupled” (or “connected”) herein may be understood as electrically coupled or as mechanically coupled, e.g., attached or fixed or attached, or just in contact without any fixation, and it will be understood that both direct coupling or indirect coupling (in other words: coupling without direct contact) may be provided.
While the present disclosure has been particularly shown and described with reference to specific aspects, it should be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the present disclosure as defined by the appended claims. The scope of the present disclosure is thus indicated by the appended claims and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced.
