Tubular or Other Member Formed of Staves Bonded at Keyway Interlocks

Abstract

A tubular member formed of silicon staves and arranged in a circular pattern to form a central bore in which a wafer support tower can be inserted for batch thermal processing in an oven. The staves are formed along an axis with an interlocking keyway structure in which axially extending hooks engage axially extending catches formed in back of the hooks on neighboring staves. An adhesive, such as a silica-forming agent and silicon powder, coat the keyway structure before assembly and is cured after assembly, so as to bond the staves together. A similar structure may be used to form a plate structure from an array of smaller parts with interlocking structure formed between neighboring parts.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of a furnace used for batch thermal processing of wafers and with which a liner of the invention may be used.

FIG. 2 is schematic cross-sectional view of a liner formed from staves bonded together to form a polygonal tube.

FIG. 3 is a cross-sectional view of a tongue-and-groove joint between staves.

FIG. 4 is a graph of the strength of different types of joints including a keyway joint of the invention.

FIG. 5 is a cross-sectional view of a V-shaped joint between staves.

FIG. 6 is a cross-sectional view of a keyway joint between two co-planar members.

FIG. 7 is an orthographic view of a liner formed with keyway joints and including an optional neck.

FIG. 8 is an exploded orthographic view of the neck of FIG. 7.

FIG. 9 is a cross-sectional view of a liner including one embodiment of the keyway joints.

FIGS. 10 and 11 are exploded cross-sectional views of two regions of the liner of FIG. 9 showing two types of staves forming the keyway joints.

FIG. 12 is a cross-sectional view of a keyway joint in the liner of FIG. 9.

FIG. 13 is another cross-sectional view the keyway joint of FIG. 12 showing clearances between the staves.

FIG. 14 is a cross-sectional view of a keyway joint used to assemble a planar sheet.

FIG. 15 is a cross-sectional view of an inclined keyway joint particularly useful in forming large planar plates and further showing its assembly on a horizontal table.

FIG. 16 is a cross-section view of an inclined keyway joint and its assembly on a tilted table.

Claims

1. A structure comprising a plurality of members meeting at a joint between neighboring members which are bonded together adjacent the joint, each joint including an interlocking structure formed within and between both of the neighboring members.

2. The structure of claim 1, wherein each of the members includes two hooks and two catches in back of the hooks in which hooks of other members are engaged.

3. The structure of claim 1, wherein the members when bonded form a one-dimensional array.

4. The structure of claim 3, wherein the bonded members form a generally planar plate.

5. The structure of claim 4, wherein each of the members includes two hooks and two catches in back of the hooks in which hooks of other members are engaged.

6. The structure of claim 5, wherein the hooks extend at inclined angles with respect to principal surfaces of the members.

7. The structure of claim 5, wherein a radius of curvature of convex corners of the hooks is greater than a radius of curvature of corresponding concave corners of the catches.

8. The structure of claim 1, wherein the bonded members are arranged in a closed tubular shape surrounding a bore.

9. The structure of claim 1, wherein the members are silicon members.

10. The structure of claim 9, wherein the members are bonded together by a cured composite of a silica-forming agent and silicon powder disposed in the joints.

11. A tubular member extending along an axis, comprising a plurality of staves extending parallel to and arranged around the axis and including a bore extending along the axis inside of the staves, wherein neighboring ones of the staves are bonded to each other at a respective interlocking junction.

12. The member of claim 11, wherein the interlocking junction comprises hooks and catches formed in each of neighboring staves and aligned so that a catch of one of the neighboring staves accepts a hook of the other of the neighboring staves.

13. The member of claim 11, wherein the staves are silicon staves.

14. The member of claim 11, wherein the staves are bonded together by a cured composite of spin-on glass and silicon powder.

15. The member of claim 11, wherein the staves include ends comprising a circumferential neck when they are bonded together.

16. The member of claim 15, wherein the neck comprises at least three flat areas on the ends of each of the staves.

17. The member of claim 11, wherein the interlocking junction is formed from portions of the staves machined to have predetermined gaps between them.

18. The member of claim 17, wherein the staves are silicon staves bonded together by a cured composite of a silica-forming agent and silicon powder filled into the gaps.

19. A tubular member extending along a longitudinal axis and comprising a plurality of staves extending parallel to and arranged around the axis, neighboring ones of the staves being bonded to each other and including ends comprising a circumferential neck when bonded together.

20. The tubular member of claim 19, wherein the neck comprises at least three flat areas at the ends of each of the staves.

21. The tubular member of claim 19, wherein the neck is substantially circular.

22. The tubular member of claim 19, wherein the staves are silicon staves.