This application is a continuation of application Ser. No. 08/141,780, filed on Oct. 22, 1993, abandoned.
Number | Name | Date | Kind |
---|---|---|---|
4906593 | Shioya et al. | Mar 1990 | |
4960732 | Dixit et al. | Oct 1990 | |
4994410 | Sun et al. | Feb 1991 | |
5084413 | Fujita et al. | Jan 1992 | |
5094981 | Shung et al. | Mar 1992 | |
5141897 | Manocha et al. | Aug 1992 | |
5250467 | Somekh et al. | Oct 1993 |
Number | Date | Country |
---|---|---|
0427254 | Dec 1985 | EP |
0164976 | May 1991 | EP |
62-243326 | Oct 1987 | JP |
63-52441 | Mar 1988 | JP |
63-288046 | Nov 1988 | JP |
2-90518 | Mar 1990 | JP |
4-120725 | Apr 1992 | JP |
62-243325 | Oct 1987 | JP |
Entry |
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Joshi, R. V., et al., “Collimated Sputtering of TiN/Ti . . . ”, Appl. Phys. Lett., vol. 61, No. 21, Nov. 23, 1992, pp. 2613-2615. |
Wolf., S., Silicon Processing, vol. 2, 1990, Lattice Press, pp. 240-254. |
Number | Date | Country | |
---|---|---|---|
Parent | 08/141780 | Oct 1993 | US |
Child | 08/329806 | US |