Number | Name | Date | Kind |
---|---|---|---|
3615956 | Irving | Oct 1971 | |
3879597 | Bersin et al. | Apr 1975 | |
4012307 | Phillips | Mar 1977 | |
4178877 | Kudo | Dec 1979 |
Number | Date | Country |
---|---|---|
1522059 | Aug 1978 | GBX |
Entry |
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J. L. Vossen et al., Thin Film Processes, Academic Press, New York, 1978, pp. 531-533. |